JPH0773029B2 - Method for manufacturing parts for fluorescent display tube - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a method for manufacturing a component for a fluorescent display tube in which a spacer frame portion and a mesh portion are integrated.

[Conventional technology]

Generally, a fluorescent display tube has a windshield (A), a filament (B), a mesa film (C), a frame (E), a major lead (D), a mesh part (control grid) (F) as shown in FIG. , A phosphor electrode (anode electrode) (K) formed on the base glass (L), and a pad (anode electrode extraction part) (I), an anode conduction pattern (J) connecting the pad and the phosphor electrode , The anode touch lead (G) coupled to the pad, and the major lead (H) connected to the anode touch lead. At the time of assembly, first, a spacer frame component as shown in FIG. 14 is heat-treated at high temperature to form an oxide film having good wettability with the glass sealing frit glass, and the anode touch lead (G) and The filament anchor support (P) is bent into a predetermined shape, and then the mesh part shown in Fig. 15 is aligned with its frame (E) 'and the frame (E) of the spacer frame part, and is superposed on the spacer frame part. A large number of spot weldings are performed from the mesh component side, and the side rails (N) are removed from both components to form an integral body of the spacer frame portion and the mesh portion.

Then, as shown in FIG. 13, the windshield (A) is opposed to the base electrode (L) provided with the fluorescent electrode (K), the anode conduction pattern (J) and the pad (I), and the frit glass is used as a binder. A filament (B), a mesa film (C), an integral body of the spacer frame portion and a mesh portion, an anode touch lead (G) connected to a pad, and a major lead (H) are sealed between them,
In addition, the periphery between the windshield (A) and the base glass (L) is sealed with frit glass, part of the major leads (D) and (H) and the through-hole leads (M) are taken out of the display tube, and the grid driver, It is connected to a decoder driver, etc. and used as a display device for various meters of automobiles, V, T, R various display parts computer terminals, etc. In FIG. 14, 0 indicates a filament anchor.

However, in the process of spot welding the mesh portion to the spacer portion, there is a problem that the spot welding speed is slow, the mesh portion is damaged or deformed, and the yield is poor. Therefore, one surface of the metal plate having the thickness of the spacer portion To form a resist pattern having the same shape as the shape of the mesh portion to be formed on, and a resist pattern having the same shape as the shape of the spacer portion to be formed, on the other side of the spacer portion A resist pattern having the same shape as the shape is formed, the metal plate on which the resist pattern is formed is etched from both sides to form a mesh portion and a spacer portion, and the thickness of the mesh portion is made smaller than the thickness of the spacer portion. Invented a method for manufacturing a product having a mesh portion for removing a resist pattern and a spacer portion (Japanese Patent Publication No. 60-26). No. 830).

[Problems to be solved by the invention]

However, although the problems in the manufacturing process as described above are solved by forming the spacer frame portion and the mesh portion integrally by etching as described above, half-etching is performed at the same time as forming the mesh portion. Since the thickness is smaller than the thickness of the spacer part, the entry of corrosion at the corner of the mesh hole is bad,
Even if an attempt is made to form a hexagonal opening, an opening close to a round hole is formed, and there is a problem that a mesh portion having a high transmittance cannot be obtained.

Therefore, a problem to be solved by the present invention is to provide a fluorescent display tube component in which a mesh portion capable of forming a display portion of a fluorescent display tube having high transmittance and high brightness and a spacer frame portion are integrated. is there.

[Means for solving problems]

As a result of research to solve the above-mentioned problems, the present inventor has made a mesh-like connection with a resist pattern for forming a frame and a first spacer frame part covering one side of a metal plate and a metal plate region to be a major lead. And a metal plate having a first resist pattern including a mesh part forming resist pattern having an outer shape with a narrower outer shape than the central part of the line part in the line part region near the intersection of the line parts. A second resist pattern, which is a resist pattern for forming a frame and a metal plate area serving as a major lead, is formed on the other surface of the metal plate, and etching is performed from both surfaces of the metal plate to form a frame and a major lead. The second resist pattern side of the metal plate area corresponding to the mesh area is half-etched simultaneously with the formation of According to the method of forming a mesh part that is thinner than the thickness of the frame, the line width of the line area near the intersection of the line parts is narrower or about the same as the line center area, and the mesh hole It has been found that it is possible to obtain a part for a fluorescent display tube in which a portion is wide open in a shape with a small corner portion R and has a high transmittance, and the present invention has been completed based on such knowledge.

That is, the present invention is that "a mesh is formed integrally with the frame inside the frame, and the mesh is thinner than the thickness of the frame and is finely formed by a line portion having a line width of 50μ or less, In a method of manufacturing a part for a fluorescent display tube in which a plurality of major leads are integrally provided on the outer peripheral edge of the frame so as to project from the frame, one side of the metal plate is covered with the frame and a metal plate region serving as the major lead. The spacer frame part forming resist pattern and a plurality of line parts connected in a mesh shape, and the line part region near the intersection of the line parts has a narrower outer shape than the line part central part region And a second space for covering the second surface of the metal plate with the frame and the metal plate region serving as the major lead on the second surface of the metal plate. A second resist pattern consisting of a resist pattern for forming a frame portion is provided, and etching is performed from both sides of the metal plate to form a frame and a major lead portion, and at the same time, a second resist pattern in a metal plate region corresponding to a mesh region. The side is a method for manufacturing a part for a fluorescent display tube, characterized in that a mesh integral with a frame thinner than the thickness of the half-etched frame is formed.

Hereinafter, the manufacturing method of the present invention will be described in detail with reference to the drawings.

First, on one surface of the metal plate (1) as shown in the first figure, as shown in the second figure, a frame, a measure lead, an anode touch lead, a filament anchor support, a part constituting a spacer frame part such as a filament anchor, and a through hole lead. The first spacer frame portion forming resist pattern (6) for covering the metal plate area is formed by a line portion connected in a mesh shape, and the line portion area near the intersection of the line portions is narrower than the line portion central area. A resist pattern (2) consisting of a mesh part forming resist pattern (7) having the outer shape of the above is provided, and a frame, a major lead, an anode touch lead, a filament anchor support, a filament anchor, etc. are provided on the other surface of the metal plate (1). That make up the spacer frame part and through-hole leads The second spacer frame portion forming resist pattern which covers the composed metal plate region (6) '
A second resist pattern (3) is formed.

Then, the spacer frame portion (11) is formed by etching from both sides as shown in FIG. 3 and, at the same time, the second resist pattern side of the metal plate region corresponding to the mesh region is half-etched. It is possible to form a mesh part (10) integrated with (1).

FIG. 4 shows a state in which the resist pattern is peeled off after etching.

Thus, in the manufacturing method of the present invention, for example, iron, steel, alloy steel, copper, copper alloy, aluminum, aluminum alloy, zinc, zinc alloy, nickel, nickel alloy, etc. can be applied as the metal plate. Furthermore, as a metal plate, KVO (Fe-Ni-C
o alloy), 42 alloy (42% Ni-Fe alloy), 426 alloy (42% Ni
-6% Cr Fe alloy), NS-1 (Fe50%, Ni50% alloy), S
US (stainless steel), SK (tool steel), KK (tool steel), tough pitch steel, deoxidized steel, phosphor blue steel, brass, beryllium steel,
Plates such as nickel silver can be used.

Next, a photosensitive solution that can be used for forming the resist is any commercially available one, for example, TESH.DOOL (polyvinyl alcohol / ammonium dichromate type) manufactured by Okamoto Chemical Co., Ltd., TE
SH.Glue (glue / ammonium dichromate), TESH.
Glue U-100 (glue / ammonium dichromate type) .AZ
O.TESH (polyvinyl alcohol / diazo compound type); Fuji-LON-D No.0.3,5 (polyvinyl alcohol / ammonium dichromate type) from Fuji Yakuhin Kogyo Co., Ltd./Fujiresist No.7.9,14,18 (polyvinyl) Alcohol / ammonium dichromate), Fujiresist No.15,16,17,19,20
(Casein / ammonium dichromate type), Photonol (casein / ammonium dichromate type) and Fujiscreen coat (polyvinyl alcohol / ammonium dichromate type): Inoenal (polyvinyl alcohol / ammonium chromate type) manufactured by Automobile Industry Co., Ltd. system),
Inoenalone (polyvinyl alcohol / ammonium chromate), JI Cancor (casein / ammonium dichromate), inochored enamel (casein / ammonium dichromate) and Hauzon (polyvinyl alcohol / diazo compound); Inostoman Kodak Company KPR (Kodak Photo Resist), KPR-
2 (Kodak Photo Resist Type-2), KPR
-3 (Kodak Photo Resist Type-3), KP
L (Kodak Photo Sensitive Lacquer), KOR
(Kodak Orthoresist), KMER (Kodak Metal Etch Resist) and KTFR (Kodak Thin Film Resist): FSR (Fuji Super Resist), FRS (Fuji Super Resist), FCR (Fuji Super Resist) manufactured by Fuji Pharmaceutical Co., Ltd. Fuji Chemical Resist), FPER (Fuji Photo Essist Resist), FNPR (Fuji New Photo Resist),
FMRN (Fuji Microresist Negative), FRR (Fuji Rabbit Resist) and FPPR (Fuji Positive Photoresist); Tokyo Ohka Kogyo Co., Ltd. Okaresist (hard rubber type), Photozole (diazo compound type), TPR (polysilicone film) Vinyl acetate), EPPR (hard rubber type), OPR (hard rubber type), OPSR (hard rubber type) and G-90 (casein
Ammonium dichromate type) and the like.

Means for forming a resist by performing exposure, development, washing with water and drying through a pattern using these known sensitizing solutions can be carried out by usual known means.

The etching solution used in the present invention may be a known etching solution for the metal of a conventionally used metal plate, for example, ferric chloride solution for iron,
Concentrated nitric acid + water, hydrochloric acid + nitric acid, ferric chloride solution for steel, concentrated nitric acid + water, hydrochloric acid + sulfuric acid, ferric chloride solution for alloy steel, concentrated nitric acid + water, hydrochloric acid + sulfuric acid Ferric chloride liquid, ammonium persulfate + mercuric chloride for steel, ferric chloride liquid, ammonium persulfate + mercuric chloride for steel alloys, and hydroxide for aluminum Sodium solution, hydrochloric acid + water, ferric chloride solution, sodium hydroxide solution, hydrochloric acid + water, ferric chloride solution for aluminum alloys, nitric acid for zinc, zinc alloys Nitric acid, for nickel, ferric chloride solution, hydrochloric acid + nitric acid,
For nickel alloys, ferric chloride solution, hydrochloric acid + nitric acid can be used.

In the present invention, the removal of the photoresist is carried out by dipping the dichromate-based resist in a 40% by weight caustic soda solution moistened at 50 ° C., and for the solvent-based photoresist, a dedicated stripping solution or a commercially available organic solvent (Triclen. Xylene, benzene, etc.).

Next, a resist pattern for forming a mesh part, in which the line part region near the part where the line parts intersect has a narrower outer shape than the center part of the line part, is an original plate in which a corner part (12) as shown in FIG. It can be formed by making a resist plate using 13). By using the original plate (13) shown in FIG. 5 for resist plate making and etching, it is possible to obtain an etched product as shown in FIG.

Further, it is also possible to use the original plates (13a) (13b) in which the corner portions are scooped out in a rectangular shape or a triangular shape as shown in FIG. 7 or 8.

FIG. 9 shows an etching product of a fluorescent display tube component manufactured by the manufacturing method of the present invention.

In the figure, 21 is a frame, 22 is a major lead, 23 is a through hole lead, 24 is a mesh, 25 is an anode touch lead, 26 is a filament anchor support, 27 is a filament anchor, and 28 is a side rail.

[Action]

Since the shape of the mesh pattern forming resist pattern is narrower in the line area near the intersection of the line sections than in the center area of the line section, the transmittance of the mesh hole with a large R in the corner R is small. It is possible to form very high mesh holes.

〔Example〕

Dimensions of alloy consisting of 52% iron, 42% nickel and 6% chromium
A metal plate having a thickness of 500 m / m × 500 m / m and a thickness of 0.15 m / m was immersed in 40% by weight caustic soda solution heated to 50 ° C. for 5 minutes to dissolve and remove dirt oils and fats on the surface and dried.

Then, at room temperature of 25 ° C, G-90 manufactured by Tokyo Ohka Kogyo Co., Ltd.
(Casein-ammonium dichromate type) Soak the metal plate treated above in the photosensitive solution for 5 to 10 seconds, and gently pull it up without unevenness to evenly spread the photosensitive solution over the entire surface of the metal plate. It was applied so that the thickness was about 6 μm. The metal plate coated with the photosensitive solution is left at room temperature for about 5 minutes, and then
It was placed in an oven at 80 ° C and dried for 20 minutes to form a photosensitive film. Remove the metal plate from the oven, leave it in the air for 5 minutes to cool, and-on the photosensitive film surface, a frame, a major lead,
The anode touch lead, the filament anchor support, the portion constituting the spacer frame portion such as the filament anchor, and the first spacer frame portion pattern corresponding to the through-hole lead, and a plurality of line portions connected in a mesh form, and a fifth illustration. The first original plate composed of the first mesh portion pattern having an outer shape in which the line portion area near the portion where the corner portions are scooped out and the line portions intersect is narrower than the line portion central area is closely attached. , A second spacer frame part pattern corresponding to the through hole lead, and a part of the other photosensitive film surface that constitutes a spacer frame part such as a frame, a major lead, an anode touch lead, a filament anchor support, and a filament anchor. Adhere the two original plates and run xenon run from the front and back. And 120 to 180 seconds exposure baking using, followed by the development. The exposed portion was cured and became insoluble in water or warm water, and the unexposed portion was dissolved and removed by immersion in water (or warm water at 40 ° C) for 20 to 30 seconds.

It was further dried and heat-treated at 200 to 300 ° C. for 4 minutes to completely cure the exposed portion.

The metal plate with the resist pattern formed as described above
Immersion was carried out at 50 ° C for 10 minutes in a ferric chloride solution at 50 ° ^Be ', and etching was performed from both sides simultaneously. At this time, the spacer frame portion and the through-hole lead are formed, and the side where the resist pattern for forming the mesh portion is not provided is more rapidly etched to be half-etched, which is thinner than the spacer frame portion and A mesh portion having a wide opening of the mesh hole portion was formed. Then, the intermediate product obtained above is immersed in a 40 wt% caustic soda solution at 50 ° C for 10 minutes to dissolve and remove the photoresist, and then dried to pass through the mesh part and the spacer frame part made of the same material. A fluorescent display tube component with a rate of 80% was obtained.

Comparative Example Similar to Example 1, except that a spacer frame portion pattern was provided instead of the first and second original plates.
The third original plate having a plurality of line parts connected in a hexagonal mesh pattern as shown in the drawing and having a uniform mesh part pattern and the spacer frame part pattern only, and the mesh part area is Using the blank fourth original plate, etching was carried out from both surfaces after resist plate making to obtain a fluorescent display tube part having mesh holes as shown in FIG.

The transmittance of the obtained product was measured and found to be 72%.

〔The invention's effect〕

As described in detail above, according to the manufacturing method of the present invention, the mesh portion and the spacer frame portion are integrally formed of the same material from the metal plate having the thickness of the spacer frame portion only by the photoetching method, and The thickness of the mesh part is made smaller than the thickness of the spacer frame part,
It is possible to manufacture the parts for a fluorescent display tube which can form the display part of the fluorescent display tube having a high transmittance and a high brightness with a wide opening, with a high yield and with high accuracy.

[Brief description of drawings]

1 to 4 are cross-sectional views showing a manufacturing process according to the manufacturing method of the present invention, FIG. 5 is a plan view of a mesh part pattern used in an embodiment of the present invention, and FIG. 6 is a plan view of the mesh part pattern. Sectional view of a mesh portion formed by etching after resist plate making, FIGS. 7 and 8 are plan views showing examples of other mesh portion patterns, and FIG. 9 is for a fluorescent display tube manufactured by the manufacturing method of the present invention. A plan view of an etching product including parts, FIG. 10 is a plan view of a mesh portion forming pattern used in a comparative example, FIG. 11 is a rear view of a mesh portion of a comparative example,
Fig. 12 is an exploded perspective view of the fluorescent display tube, Fig. 13 is a sectional view of the fluorescent display tube, Fig. 14 is a plan view of the etching product of the spacer frame part, and Fig. 15 is a plan view of the etching product of the mesh part. It is a figure. 1 ... Metal plate 6 ... First spacer frame portion forming resist pattern 6 '... Second spacer frame portion forming resist pattern 7 ... Mesh portion forming resist pattern 9 ... Mesh hole portion 10 ... Mesh part 11 …… Spacer frame part

Claims (1)

[Claims] 1. A mesh is integrally formed with the frame inside the frame, and the mesh is thinner than the thickness of the frame and is finely formed by line portions having a line width of 50 μm or less. In the method of manufacturing a part for a fluorescent display tube in which a plurality of major leads are integrally projected on the outer peripheral edge of the frame, the frame is provided on one side of the metal plate,
And the first spacer frame portion forming resist pattern for covering the metal plate area to be the major lead and a plurality of line portions connected in a mesh shape, and the line portion area near the intersection of the line portions is closer to the center portion of the line portion. A resist pattern for forming a mesh portion having a narrow outer shape
And a second resist pattern consisting of only a resist pattern portion for forming a frame and a metal plate area serving as a major lead on the other surface of the metal plate. Etching is performed from both sides to form the frame and the major lead portion, and at the same time, the second resist pattern side of the metal plate area corresponding to the mesh area is thinner than the half-etched frame, and the mesh integrated with the frame. A method of manufacturing a component for a fluorescent display tube, the method comprising: