JPH067151B2 - Measuring device for electronic equipment - Google Patents

Description

Detailed Description of the Invention [Industrial applications]

The present invention relates to a measuring device for an electronic device, and more particularly, to a measuring device for improving measurement efficiency when sequentially measuring each characteristic of a plurality of electronic devices formed on a substrate in a manufacturing process.

[Prior art]

For example, as shown in FIG. 3, an electronic device A such as a hybrid IC configured by loading a predetermined monolithic IC, a transistor, a resistor and a capacitor on a circuit board has a plurality of electronic devices on a single board B. Are collectively formed. Then, the characteristic measurement of these electronic devices A ... Is sequentially performed using the measurement probe P before dividing the substrate into each unit electronic device. That is, as shown in FIGS. 3 and 4, the substrate is placed on, for example, a three-dimensional table, and the measurement probe P and the table are moved relatively by one pitch while the measurement probe is sequentially operated for each unit electron. The device is brought into contact with the electrode pad to measure a predetermined characteristic.

By the way, in the case where the circuit includes a capacitor such as the hybrid IC, it is necessary to wait a time from the contact of the measuring probe P to the electrode pad until the capacitor is charged up. In addition, since it takes a considerable time to measure one electronic device, there is a problem that the measurement efficiency is very poor. That is, since a single measuring probe P is used to energize each electronic device A and measure the characteristics, a charge-up time is required every time the measuring probe is brought into contact with the pad of each electronic device. It was. Further, the measurement probe P is connected to the measuring device via the amplifier box, but since the wiring from the probe to the amplifier box cannot be lengthened in order to ensure the reliability of the measurement, the same specification as the conventional one can be obtained. It is not possible due to space restrictions to configure the probes and the corresponding amplifier boxes in parallel with the number of electronic devices on the board, and even if it is possible, the amplifier boxes are expensive. Therefore, there is a problem that the equipment cost is significantly increased. The present invention has been made to solve the above-mentioned conventional problems, and requires less capital investment for measurement of each electronic device on a substrate on which a plurality of unit electronic devices that require charge-up at the time of measurement are configured. It is an object of the present invention to provide a measuring device for an electronic device, which can be performed more efficiently without requiring it.

[Means for solving the problem]

In order to solve the above problems, the present invention takes the following technical means. That is, the electronic device measuring apparatus according to the present invention is an apparatus for sequentially measuring the characteristics of each electronic device formed on a substrate, and the terminal pad required for at least charge-up in the plurality of electronic devices on the substrate. Charge-up probe means having a plurality of sets of probes capable of contacting with each other, and a predetermined probe of each set of the charge-up probe means or a predetermined terminal pad of each electronic device are sequentially contacted and It is configured to include a measurement probe for performing characteristic measurement.

[Action and effect]

In a measuring device for electronic devices of the present invention, a charge-up probe means for charging up capacitors of a plurality of electronic devices formed on a substrate, and a measuring probe for measuring characteristics of each electronic device. Are separately configured, and a plurality of sets of probes in the charge-up probe means are brought into contact with a predetermined pad of each electronic device to collectively charge up the plurality of electronic devices. The characteristic of each electronic device is sequentially measured by directly and sequentially contacting a predetermined probe of each set in the charge-up probe means or a predetermined terminal pad of the electronic device. Therefore, according to the device of the present invention, when sequentially measuring the characteristics of each electronic device, the charge-up of the capacitor of each electronic device has already been completed. In the above, there is no need to wait for charge-up every time, and as a whole, there is an effect that the efficiency of characteristic measurement of a plurality of electronic devices formed on a substrate is dramatically improved.

[Explanation of Examples]

Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings. In order to increase the efficiency of manufacturing and inspection, a method of collectively manufacturing a plurality of electronic devices on a single substrate and finally separating each electronic device into a product is adopted. This manufacturing method is also followed in a relatively large electronic device such as a hybrid IC. As shown in FIG. 1, the electronic device A such as the hybrid IC described above is divided into a plurality of rows and a plurality of columns by a grid-like cut line on the upper surface of a single substrate 2, and a fixed circuit pattern is formed. Each rectangular area a ... Is loaded with a predetermined monolithic IC, chip type resistor, capacitor, transistor, etc., and in this state, each electronic device undergoes the characteristic inspection of the present invention. The substrate 2 of the example shown in the drawing is formed with a total of 12 electronic devices arranged in a row in four rows of three rows, and the substrate 2 is mounted on, for example, a three-dimensional table and is arranged in rows. In addition to being step-fed by one pitch in the direction (arrow X direction) and the column direction (arrow Y direction), it is also capable of reciprocating in the vertical direction. First, as shown in FIG. 1 and FIG. 2, the measuring apparatus of the present invention is provided with a charge-up probe means 3 capable of collectively charging up A1 ... . That is, the charge-up probe means 3 is constituted by supporting four sets of comb-teeth-like probes 5 ... Which can simultaneously contact the terminal pads 4 ... Of the electronic devices 1 ... On the rod-like support 3a. , These probes 5 simultaneously charge up the above four electronic devices A1 ... Then, the measurement probes 6 sequentially contact the rear ends of the four sets of probes 5 of the charge-up probe means 3, so that the one row 4 already charged up.
The characteristics of each electronic device A1 ... Are measured. In the present example, the measuring probes 6 have a structure in which a predetermined number of comb-teeth unit probes 6b are supported on a rod-shaped support 6a. In this case, in this example, the three-dimensional table is driven, and the substrate 2 and the charge-up probe means 3 which are still in contact with the respective terminal pads 4 are pitched in the direction of the arrow Y, that is, the electronic device A1. That is, the measurement probe 6 is moved up and down relatively while being fed by a distance corresponding to the length in the Y direction, and this is sequentially brought into contact with a predetermined probe of the charge-up probe means 3. Each probe 5 of the charge-up probe means 3 ...
Are in contact with the terminal pads 4 of each electronic device. Therefore, when the measuring probe is brought into contact with the probe 5, it is substantially the same as when the measuring probe is brought into contact with the terminal pad of each electronic device. It will be. When the characteristic measurement of the four electronic devices A1 in the first row is completed in this way, the three-dimensional table returns to the original position in the Y direction, and moves one pitch in the X direction of the arrow to move the four electronic devices A2 in the second row of the substrate 2. Of each of the electronic devices A2 ... Of the charge-up probe means 3 is brought into contact with each terminal pad 4 to charge up the electronic devices of the second row.
Similarly to the above, the board 2 and the charge-up probe means 3 which is in contact with the respective terminal pads 4 ...
The characteristic is measured for each of the electronic devices A2 ... In the second row by relatively scanning the measuring probe 6 while feeding one pitch in each direction. The same applies to the measurement of the four electronic devices A3 ... In the third row. Thus, in the measuring device for an electronic device of the present invention,
The charge-up probe means 3 and the measurement probe 6 are configured separately, and the charge-up probe means 3 collectively charges up a plurality of electronic devices A, and then the measurement probe 6 is used for each electronic device. The characteristic measurement of each electronic device is sequentially performed by sequentially connecting to the terminal pad A. Therefore, there is no need to wait for charge-up when the measuring probes 6 are successively brought into contact with the terminal pads of the electronic devices A, and the measuring efficiency is increased accordingly. Of course, the scope of the present invention is not limited to the above embodiments. In the embodiment, the charge-up probe means 3 is configured so that four rows of electronic devices can be charged up at the same time, and when the measurement of the one row of electronic devices is completed, the second row of electronic devices is charged up. However, the charge-up probe means may be configured to charge up all 12 electronic devices in 3 rows. By doing so, it is not necessary to change the position of the charge-up probe means, and the measurement efficiency is further improved. Also,
In the embodiment, the measurement probe is sequentially contacted with the predetermined probe of the charge-up probe means 3 so that the measurement probe is substantially connected to the predetermined terminal pad of each electronic device. Probe 6
Needless to say, it is also possible to directly contact the predetermined terminal pad of each electronic device.

[Brief description of drawings]

FIG. 1 is a plan view for explaining an embodiment of the present invention, FIG. 2 is a front view thereof, and FIGS. 3 and 4 are explanatory views of a conventional measurement example. 2 ... Substrate, 3 ... Charge-up probe means, 4 ... Terminal pad, 5 ... Probe, 6 ... Measuring probe.

Claims (1)

[Claims] 1. An apparatus for sequentially measuring the characteristics of a plurality of electronic devices formed on a substrate, wherein a plurality of sets of electronic devices on the substrate that can contact at least a terminal pad required for charge-up are provided. Charge-up probe means including a probe, and a measurement probe for sequentially contacting a predetermined probe of each set of the charge-up probe means or a predetermined terminal pad of each electronic device to measure characteristics of each electronic device. And a measuring device for an electronic device.