JPH0758255B2 - Adsorption amount measuring device - Google Patents
Adsorption amount measuring deviceInfo
- Publication number
- JPH0758255B2 JPH0758255B2 JP1128564A JP12856489A JPH0758255B2 JP H0758255 B2 JPH0758255 B2 JP H0758255B2 JP 1128564 A JP1128564 A JP 1128564A JP 12856489 A JP12856489 A JP 12856489A JP H0758255 B2 JPH0758255 B2 JP H0758255B2
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- Prior art keywords
- container
- sample
- gas
- measurement
- adsorption amount
- Prior art date
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- Sampling And Sample Adjustment (AREA)
Description
【発明の詳細な説明】 〈産業上の利用分野〉 本発明は試料によるガスの吸着量を測定する装置のう
ち、いわゆる定容法に基づく吸着量測定装置に関し、例
えばガス吸着法を利用した粉体や多孔体の表面積や細孔
分布の高精度測定に利用することのできる装置に関す
る。DETAILED DESCRIPTION OF THE INVENTION <Industrial field of application> The present invention relates to an adsorption amount measuring device based on a so-called constant volume method among devices for measuring an adsorption amount of a gas by a sample, for example, a powder using the gas adsorption method. The present invention relates to a device that can be used for highly accurate measurement of the surface area and pore distribution of a body or a porous body.
〈従来の技術〉 試料の表面にガス分子を物理吸着させ、その吸着量を計
測することにより、試料の表面積や細孔分布を求めるこ
とができるが、その吸着量の測定方法としては、一般
に、流動法と定容法とが知られている。<Prior Art> By physically adsorbing gas molecules on the surface of a sample and measuring the adsorption amount, the surface area and pore distribution of the sample can be obtained. The flow method and the constant volume method are known.
流動法は、基本的には試料を収容した容器内に吸着ガス
と非吸着ガスとの混合ガスを流し、容器の上下流におけ
るガスの混合の変化から試料によるガスの吸着量を求め
る方法であって、短時間で吸脱着等温線の一部の測定を
簡単に行うことを目的とする測定方法で、粉体や多孔体
の品質管理の分野等において利用するのに適している。The flow method is basically a method in which a mixed gas of an adsorbed gas and a non-adsorbed gas is caused to flow in a container containing a sample, and the amount of gas adsorbed by the sample is obtained from the change in gas mixing in the upstream and downstream of the container. Thus, it is a measuring method for the purpose of simply measuring a part of the adsorption / desorption isotherm in a short time, and is suitable for use in the field of quality control of powders and porous bodies.
一方、定容法は、既知容積のマニホールドと試料容器と
の間を開閉弁で仕切り、その開閉弁を閉じた状態でマニ
ホールド内に所定圧力のもとに吸着ガスを導入した後、
開閉弁を開いて試料容器内に吸着ガスを導入して試料に
吸着させ、吸着平衡に達した時点での圧力を測定するこ
とによりガスの吸着量を求める動作を、マニホールドへ
の吸着ガスの導入圧力を変化させつつ繰り返すことによ
り、試料の吸着等温線を求めることを基本としており、
主として長時間にわたる吸脱着等温線の測定を精度良く
行うことを目的とする測定方法で、研究・開発の分野等
において試料の表面積や細孔分布の厳密に測定したい場
合等において利用される。On the other hand, the constant volume method is a partition between the known volume of the manifold and the sample container is separated by an on-off valve, and after the on-off valve is closed, adsorbed gas is introduced into the manifold under a predetermined pressure,
Open the on-off valve to introduce the adsorbed gas into the sample container, adsorb it to the sample, and measure the pressure at the time when adsorption equilibrium is reached. Basically, the adsorption isotherm of the sample is obtained by repeating the process while changing the pressure.
It is a measurement method mainly intended to accurately measure adsorption / desorption isotherms over a long period of time, and is used in the field of research / development, etc. when strict measurement of the surface area and pore distribution of a sample is desired.
ところで、このような吸着量測定に際しては、測定すべ
き試料の前処理として、試料表面に付着している不純物
を除去するための脱ガス処理が必要となる。By the way, when measuring such an adsorption amount, a degassing process for removing impurities adhering to the sample surface is required as a pretreatment of the sample to be measured.
そのため、流動法に基づく吸着量測定装置にあっては、
実際の測定に先立ち、試料容器を混合ガス流動用の管路
に装着した状態で加熱しつつ、ヘリウムガス等の非吸着
ガスをその内部に流すことにより、容器内の試料の脱ガ
スを行っている。Therefore, in the adsorption amount measuring device based on the flow method,
Prior to the actual measurement, the sample in the container is degassed by heating the sample container while it is attached to the conduit for flowing the mixed gas and flowing a non-adsorbed gas such as helium gas into the sample container. There is.
一方、定容法に基づく吸着量測定装置にあっては、従
来、実際に吸着量を測定するための測定ステージの他
に、これとは別個の配管系からなる脱ガスステージが設
けられる。On the other hand, in the adsorption amount measuring device based on the constant volume method, conventionally, in addition to the measurement stage for actually measuring the adsorption amount, a degassing stage consisting of a pipe system separate from this is provided.
第3図に従来の脱ガスステージの構成例を示す。この例
において、試料は試料セル30a,30bに収容された状態で
脱ガスステージのセル装着部31a,31bに装着される。こ
の装着状態において試料はヒータ32a,32bによって加熱
されるとともに、試料セル30a,30b内が真空ポンプ33に
よって真空排気され、試料表面の不純物が除去される。FIG. 3 shows a configuration example of a conventional degassing stage. In this example, the sample is mounted in the cell mounting parts 31a and 31b of the degassing stage while being housed in the sample cells 30a and 30b. In this mounted state, the sample is heated by the heaters 32a and 32b, and the insides of the sample cells 30a and 30b are evacuated by the vacuum pump 33 to remove impurities on the sample surface.
このような前処理操作は、脱ガス制御用コンピータ34か
らの制御信号に基づき、バルブドライバ35を介して各バ
ルブ36a,36b〜39を制御することによって自動的に行わ
れる。Such pretreatment operation is automatically performed by controlling the valves 36a, 36b to 39 via the valve driver 35 based on the control signal from the degassing control computer 34.
なお、図において40は真空度監視用の真空計で、41はA
−D変換器、42はヒータの温度調節器である。In the figure, 40 is a vacuum gauge for monitoring the degree of vacuum, and 41 is A
The -D converter, 42 is a temperature controller for the heater.
このような前処理が完了すると、試料セル30a,30b内に
はヘリウムなどの不活性ガスを封入し、試料が外気に触
れないようにして測定ステージに移送する。When such pretreatment is completed, an inert gas such as helium is filled in the sample cells 30a and 30b, and the sample is transferred to the measurement stage so as not to come into contact with the outside air.
測定ステージでは、その試料セルを液体窒素などによっ
て冷却して物理吸着を支配的にした状態で、窒素等の吸
着ガスを試料セル内に導入し、試料によるガス吸着量を
測定するわけである。In the measurement stage, an adsorption gas such as nitrogen is introduced into the sample cell while the sample cell is cooled by liquid nitrogen or the like to make physical adsorption dominant, and the amount of gas adsorbed by the sample is measured.
〈発明が解決しようとする課題〉 以上のように、定容法に基づく従来の吸着量測定装置で
は、測定ステージとは全く別個の配管系と制御装置等に
よって構成された脱ガスステージを設けており、脱ガス
処理完了後に、試料を収容したセルを測定ステージにま
で持っていって装着し直す必要があった。そのため、脱
ガス処理あるいは測定動作をそれぞれ自動化しても、脱
ガス処理から測定の終了までの全工程を自動化すること
は実質的に不可能であった。<Problems to be Solved by the Invention> As described above, in the conventional adsorption amount measuring device based on the constant volume method, a degassing stage constituted by a pipe system and a control device, etc., which is completely different from the measuring stage, is provided. However, after the degassing process was completed, it was necessary to bring the cell containing the sample to the measurement stage and reattach it. Therefore, even if the degassing process or the measurement operation is automated, it is substantially impossible to automate the entire process from the degassing process to the end of the measurement.
〈課題を解決するための手段〉 本発明の吸着量測定装置は、試料を収容した容器を容器
装着部に装着した状態で冷却する冷却手段と、その冷却
状態で容器内部に吸着ガスを導入する吸着ガス導入手段
を有し、冷却状態での試料による容器内のガスの吸着量
を測定する装置において、容器装着部に装着された容器
を加熱する加熱手段と、容器装着部に装着された容器内
を真空排気する排気手段と、加熱手段、排気手段、冷却
手段および吸着ガス導入手段をあらかじめ設定された手
順のもとに選択的に動作させる制御手段を備え、この制
御手段は、容器装着部に装着されている容器を加熱しつ
つ真空排気した後、その容器を冷却しつつその内部に吸
着ガスを導入するように構成されていることによって特
徴づけられる。<Means for Solving the Problems> The adsorption amount measuring device of the present invention is a cooling means for cooling a container containing a sample in a state where the container is mounted in the container mounting part, and an adsorbed gas is introduced into the container in the cooled state. An apparatus having an adsorbed gas introduction means for measuring an adsorption amount of a gas in a container by a sample in a cooled state, a heating means for heating the container mounted in the container mounting part, and a container mounted in the container mounting part Evacuation means for evacuating the inside, and control means for selectively operating the heating means, the exhaust means, the cooling means, and the adsorbed gas introduction means according to a preset procedure are provided. It is characterized in that it is configured such that the container attached to the container is heated and evacuated while being evacuated, and then the adsorbed gas is introduced into the container while cooling the container.
〈作用〉 試料容器を吸着量測定のための容器装着部に装着した状
態で、容器を冷却して吸着ガスを内部に導入する実際の
測定に先立って、加熱手段により容器を加熱しつつ、排
気手段によって容器内部を真空排気することにより、試
料を高精度のもとに脱ガスを行うことが可能となり、脱
ガス処理〜吸着量測定の各工程間での試料の容器の移動
が不要となる。<Operation> While the sample container is mounted on the container mounting part for measuring the adsorption amount, prior to the actual measurement of cooling the container and introducing the adsorbed gas into the inside, the container is heated by the heating means and exhausted. By evacuating the inside of the container by means of the means, the sample can be degassed with high accuracy, and it is not necessary to move the container of the sample between each process of degassing process to adsorption amount measurement. .
〈実施例〉 第1図は本発明実施例の配管系と制御回路のブロック図
を併記して示す全体構成図である。<Embodiment> FIG. 1 is an overall configuration diagram showing a block diagram of a piping system and a control circuit of an embodiment of the present invention.
試料を収容した試料セル1は、セル装着部2において配
管系に接続される。The sample cell 1 containing the sample is connected to the piping system at the cell mounting portion 2.
配管系には、その適宜箇所にバルブ3〜10が配設されて
いるとともに、吸着ガスたる窒素ガス源と不活性ガスた
るヘリウムガス源が接続され、さらに系内を真空排気す
るための真空ポンプ11が接続されている。The piping system is provided with valves 3 to 10 at appropriate locations, a nitrogen gas source as an adsorbing gas and a helium gas source as an inert gas are connected, and a vacuum pump for evacuating the system. 11 is connected.
この配管系内の圧力は真空計12と圧力計13によって計測
され、A−D変換器14でデジタル化された後、コンピュ
ータ15に採り込まれる。The pressure in this piping system is measured by a vacuum gauge 12 and a pressure gauge 13, digitized by an AD converter 14, and then taken into a computer 15.
なお、配管系内で16,17は絞り、18は飽和蒸気圧測定用
チューブ、19は校正用容積である。In the piping system, 16 and 17 are throttles, 18 is a saturated vapor pressure measuring tube, and 19 is a calibration volume.
配管系の下方には、試料セル1を冷却するための液体窒
素等の冷媒を収容したデュワー瓶20が設けられており、
このデュワー瓶20は、コンピータ15からの指令に基づい
てエレベータ機構21によって上下動される。また、上述
した各バルブ3〜10はおなじくコンピュータ15からの指
令に基づくバルブドライバ22からの制御信号によって開
閉制御される。Below the piping system, a Dewar bottle 20 containing a refrigerant such as liquid nitrogen for cooling the sample cell 1 is provided.
The Dewar bottle 20 is moved up and down by the elevator mechanism 21 based on a command from the computer 15. Further, the valves 3 to 10 described above are controlled to be opened / closed by a control signal from the valve driver 22 based on the same command from the computer 15.
以上の構成は従来の装置における測定ステージと同等で
ある。The above configuration is equivalent to the measurement stage in the conventional device.
さて、この実施例における特徴は、配管系の下方に、試
料セル1を加熱するためのヒータ23と、その位置を変更
するための駆動機構24を設けるとともに、このヒータ23
の温度調節およびON/OFFを司る温度調節器25と、駆動機
構24の動きとをコンピュータ15からの指令信号によって
制御するように構成した点である。Now, the feature of this embodiment is that a heater 23 for heating the sample cell 1 and a drive mechanism 24 for changing its position are provided below the piping system.
The temperature controller 25 which controls the temperature and ON / OFF and the movement of the drive mechanism 24 are configured to be controlled by a command signal from the computer 15.
駆動機構24は、ヒータ23を固着してこれを上下動および
回動させることができる。すなわち、ヒータ23を図の状
態から上方に移動させることによって、試料セル1を加
熱することができ、また、図の状態からヒータ23を回動
させることによって、デュワー瓶20の上昇を妨げない位
置に退避させることができる。The drive mechanism 24 can fix the heater 23 and move the heater 23 vertically. That is, the sample cell 1 can be heated by moving the heater 23 upward from the state shown in the drawing, and the heater 23 can be rotated from the state shown in the drawing so as not to prevent the Dewar bottle 20 from rising. Can be evacuated to.
第2図はコンピュータ15に書き込まれたプログラムの内
容を示すフローチャートで、以下、この図を参照しつつ
本発明実施例の作用を述べる。FIG. 2 is a flow chart showing the contents of the program written in the computer 15. The operation of the embodiment of the present invention will be described below with reference to this figure.
試料を試料セル1内に挿入し、そのままセル装着部2に
装着し、装置に起動指令を与える。The sample is inserted into the sample cell 1 and mounted on the cell mounting part 2 as it is, and a start command is given to the apparatus.
起動指令が与えられると、まず駆動機構24および温度調
節器25に指令が与えられ、ヒータ23をONにして上昇させ
る。同時にバルブ3と6のみを開くことにより、試料セ
ル1内が真空排気が開始される。また、その内部の試料
が加熱され、試料の脱ガス処理が行われる。なお、ある
程度系内の真空度が上がった後には、バルブ5が開かれ
てこれを介して真空引きが行われる。When a start command is given, first a command is given to the drive mechanism 24 and the temperature controller 25 to turn on the heater 23 and raise it. At the same time, by opening only the valves 3 and 6, the inside of the sample cell 1 is evacuated. Further, the sample inside is heated, and the sample is degassed. After the degree of vacuum in the system has risen to some extent, the valve 5 is opened and the vacuum is drawn through this.
そして、あらかじめ設定された脱ガス完了条件が満たさ
れたか否かを判定し、それが満たされた場合にはヒータ
23をOFFにするとともに下降させ、次いで回動させて側
方に退避させる。Then, it is determined whether a preset degassing completion condition is satisfied, and if it is satisfied, the heater is
Turn OFF 23 and lower it, then rotate it to retract sideways.
その状態で今度はデュワー瓶20を上昇させて試料セル1
を冷媒中に浸し、試料の冷却を開始し、そのまま測定動
作へと自動的に移行する。In that state, this time, the Dewar 20 is raised and the sample cell 1
Is immersed in the refrigerant, cooling of the sample is started, and the measurement operation is automatically performed.
なお、前述した脱ガス完了条件としては、例えば加熱開
始後にある一定時間が経過したこと、あるいは、ある真
空度に達したときにバルブ5ないしは6を閉じて排気を
中断して真空計12からのデータをモニタし、真空度の変
化がある範囲内に収まっていること等を採用することが
できる。The degassing completion conditions described above include, for example, that a certain time has elapsed after the start of heating, or when a certain degree of vacuum is reached, the valves 5 or 6 are closed to stop the exhaust and the vacuum gauge 12 The data can be monitored, and it can be adopted that the degree of vacuum change is within a certain range.
なお、以上の実施例では一つの測定ステージをを持つも
のについて説明したが、二つ以上の測定ステージを持つ
ものについても本発明を全く同様に適用できることは勿
論である。It should be noted that in the above embodiment, the one having one measuring stage has been described, but it goes without saying that the present invention can be applied to the one having two or more measuring stages in the same manner.
また、このような脱ガス機能を持った測定ステージに加
えて、従来と同様の第3図に示すような前処理専用の脱
ガスステージを設けておけば、測定中においても次の試
料の前処理が可能となり、測定能率を向上させることが
できる。In addition to the measurement stage having such a degassing function, if a degassing stage dedicated to pretreatment as shown in FIG. Processing becomes possible and the measurement efficiency can be improved.
さらに、本発明の機能を利用して、物理吸着のみなら
ず、化学吸着の測定をも行えるように構成することもで
きる。Further, by utilizing the function of the present invention, not only physical adsorption but also chemical adsorption can be measured.
すなわち、化学吸着の測定は例えば酸素や水素等のガス
が用いられ、通常は常温以上の温度領域で測定される。
そこで、ヒータ23の温度制御を化学吸着に適応できるよ
うに例えばプログラマブルとしておき、前記した測定ス
テージにおける脱ガスの完了後に、試料セル1を冷却せ
ずにそのままヒータ23の温度をコントロールし、化学吸
着の測定を行えるように構成することができる。That is, a gas such as oxygen or hydrogen is used for the measurement of chemisorption, and it is usually measured in a temperature range above normal temperature.
Therefore, the temperature control of the heater 23 is set to be programmable so that it can be adapted to chemisorption, and after the degassing at the measurement stage is completed, the temperature of the heater 23 is controlled as it is without cooling the sample cell 1 to perform chemisorption. Can be configured to perform measurements of
〈発明の効果〉 以上説明したように、本発明によれば、定容法に基づく
吸着量測定装置における測定のための容器装着部に容器
を装着した状態で、その容器を加熱する加熱手段と、容
器内部を真空排気する排気手段を設けるとともに、これ
らの加熱手段および排気手段と、測定のための容器冷却
手段と吸着ガス導入手段とを、あらかじめ設定された手
順のもとに選択的に動作させる制御手段を設け、実際の
吸着量測定動作に先立って容器を加熱しつつその内部を
真空排気するよう構成したので、定容法に基づく吸着量
測定のための容器装着部に試料容器を装着したまま、そ
の内部の試料の脱ガス処理を自動的に行うことが可能と
なり、従来の定容法に基づく吸着量測定装置のように試
料容器を脱ガスステージと測定ステージの間で移送して
装着しなおすことが不要となって、試料の前処理として
の脱ガス処理から吸着量の測定まで、全工程を自動化で
きるようになるばかりでなく、脱ガス処理の後に高真空
度を保持したままで測定動作に移行することが可能とな
り、測定精度をも向上させることができる。<Effects of the Invention> As described above, according to the present invention, a heating means for heating the container in a state where the container is mounted on the container mounting part for measurement in the adsorption amount measuring device based on the constant volume method, and An evacuation means for evacuating the inside of the container is provided, and these heating means and evacuation means, as well as the container cooling means for measurement and the adsorbed gas introducing means are selectively operated based on a preset procedure. A control means is provided to heat the container and evacuate the inside of the container prior to the actual adsorption amount measurement operation, so the sample container is attached to the container mounting part for adsorption amount measurement based on the constant volume method. As it is, it is possible to automatically degas the sample inside, and transfer the sample container between the degassing stage and the measuring stage like the adsorption amount measuring device based on the conventional constant volume method. Dress Not only does it not have to be reattached, it is possible to automate all the processes from degassing as a pretreatment of the sample to the measurement of the adsorption amount, while maintaining a high degree of vacuum after degassing. With this, it becomes possible to shift to the measurement operation, and the measurement accuracy can be improved.
しかも、試料容器を加熱しつつその内部を真空排気する
ことによって脱ガスを行う関係上、脱ガスの判定条件と
して、試料から放出されるガスによる真空度の変化量を
採用することができるため、信頼性の高い脱ガス処理を
行うことができる。Moreover, since the degassing is performed by evacuating the inside of the sample container while heating it, the amount of change in the degree of vacuum due to the gas released from the sample can be adopted as the degassing determination condition. Degassing treatment with high reliability can be performed.
また、本発明を化学吸着の測定にも対応できるよう構成
すると、前処理ガスとして万一反応性の強いガスあるい
は毒性の強いガス等を使用する場合でも、外気に触れず
に前処理から測定へ自動移行が可能となる関係上、安全
性、信頼性が向上するという効果もある。In addition, if the present invention is configured to be applicable to the measurement of chemisorption, even if a highly reactive gas or a highly toxic gas is used as the pretreatment gas, the pretreatment can be changed to the measurement without touching the outside air. Since automatic transfer is possible, there is also an effect that safety and reliability are improved.
第1図は本発明実施例の全体構成図、第2図はそのコン
ピュータ15に書き込まれたプログラムの内容を示すフロ
ーチャート、第3図は従来の脱ガスステージの構成図で
ある。 1……試料セル 2……セル装着部 3〜10……バルブ 11……真空ポンプ 15……コンピュータ 20……デュワー瓶 21……エレベータ機構 23……ヒータ 24……駆動機構 25……温度調節器FIG. 1 is an overall configuration diagram of an embodiment of the present invention, FIG. 2 is a flow chart showing the contents of a program written in the computer 15, and FIG. 3 is a configuration diagram of a conventional degassing stage. 1 …… Sample cell 2 …… Cell mounting part 3 ~ 10 …… Valve 11 …… Vacuum pump 15 …… Computer 20 …… Dewar bottle 21 …… Elevator mechanism 23 …… Heater 24 …… Drive mechanism 25 …… Temperature control vessel
Claims (1)
た状態で冷却する冷却手段と、その冷却状態で上記容器
内部に吸着ガスを導入する吸着ガス導入手段を有し、冷
却状態での試料による容器内のガスの吸着量を測定する
装置において、上記容器装着部に装着された容器を加熱
する加熱手段と、上記容器装着部に装着された容器内を
真空排気する排気手段と、上記加熱手段、排気手段、冷
却手段および吸着ガス導入手段をあらかじめ設定された
手順のもとに選択的に動作させる制御手段を備え、この
制御手段は、上記容器装着部に装着されている容器を加
熱しつつ真空排気した後、その容器を冷却しつつその内
部に吸着ガスを導入するよう構成されていることを特徴
とする吸着量測定装置。1. A cooling means for cooling a container containing a sample in a state where the container is mounted in a container mounting portion, and an adsorption gas introducing means for introducing an adsorption gas into the inside of the container in the cooling state. In a device for measuring the amount of gas adsorbed in a container by a sample, heating means for heating the container mounted in the container mounting part, exhaust means for evacuating the container mounted in the container mounting part, and The heating means, the exhausting means, the cooling means, and the adsorbed gas introducing means are provided with a control means for selectively operating them according to a preset procedure, and the control means heats the container mounted in the container mounting part. The apparatus for measuring an adsorption amount is characterized in that the adsorption gas is introduced into the interior of the container while the container is cooled while being evacuated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1128564A JPH0758255B2 (en) | 1989-05-22 | 1989-05-22 | Adsorption amount measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1128564A JPH0758255B2 (en) | 1989-05-22 | 1989-05-22 | Adsorption amount measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02307038A JPH02307038A (en) | 1990-12-20 |
| JPH0758255B2 true JPH0758255B2 (en) | 1995-06-21 |
Family
ID=14987882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1128564A Expired - Fee Related JPH0758255B2 (en) | 1989-05-22 | 1989-05-22 | Adsorption amount measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0758255B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104122183A (en) * | 2014-07-04 | 2014-10-29 | 北京精微高博科学技术有限公司 | Micropore analyzer using secondary adsorption technology and application method thereof |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2779913B2 (en) * | 1995-01-30 | 1998-07-23 | 稔 竹内 | Pore distribution measuring device and metering injector |
| CN110763855A (en) * | 2019-12-03 | 2020-02-07 | 贝士德仪器科技(北京)有限公司 | Full-automatic physical adsorption instrument |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63225142A (en) * | 1987-03-14 | 1988-09-20 | Ookura Rikagaku Kenkyusho:Kk | Measuring apparatus of surface area of solid substance |
-
1989
- 1989-05-22 JP JP1128564A patent/JPH0758255B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104122183A (en) * | 2014-07-04 | 2014-10-29 | 北京精微高博科学技术有限公司 | Micropore analyzer using secondary adsorption technology and application method thereof |
| CN104122183B (en) * | 2014-07-04 | 2017-04-26 | 北京精微高博科学技术有限公司 | Micropore analyzer using secondary adsorption technology and application method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02307038A (en) | 1990-12-20 |
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