JPH0711873B2 - Disc manufacturing method - Google Patents

Description

The present invention relates to a disc manufacturing method for manufacturing a disc represented by a compact disc.

[Outline of Invention]

In the present invention, the holder for holding the substrate is circulated between the loading position, the position for mounting the material for forming the reflective film, and the position for forming the reflective film.

[Conventional technology]

In a compact disc, a reflective film made of aluminum or the like is formed on the signal surface of a substrate onto which recorded information is transferred, and a protective film made of an ultraviolet curable resin or the like is further coated on the reflective film. When forming the reflective film, a plurality of substrates having a signal surface are held by a holder, such a plurality of holders are carried into the inside of a vapor deposition device or the like, and aluminum is vapor-deposited on the signal surface. When the vapor deposition is completed, the holder is pulled out of the vapor deposition apparatus, the substrates on which the reflective film is formed are removed from all the holders, and when the vapor deposition is completed, the substrate on which the reflective film is not formed is attached to each holder again.

Therefore, in the conventional apparatus, holders are arranged on both sides of the vapor deposition apparatus, and the holders are reciprocally moved with respect to the vapor deposition apparatus so that they are alternately loaded into the apparatus. Remove (unload)
And attach a new board (loading)
Was doing.

[Problems to be solved by the invention]

As described above, in the conventional apparatus, the two holders are alternately loaded into the vapor deposition apparatus. Therefore, when automating, two loading apparatuses are required, which increases the size and cost of the apparatus. However, there is a drawback that the working time becomes long and the automation is hindered.

Therefore, an object of the present invention is to provide a small-sized and low-cost disk manufacturing apparatus which has good work efficiency.

[Means for solving problems]

According to the present invention, a mask is attached to a substrate on which a reflective film is not formed, the substrate is loaded into the holder integrally with the mask, and the substrate on which the reflective film is formed is integrally unloaded from the holder from the holder. The holder is provided between a first position where the attaching / detaching means is provided, a second position where the material for forming the reflective film is mounted, and a third position where the reflective film is formed on the substrate. It is characterized by circulating.

[Action]

When the holder is in the first position, the substrate on which the reflective film has already been formed is unloaded, and the substrate on which the reflective film has not yet been formed is loaded. The holder is moved from the first position to the second position where the material of the reflective film is mounted. The holder is moved from the second position to the third position where the reflective film is formed. Furthermore, the holder is moved from the third position to the first position again. That is, the holder is circulated.

〔Example〕

FIG. 1 shows a plan view of a disk manufacturing apparatus of the present invention. Reference numeral 1 is a supply means, to which a plurality of cases 2 are attached. The case 2 accommodates a plurality of substrates 4 having a signal surface onto which recording information is transferred. The substrate 4 is made of, for example, a synthetic resin such as polycarbonate. Denoted at 3 is a take-out means, and the substrate 4 is removed from the case 2 by one.
The sheets are taken out one by one by vacuum suction or the like and sequentially placed on the conveying means 11.

As shown in FIGS. 1 and 2, the transfer means 11 has two bars 13 each having a guide portion 12 for positioning the substrate 4 at a predetermined pitch P. The bar 13 rises vertically (in the direction perpendicular to the paper surface in FIG. 1, upward in FIG. 2) and then moves forward by 1 pitch (in the right direction in FIG. 1 and in the direction perpendicular to the paper surface in FIG. 2) Then, the operation of descending vertically and moving backward by one pitch is repeated. Locking portions 14 are fixed and arranged for each pitch P at a position corresponding to the center hole of the substrate 4 positioned in the guide portion 12. The locking portion 14 is a conical portion 15 that fits in the central hole of the substrate 4, and a flange portion that supports the substrate 4.
It has 16 and. The height of the flange portion 16 is lower than the position of the guide portion 12 when the bar 13 is raised and is higher than the position when the bar 13 is lowered. Therefore, each time the bar 13 moves up, forward, down, and backward for one cycle, the substrate 4 is sequentially conveyed (moved) by one pitch P to the front locking portion 14.

As is clear from FIGS. 1 and 2, a plurality of (in this embodiment, one pair) supply means 1 and conveyance means 11 are provided. Therefore, the substrates (disks) 4 to which different kinds of recording information are transferred can be respectively supplied from one and the other supplying means 1 (they may be the same, of course).

When the eight substrates 4 are transported to the predetermined position by the transport means 11, the loading means 21 starts its operation.
The loading means 21 includes eight chucks 22 (that is, a total of 16 chucks) arranged at every pitch P corresponding to each transport means 11.
Have. The loading means 21 includes a chuck 22 and a holder 33.
Move in the direction of.

A holder 33 provided with a pair of holding parts 8 is shown in FIGS.
As shown, the three are combined as a set.
The loading means 21 is positioned by the member 41 so that one of the holders 33 faces the conveying means 11 side.
The opposing holders 33 hold two rows of eight substrates 4 each having a reflective film already formed thereon.

As shown in FIG. 8, the chuck 22 holds the holding portion 52 of the mask 51, and detaches the substrate 4 from the holder 33. Since the leaf spring 55 is inserted into the center hole of the substrate 4 and spreads outward,
The substrate 4 is pressed and held by the flange portion 53 of the mask 51.

The loading unit 21 moves the substrate 4 that has been separated from the holder 33 integrally with the mask 51 to the transfer unit 61 and unloads it. Unloading is performed as shown in FIGS. 3 and 4. Similarly to the transporting means 11, the transporting means 61 has two bars 63 on which guide portions 62 are formed and one pitch P.
And a locking portion 64 fixed for each. The locking portion 64 includes an abutting portion 65 having a diameter smaller than the center hole of the substrate 4 and a flange portion 66 having a large diameter.
And have. When in the reference position, the contact portion 65 and the flange portion 66 are located below the raised guide portion 62 and above the lowered guide portion 62. When the chuck 22 moves the substrate 4 to a predetermined position above the transfer means 61, the contact portion 65 is raised by the plunger 67. Abutment
65 abuts against the leaf spring 55 to compress the leaf spring 55 and reduce its diameter. As a result, the substrate 4 is masked by the force of gravity 51.
Get away from and fall. At this time, the flange 68 is driven by the plunger 68 and the flange portion 66 is also raised, so
The center hole is fitted into the contact portion 65, and the flat surface portion is supported by the flange portion 66. The contact portion 65 and the flange portion 66 supporting the substrate 4 thus unloaded descend to the reference position.

When the unloading is completed, the bar 63 moves upward, forward, downward, and backward as one cycle similarly to the bar 13, so that the substrate (disk) 4 on which the reflecting surface is formed is sequentially moved forward by 1 pitch P. Be transported. Since the unloading is performed on eight substrates, the first eight of the locking portions of the transfer means 61 have the locking portions 64, and the rest have the locking portions 14. The transport means 61 is also the transport means
One pair is provided corresponding to 11. Therefore, the substrates having different recording information can be separately taken out from the one and the other conveying means 61. Of course, if the number of systems is increased, more kinds of substrates can be processed.

The substrate 4 is transferred to the next step (for example, a protective film forming step) by the transfer means 61.

On the other hand, when the unloading is completed, the loading means 21 continues to load next. Transport means
The first several locks 11 are configured as locks 14, and the last eight locks 64 are configured for loading.

When the unloading is completed, chuck 22 will be mask 51.
Is holding. The loading means 21 positions this mask 51 above the center holes of the last eight substrates 4 of the transport means 11. Next, the contact portion 65 of the locking portion 64 and the flange portion 66 both rise. The contact portion 65 is fitted into the center hole of the substrate 4, and the flange portion 66 contacts the flat surface portion of the substrate 4, so that the substrate 4 rises apart from the guide portion 62. The tip of the contact part 65 is a leaf spring
When it comes into contact with 55, the leaf spring 55 elastically deforms to have a smaller diameter than the central hole of the substrate 4. At this time, since the protrusion 56 functions as a stopper, the leaf spring 55 does not deform more than necessary. The contact portion 65 stops at the position where it contacts the leaf spring 55, but the flange portion 66 further rises and stops when the substrate 4 contacts the flange portion 53 of the mask 51. In this state, the contact portion 65 next descends. Since the inner diameter of the flange portion 66 is set to be larger than the diameter when the leaf spring 55 spreads, the leaf spring 55 has a large diameter due to its own elastic force when the contact by the contact portion 65 is released. As a result, the substrate 4 is held on the mask 51.

In this way, the leaf spring 55 is not pressed by the central hole itself of the substrate 4 during loading and unloading, so that the central hole is prevented from being cracked.

The loading means 21 holds the mask 51 holding the substrate 4 by the chuck 22 and moves it to the position of the holder 33. Since the holder 33 has just removed the substrate 4 on which the reflective film is formed, the substrate 4 is not loaded. The chuck 22 inserts the protrusion 56 of the mask 51 into the hole 43 provided in the holder 33. The protrusion 56 is made of, for example, magnetic stainless steel,
Since the magnet 44 is fixed in the hole 43, the magnet 44 is
56 is sucked, and the flange portion 53 presses the substrate 4 toward the holder 33 by the suction force. Since the inner diameter of the hole 43 is set to be larger than the large diameter of the leaf spring 55, the leaf spring 55 does not have a small diameter inside the hole 43. In addition, in order to obtain a sufficient suction force,
The tip of the protruding portion 56 is made as close as possible to the magnet 44, but is not in contact with it. The hole 43 is provided with a small hole 45 for removing air. This is to completely remove the air in the holes 43 when the pressure is reduced in the process of forming the reflective film. In the vicinity of the center hole of the substrate 4 thus loaded on the holder 33, the flange portion of the mask 51 is provided.
The reflective film is not formed because it is masked by 53. Further, since the holder 33 is provided with the projecting portion 42 in an annular shape, and the projecting portions 42 face each other, no reflective film is formed on the outer peripheral end portion of the substrate 4.

For example, a groove 54 is formed near the joint between the grip portion 52 and the flange portion 53, which are integrally formed of synthetic resin or the like. In the reflective film forming step, the reflective film is not only on the substrate 4 but also on the mask.
It is also formed outside 51. Therefore, the chuck 22 holds the grip 52
When gripping, the reflective film which is rubbed by the chuck 22 and formed on the outside of the mask 51 is removed. When the removed gas adheres to the signal surface (upper surface in FIG. 8), pinholes are generated. Therefore, by providing the groove 54, the chuck
The horizontal surface (the surface on which the reflective film is easily formed) that comes into contact with 22 is made as small as possible so that gas is less likely to be generated. Further, the generated dust falls into the groove 54, and the amount of the dust to be dropped onto the substrate 4 is reduced.

When the unloading and the loading of one holder 33 are completed, the loading means 21 temporarily releases the positioning by the member 41, rotates the shaft 34 by 120 degrees, and performs positioning again. As a result, the new holder 33 faces the loading means 21. Unloading and loading are performed on the new holder 33 in the same manner as described above.

As shown in FIG. 5, seven sets of three holders 33 are arranged on the base 32. Therefore, when unloading and loading of one set of holders 33 is completed, the gear 37 fixed to the base 32 is rotated by a gear (not shown), and the next one
The pair of holders faces the loading means 21.

When the loading and unloading of each of the seven holders 33 is completed in this way, as shown in FIG. 1 (only one holder is shown in the figure for convenience), the reflective film forming system is shown. At 31, the base 32 is moved from the loading position facing the loading means 21 to the position 46. At a position 46, a material 40 such as aluminum forming a reflection film is mounted and arranged on a heater 39 supported by a pole 38 provided at the center of the base 32. The base 32 has a structure in which one set of holders is omitted in order to secure a space for mounting work.

Of course, the material can be loaded when the base 32 is in the loading position, if necessary.

The base 32 replenished with the material 40 is moved to a position 47, and is further moved into the reflection film forming means 48 arranged at the reflection film forming position.

When the base 32 is placed inside, the reflection film forming means 48 depressurizes the room and heats the heater 39 to evaporate the material 40. The evaporated material 40 becomes fine particles and is scattered in a radial manner to form a reflective film on the substrate 4 held by the holder 33. At this time, since the gear 37 is rotated, the base 32 is rotated and each holder revolves. At this time, the gear 35 provided in the set of each holder is rotated by the central fixed gear 36, so that each holder revolves at the same time as revolving. In this way, the reflective film is uniformly formed.

When the formation of the reflection film is completed, the base 32 is moved to the position 49, and then again to the position facing the loading means 21. That is, the base 32 circulates in each position.

When it takes about 10 minutes to form the reflective film and about 13 to 15 minutes for loading and unloading, for example, three bases 32
It is efficient to circulate. That is, when one base 32 is loading and unloading, the other one is placed at the reflection film forming position to form the reflection film. Since the formation of the reflective film ends a little earlier, the finished base is in position
Move to 49 and let it stand by. Then, the other one, which was made to stand by at the position 46, is moved to the position 47 and made to stand by. When the loading and unloading that requires the longest time are completed, the base is moved to the position 46, the base at the position 49 is moved to the loading position, and the base at the position 47 is moved into the reflection film forming means 48.

9 and 10 show a mechanism for rotating the holder 33. The gear 35 is fixed to a substantially cylindrical gear shaft 71. A pin 72 is inserted in the center of the gear shaft 71 so as to be rotatable and vertically movable. Reference numeral 73 denotes a spring, which urges the lower surface of the connecting portion 70 fixed to the tip of the pin 72 so that the lower surface contacts the upper surface of the gear shaft 71. Three holes 75 are provided on the lower surface of the coupling portion 70 at intervals of 120 degrees. Further, three coupling pins 74 that fit into the holes 75 are also provided on the upper surface of the gear shaft 71. Three holes 77 are provided on the bottom surface of the shaft 34 at the center of the holder 33, and three coupling pins 76 that fit into the holes 77 are provided on the upper surface of the coupling portion 70.

When the holder 33 is located at a position other than the position where it is positioned by the member 41, the connecting pin 76 is fitted in the hole 77 and the connecting pin 74 is fitted in the hole 75. Therefore, when the gear 35 rotates, the gear shaft 71, the coupling portion 70, and the shaft 34 rotate, and the holder 33 supported by the shaft 34 rotates (rotates).

When the holder 33 is positioned by the member 41, the head 78 rises and the three coupling pins 79 formed on the upper surface thereof fit into the three holes 80 formed on the lower surface of the pin 72. . When the head 78 further rises against the biasing force of the spring 73, the pin 72 also rises, and the coupling between the coupling pin 74 and the hole 75 is released. In this state, the head 78 is rotated by about 120 degrees via the gear 81 fixed to the outer periphery of the head 78. Therefore, the pin 72, the coupling portion 70, and the shaft 34 are rotated by about 120 degrees (the gear 35 and the gear shaft 71 do not rotate at this time), and the holder 33 is eventually rotated by about 120 degrees. The holder 33 is positioned by the member 41 at the position rotated by 120 degrees as described above.

Of the three holders 33, when the unloading and loading of the first holder 33 is completed, the shaft 34 becomes 120
The second holder 33 is rotated once to unload and load the second holder 33. Axis 34 when it ends
Is further rotated 120 degrees to unload and load the third holder 33. That is, the rotation angle of the shaft 34 required for loading and unloading the three holders 33 is 240 degrees. When the loading and unloading of the three holders 33 are completed, the head 78 is lowered, and the pins 72 are also lowered accordingly. In the case where the lower surface of the coupling portion 70 and the upper surface of the gear shaft 71 are coupled by, for example, one groove provided on one side and the other side and one protrusion that fits into the groove, the pin 72 (or the gear shaft 71). You can't combine the two unless you rotate them by 120 degrees and rotate them by a total of 360 degrees. Therefore, the original operation requires unnecessary rotation, which takes time. However, in this embodiment, since the pins 74 and the holes 75 are provided by the number corresponding to the number of the holders 33, even if the pins 72 are not rotated further 120 degrees but lowered as they are, the coupling portion 70 and the gear shaft 70 are not moved. It is possible to combine 71. Therefore, the operation other than the original operation becomes unnecessary.

For example, when one set of four holders 33 is used, four holes corresponding to the connecting pins are provided, or two vertically intersecting grooves and two are provided.
A book projection may be provided. Even when the number of holders is further increased, the number of connecting pins and holes may be similarly increased.

〔effect〕

As described above, the present invention attaches the mask to the substrate on which the reflective film is not formed, loads the substrate on the holder integrally with the mask, and integrates the substrate on which the reflective film is formed with the mask. A first position provided with an attaching / detaching means for unloading from the holder; a second position for mounting a material for forming a reflective film; and a third position for forming the reflective film on the substrate. Since the holder is circulated between them, not only a large number of disks can be manufactured in time, but also downsizing and cost reduction can be achieved.

[Brief description of drawings]

FIG. 1 is a plan view of a disk manufacturing apparatus of the present invention, FIG.
3 and 4 are side views of the transfer means, FIG. 5 is a plan view of the base, FIGS. 6 and 7 are plan and front views of the holder, and FIG. 8 is a view of the holder. An exploded plan view, FIGS. 9 and 10 are a side view and a bottom view of the rotation mechanism of the holder. 1 ... Supplying means 2 ... Case 3 ... Ejecting means 4 ... Substrate 11 ... Conveying means 12 ... Guide section 13 ... Bar 14 ... Locking section 15 ... Cone section 16 ... Flange section 21 ... … Loading means 22 …… Chuck 31 …… Reflective film forming system 32 …… Base 33 …… Holder 34 …… Shaft 35, 36, 37 …… Gear 38 …… Pole 39 …… Heater 40 …… Material 41 …… Member 42 …… Projection 43 …… Hole 44 …… Magnet 45 …… Small holes 46,47,49 …… Position 48 …… Reflective film forming means 51 …… Mask 52 …… Grip 53 …… Flange 54… … Groove 55 …… Leaf spring 56 …… Projection part 61 …… Conveying means 62 …… Guide part 63 …… Bar 64 …… Locking part 65 …… Abutting part 66 …… Flange part 67, 68 …… Plunger 70 …… Coupling 71 …… Gear shaft 72 …… Pin 73 …… Spring 74 …… Coupling pin 75 …… Hole 76 …… Coupling pin 77 …… Hole 78 …… Head 79 …… Coupling pin 80 …… Hole 81… …gear

Front page continued (72) Inventor Tsutomu Yaekura 2680 Nishi Hanawa, Tatomi-cho, Nakakoma-gun Yamanashi Pioneer Video Co., Ltd. (72) Inventor Hiroaki Watanabe 2680 Nishi Hanawa, Tatomi-cho, Nakakoma-gun, Yamanashi Pioneer Video Co., Ltd. References JP-A-61-113141 (JP, A)

Claims (1)

[Claims] 1. A mask is attached to a substrate on which a reflective film is not formed, the substrate is loaded into a holder integrally with the mask, and the substrate on which the reflective film is formed is integrally removed from the holder from the holder. The holder is provided between a first position equipped with a loading / unloading means, a second position for mounting a material for forming a reflective film, and a third position for forming the reflective film on the substrate. A method of manufacturing a disc, comprising: