JPH0718827B2 - Thermophysical property measurement method - Google Patents
Thermophysical property measurement methodInfo
- Publication number
- JPH0718827B2 JPH0718827B2 JP2190020A JP19002090A JPH0718827B2 JP H0718827 B2 JPH0718827 B2 JP H0718827B2 JP 2190020 A JP2190020 A JP 2190020A JP 19002090 A JP19002090 A JP 19002090A JP H0718827 B2 JPH0718827 B2 JP H0718827B2
- Authority
- JP
- Japan
- Prior art keywords
- distribution
- sample
- macroscopic
- temperature rise
- heat capacity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000691 measurement method Methods 0.000 title description 8
- 238000009826 distribution Methods 0.000 claims description 93
- 239000000463 material Substances 0.000 claims description 72
- 238000000034 method Methods 0.000 claims description 34
- 230000001052 transient effect Effects 0.000 claims description 33
- 238000005259 measurement Methods 0.000 claims description 23
- 230000000704 physical effect Effects 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 11
- 238000009792 diffusion process Methods 0.000 claims 1
- 230000005855 radiation Effects 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000009529 body temperature measurement Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000000113 differential scanning calorimetry Methods 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Description
【発明の詳細な説明】 [産業上の利用分野] 本発明は積層面の垂直方向に沿って組成及び物性の変化
する傾斜機能材料、層状材料等の巨視的不均質材料の熱
拡散率、比熱、熱伝導率等の熱物性値の分布の測定に係
るものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to the thermal diffusivity and specific heat of a macroscopic heterogeneous material such as a functionally graded material or a layered material whose composition and physical properties change along the vertical direction of the laminated surface. The present invention relates to measurement of distribution of thermophysical property values such as thermal conductivity.
[従来の技術と問題点] 通常の均一で緻密な固体材料の熱物性値の測定方法とし
ては、熱拡散率に対してはレーザフラッシュ法、比熱に
対しては断熱法、示差走査熱量法、投下法、熱伝導率に
対しては定常法が一般的に用いられており、測定技術は
確立されているとみなすことができる。(例えば、マグ
リッチ、セザーリヤン、ベレッキー編、「熱物性計測法
概論、第1巻、測定技術のレビュー」(1984年)プレー
ナムプレス、ニューヨーク;Maglic,Cezairliyan,Pelets
key編「Compendium of Thermophysical Pproperty Meas
urement Methods,Volume 1,Survey of Measurement Tec
hniques」、(1984年)、Plenum Press,New York)とこ
ろが近年、制御された組成の不均一を巨視的に導入した
傾斜機能材料や多層材料等の巨視的不均質材料の開発が
進んでおり、このような材料に対しては通常の均一で緻
密な材料に用いられている上記の測定法はそのままでは
適応できない。(例えば、荒木信幸、「熱伝導率測定法
の進展と測定方法の選び方」、日本機械学会誌、vol.9
0、no.822、pp.79−84、1987年) また、このような巨視的不均質材料は高温での使用を想
定することが多く、高温に至るまでの熱物性値が必要と
されている。通常の均一で緻密な固体材料を1000℃以上
の高温において測定する場合は、まずレーザフラッシュ
法により熱拡散率を測定し、投下法等により求めた比熱
の値及び試料の密度から熱伝導率を算出することが一般
的である。ところが傾斜機能材料のように巨視的に不均
質な材料においては、熱拡散率及び比熱は平均値として
求まるため、均質材料の場合のような簡単な式により熱
伝導率を算出することができない。即ち巨視的不均質材
料に対しては試料全体の熱拡散率の平均値や試料全体の
熱容量ではなく、試料内部の位置に依存して変化する熱
拡散率及び比熱の分布を測定することが必要となる。[Prior Art and Problems] The usual thermophysical property values of a solid material are measured by a laser flash method for thermal diffusivity, an adiabatic method for specific heat, a differential scanning calorimetric method, The steady-state method is generally used for the dropping method and the thermal conductivity, and it can be considered that the measurement technique is established. (For example, Magrich, Cesaryan, Berecky, "Introduction to Thermophysical Properties, Volume 1, Review of Measurement Techniques" (1984) Planham Press, New York; Maglic, Cezairliyan, Pelets.
key `` Compendium of Thermophysical Pproperty Meas
urement Methods, Volume 1, Survey of Measurement Tec
hniques ”(1984), Plenum Press, New York) However, in recent years, development of macroscopic inhomogeneous materials such as functionally graded materials and multi-layer materials that macroscopically introduce controlled compositional inhomogeneity, For such materials, the above-mentioned measuring methods used for ordinary uniform and dense materials cannot be applied as they are. (For example, Nobuyuki Araki, “Advancement of thermal conductivity measurement methods and how to select measurement methods”, Journal of Japan Society of Mechanical Engineers, vol.9.
(0, no.822, pp.79-84, 1987) In addition, such macroscopic heterogeneous materials are often assumed to be used at high temperatures, and thermophysical property values up to high temperatures are required. There is. When measuring an ordinary uniform and dense solid material at a high temperature of 1000 ° C or higher, first measure the thermal diffusivity by the laser flash method, and then determine the thermal conductivity from the specific heat value obtained by the dropping method and the density of the sample. It is common to calculate. However, in a material that is macroscopically inhomogeneous, such as a functionally gradient material, the thermal diffusivity and the specific heat are obtained as average values, so the thermal conductivity cannot be calculated by a simple formula as in the case of a homogeneous material. That is, for macroscopic inhomogeneous materials, it is necessary to measure the distribution of thermal diffusivity and specific heat that changes depending on the position inside the sample, not the average value of the thermal diffusivity of the entire sample or the heat capacity of the entire sample. Becomes
通常のレーザフラッシュ法においては、パルスレーザビ
ームの空間エネルギー密度の分布は不均一であるため試
料内部では必ずしも一次元熱流状態が実現されておら
ず、また試料裏面中心部1カ所のみの過渡的温度上昇を
測定しているため、熱拡散率、比熱の分布の測定には適
応できない。従って、現状では1000℃以上の高温で巨視
的不均質材料の熱拡散率、比熱、熱伝導率等の熱的特性
の分布を測定する方法は存在せず、傾斜機能材料や多層
材料等の巨視的不均質材料の熱物性評価を行ううえで緊
急の課題となっている。In the ordinary laser flash method, the spatial energy density distribution of the pulsed laser beam is non-uniform, so a one-dimensional heat flow state is not always realized inside the sample, and the transient temperature of only one central part on the back surface of the sample Since the rise is measured, it cannot be applied to the measurement of thermal diffusivity and specific heat distribution. Therefore, at present, there is no method to measure the distribution of thermal properties such as thermal diffusivity, specific heat, and thermal conductivity of macroscopic heterogeneous materials at high temperatures of 1000 ° C or higher, and macroscopic materials such as functionally graded materials and multilayer materials Has become an urgent issue in evaluating thermophysical properties of heterogeneous materials.
[発明の目的] 本発明は傾斜機能材料、多層材料などの積層面に垂直方
向に沿って組成及び物性の変化する巨視的不均質材料に
対して熱拡散率、比熱、熱伝導率等の熱的特性の材料内
部の分布を位置の関数として測定できる熱物性測定方法
を提供することを目的とする。[Object of the Invention] The present invention relates to a thermal diffusivity, a specific heat, a thermal conductivity, etc. for a macroscopic heterogeneous material whose composition and physical properties change along a direction perpendicular to a laminated surface such as a functionally graded material and a multilayer material. It is an object of the present invention to provide a thermophysical property measuring method capable of measuring the distribution of a physical property inside a material as a function of position.
[問題点を解決するための手段] 本発明は上記欠点を除くために、以下の手段を講じた。
即ち、積層面の垂直方向に組成及び物性の変化する巨視
的不均質材料から面内方向に不均一性が表れた平板状試
料を切り出し、その表面及び裏面を均一に黒化し、レー
ザビーム均一化光学系を通して空間エネルギー密度を均
一化したパルスレーザビームにより試料表面を均一エネ
ルギー密度でパルス放射加熱した後の、試料裏面の過渡
的温度上昇の面内分布を測定することにより、積層面の
垂直方向に変化する巨視的不均質材料の熱的特性の分布
を求めた。[Means for Solving Problems] The present invention takes the following means in order to eliminate the above-mentioned drawbacks.
That is, a flat plate sample showing inhomogeneity in the in-plane direction is cut out from a macroscopic inhomogeneous material whose composition and physical properties change in the direction perpendicular to the laminated surface, and the front and back surfaces thereof are uniformly blackened to make the laser beam uniform. By measuring the in-plane distribution of the transient temperature rise on the back surface of the sample after pulsed radiant heating of the sample surface with a uniform energy density by a pulsed laser beam with a uniform spatial energy density through an optical system, The distribution of thermal properties of macroscopic inhomogeneous materials that change with time was obtained.
熱的特性の分布として、試料裏面の過渡的温度上昇の面
内分布より求めた過渡的温度上昇速度の面内分布より積
層面の垂直方向に変化する巨視的不均質材料の熱拡散率
の分布を求めた。As the distribution of thermal characteristics, the distribution of the thermal diffusivity of the macroscopic heterogeneous material that changes in the vertical direction of the laminated surface from the in-plane distribution of the transient temperature rise rate obtained from the in-plane distribution of the transient temperature rise on the back surface of the sample I asked.
熱的特性の分布として、試料裏面の過渡的温度上昇の面
内分布により求めた過渡的温度上昇最大値の面内分布よ
り、積層面の垂直方向に変化する巨視的不均質材料の単
位体積当りの熱容量の相対値の分布を求めた。As the distribution of thermal characteristics, the in-plane distribution of the transient temperature rise maximum value obtained from the in-plane distribution of the transient temperature rise on the back surface of the sample is used to determine the per unit volume of the macroscopic heterogeneous material that changes in the vertical direction of the laminated surface. The distribution of the relative value of the heat capacity of was calculated.
熱的特性の分布として、予め測定した平板状試料全体の
熱容量を単位体積当りの熱容量の相対値の分布に従って
比例配分することにより単位体積当りの熱容量の絶対値
の分布を求めた。As the distribution of the thermal characteristics, the distribution of the absolute value of the heat capacity per unit volume was obtained by proportionally distributing the heat capacity of the whole flat sample measured in advance according to the distribution of the relative value of the heat capacity per unit volume.
熱的特性の分布として、単位体積当りの熱容量の絶対値
の分布を一般的方法により別途測定した密度の分布によ
り、試料内部の各位置毎に除することによって得られる
商として積層面の垂直方向に変化する巨視的不均質材料
の比熱の分布を求めた。As the distribution of the thermal characteristics, the distribution of the absolute value of the heat capacity per unit volume is separately measured by a general method, and the distribution of the density is divided by each position inside the sample. The distribution of the specific heat of the macroscopic inhomogeneous material which changes in the above-mentioned manner was obtained.
熱的特性の分布として、熱拡散率の分布及び単位体積当
りの熱容量の絶対値の分布の各位置における積として、
積層面の垂直方向に変化する巨視的不均質材料の熱伝導
率の分布を求めた。As the distribution of the thermal characteristics, as the product at each position of the distribution of the thermal diffusivity and the distribution of the absolute value of the heat capacity per unit volume,
The distribution of thermal conductivity of macroscopic inhomogeneous materials changing in the direction perpendicular to the laminated plane was obtained.
巨視的不均質材料の厚さが小さく積層面に垂直に切り出
した試料では測定に十分な大きさが得られない場合、積
層面に対して傾きを持つ平面に沿って平板状試料を切り
出した。When the thickness of the macroscopic inhomogeneous material was small and the sample cut perpendicular to the stacking plane was not large enough for measurement, a flat plate sample was cut out along a plane having an inclination with respect to the stacking plane.
[作用] 上記の手段においては、面に沿って組成と物性が変化す
る平板状試料に対して、その表面と裏面を均一に黒化す
ることにより、レーザビームに対する試料表面の吸収率
が一様となり均一なパルス放射加熱が可能となる。また
放射測温波長における試料裏面の放射率が一様となるた
め正確な相対温度分布測定が可能となる。[Operation] In the above means, the flat surface sample whose composition and physical properties change along the surface is uniformly blackened on its front and back surfaces, so that the absorptance of the sample surface with respect to the laser beam is uniform. As a result, uniform pulsed radiant heating becomes possible. Further, since the emissivity of the back surface of the sample becomes uniform at the radiation temperature measurement wavelength, the relative temperature distribution can be accurately measured.
このようにして準備した試料の表面をレーザビーム均一
化光学系を通して空間エネルギー密度の分布を均一化し
たパルスレーザビームを用いて照射することにより、試
料内部での一次元熱流分布が達成され、さらにパルス加
熱後の試料裏面温度分布の過渡的変化を高速熱画像装置
により測定することにより、試料面に沿った各位置にお
ける熱拡散率の絶対値及び単位体積当りの熱容量の相対
値の分布の測定が可能となる。By irradiating the surface of the sample prepared in this way with a pulsed laser beam having a uniform spatial energy density distribution through a laser beam homogenizing optical system, a one-dimensional heat flow distribution inside the sample is achieved. By measuring the transient changes in the temperature distribution on the back surface of the sample after pulse heating with a high-speed thermal imager, the distribution of the absolute value of the thermal diffusivity and the relative value of the heat capacity per unit volume at each position along the sample surface was measured. Is possible.
試料全体の熱容量は断熱法、示差走査熱量法、投下法等
のよく知られた方法により測定可能であり、その結果を
以上の方法で得られた単位体積当りの熱容量の相対値の
分布で比例配分することにより、単位体積当りの熱容量
の絶対値の分布が求められる。The heat capacity of the entire sample can be measured by well-known methods such as the adiabatic method, differential scanning calorimetry method, and dropping method, and the result is proportional to the distribution of the relative value of the heat capacity per unit volume obtained by the above method. By allocating, the distribution of the absolute value of the heat capacity per unit volume can be obtained.
さらに試料の各部分の密度をピクノメータ法、密度天秤
法などの標準的方法により測定することにより、単位体
積当りの熱容量の絶対値の分布から比熱の絶対値の分布
が求められる。Further, by measuring the density of each part of the sample by a standard method such as a pycnometer method or a density balance method, the distribution of the absolute value of the specific heat can be obtained from the distribution of the absolute value of the heat capacity per unit volume.
以上のようにして得られた試料内の各位置における熱拡
散率の値と単位体積当りの熱容量の絶対値の積として試
料内の熱伝導率の分布が求まる。The distribution of the thermal conductivity in the sample is obtained as the product of the value of the thermal diffusivity at each position in the sample obtained as described above and the absolute value of the heat capacity per unit volume.
なお、材料の厚さが小さく、積層面に垂直に切り出すと
十分な幅の平板状試料が得られない場合、板状材料の面
方向に対して5°〜20°程傾いた面に沿って厚さ0.2mm
〜2mm程度の厚さの平板状に切り出すことにより測定が
可能となる。In addition, when the thickness of the material is small and a flat plate sample with a sufficient width cannot be obtained by cutting out perpendicularly to the laminated surface, along a surface inclined by about 5 ° to 20 ° with respect to the plane direction of the plate material. 0.2 mm thickness
Measurement is possible by cutting into a flat plate with a thickness of about 2 mm.
本願発明においてはレーザビーム均一化光学系の使用に
より試料表面の均一加熱が実現されるとともに、試料裏
面の局所的な過渡温度上昇の分布が観測されている。空
間エネルギー密度が不均一なマルチモード発振のレーザ
ビームにより試料表面を加熱し、試料裏面の平均的な過
渡温度上昇を1個所だけ測定する通常のレーザフラッシ
ュ法とは以上の点で相違している。In the present invention, uniform heating of the sample surface is realized by using the laser beam homogenizing optical system, and a local distribution of transient temperature rise on the back surface of the sample is observed. It differs from the ordinary laser flash method in which the sample surface is heated by a multimode oscillation laser beam with non-uniform spatial energy density and the average transient temperature rise of the sample back surface is measured at only one location. .
[発明の実施例] 以下では、本発明の実施例を図面によって説明する。第
1図は本発明による熱物性測定の原理を表す図である。
空間的にエネルギー密度が均一なパルス放射加熱1によ
り面方向に沿って組成及び物性が変化するように平板状
に切り出した巨視的不均質材料試料2の表面を瞬間的に
一様に加熱する。その際試料表面の放射加熱光に対する
吸収率と試料裏面の放射測温時の放射率を一定に保つた
め、試料表面と裏面を一様に黒化しておく。組成・物性
の変化の面に沿った特性長さに対して試料が十分に薄け
れば、試料の各部分において熱は試料表面から裏面に向
かって垂直に一次元的に流れると見なすことができる。
このような状態で高速の熱画像装置又は一次元走査放射
温度計3を用いて組成及び物性の変化する方向に沿って
巨視的不均質材料試料裏面の一次元温度分布の変化を測
定する。その結果は図の右側に示される試料裏面の各位
置における過渡的温度上昇4として整理され、巨視的不
均質材料の組成、物性の変化する方向に沿った一次元の
立ち上がり時間の分布5と最大温度上昇の分布6が求ま
る。Embodiments of the Invention Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing the principle of thermophysical property measurement according to the present invention.
The surface of the macroscopic inhomogeneous material sample 2 cut out in a flat plate shape so as to change the composition and physical properties along the surface direction is instantaneously and uniformly heated by the pulsed radiation heating 1 having a spatially uniform energy density. At this time, in order to keep the absorptance of the sample surface for radiant heating light and the emissivity of the back surface of the sample at the time of radiation temperature measurement constant, the front and back surfaces of the sample are uniformly blackened. If the sample is thin enough for the characteristic length along the plane of change in composition / physical properties, it can be considered that heat will flow in one dimension vertically from the sample front surface to the back surface in each part of the sample. .
In such a state, the change in the one-dimensional temperature distribution of the back surface of the macroscopic inhomogeneous material sample is measured along the direction in which the composition and the physical properties change by using the high-speed thermal imager or the one-dimensional scanning radiation thermometer 3. The results are arranged as the transient temperature rise 4 at each position on the back surface of the sample shown on the right side of the figure, and the composition of macroscopic inhomogeneous material and the one-dimensional rise time distribution 5 along the direction of change of physical properties and the maximum The distribution 6 of temperature rise is obtained.
上記の原理に基づく過渡的温度上昇の面内分布の実測例
を第2図に示す。横軸が試料面上の位置、縦軸が過渡温
度上昇、斜めの軸がパルス加熱後の経過時間を表してい
る。第2図の7.は通常の均質材料に対する過渡温度上昇
の面内分布の時間変化、8.は面内方向に組成が変化する
巨視的不均質材料に対する過渡温度上昇の面内分布の時
間変化を示している。第1図に示されるように巨視的不
均質材料試料の組成変化は1次元方向のみであり、過渡
的温度上昇の面内上昇も1次元方向にのみ変化する。FIG. 2 shows an actual measurement example of the in-plane distribution of the transient temperature rise based on the above principle. The horizontal axis represents the position on the sample surface, the vertical axis represents the transient temperature rise, and the diagonal axis represents the elapsed time after pulse heating. In Fig. 2, 7 is the time variation of the in-plane distribution of the transient temperature rise for ordinary homogeneous materials, and 8 is the time variation of the in-plane distribution of the transient temperature rise for macroscopic heterogeneous materials whose composition changes in the in-plane direction. Is shown. As shown in FIG. 1, the composition change of the macroscopic inhomogeneous material sample changes only in the one-dimensional direction, and the in-plane increase of the transient temperature rise also changes only in the one-dimensional direction.
均質材料においては同一の経過時間における過渡温度上
昇は7.に示されるように、位置に依らず常に一定であ
る。一方、巨視的不均質材料においては熱拡散率の大き
い位置では温度の上昇が速く熱拡散率の小さい位置では
遅いため、8.に示されるように過渡温度上昇は位置によ
って異なる。In the homogeneous material, the transient temperature rise at the same elapsed time is always constant regardless of the position, as shown in 7. On the other hand, in the macroscopic inhomogeneous material, the temperature rises rapidly at the position where the thermal diffusivity is large and slow at the position where the thermal diffusivity is small, so that the transient temperature rise varies depending on the position, as shown in Section 8.
第3図は、横軸を時間、縦軸を過渡温度上昇として、第
2図のデータを試料上の位置ごとに表示している。均質
材料に対する結果9.では過渡温度上昇曲線の形が位置に
依らず同一であるのに対して、巨視的不均質材料に対す
る結果10.では過渡温度上昇曲線の上昇速度が位置によ
って異なっている。In FIG. 3, the horizontal axis represents time and the vertical axis represents transient temperature rise, and the data in FIG. 2 are displayed for each position on the sample. In the result 9 for the homogeneous material, the shape of the transient temperature rise curve is the same regardless of the position, whereas in the result 10 for the macroscopic heterogeneous material, the rising speed of the transient temperature rise curve differs depending on the position.
以上の測定は、試料面上の各位置において同時に通常の
レーザフラッシュ法による熱拡散率、熱容量測定を行っ
ていることに対応する。パルス放射加熱後の試料裏面温
度は第2図に示される曲線に従って上昇することが知ら
れている。一定時間経過後は温度上昇は最大値ΔTに達
しその後は一定値を保つ。最大温度上昇の半値ΔT/2に
達するまでの時間をt1/2と表すと熱拡散率は次式で与え
られる。The above measurement corresponds to the simultaneous measurement of the thermal diffusivity and the thermal capacity by the ordinary laser flash method at each position on the sample surface. It is known that the sample back surface temperature after pulsed radiation heating rises according to the curve shown in FIG. The temperature rise reaches the maximum value ΔT after a certain period of time, and then keeps the constant value. The thermal diffusivity is given by the following equation, where t 1/2 is the time required to reach the half-maximum temperature rise ΔT / 2.
ここでlは試料の厚さである。 Here, 1 is the thickness of the sample.
同時に単位体積当りの熱容量は次式で与えられる。At the same time, the heat capacity per unit volume is given by the following equation.
ここでqは試料の単位面積が吸収するパルス放射加熱の
エネルギーである。 Here, q is the energy of pulsed radiation heating absorbed by the unit area of the sample.
ただしこの場合、qとΔTの絶対値を評価することは容
易ではなくCの値も通常相対値となる。However, in this case, it is not easy to evaluate the absolute values of q and ΔT, and the value of C is usually a relative value.
第1図に示した試料裏面の各位置xにおける過渡的温度
上昇4の測定曲線に対して第2図の解析を行うことによ
り、巨視的不均質材料試料に対して組成、物性の変化す
る方向に沿った熱拡散率の絶対値の分布、及び単位体積
当りの熱容量の相対値の分布を求めることができる。試
料全体の熱容量を断熱法、示差走査熱量法、投下法等の
確立された方法により別途測定しておけば、全熱容量を
単位体積当りの熱容量分布の相対値で比例配分すること
により、単位体積当りの熱容量分布の絶対値が求められ
る。第3図に多層材料に対する測定例を示す。位置xに
おける値であるので立ち上がり時間の分布5はt
1/2(x)、最大温度上昇の分布6はΔT(x)、熱拡
散率の分布11はα(x)、単位体積当りの熱容量の分布
12はC(x)と表した。By performing the analysis of FIG. 2 on the measurement curve of the transient temperature rise 4 at each position x on the back surface of the sample shown in FIG. 1, the direction in which the composition and physical properties of the macroscopic heterogeneous material sample change The distribution of the absolute value of the thermal diffusivity along with, and the distribution of the relative value of the heat capacity per unit volume can be obtained. If the heat capacity of the entire sample is separately measured by an established method such as the adiabatic method, differential scanning calorimetry method, or dropping method, the total heat capacity is proportionally distributed by the relative value of the heat capacity distribution per unit volume, The absolute value of the heat capacity distribution per hit is obtained. FIG. 3 shows a measurement example for a multilayer material. Since it is the value at position x, the rise time distribution 5 is t
1/2 (x), maximum temperature rise distribution 6 is ΔT (x), thermal diffusivity distribution 11 is α (x), heat capacity distribution per unit volume
12 was represented as C (x).
熱伝導率の分布13は定義により次式で表される。The distribution 13 of thermal conductivity is expressed by the following equation by definition.
λ(x)=α(x)・C(x) (3) 従って熱拡散率の分布11 α(x)及び単位体積当りの
熱容量の分布12 C(x)が既知であればλ(x)は容
易に求まる。λ (x) = α (x) · C (x) (3) Therefore, if the distribution 11 α (x) of thermal diffusivity and the distribution 12 C (x) of heat capacity per unit volume are known, λ (x) Is easily found.
また、試料各部の密度の分布ρ(x)をピクノメータや
密度天秤等により測定しておけば、C(x)から比熱の
分布c(x)が次式により求まる。If the density distribution ρ (x) of each part of the sample is measured by a pycnometer or a density balance, the specific heat distribution c (x) can be obtained from C (x) by the following equation.
第4図は本方法に基づく測定装置の構成の一例を示して
いる。大出力パルスレーザ14より出射されるレーザビー
ム15は通常はマルチモード発振のため空間的に不均一で
あるので、レーザビーム均一化光学系16を通すことによ
り空間エネルギー分布を均一化する。このようにして均
一化されたレーザビーム1は鏡17により反射され上部の
窓を通して真空槽18内に導かれ、試料ホルダ20中に設置
された巨視的不均質材料試料2に照射される。なお試料
2はヒータ19により室温から2000℃以上までの温度範囲
に加熱され、広い温度範囲での測定が可能となってい
る。試料2裏面の一次元温度分布の変化は下部の窓を通
して熱画像装置又は一次元走査放射温度計3により測定
される。測定結果はレーザかのトリガ信号に同期して高
速多チャンネルデータ記録装置21に読み込まれる。パー
ソナルコンピュータ22に送られた測定結果はフロッピー
ディスクに記録されるとともに解析処理され、試料裏面
の各位置における過渡的温度上昇曲線がCRT上に表示さ
れる。さらに別途測定した試料の全熱容量、及び試料各
部の密度分布をあらかじめ入力しておくことにより、試
料各部の熱拡散率、比熱,熱伝導率等の熱的特性の分布
が算出される。 FIG. 4 shows an example of the configuration of a measuring device based on this method. Since the laser beam 15 emitted from the high-power pulse laser 14 is usually spatially non-uniform due to multimode oscillation, the spatial energy distribution is made uniform by passing through the laser beam homogenizing optical system 16. The laser beam 1 thus homogenized is reflected by the mirror 17, guided through the upper window into the vacuum chamber 18, and irradiated on the macroscopic inhomogeneous material sample 2 installed in the sample holder 20. The sample 2 is heated by the heater 19 in the temperature range from room temperature to 2000 ° C. or higher, and measurement in a wide temperature range is possible. The change in the one-dimensional temperature distribution on the back surface of the sample 2 is measured by the thermal imager or the one-dimensional scanning radiation thermometer 3 through the lower window. The measurement result is read into the high-speed multi-channel data recording device 21 in synchronization with the laser trigger signal. The measurement result sent to the personal computer 22 is recorded on a floppy disk and analyzed, and a transient temperature rise curve at each position on the back surface of the sample is displayed on the CRT. Further, by inputting the total heat capacity of the sample separately measured and the density distribution of each part of the sample in advance, distributions of thermal characteristics such as thermal diffusivity, specific heat and thermal conductivity of each part of the sample are calculated.
なお第7図に示されるように、傾斜機能材料23は厚さが
1〜10mm程度であるため、積槽面24に垂直25に平板状試
料を切り出すと試料の幅が一次元温度分布変化の測定に
必要なだけ十分広くとれない。このような場合には第7
図に示すように積層面24から5°〜20°程度の傾きで厚
さ0.2〜2mm、幅10mm〜20mm程度の平板状試料26を切り出
すことにより測定が可能となる。As shown in FIG. 7, since the functionally graded material 23 has a thickness of about 1 to 10 mm, when a flat sample is cut out perpendicularly to the stacking tank surface 24, the width of the sample changes in one-dimensional temperature distribution. It cannot be wide enough for measurement. In such cases, the seventh
As shown in the figure, the measurement can be performed by cutting out a flat plate-shaped sample 26 having a thickness of 0.2 to 2 mm and a width of 10 mm to 20 mm at an inclination of about 5 ° to 20 ° from the laminated surface 24.
[発明の効果] 以上述べたように、本熱物性測定方法によれば積層面の
垂直方向に沿って組成及び物性の変化する巨視的不均質
材料の熱拡散率、比熱、熱伝導率等の熱物性値の試料内
の位置による分布の測定が可能となる。本発明により従
来の方法では困難であった傾斜機能材料、多層材料等の
巨視的不均質材料の熱物性測定がはじめて可能となる。
さらに本熱物性測定方法は2000℃以上の高温まで容易に
適応可能であるため、特にエネルギー利用の高度化、原
子力平和利用、航空宇宙分野等、高温環境化での新材料
の利用が要請されている分野において巨視的不均質材料
の開発、利用を促進すると思われる。[Effects of the Invention] As described above, according to the present thermophysical property measuring method, the thermal diffusivity, specific heat, thermal conductivity, etc. of a macroscopic heterogeneous material whose composition and physical properties change along the vertical direction of the laminated surface can be obtained. It is possible to measure the distribution of thermophysical property values depending on the position in the sample. According to the present invention, thermophysical property measurement of macroscopic heterogeneous materials such as functionally graded materials and multilayer materials, which has been difficult by conventional methods, becomes possible for the first time.
Furthermore, since this thermophysical property measurement method can be easily applied to temperatures as high as 2000 ° C. or higher, there is a demand for the use of new materials in high-temperature environments, especially in advanced energy utilization, peaceful nuclear energy utilization, aerospace, etc. It is expected to promote the development and use of macroscopic heterogeneous materials in the fields where they are used.
第1図は本発明による熱物性測定の原理を示す図であ
る。第2図は本発明を均質材料及び巨視的不均質材料に
適用した場合の過渡温度上昇の面内分布の時間変化の実
測例である。第3図は本発明を均質材料および巨視的不
均質材料に適用した場合の各位置における過渡温度上昇
曲線の実測例である。第4図は試料裏面上の各位置にお
ける過度的温度上昇の測定曲線から熱拡散率及び単位体
積当たりの熱容量の算出を示すグラフである。第5図は
多層材料に対する測定例とそれを解析して得られる熱拡
散率、単位体積当たりの熱容量、熱伝導率の分布を示す
グラフである。第6図は本発明の実施例を示す測定装置
の構成図である。第7図は薄い巨視的不均質材料を斜め
に切り出すことにより本熱物性測定方法が適用可能な試
料が作成できることを示した斜視図である。 1……均一なパルス放射加熱 2……巨視的不均質材料試料 3……熱画像装置又は一次元走査放射温度計 4……試料裏面の各位置における過度的温度上昇 5……立ち上がり時間の分布 6……最大温度上昇の分布 7……均質材料における過渡温度上昇の面内分布の時間
変化 8……巨視的不均質材料における過渡温度上昇の面内分
布の時間変化 9……均質材料の各位置における過渡温度上昇曲線 10……巨視的不均質材料の各位置における過渡温度曲線 11……熱拡散率の分布 12……単位体積当たりの熱容量の分布 13……熱伝導率の分布 14……大出力パルスレーザ 15……直接レーザビーム 16……レーザビーム均一化光学系 17……鏡 18……真空槽 19……ヒータ 20……試料ホルダ 21……高速多チャンネルデータ記録装置 22……パーソナルコンピュータ 23……傾斜機能材料、多層材料等の巨視的不均質材料 24……積層面に沿った方向 25……組成・物性の変化する方向 26……積層面に対して傾きを持つ平面に沿って、切り出
した平板状試料FIG. 1 is a diagram showing the principle of thermophysical property measurement according to the present invention. FIG. 2 is an example of actual measurement of the temporal change in the in-plane distribution of the transient temperature rise when the present invention is applied to a homogeneous material and a macroscopic inhomogeneous material. FIG. 3 is a measurement example of a transient temperature rise curve at each position when the present invention is applied to a homogeneous material and a macroscopic inhomogeneous material. FIG. 4 is a graph showing calculation of the thermal diffusivity and the heat capacity per unit volume from the measurement curve of the excessive temperature rise at each position on the back surface of the sample. FIG. 5 is a graph showing a measurement example of a multilayer material and a distribution of thermal diffusivity, heat capacity per unit volume, and thermal conductivity obtained by analyzing the measurement. FIG. 6 is a block diagram of a measuring apparatus showing an embodiment of the present invention. FIG. 7 is a perspective view showing that a sample to which the present thermophysical property measuring method can be applied can be prepared by obliquely cutting out a thin macroscopic inhomogeneous material. 1 ... Uniform pulsed radiation heating 2 ... Macroscopic inhomogeneous material sample 3 ... Thermal imager or one-dimensional scanning radiation thermometer 4 ... Excessive temperature rise at each position on the backside of sample 5 ... Rise time distribution 6 …… Distribution of maximum temperature rise 7 …… Time change of in-plane distribution of transient temperature rise in homogeneous material 8 …… Time change of in-plane distribution of transient temperature rise in macroscopic heterogeneous material 9 …… Each homogeneous material Transient temperature rise curve at position 10 …… Transient temperature curve at each position of macroscopic heterogeneous material 11 …… Distribution of thermal diffusivity 12 …… Distribution of heat capacity per unit volume 13 …… Distribution of thermal conductivity 14 …… High-power pulsed laser 15 …… Direct laser beam 16 …… Laser beam homogenization optical system 17 …… Mirror 18 …… Vacuum chamber 19 …… Heater 20 …… Sample holder 21 …… High-speed multi-channel data recorder 22 …… Personal Computer 2 3 ... Macroscopic inhomogeneous materials such as functionally graded materials and multi-layer materials 24 ... Direction along the lamination plane 25 ... Direction in which composition and physical properties change 26 ... A plane that is inclined with respect to the lamination plane , Cut flat sample
Claims (7)
る巨視的不均質材料から面内方向に不均一性が表れた平
板状試料を切り出し、その表面及び裏面を均一に黒化
し、試料表面を均一エネルギー密度でパルス放射加熱し
た後の、試料裏面の過渡的温度上昇の面内分布を測定す
ることにより、積層面の垂直方向に変化する巨視的不均
質材料の熱的特性の分布を求めることを特徴とする熱物
性測定方法。1. A flat plate sample showing inhomogeneity in the in-plane direction is cut out from a macroscopic inhomogeneous material whose composition and physical properties change in the direction perpendicular to the laminated surface, and the front and back surfaces thereof are uniformly blackened to obtain a sample. By measuring the in-plane distribution of the transient temperature rise on the back surface of the sample after pulsed radiant heating of the surface at a uniform energy density, the distribution of the thermal properties of the macroscopic inhomogeneous material that changes in the vertical direction of the laminated surface can be determined. A method for measuring thermophysical properties, characterized by obtaining.
温度上昇の面内分布より求めた過渡的温度上昇速度の面
内分布より積層面の垂直方向に変化する巨視的不均質材
料の熱拡散率の分布を求めることを特徴とする請求項
(1)記載の熱物性測定方法。2. A distribution of thermal characteristics of a macroscopic inhomogeneous material that changes in the vertical direction of the laminated surface from the in-plane distribution of the transient temperature rise rate obtained from the in-plane distribution of the transient temperature rise on the back surface of the sample. The thermophysical property measuring method according to claim 1, wherein a distribution of thermal diffusivity is obtained.
温度上昇の面内分布により求めた過渡的温度上昇最大値
の面内分布より、積層面の垂直方向に変化する巨視的不
均質材料の単位体積当りの熱容量の相対値の分布を求め
ることを特徴とする請求項(1)記載の熱物性測定方
法。3. As a distribution of thermal characteristics, a macroscopic inhomogeneity that changes in the vertical direction of the laminated surface from the in-plane distribution of the maximum value of the transient temperature rise obtained by the in-plane distribution of the transient temperature rise on the back surface of the sample. The method for measuring thermophysical properties according to claim 1, wherein the distribution of the relative value of the heat capacity per unit volume of the material is obtained.
状試料全体の熱容量を請求項(3)で求めた単位体積当
りの熱容量の相対値の分布に従って比例配分することに
より単位体積当りの熱容量の絶対値の分布を求めること
を特徴とする請求項(1)記載の熱物性測定方法。4. As a distribution of thermal characteristics, the heat capacity of the whole flat sample measured in advance is proportionally distributed according to the distribution of the relative value of the heat capacity per unit volume obtained in claim (3), and The method for measuring thermophysical properties according to claim 1, wherein the distribution of the absolute value of the heat capacity is obtained.
めた単位体積当りの熱容量の絶対値の分布を予め測定し
た密度の分布により、試料内部の各位置毎に除すること
によって得られる商として積層面の垂直方向に変化する
巨視的不均質材料の比熱の分布を求めることを特徴とす
る請求項(1)記載の熱物性測定方法。5. As the distribution of thermal characteristics, the distribution of the absolute value of the heat capacity per unit volume obtained in claim (4) is divided by the density distribution measured in advance at each position inside the sample. The thermophysical property measuring method according to claim 1, wherein a distribution of the specific heat of the macroscopic inhomogeneous material that changes in the direction perpendicular to the laminated surface is obtained as the obtained quotient.
めた熱拡散面の分布、及び請求項(4)で求めた単位体
積当りの熱容量の絶対値の分布の各位置における積とし
て、積層面の垂直方向に変化する巨視的不均質材料の熱
伝導率の分布を求めることを特徴とする請求項(1)に
記載の熱物性測定方法。6. The product at each position of the distribution of the thermal diffusion surface obtained in claim (2) and the distribution of the absolute value of the heat capacity per unit volume obtained in claim (4) as the distribution of thermal characteristics. The method for measuring thermophysical properties according to claim 1, wherein a distribution of the thermal conductivity of the macroscopic inhomogeneous material that changes in the direction perpendicular to the laminated surface is obtained as the above.
垂直に切り出した試料では測定に十分な大きさが得られ
ない場合、積層面に対して傾きを持つ平面に沿って平板
状試料を切り出すことを特徴とする請求項(1)記載の
熱物性測定方法。7. When the thickness of the macroscopic inhomogeneous material is small and a sample cut out perpendicularly to the laminated surface cannot obtain a sufficient size for measurement, a flat plate shape is formed along a plane inclined with respect to the laminated surface. The thermophysical property measuring method according to claim 1, wherein a sample is cut out.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2190020A JPH0718827B2 (en) | 1990-07-18 | 1990-07-18 | Thermophysical property measurement method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2190020A JPH0718827B2 (en) | 1990-07-18 | 1990-07-18 | Thermophysical property measurement method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0476446A JPH0476446A (en) | 1992-03-11 |
| JPH0718827B2 true JPH0718827B2 (en) | 1995-03-06 |
Family
ID=16251037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2190020A Expired - Lifetime JPH0718827B2 (en) | 1990-07-18 | 1990-07-18 | Thermophysical property measurement method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0718827B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025135421A1 (en) * | 2023-12-22 | 2025-06-26 | 오씨아이 주식회사 | Method for measuring thermal diffusivity of silicon nitride heat dissipation substrate specimen and silicon nitride heat dissipation substrate specimen measured using same |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016042037A (en) * | 2014-08-14 | 2016-03-31 | 富士通株式会社 | Evaluation method and device, and program |
| JP6840514B2 (en) * | 2016-11-14 | 2021-03-10 | 株式会社超高温材料研究センター | Thermal diffusivity analysis method |
| WO2020047054A1 (en) | 2018-08-28 | 2020-03-05 | University Of Virginia Patent Foundation | Steady-state thermo-reflectance method & system to measure thermal conductivity |
-
1990
- 1990-07-18 JP JP2190020A patent/JPH0718827B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025135421A1 (en) * | 2023-12-22 | 2025-06-26 | 오씨아이 주식회사 | Method for measuring thermal diffusivity of silicon nitride heat dissipation substrate specimen and silicon nitride heat dissipation substrate specimen measured using same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0476446A (en) | 1992-03-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7976215B2 (en) | Apparatus and method for measuring thermal diffusivity using the flash method | |
| Vozár et al. | Uncertainty of thermal diffusivity measurements using the laser flash method | |
| US11022574B2 (en) | Method and apparatus for rapid measurement of thermal conductivity of a thin film material | |
| US9772298B2 (en) | Method and apparatus for determining thermal conductivity and thermal diffusivity of a heterogeneous material | |
| Goncharov et al. | X-ray diffraction in the pulsed laser heated diamond anvil cell | |
| JP2015225034A (en) | Measurement method of thermal diffusivity of translucent material | |
| Brown | Heat-flux transitions at low Rayleigh number | |
| Smith et al. | A calorimeter for high-power CW lasers | |
| CN107843616A (en) | The apparatus and method of the thermal conductivity of quick measurement thin-film material | |
| JPH0718827B2 (en) | Thermophysical property measurement method | |
| Manca et al. | Experimental investigation on natural convection in horizontal channels with the upper wall at uniform heat flux | |
| Osakabe et al. | Development of fast response calorimeter for neutral beam shine-through measurement on CHS | |
| JPH09222404A (en) | Method and device for measuring specific heat capacity | |
| JP5490628B2 (en) | Measurement method of thermal constant using light heating method | |
| JP4100841B2 (en) | Contact thermal resistance measurement method | |
| Golovin et al. | Determination of the thermal diffusivity of materials by a nondestructive express method with the use of step-by-step local heating of the surface and high-speed thermography | |
| Hemberger et al. | Determination of the local thermal diffusivity of inhomogeneous samples by a modified laser-flash method | |
| Sheindlin et al. | Experimental determination of the thermal conductivity of liquid UO2 near the melting point | |
| JP2002116167A (en) | Thermal conductivity measuring device and measuring method | |
| Crespy et al. | Study of laser megajoule calorimeter's thermal behaviour for energy measurement uncertainty optimisation | |
| JP4101012B2 (en) | Thermal property evaluation method and apparatus for laminated material having thermal resistance | |
| JPH03237346A (en) | Method for measuring specific heat | |
| Perpiñà et al. | Thermal calibration procedure for internal infrared laser deflection apparatus | |
| BABA et al. | A social system for production and utilization of thermophysical quantity data—Measurement technology, metrological standard, standardization of measurement method, and database for thermal diffusivity by laser flash method— | |
| Quoc et al. | Phase lock-in thermography for metal walls characterization |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |