JPH0749039B2 - Method for manufacturing ultrasonic transducer - Google Patents

Description

TECHNICAL FIELD The present invention relates to a method for manufacturing an ultrasonic transducer.

2. Description of the Related Art A conventional method of manufacturing an ultrasonic transducer will be described with reference to the drawings.

FIGS. 4 (a) and 4 (b) and FIGS. 5 (a) and 5 (b) are respectively a front view and a side view showing a conventional method for manufacturing an ultrasonic transducer. 4 (a) and 5 (a)
As shown in FIG. 7, on the flat receiving surface 41a of the receiving jig 41, a plurality of thin plate members 44 made of piezoelectric ceramics for forming an ultrasonic transducer are laminated with an adhesive between the surfaces, and the topmost layer is formed. The elastic body 43 is placed on the thin plate member 43. Then, the pressing jig 42 is lowered with respect to the receiving jig 41, and the flat pressing surface 42a causes the thin plate member 44 to be pressed from above the elastic body 43 as shown in FIGS. 4 (b) and 5 (b). Then, each thin plate material 44 is cured with an adhesive, whereby an ultrasonic transducer can be manufactured.

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention However, in the prior art as described above, the pressure distribution generated in the adhesive layer is as shown in FIGS. 6 (a) and 6 (b). Since the pressure gradient in the central part is gentle, adhesive and air bubbles tend to remain in the center of the adhesive surface. Further, it is difficult to form the thin plate material 44 so as not to cause unevenness in plate thickness, but if there is unevenness in plate thickness like this,
Since the pressing surface 42a of the pressing jig 42 has a flat shape, an unbalanced load occurs and there is a problem that a uniform adhesive layer cannot be obtained.

The present invention is to solve the problems of the prior art as described above, it is possible to satisfactorily discharge the adhesive and air bubbles in each layer of the adhesion surface, also, the uneven load due to uneven plate thickness of the thin plate material It is an object of the present invention to provide a method for manufacturing an ultrasonic transducer, which can prevent the formation of a uniform adhesive layer and obtain stable element characteristics.

Means for Solving the Problems Technical means of the present invention for achieving the above object are
On the flat receiving surface of the receiving jig, laminate a plurality of thin plate materials for forming an ultrasonic transducer with adhesive between the surfaces, and move the pressing jig forward to the receiving jig side. The thin plate member is pressed and adhered by a curved pressing surface that gradually protrudes forward from the periphery to the central portion.

It is preferable that at least the pressing surface portion of the pressing jig is formed of an elastic body.

Further, the thin plate material is pressed by the pressing surface of the pressing jig through an elastic body.

Action The action of the above technical means is as follows.

The pressure distribution of the adhesive surface is directed from the center to the periphery by pressing the thin plate material directly with the curved pressure surface that gradually protrudes forward from the periphery to the center of the pressure jig or through the elastic body. Therefore, it is possible to reduce the uneven load due to uneven thickness of the thin plate material.

Embodiment Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings.

1 (a) and 1 (b) and FIGS. 2 (a) and 2 (b) are a front view and a side view, respectively, showing a method for manufacturing an ultrasonic transducer according to an embodiment of the present invention.

In FIGS. 1 (a) and (b) and FIGS. 2 (a) and (b), 1 is a receiving jig 1, which is provided at a fixed position and has a receiving surface 1a formed in a flat shape. . A pressing jig 2 has a curved surface shape in which the pressing surface 2a gradually protrudes forward from the periphery to the central portion, and the pressing surface 2a is received by the supporting means (not shown). It is supported so as to be vertically slidable opposite to 1a. Reference numeral 3 denotes an elastic body for cushioning, which is made of silicon rubber or the like. Four
Is a plurality of thin plate materials made of piezoelectric ceramics for forming an ultrasonic transducer, and in a state of being laminated on the receiving surface 1a of the receiving jig 1, the horizontal movement is restricted by a restricting means (not shown). It

In order to manufacture an ultrasonic transducer with the manufacturing apparatus as described above, first, as shown in FIGS. 1 (a) and 2 (a), a plurality of receiving jigs 1 are placed on the flat receiving surface 1a. An adhesive is applied to each surface of the thin plate members 4 to be laminated, and the thin plate members 4 are constrained to prevent positional displacement. Next, the elastic body 3 is placed on the laminated thin plate members 4. After that, FIG. 1 (b) and the second
As shown in FIG. 2B, the pressing jig 2 is moved forward, and the laminated thin plate member 4 is pressed from above the elastic body 3 by the curved pressing surface 2a, and the adhesive is solidified while maintaining this state. , An ultrasonic transducer can be manufactured.

At this time, the pressure distribution on the adhesive surface decreases from the center to the periphery as is clear from the isobaric diagrams and pressure gradient diagrams shown in FIGS. 3 (a) and 3 (b). It can be satisfactorily discharged, and an unbalanced load due to uneven plate thickness of the thin plate member 4 can be reduced to obtain a uniform adhesive layer. Therefore, stable element characteristics can be realized.

Alternatively, the laminated thin plate members 4 may be directly pressed by the pressing surface 2a of the pressing jig 2. At this time, the pressing jig 2
At least the pressing surface 2a may be formed of an elastic body.

EFFECTS OF THE INVENTION As described above, according to the present invention, a thin plate material for forming an ultrasonic transducer having an adhesive between the surfaces is laminated on the flat receiving surface of the receiving jig, and the pressure is applied. The jig is advanced to the receiving jig side, and the thin plate material is directly or via an elastic body pressure-bonded by the curved pressure surface that gradually projects forward from the periphery to the central part. Therefore, the pressure distribution generated in each layer of the laminated thin plate materials can be lowered from the center of the bonding surface to the periphery, and the adhesive and air bubbles in the layer can be discharged to the outside of the layer, and
A uniform adhesive layer can be obtained by reducing an unbalanced load due to uneven plate thickness of the thin plate material. Therefore, stable element characteristics can be realized.

[Brief description of drawings]

FIGS. 1 (a), (b) and FIGS. 2 (a), (b) are front and side views showing a method of manufacturing an ultrasonic transducer according to an embodiment of the present invention, and FIG. 3 (a). , (B) show the pressure distribution generated in the adhesive layer during the production according to the above-mentioned embodiment, FIG. 3 (a) is an isobaric diagram, FIG. 3 (b) is a pressure gradient diagram, and FIG. a), (b) and FIG. 5 (a),
FIG. 6B is a front view and a side view showing a method for manufacturing an ultrasonic transducer according to a conventional example, and FIGS. 6A and 6B.
Shows a pressure distribution generated in the adhesive layer during the production according to the above-mentioned example, FIG. 6 (a) is an isobaric diagram, and FIG. 6 (b) is a pressure gradient diagram. 1 ... Receiving jig, 1a ... Receiving surface, 2 ... Pressurizing jig, 2a ...
... Pressure surface, 3 ... elastic body, 4 ... thin plate material.

Claims (3)

[Claims] 1. A plurality of thin plate materials for forming an ultrasonic transducer having an adhesive between the surfaces are laminated on a flat receiving surface of the receiving jig, and the pressing jig is used to cure the thin plate. A method for manufacturing an ultrasonic transducer, comprising advancing to the tool side and pressurizing and adhering the above-mentioned thin plate material with a curved pressing surface that gradually protrudes forward from the periphery to the central portion. 2. The method for manufacturing an ultrasonic transducer according to claim 1, wherein at least the pressing surface portion of the pressing jig is formed of an elastic body. 3. The method for manufacturing an ultrasonic transducer according to claim 1, wherein the thin plate material is pressed by a pressing surface of a pressing jig through an elastic body.