JPH0659714B2 - Substrate having a surface protection film adhered thereto and method of manufacturing the same - Google Patents
Substrate having a surface protection film adhered thereto and method of manufacturing the sameInfo
- Publication number
- JPH0659714B2 JPH0659714B2 JP61105168A JP10516886A JPH0659714B2 JP H0659714 B2 JPH0659714 B2 JP H0659714B2 JP 61105168 A JP61105168 A JP 61105168A JP 10516886 A JP10516886 A JP 10516886A JP H0659714 B2 JPH0659714 B2 JP H0659714B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- mol
- film
- substrate according
- polyimide resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 45
- 229920001721 polyimide Polymers 0.000 claims description 24
- 239000009719 polyimide resin Substances 0.000 claims description 21
- 238000004519 manufacturing process Methods 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- 239000011347 resin Substances 0.000 claims description 16
- 229920005989 resin Polymers 0.000 claims description 16
- 230000001681 protective effect Effects 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 10
- 239000002904 solvent Substances 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 9
- 238000004080 punching Methods 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 claims description 4
- 239000005977 Ethylene Substances 0.000 claims description 4
- 229920001684 low density polyethylene Polymers 0.000 claims description 4
- 239000004702 low-density polyethylene Substances 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 229920000089 Cyclic olefin copolymer Polymers 0.000 claims description 3
- 150000001244 carboxylic acid anhydrides Chemical class 0.000 claims description 3
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims description 3
- 229920000098 polyolefin Polymers 0.000 claims description 3
- 229920005992 thermoplastic resin Polymers 0.000 claims description 3
- 239000004711 α-olefin Substances 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 2
- 239000000243 solution Substances 0.000 description 15
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical group CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 13
- 238000000576 coating method Methods 0.000 description 11
- 239000011248 coating agent Substances 0.000 description 10
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 9
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 4
- 239000008188 pellet Substances 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- UPMLOUAZCHDJJD-UHFFFAOYSA-N 4,4'-Diphenylmethane Diisocyanate Chemical compound C1=CC(N=C=O)=CC=C1CC1=CC=C(N=C=O)C=C1 UPMLOUAZCHDJJD-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 239000012776 electronic material Substances 0.000 description 3
- 229920001038 ethylene copolymer Polymers 0.000 description 3
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 3
- 239000013557 residual solvent Substances 0.000 description 3
- 238000007788 roughening Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- VXNZUUAINFGPBY-UHFFFAOYSA-N 1-Butene Chemical compound CCC=C VXNZUUAINFGPBY-UHFFFAOYSA-N 0.000 description 2
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- QQVIHTHCMHWDBS-UHFFFAOYSA-N isophthalic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=C1 QQVIHTHCMHWDBS-UHFFFAOYSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- AWGPJFBOFKWELL-UHFFFAOYSA-N 1-isocyanato-3-[(4-isocyanatophenyl)methyl]benzene Chemical compound C1=CC(N=C=O)=CC=C1CC1=CC=CC(N=C=O)=C1 AWGPJFBOFKWELL-UHFFFAOYSA-N 0.000 description 1
- SYRYWPVKZTYAFV-UHFFFAOYSA-N 1-isocyano-4-[(4-isocyanophenyl)methyl]benzene Chemical compound C1=CC([N+]#[C-])=CC=C1CC1=CC=C([N+]#[C-])C=C1 SYRYWPVKZTYAFV-UHFFFAOYSA-N 0.000 description 1
- YKQNDHBJPRVKPY-UHFFFAOYSA-N 2,4-diisocyano-1-methylbenzene Chemical compound CC1=CC=C([N+]#[C-])C=C1[N+]#[C-] YKQNDHBJPRVKPY-UHFFFAOYSA-N 0.000 description 1
- WXHLLJAMBQLULT-UHFFFAOYSA-N 2-[[6-[4-(2-hydroxyethyl)piperazin-1-yl]-2-methylpyrimidin-4-yl]amino]-n-(2-methyl-6-sulfanylphenyl)-1,3-thiazole-5-carboxamide;hydrate Chemical compound O.C=1C(N2CCN(CCO)CC2)=NC(C)=NC=1NC(S1)=NC=C1C(=O)NC1=C(C)C=CC=C1S WXHLLJAMBQLULT-UHFFFAOYSA-N 0.000 description 1
- JVERADGGGBYHNP-UHFFFAOYSA-N 5-phenylbenzene-1,2,3,4-tetracarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C(C(=O)O)=CC(C=2C=CC=CC=2)=C1C(O)=O JVERADGGGBYHNP-UHFFFAOYSA-N 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- OWYWGLHRNBIFJP-UHFFFAOYSA-N Ipazine Chemical compound CCN(CC)C1=NC(Cl)=NC(NC(C)C)=N1 OWYWGLHRNBIFJP-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 229920000577 Nylon 6/66 Polymers 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004697 Polyetherimide Substances 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- 229920002253 Tannate Polymers 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000004963 Torlon Substances 0.000 description 1
- 229920003997 Torlon® Polymers 0.000 description 1
- 241001648319 Toronia toru Species 0.000 description 1
- 229920004738 ULTEM® Polymers 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 1
- -1 and in particular Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 150000004984 aromatic diamines Chemical class 0.000 description 1
- TZYHIGCKINZLPD-UHFFFAOYSA-N azepan-2-one;hexane-1,6-diamine;hexanedioic acid Chemical compound NCCCCCCN.O=C1CCCCCN1.OC(=O)CCCCC(O)=O TZYHIGCKINZLPD-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- WXCZUWHSJWOTRV-UHFFFAOYSA-N but-1-ene;ethene Chemical compound C=C.CCC=C WXCZUWHSJWOTRV-UHFFFAOYSA-N 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 description 1
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- LNOPIUAQISRISI-UHFFFAOYSA-N n'-hydroxy-2-propan-2-ylsulfonylethanimidamide Chemical compound CC(C)S(=O)(=O)CC(N)=NO LNOPIUAQISRISI-UHFFFAOYSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920005575 poly(amic acid) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
- Insulated Metal Substrates For Printed Circuits (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は表面保護フイルムをはり付けた基板およびその
製造方法に関するものである。詳しくは電子材料分野に
好適な表面保護フイルムをはり付けた基板およびその製
造方法に関するものである。TECHNICAL FIELD The present invention relates to a substrate having a surface protective film adhered thereto and a method for producing the same. More specifically, the present invention relates to a substrate having a surface protective film adhered thereto suitable for the field of electronic materials and a method for manufacturing the same.
特に、清浄な表面を必要とする基板を製造すること、保
存すること、および流通するのに好適な形態を有する基
板、およびその製造方法に関するものである。In particular, the present invention relates to a substrate having a form suitable for producing, storing, and distributing a substrate requiring a clean surface, and a method for producing the substrate.
本発明の利用される分野は電子材料の分野であり、特
に、太陽電池、光センサー、光スイツチ等の光電変換装
置用の基板、サーマルヘツド用の基板等が挙げられる。The field of use of the present invention is in the field of electronic materials, and in particular, substrates for photoelectric conversion devices such as solar cells, photosensors, and optical switches, substrates for thermal heads, and the like can be mentioned.
これらの中で、たとえば太陽電池用基板、特に金属板の
上に絶縁層としてポリイミド樹脂をコーテイングした基
板の場合であれば、表面を清浄かつ無傷に保つ必要から
輸送に際して専用のキヤリーケースを用いたり、専用の
合紙をはさみ込んだりすることがあるが、輸送効率が低
かつたり、手間がかかつたりで、いずれも好ましい方法
とは言えない。Among these, for example, in the case of a substrate for a solar cell, particularly a substrate coated with a polyimide resin as an insulating layer on a metal plate, a dedicated carrier case may be used for transportation because it is necessary to keep the surface clean and intact, There is a case where a special interleaving paper is sandwiched, but the transport efficiency is low and the work is troublesome, so that neither method is preferable.
また、表面を粘着剤付の保護フイルムを貼付けたタイプ
の基板もあるが、保護フイルムを剥離すると粘着剤の一
部が基板表面に強く密着して清浄さがそこなわれるとい
う欠点があり、やはり好ましくない。There is also a type of substrate with a protective film attached with an adhesive on the surface, but when the protective film is peeled off, part of the adhesive adheres strongly to the substrate surface, impairing cleanliness. Not preferable.
本発明者達は、これらの事情に鑑みて、基板表面を清浄
かつ無傷に保ちつつ輸送、保存のできる基板およびその
製造方法について鋭意検討した結果、本発明に到達し
た。In view of these circumstances, the inventors of the present invention have arrived at the present invention as a result of earnestly examining a substrate that can be transported and stored while keeping the surface of the substrate clean and intact, and a manufacturing method thereof.
すなわち本発明の要旨は、金属板、その表面に被着して
なるオリイミド樹脂層、および該樹脂層の表面にはり付
けた剥離可能なフイルムより構成されている基板および
その製造方法にある。That is, the gist of the present invention is a substrate composed of a metal plate, an oriimide resin layer adhered to the surface thereof, and a peelable film attached to the surface of the resin layer, and a method for producing the same.
本発明の基板は上記の利点の他に、基板製造時における
次工程までの輸送、保管、プレス打抜加工等において取
扱いの容易さの点で多大の利益をもたらすものである。In addition to the above advantages, the substrate of the present invention brings a great advantage in terms of easiness of handling in transportation, storage, press punching and the like to the next step in manufacturing a substrate.
以下に本発明を詳しく説明する。 The present invention will be described in detail below.
本発明の基板は金属板、その表面に被着してなるポリイ
ミド樹脂層、および該樹脂層の表面に被着してなる剥離
可能なフイルムよりなる。The substrate of the present invention comprises a metal plate, a polyimide resin layer deposited on the surface of the metal plate, and a peelable film deposited on the surface of the resin layer.
本発明で金属板としては、ステンレス板、アルミニウム
板、アルミニウム合金板、銅板、銅合金板、鉄板、モリ
ブデン板、クローム板、亜鉛板等の金属板が好適に用い
られる。In the present invention, a metal plate such as a stainless plate, an aluminum plate, an aluminum alloy plate, a copper plate, a copper alloy plate, an iron plate, a molybdenum plate, a chrome plate, or a zinc plate is preferably used as the metal plate.
とくに金属板としてアルミニウム板を用いる場合には、
アルミニウム板の接着性表面処理として、クロメート処
理、リン酸塩処理、タンニン酸チタン処理等の化成皮膜
生成による方法、硫酸、リン酸、クロム酸、スルフアミ
ン酸、ホウ酸、シユウ酸、スルホサリチル酸、マロン
酸、コハク酸、クエン酸、リンゴ酸などの電解浴による
陽極酸化皮膜生成による方法、塩酸、硝酸などの電解浴
による電解粗面化処理又は、ブラシ研摩、ホーニングな
どの機械的粗面化処理による方法などを採用することが
できる。Especially when using an aluminum plate as the metal plate,
Chromate treatment, phosphate treatment, titanium tannate treatment, etc., as a surface treatment for adhesion of aluminum plate, by forming a chemical conversion film, sulfuric acid, phosphoric acid, chromic acid, sulfamic acid, boric acid, oxalic acid, sulfosalicylic acid, malon By acid succinic acid, citric acid, malic acid, etc. electrolytic bath roughening treatment by electrolytic bath formation, hydrochloric acid, nitric acid etc. electrolytic roughening treatment, brush polishing, mechanical roughening treatment such as honing A method etc. can be adopted.
これらの金属板の厚みとしては一般には0.05〜5mm、好
ましくは0.1〜1mm程度から選択される。表面の粗度
は一般には平滑であるほど好ましく、たとえばステンレ
ス板であればRmaxで1μm以下、好ましくは0.5μm
以下のものが好適に用いられる。金属板の硬度としては
硬すぎるものは加工性が悪く、また軟らかすぎるものは
プレス打抜き加工等で端部変形(バリ)を発生しやすい
ためいずれも好ましくない。たとえばステンレス板であ
れば好適にはビツカース硬度が100〜300、特に好
ましくは150〜250のものが用いられる。The thickness of these metal plates is generally selected in the range of 0.05 to 5 mm, preferably 0.1 to 1 mm. Generally, the surface roughness is preferably as smooth as possible. For example, in the case of a stainless steel plate, Rmax is 1 μm or less, preferably 0.5 μm.
The following are preferably used. If the hardness of the metal plate is too hard, the workability is poor, and if it is too soft, edge deformation (burrs) is likely to occur during press punching or the like, which is not preferable. For example, a stainless plate having a Vickers hardness of 100 to 300, particularly preferably 150 to 250, is used.
本発明でポリイミド樹脂とは、溶媒可溶型のものであ
り、ポリイミド、ポリアミドイミド、ポリエーテルイミ
ドおよびこれらの混合物が含まれる。具体的には、ベン
ゾフエノンテトラカルボン酸二無水物(BTDA)と二種の
芳香族ジイソシアネート、すなわち4,4′−ジイソシア
ノジフエニルメタンおよび2,4−ジイソシアノトルエン
を共重合させて合成したもの、例えば (Arは 又は を表わす。但し、 は および/または を表わす。) の構造を有するもの。In the present invention, the polyimide resin is a solvent-soluble type, and includes polyimide, polyamideimide, polyetherimide, and a mixture thereof. Specifically, benzophenone tetracarboxylic dianhydride (BTDA) and two kinds of aromatic diisocyanates, that is, 4,4'-diisocyanodiphenylmethane and 2,4-diisocyanotoluene are copolymerized. Synthesized, for example (Ar is Or Represents However, Is And / or Represents ) Having the structure of.
ゼネラル・エレクトリツク社製、商品名「Ultem」とし
て知られる の構造を有するもの。Made by General Electric Company, known as "Ultem" Having the structure of.
等の構造を有するもの。 Having a structure such as.
ビフエニルテトラカルボン酸二無水物と芳香族ジアミン
からポリアミド酸を経由して合成される の構造を有するもの。Synthesized from biphenyl tetracarboxylic dianhydride and aromatic diamine via polyamic acid Having the structure of.
チバ・ガイギー社製、商品名「XU-218」として知られる の構造を有するもの。Made by Ciba Geigy, known as trade name "XU-218" Having the structure of.
繰り返し単位の約80モル%が式 で表わされる構造を有し、および残りの20モル%が式 で表わされる構造を有するコポリアミドイミド。Approximately 80 mol% of repeating units are of formula And has a structure represented by A copolyamideimide having a structure represented by:
アモコ社製、商品名「Torlon」として知られる の構造を有するもの等が挙げられる。Made by Amoco, known as "Torlon" And the like.
また、ポリイミドの中に第2成分として、ポリサルホ
ン、ポリエーテルサルホン等の溶媒可溶型ポリマーを混
合したものも含まれる。Further, a mixture of polyimide with a solvent-soluble polymer such as polysulfone or polyether sulfone as a second component is also included.
本発明においては、繰り返し単位の10〜30モル%が
式 で表わされる構造を有し、かつ残り90〜70モル%が
式 で表わされる構造を有するコポリイミド,または繰り返
し単位の70〜90モル%が式 で表わされる構造を有し、かつ残り30〜10モル%が
式 で表わされる構造を有するコポリアミドイミドが好適に
用いられる。In the present invention, 10 to 30 mol% of repeating units are represented by the formula And the remaining 90 to 70 mol% is of the formula A copolyimide having a structure represented by: And has a structure represented by A copolyamideimide having a structure represented by is preferably used.
前者は特に耐熱性に優れている。また後者は耐熱性およ
び柔軟性に優れており、曲げ加工を必要とする場合に好
適に用いることができる。The former is particularly excellent in heat resistance. The latter has excellent heat resistance and flexibility, and can be suitably used when bending is required.
また、本発明のコポリイミドおよびコポリアミドイミド
の対数粘度(ηinh )は0.1〜10dl/g(N−メチル
ピロリドン中、0.5%、30℃で測定)の範囲から選
ばれる。The logarithmic viscosity (ηinh) of the copolyimide and copolyamideimide of the present invention is selected from the range of 0.1 to 10 dl / g (0.5% in N-methylpyrrolidone, measured at 30 ° C.).
ポリイミド樹脂層の膜厚としては1〜100μm、好まし
くは2〜80μm、より好ましくは5〜50μm程度が
好適である。膜厚は、この範囲より小さい場合ピンホー
ル等の欠陥が発生しやすく、また電子部品として使用す
る際には絶縁破壊を発生する危険性が高くなり好ましく
ない。また膜厚がこの範囲より大きい場合には該樹脂を
塗布する工程で使用した溶媒が残留しやすくなりやはり
好ましくない。The thickness of the polyimide resin layer is preferably 1 to 100 μm, preferably 2 to 80 μm, and more preferably 5 to 50 μm. If the film thickness is smaller than this range, defects such as pinholes are likely to occur, and the risk of dielectric breakdown is increased when used as an electronic component, which is not preferable. Further, if the film thickness is larger than this range, the solvent used in the step of applying the resin is likely to remain, which is also not preferable.
本発明で剥離可能なフイルムとは、板状物体の表面を物
理的、機械的に保護するために該表面に被着したフイル
ムのことであり、剥離に際して該表面に、物理的、機械
的、化学的な痕跡を実質的に何ら残すことなく通常の剥
離強度、すなわち0.5〜20g/cm、好ましくは1〜1
0g/cm(剥離速度0.5m/分での数値)程度で容易に剥
離することができるフイルムのことである。具体的には
特開昭60−245549号公報記載の可剥離性保護フイル
ム、すなわち、少なくとも2層の樹脂層よりなる保護フ
イルムであり、 (I) 被保護面と接する最内層を形成する樹脂がa)密度
0.91〜0.935g/c.c.の低密度ポリエチレン、4
0〜95重量%、b)密度0.86〜0.91g/c.c.の非
晶ないし低結晶性のエチレン/α−オレフィン共重合
体、5〜60重量%、混合物であり、かつa),b)成分の
うち少なくとも1成分が不飽和カルボン酸あるいは不飽
和カルボン酸無水物で、その一部ないし全部を変性した
変性ポリオレフィン組成物から成り、 (II) 最外層が弾性率6000kg/cm2以上で、かつ荷重
4.6kg/cm2での熱変形温度が140℃以上の熱可塑性
樹脂層であることを特徴とする可剥離性表面保護フィル
ム 等が好適に用いられる。The peelable film in the present invention is a film adhered to the surface of the plate-like object in order to physically and mechanically protect the surface of the plate-like object. Normal peel strength, i.e. 0.5-20 g / cm, preferably 1-1, without leaving any chemical traces
A film that can be easily peeled off at about 0 g / cm (a numerical value at a peeling speed of 0.5 m / min). Specifically, it is a peelable protective film described in JP-A-60-245549, that is, a protective film composed of at least two resin layers, and (I) the resin forming the innermost layer in contact with the surface to be protected is a) Low density polyethylene with a density of 0.91 to 0.935 g / cc, 4
0 to 95% by weight, b) an amorphous or low crystalline ethylene / α-olefin copolymer having a density of 0.86 to 0.91 g / cc, 5 to 60% by weight, a mixture, and a), b At least one of the components) is an unsaturated carboxylic acid or an unsaturated carboxylic acid anhydride, and is composed of a modified polyolefin composition partially or wholly modified, and (II) the outermost layer has an elastic modulus of 6000 kg / cm 2 or more. A peelable surface protective film or the like characterized by being a thermoplastic resin layer having a heat distortion temperature of 140 ° C. or higher under a load of 4.6 kg / cm 2 is preferably used.
粘着剤を介して表面に被着する方式のフイルムは、分析
的にみて粘着剤が表面に残留することが確認される限
り、本発明の剥離可能なフイルムとは区別されるもので
ある。The film which is adhered to the surface via an adhesive is distinguished from the peelable film of the present invention as long as it is confirmed analytically that the adhesive remains on the surface.
次に本発明の基板を製造する方法を説明する。Next, a method for manufacturing the substrate of the present invention will be described.
まず、金属板の表面にポリイミド樹脂の溶媒溶液を塗布
する。塗布の方法としてはスピンコート、ドクターブレ
ードコート、バーコート、ロールコート、フローコート
等種々があるが、たとえばロールコートであれば、ロー
ルの種類、樹脂溶液の粘度、濃度等にもよるが、湿り膜
厚として3〜300μm程度に塗布することができるの
で、乾燥膜厚が所定の膜厚になるよう上記の操作条件を
適宜調整すればよい。First, a solvent solution of polyimide resin is applied to the surface of a metal plate. There are various coating methods such as spin coating, doctor blade coating, bar coating, roll coating, and flow coating. For example, if it is roll coating, it depends on the type of roll, the viscosity of the resin solution, the concentration, etc. Since the coating can be applied to a film thickness of about 3 to 300 μm, the above operating conditions may be appropriately adjusted so that the dry film thickness becomes a predetermined film thickness.
塗布が完了したら加熱処理を行う。塗布する樹脂溶液に
使用する溶媒の種類によつては、塗布後大気中に放置す
ると吸湿して樹脂を凝固析出させるものがあるので、こ
の場合には、大気の湿度にもるが、数秒〜数分以内に直
ちに加熱して残留溶媒濃度が十分低い値になるようにす
る必要がある。加熱処理の仕方としては、200〜40
0℃程度で5〜30分程度加熱する。具体的には、溶媒
の種類や本発明の基板の用途にもよるが、たとえば溶媒
がジメチルホルムアミドであつて、用途がアモルフアス
シリコーン太陽電池用基板であれば、真空下のCVD操
作において悪影響の出ないよう残留溶媒濃度は150pp
m程度以下である必要がある。When coating is completed, heat treatment is performed. Depending on the type of solvent used for the resin solution to be applied, there is one that absorbs moisture and solidifies and precipitates the resin when left in the atmosphere after application, so in this case, depending on the humidity of the atmosphere, it takes a few seconds to It is necessary to heat immediately within a few minutes so that the residual solvent concentration becomes a sufficiently low value. As a method of heat treatment, 200 to 40
It heats at about 0 degreeC for about 5 to 30 minutes. Specifically, depending on the type of solvent and the use of the substrate of the present invention, for example, if the solvent is dimethylformamide and the use is a substrate for amorphous silicone solar cells, it may have a bad influence on the CVD operation under vacuum. The residual solvent concentration is 150 pp so that it does not come out
It must be less than m.
加熱時の昇温の仕方としては、使用する溶媒の種類によ
つては、いきなり昇温すると急激に気化して表面性が悪
くなることがあるので徐々に昇温させることが好まし
い。この場合、連続的に昇温しても、数十度毎に段階的
に昇温してもよく、表面性、残留溶媒濃度の程度に従つ
て適宜昇温パターンを選択することができる。Depending on the type of solvent used, when the temperature is suddenly raised, the temperature may be rapidly vaporized and the surface property may be deteriorated. Therefore, it is preferable to raise the temperature gradually. In this case, the temperature may be raised continuously or stepwise at intervals of several tens of degrees, and the temperature rise pattern can be appropriately selected according to the degree of surface property and the residual solvent concentration.
ポリイミド樹脂の加熱処理が完了したら、該樹脂層の表
面に剥離可能なフイルムを付着させる。付着の方法とし
ては、加熱、加圧下フイルムを軟化させて付着させるこ
とにより、行うことができる。たとえば80〜160℃
程度に加熱したロールの間を0.5〜5Kg/cm2G程度の
圧力ではさみ込みながら、速度0.5〜5m/分程度のス
ピードで通過させることにより、良好に付着させること
ができる。このときの剥離強度は0.5〜20g/cm(剥
離速度0.5m/分での数値)であり、ポリイミド樹脂層
表面に確実に付着していると同時に、剥離に際しては、
基板の変形を引起すことなく、通常の人間の手の感覚と
して無理なく容易に剥離することができる。After the heat treatment of the polyimide resin is completed, a peelable film is attached to the surface of the resin layer. The film can be adhered by softening the film under heating and pressure to adhere the film. For example 80-160 ℃
Good adhesion can be achieved by passing the rolls heated to a certain degree at a speed of about 0.5 to 5 m / min while sandwiching them with a pressure of about 0.5 to 5 kg / cm 2 G. The peel strength at this time is 0.5 to 20 g / cm (a numerical value at a peeling speed of 0.5 m / min), and the polyimide resin layer surely adheres to the surface of the polyimide resin layer at the same time as peeling.
The substrate can be easily and easily peeled off without causing deformation of the substrate as if it were a normal human hand.
このようにして本発明の基板は製造される。さらに、こ
の基板を所定の形状、寸法に打抜くことによつても良好
な基板を製造することができる。このとき表面にフイル
ムがあることは打抜き加工、およびこれに伴う作業を容
易にする点で多大の利益をもたらすものである。In this way, the substrate of the present invention is manufactured. Further, a good substrate can be manufactured also by punching this substrate into a predetermined shape and size. At this time, the presence of the film on the surface brings a great advantage in facilitating the punching process and the work associated therewith.
以下に実施例を挙げて本発明を更に詳しく説明するが、
本発明はこれに限定されるものではない。Hereinafter, the present invention will be described in more detail with reference to Examples.
The present invention is not limited to this.
製造参考例1 米国特許第3,708,458号の実施例4に述べられている手
順を使用し3,3′4,4′−ベンゾフエノンテトラカルボン
酸無水物と80モル%のトリレンジイソシアネート(2,
4−異性体約80モル%と2,6−異性体約20モル%の混
合物)および20モル%の4,4′−ジフエニルメタンジ
イソシアネートを含む混合物より共重合ポリイミドを重
合した。Preparation Reference Example 1 Using the procedure described in Example 4 of US Pat. No. 3,708,458, 3,3′4,4′-benzophenonetetracarboxylic anhydride and 80 mol% tolylene diisocyanate (2,
A copolymerized polyimide was polymerized from a mixture containing about 80 mol% of 4-isomer and about 20 mol% of 2,6-isomer) and 20 mol% of 4,4'-diphenylmethane diisocyanate.
重合溶媒はN,N′−ジメチルホルムアミドを使用し樹脂
物濃度は21重量%であつた。The polymerization solvent used was N, N'-dimethylformamide, and the resin concentration was 21% by weight.
このコポリイミドの30℃における相対粘度(ηinh )
(ジメチルホルムアミド中、0.5%)は0.6dl/gで
あつた。Relative viscosity (ηinh) of this copolyimide at 30 ℃
(0.5% in dimethylformamide) was 0.6 dl / g.
製造参考例2 予備乾燥した10の反応器に614.82g(3.20モ
ル)のトリメリツト酸無水物および132.90g(0.80
モル)のイソフタル酸を装入した。この反応器は温度
計、凝縮器、撹拌機及び窒素入口を備えていた。PRODUCTION REFERENCE 2 In 10 pre-dried reactors 614.82 g (3.20 mol) trimellitic anhydride and 132.90 g (0.80)
Mol) of isophthalic acid. The reactor was equipped with a thermometer, condenser, stirrer and nitrogen inlet.
5の乾燥したびん中に1000.96g(4.0モル)の4,
4′−メチレンビスフエニルイソシアナート(以下MD
Iと略称)をはかり取り、次いで434mlのN−メチル
ピロリドン(以下NMPと略称)をはかり取つてMDI
を溶解した。このMDI溶液を反応器に加え、次いでM
DIをはかり取つたびんをすすぐために3650mlのNMP
を加えた。1000.96 g (4.0 mol) of 4, in a dry bottle of 5,
4'-Methylenebisphenyl isocyanate (hereinafter MD
I) and then 434 ml of N-methylpyrrolidone (hereinafter abbreviated as NMP) and MDI
Was dissolved. Add this MDI solution to the reactor, then M
3650 ml NMP to rinse bottles with DI
Was added.
65rpmの撹拌速度および窒素雰囲気の下でこの溶液を
3時間40分にわたつて53℃から170℃まで加熱し
てさらに1時間55分169℃〜171℃に加熱した。
このようにして繰返し単位の約80モル%が の構造を有し、繰返し単位の約20モル%が の構造を有するランダムコポリアミドイミドのNMPの
25重量%溶液が得られた。The solution was heated from 53 ° C. to 170 ° C. over 3 hours and 40 minutes under a stirring speed of 65 rpm and a nitrogen atmosphere, and further heated to 169 ° C. to 171 ° C. for 1 hour and 55 minutes.
In this way about 80 mol% of the repeating units With about 20 mol% of the repeating units A 25% by weight solution of NMP of random copolyamideimide having the structure of was obtained.
このコポリアミドイミドの30℃における対数粘度(η
inh )(N−メチルピロリドン中0.5%)は0.60
3dl/gであつた。The logarithmic viscosity (η
inh) (0.5% in N-methylpyrrolidone) is 0.60
It was 3 dl / g.
この溶液をメタノール中に加え、ポリマーを析出させた
後、150℃で3時間乾燥し、コポリアミドイミド粉末
を得た。This solution was added to methanol to precipitate a polymer, which was then dried at 150 ° C. for 3 hours to obtain a copolyamideimide powder.
製造参考例3 エチレン−ブテン1共重合体(エチレン含有率87モル
%、ブテン−1含有量13モル%、結晶化度20%)1
00重量部と、少量のアセトンで溶かしたα,α′−ビ
ス−t−ブチルパーオキシ−p−ジイソプロピルベンゼ
ン0.025重量部、無水マレイン酸0.8重量部をヘ
ンシエルミキサー中でブレンドする。Production Reference Example 3 Ethylene-butene 1 copolymer (ethylene content 87 mol%, butene-1 content 13 mol%, crystallinity 20%) 1
00 parts by weight, 0.025 parts by weight of α, α'-bis-t-butylperoxy-p-diisopropylbenzene dissolved in a small amount of acetone, and 0.8 parts by weight of maleic anhydride are blended in a Henschel mixer. .
この混合粒状物を内径40mmφ、L/D=28の押出機を
用いて230℃で押し出しペレツト化した。The mixed granules were extruded into pellets at 230 ° C. using an extruder having an inner diameter of 40 mmφ and L / D = 28.
このペレツトの一部を粉砕後、アセトンにて未反応無水
マレイン酸をソツクスレー抽出器にて12時間抽出し
た。このものを赤外スペクトルにて無水マレイン酸を定
量したところ0.7重量%の無水マレイン酸がグラフト
反応していた。After crushing a part of this pellet, unreacted maleic anhydride was extracted with acetone by a Soxhlet extractor for 12 hours. When this product was quantified for maleic anhydride by infrared spectrum, 0.7% by weight of maleic anhydride was graft-reacted.
この様にして得られた変性エチレン共重合体ペレツト
と、低密度ポリエチレンペレツトをブレンドしNovamid
2030A(三菱化成登録商標、ナイロン6/66共重合
体、共重合比85/15、ηrel=3.5)との共押し出し
による積層フイルムを製造した。このフイルムの厚みは
70μmであり、ナイロン部40μm、変性エチレン共
重合体部30μmであつた。The modified ethylene copolymer pellets thus obtained and low density polyethylene pellets were blended and
A laminated film was produced by co-extrusion with 2030A (registered trademark of Mitsubishi Kasei, nylon 6/66 copolymer, copolymerization ratio 85/15, ηrel = 3.5). The thickness of this film was 70 μm, and the nylon portion was 40 μm and the modified ethylene copolymer portion was 30 μm.
実施例1 金属板としてステンレスのBA板、Sus430、寸法3
00mm角、板厚0.15mmを用いた。ビツカース硬度は
200、表面粗度はRmax=1500Å、Ra=180Åであつ
た。ポリイミド樹脂としては製造参考例1に記載のもの
をジメチルホルムアミドを溶媒として固形分濃度15重
量%に調整し、孔径1μmのフイルターで過した溶液
を用いた。Example 1 Stainless steel BA plate as a metal plate, Sus430, size 3
A 00 mm square and a plate thickness of 0.15 mm were used. The Vickers hardness was 200, and the surface roughness was Rmax = 1500Å, Ra = 180Å. As the polyimide resin, the solution described in Production Reference Example 1 was adjusted to a solid content concentration of 15% by weight using dimethylformamide as a solvent, and the solution was passed through a filter having a pore size of 1 μm.
上記金属板の片側表面に上記ポリイミド樹脂溶液を室温
下ロールコータで塗布し、直ちに80℃のオーブンで5
分間処理し、その後徐々に昇温して350℃で5分間処
理した。得られた塗膜は約10μmの膜厚を有し、表面
粗度はRmax=250Å、Ra=50Åであつた。The polyimide resin solution was applied to one surface of the metal plate with a roll coater at room temperature and immediately heated in an oven at 80 ° C for 5 hours.
Then, the temperature was gradually raised and the temperature was increased to 350 ° C. for 5 minutes. The obtained coating film had a film thickness of about 10 μm, and the surface roughness was Rmax = 250Å, Ra = 50Å.
このあと製造参考例3に記載のフイルムを変性エチレン
共重合体部をポリイミド樹脂と接触する側として、ロー
ル温度120℃、ロール押付圧力2Kg/cm2G、搬送速度
1m/分の条件下、ラミネートした。After that, the film described in Production Reference Example 3 was laminated under the conditions where the modified ethylene copolymer part was in contact with the polyimide resin, the roll temperature was 120 ° C., the roll pressing pressure was 2 kg / cm 2 G, and the conveying speed was 1 m / min. did.
さらに、このあと、45トンクランクプレスに打抜き金
型を取付けて打抜き加工を行い、寸法100mm角の表面
保護フイルム付基板を得た。この基板におけるフイルム
の剥離強度は2.5g/cm(剥離強度0.5m/分での数
値、以下同じ)であつた。Further, after that, a punching die was attached to a 45-ton crank press and punching was performed to obtain a substrate with a surface protective film having a size of 100 mm square. The peel strength of the film on this substrate was 2.5 g / cm (a numerical value at a peel strength of 0.5 m / min, the same applies hereinafter).
実施例2 ポリイミド樹脂として製造参考例2に記載のものを用
い、また、熱処理温度が300℃であつたこと以外は実
施例1と同様にして表面保護フイルム付基板を得た。Example 2 A substrate with a surface protection film was obtained in the same manner as in Example 1 except that the polyimide resin described in Production Reference Example 2 was used and the heat treatment temperature was 300 ° C.
この基板における塗膜の表面粗度はRmax=280Å、Ra
=55Åであり、フイルムの剥離強度は3.1g/cmであ
つた。The surface roughness of the coating film on this substrate is Rmax = 280Å, Ra
= 55Å, and the peel strength of the film was 3.1 g / cm.
実施例3 金属板として、純度99.7%、寸法300mm×300
mm、板厚0.8mmのアルミニウム板に脱脂処理をほどこ
し、30%リン酸水溶液中30℃にて直流40V、3分
間陽極酸化処理をほどこし、水洗、乾燥したものを用い
た。本金属板の陽極酸化皮膜の細孔の大きさは、電子顕
微鏡観察の結果、500〜800Åで、平均約650Å
で、密度は約100個/μm2であつた。ポリイミド樹
脂としては製造参考例1に記載のものをジメチルホルム
アミドを溶媒として固形分濃度25重量%に調整し、孔
径1μmのフイルターで過した溶液を用いた。Example 3 As a metal plate, purity 99.7%, size 300 mm × 300
An aluminum plate having a thickness of 0.8 mm and a thickness of 0.8 mm was degreased, anodized in a 30% phosphoric acid aqueous solution at 30 ° C. for 40 minutes at a direct current of 40 V, washed with water, and dried. The size of the pores of the anodized film of the metal plate was 500 to 800Å as a result of electron microscope observation, and the average size was about 650Å.
The density was about 100 particles / μm 2 . As the polyimide resin, the solution described in Production Reference Example 1 was adjusted to a solid concentration of 25% by weight using dimethylformamide as a solvent, and the solution was passed through a filter having a pore size of 1 μm.
上記金属板の片側表面に上記ポリイミド樹脂溶液を室温
下ドクターナイフで塗布し、直ちに80℃のオーブンで
15分間処理し、その後連続的に昇温して320℃で5
分間処理した。得られた塗膜の膜厚は約50μmであつ
た。The polyimide resin solution was applied to one surface of the metal plate with a doctor knife at room temperature, immediately treated in an oven at 80 ° C for 15 minutes, and then continuously heated to 320 ° C for 5 minutes.
Processed for a minute. The film thickness of the obtained coating film was about 50 μm.
このあと、実施例1と同様にしてフイルムをラミネート
しプレス打抜き加工を行つて表面保護フイルム付基板を
得た。この基板におけるフイルムの剥離強度は2.0g/
cmであつた。After that, the film was laminated in the same manner as in Example 1 and subjected to press punching to obtain a substrate with a surface protective film. The peel strength of the film on this substrate is 2.0 g /
It was in cm.
実施例4 ポリイミド樹脂として製造参考例1に記載のものと製造
参考例2に記載したものを固形分重量として等量混合し
た溶液であつて、固形分濃度を22重量%に調整し孔径
1μmのフイルターで過した溶液を用いたこと、乾燥
塗膜の膜厚が25μmであつたこと以外は実施例3と同
様にして表面保護フイルム付基板を得た。この基板にお
けるフイルムの剥離強度は2.1g/cmであつた。Example 4 A solution obtained by mixing equal amounts of the polyimide resin described in Production Reference Example 1 and that described in Production Reference Example 2 in terms of solid content weight, the solid content concentration was adjusted to 22% by weight, and the pore diameter was 1 μm. A substrate with a surface protective film was obtained in the same manner as in Example 3 except that the solution passed through the filter was used and the thickness of the dried coating film was 25 μm. The peel strength of the film on this substrate was 2.1 g / cm.
本発明の基板は電子材料の分野において有用であり、特
に太陽電池、光センサー、光スイツチ等の光電変換装置
用の基板、サーマルヘツド用の基板として好適である。The substrate of the present invention is useful in the field of electronic materials, and is particularly suitable as a substrate for photoelectric conversion devices such as solar cells, photosensors, and optical switches, and a substrate for thermal heads.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 酒井 静枝 神奈川県横浜市緑区鴨志田町1000番地 三 菱化成工業株式会社総合研究所内 (72)発明者 今奈良 徹 神奈川県横浜市緑区鴨志田町1000番地 三 菱化成工業株式会社総合研究所内 (56)参考文献 特開 昭58−8636(JP,A) 特開 昭58−186571(JP,A) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shizue Sakai 1000 Kamoshida-cho, Midori-ku, Yokohama-shi, Kanagawa Sanryoh Chemical Industry Co., Ltd. (72) Inventor Toru Imanara 1000 Kamoshida-cho, Midori-ku, Yokohama-shi, Kanagawa Address Sanryo Kasei Co., Ltd., Research Laboratory (56) Reference JP-A-58-8636 (JP, A) JP-A-58-186571 (JP, A)
Claims (9)
ド樹脂層、および該樹脂層の表面に被着してなる下記フ
ィルムをはり付けたことを特徴とする基板。 (I)被保護面と接する最内層を形成する樹脂がa)密
度0.91〜0.935g/ccの低密度ポリエチレン、4
0〜95重量%、b)密度0.86〜0.91g/ccの非
晶ないし低結晶性のエチレン/α−オレフィン共重合
体、5〜60重量%、の混合物であり、かつa),b)
成分のうち少なくとも1成分が不飽和カルボン酸あるい
は不飽和カルボン酸無水物で、その一部ないし全部を変
性した変性ポリオレフィン組成物から成り、 (II)最外層が弾性率6000kg/cm2以上で、かつ荷重
4.6kg/cm2での熱変形温度が140℃以上の熱可塑性
樹脂層である可剥離性表面保護フィルム1. A substrate comprising a metal plate, a polyimide resin layer deposited on the surface thereof, and the following film deposited on the surface of the resin layer adhered thereto. (I) The resin forming the innermost layer in contact with the protected surface is a) low density polyethylene having a density of 0.91 to 0.935 g / cc, 4
0 to 95% by weight, b) a mixture of an amorphous or low crystalline ethylene / α-olefin copolymer having a density of 0.86 to 0.91 g / cc, 5 to 60% by weight, and a), b)
At least one of the components is an unsaturated carboxylic acid or an unsaturated carboxylic acid anhydride and is composed of a modified polyolefin composition partially or wholly modified, and (II) the outermost layer has an elastic modulus of 6000 kg / cm 2 or more, A peelable surface protective film which is a thermoplastic resin layer having a heat distortion temperature of 140 ° C or more under a load of 4.6 kg / cm 2.
あることを特徴とする特許請求の範囲第1項記載の基
板。2. The substrate according to claim 1, wherein the metal plate is stainless steel or aluminum.
30モル%が式 で表わされる構造を有し、かつ残り90〜70モル%が
式 で表わされる構造を有するコポリイミドであることを特
徴とする特許請求の範囲第1項又は第2項記載の基板。3. The polyimide resin comprises 10 to 10 repeating units.
30 mol% is the formula And the remaining 90 to 70 mol% is of the formula The substrate according to claim 1 or 2, which is a copolyimide having a structure represented by:
90モル%が式 で表わされる構造を有し、かつ残り30〜10モル%が
式 で表わされる構造を有するコポリアミドイミドであるこ
とを特徴とする特許請求の範囲第1項又は第2項記載の
基板。4. A polyimide resin containing 70 to 60 repeating units.
90 mol% is the formula And has a structure represented by The substrate according to claim 1 or 2, which is a copolyamideimide having a structure represented by:
の溶媒溶液を塗布した後、加熱処理を行って該樹脂を硬
化させ、ついで加熱ロールを押付けることにより下記フ
ィルムを付着させることを特徴とする表面保護用フィル
ムを貼付した基板の製造方法。 (I)被保護面と接する最内層を形成する樹脂がa)密
度0.91〜0.935g/ccの低密度ポリエチレン、4
0〜95重量%、b)密度0.86〜0.91g/ccの非
晶ないし低結晶性のエチレン/α−オレフィン共重合
体、5〜60重量%、の混合物であり、かつa),b)
成分のうち少なくとも1成分が不飽和カルボン酸あるい
は不飽和カルボン酸無水物で、その一部ないし全部を変
性した変性ポリオレフィン組成物から成り、 (II)最外層が弾性率6000kg/cm2以上で、かつ荷重
4.6kg/cm2での熱変形温度が140℃以上の熱可塑性
樹脂層である可剥離性表面保護フィルム5. A method of applying a solvent solution of a solvent-soluble polyimide resin to the surface of a metal plate, heating the resin to cure the resin, and then pressing a heating roll to attach the following film. A method for manufacturing a substrate having a characteristic surface protection film attached thereto. (I) The resin forming the innermost layer in contact with the protected surface is a) low density polyethylene having a density of 0.91 to 0.935 g / cc, 4
0 to 95% by weight, b) a mixture of an amorphous or low crystalline ethylene / α-olefin copolymer having a density of 0.86 to 0.91 g / cc, 5 to 60% by weight, and a), b)
At least one of the components is an unsaturated carboxylic acid or an unsaturated carboxylic acid anhydride, and is composed of a modified polyolefin composition partially or wholly modified, and (II) the outermost layer has an elastic modulus of 6000 kg / cm 2 or more, A peelable surface protective film which is a thermoplastic resin layer having a heat distortion temperature of 140 ° C or more under a load of 4.6 kg / cm 2.
ス打抜き加工を行うことを特徴とする特許請求の範囲第
5項記載の基板の製造方法。6. The method for manufacturing a substrate according to claim 5, wherein press punching is performed after the peelable film is attached.
あることを特徴とする特許請求の範囲第5項又は第6項
記載の基板の製造方法。7. The method for producing a substrate according to claim 5, wherein the metal plate is stainless steel or aluminum.
30モル%が式 で表わされる構造を有し、かつ残り90〜70モル%が
式 で表わされる構造を有するコポリイミドであることを特
徴とする特許請求の範囲第5項ないし第7項のいずれか
1つの項に記載の基板の製造方法。8. The polyimide resin is composed of 10 to 10 repeating units.
30 mol% is the formula And the remaining 90 to 70 mol% is of the formula The method for producing a substrate according to any one of claims 5 to 7, which is a copolyimide having a structure represented by:
90モル%が式 で表わされる構造を有し、かつ残り30〜10モル%が
式 で表わされる構造を有するコポリアミドイミドであるこ
とを特徴とする特許請求の範囲第5項ないし第7項のい
ずれか1つの項に記載の基板の製造方法。9. A polyimide resin comprising 70 to 60 repeating units.
90 mol% is the formula And has a structure represented by The method for producing a substrate according to any one of claims 5 to 7, which is a copolyamideimide having a structure represented by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61105168A JPH0659714B2 (en) | 1986-05-08 | 1986-05-08 | Substrate having a surface protection film adhered thereto and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61105168A JPH0659714B2 (en) | 1986-05-08 | 1986-05-08 | Substrate having a surface protection film adhered thereto and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62261434A JPS62261434A (en) | 1987-11-13 |
| JPH0659714B2 true JPH0659714B2 (en) | 1994-08-10 |
Family
ID=14400151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61105168A Expired - Lifetime JPH0659714B2 (en) | 1986-05-08 | 1986-05-08 | Substrate having a surface protection film adhered thereto and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0659714B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4435109B2 (en) * | 2006-05-01 | 2010-03-17 | リンテック株式会社 | Protective sheet for punching process and method for producing hard coat film for optical recording medium |
| JP2011138683A (en) * | 2009-12-28 | 2011-07-14 | Dainippon Printing Co Ltd | Electronic element |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS588636A (en) * | 1981-07-08 | 1983-01-18 | 旭化成株式会社 | Photo polymerizing element wound in roll form |
| JPS58186571A (en) * | 1982-04-23 | 1983-10-31 | Mitsubishi Gas Chem Co Inc | Manufacturing method of polishing auxiliary material |
-
1986
- 1986-05-08 JP JP61105168A patent/JPH0659714B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62261434A (en) | 1987-11-13 |
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