JPH0776137B2 - High thermal shock resistance joining method of ceramics and metal and joining product - Google Patents
High thermal shock resistance joining method of ceramics and metal and joining productInfo
- Publication number
- JPH0776137B2 JPH0776137B2 JP30707386A JP30707386A JPH0776137B2 JP H0776137 B2 JPH0776137 B2 JP H0776137B2 JP 30707386 A JP30707386 A JP 30707386A JP 30707386 A JP30707386 A JP 30707386A JP H0776137 B2 JPH0776137 B2 JP H0776137B2
- Authority
- JP
- Japan
- Prior art keywords
- base material
- metal
- ceramic
- layer
- composite layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052751 metal Inorganic materials 0.000 title claims description 84
- 239000002184 metal Substances 0.000 title claims description 84
- 239000000919 ceramic Substances 0.000 title claims description 69
- 230000035939 shock Effects 0.000 title claims description 18
- 238000000034 method Methods 0.000 title claims description 14
- 239000000463 material Substances 0.000 claims description 82
- 239000002131 composite material Substances 0.000 claims description 24
- 150000002739 metals Chemical class 0.000 claims description 2
- 238000005219 brazing Methods 0.000 description 14
- 239000010949 copper Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 102200082816 rs34868397 Human genes 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910017945 Cu—Ti Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Landscapes
- Pressure Welding/Diffusion-Bonding (AREA)
- Ceramic Products (AREA)
Description
【発明の詳細な説明】 「産業上の利用分野」 この発明は、セラミックスと金属とを接合して耐熱衝撃
性の高い接合製品を得る接合方法および接合製品に関す
るものである。TECHNICAL FIELD The present invention relates to a joining method and a joining product for joining a ceramic and a metal to obtain a joined product having high thermal shock resistance.
「従来の技術」 周知のように、摩耗や熱作用を頻繁に受ける金属部品
（金属母材）に対しては、一部にセラミックスを用いて
部品の耐摩耗性、耐熱性の向上を図る手段が取られてい
る。“Prior Art” As is well known, for metal parts (metal base materials) that are frequently subjected to wear and heat, a means for improving wear resistance and heat resistance of parts by using ceramics in part. Has been taken.
従来、上記のようなセラミックスと金属との接合製品
は、第６図に示すように、金属母材１とセラミックス母
材２とを中間金属層３を介して接合一体化したものであ
った。この接合製品の接合方法としては、主に次の３つ
の方法が用いられている。まず、第１の方法は、セラミ
ックス母材２の接合面に予め30〜60μｍ程度の厚みにメ
タライズ層を形成しておき、このセラミックス母材２に
前記中間金属層３をロウ付するとともに、この中間金属
層３を金属母材１にロウ付する方法である。また、第２
の方法は、金属母材１の接合面には金属用のロウ材を塗
布すると同時に、セラミックス母材２にはメタライズ用
のロウ材を塗布し、これらの間に中間金属層３を介装
し、これらを加熱することによってロウ付、一体化する
方法である。そして、第３の方法は、金属母材１とセラ
ミックス母材２との間に中間金属層３を介装し、これら
３者を加圧下で加熱し、中間金属層３をそれぞれ金属母
材１およびセラミックス母材２中に拡散させ、接合する
方法である。Conventionally, as shown in FIG. 6, the above-described ceramic-metal joined product has been formed by integrally joining the metal base material 1 and the ceramic base material 2 through the intermediate metal layer 3. The following three methods are mainly used for joining the joined products. First, in the first method, a metallized layer having a thickness of about 30 to 60 μm is previously formed on the joint surface of the ceramic base material 2, the intermediate metal layer 3 is brazed to the ceramic base material 2, and This is a method of brazing the intermediate metal layer 3 to the metal base material 1. Also, the second
In this method, a brazing material for metal is applied to the joint surface of the metal base material 1, a brazing material for metallization is applied to the ceramic base material 2, and an intermediate metal layer 3 is interposed between them. It is a method of brazing and integrating them by heating them. And the 3rd method interposes the intermediate | middle metal layer 3 between the metal base material 1 and the ceramics base material 2, heats these 3 persons under pressure, and each intermediate metal layer 3 is made into the metal base material 1. And a method of diffusing into the ceramic base material 2 and joining.
上記中間金属層３としては、通常、Cu、Al、Niや、また
Ag等の貴金属、そして、これら単体金属を含んでなる高
展延性合金が使用されている。The intermediate metal layer 3 is usually Cu, Al, Ni, or
Noble metals such as Ag and highly ductile alloys containing these elemental metals are used.
上記接合構造において、接合強度はセラミックス母材２
と中間金属層３との接合面積に比例することが知られて
いる。また、金属母材１とセラミックス母材２との間に
かかる応力を緩和するためには、中間金属層３としては
ある程度以上の厚みが必要であるが、中間金属層３自体
の熱もしくは塑性に伴う変形力のセラミックス母材２へ
の影響を考える場合、この中間金属層３の厚みは薄い方
が好ましいことになる。従って、現状において、セラミ
ックス母材２に直接接合しているメタライズ層などは上
記したように30〜60μｍ程度の薄さに形成されている。In the above joining structure, the joining strength is the ceramic base material 2
It is known to be proportional to the bonding area between the intermediate metal layer 3 and the intermediate metal layer 3. Further, in order to relieve the stress applied between the metal base material 1 and the ceramic base material 2, the intermediate metal layer 3 needs to have a certain thickness or more, but the heat or plasticity of the intermediate metal layer 3 itself may increase. Considering the influence of the accompanying deformation force on the ceramic base material 2, it is preferable that the thickness of the intermediate metal layer 3 is thin. Therefore, at present, the metallized layer directly bonded to the ceramic base material 2 is formed to a thickness of about 30 to 60 μm as described above.
「発明が解決しようとする問題点」 ところで、上記従来のセラミックスと金属との接合製品
には、下記のような問題点があり、その解決が望まれて
いる。"Problems to be Solved by the Invention" By the way, the above-described conventional bonded product of ceramics and metal has the following problems, and the solution thereof is desired.
すなわち、上記接合製品においては、第７図に示すよう
に、通常は接合強度を上げるためにセラミックス母材２
の接合側の面2aのほぼ全域を覆うように中間金属層３を
形成し、接合している。そのため、このような構造にお
いては、例えば熱膨張率の大きい金属母材１の冷却収縮
に伴って中間金属層３にかかる引張り応力は、図中矢印
のように各辺の中央に向かって働くことになり、その結
果、中間金属層３の角部Ｃ…に最も大きな引張り応力が
働く。そのため、引張り応力に対して弱いセラミックス
母材２は、上記角部Ｃに相当する部分に応力集中が生じ
てクラックが発生し、剥離してしまうということがしば
しば発生している。That is, in the above bonded product, as shown in FIG. 7, the ceramic base material 2 is usually used to increase the bonding strength.
The intermediate metal layer 3 is formed so as to cover almost the entire area of the surface 2a on the bonding side, and is bonded. Therefore, in such a structure, for example, the tensile stress applied to the intermediate metal layer 3 due to the cooling shrinkage of the metal base material 1 having a large thermal expansion coefficient acts toward the center of each side as indicated by the arrow in the figure. As a result, the largest tensile stress acts on the corner portions C ... Of the intermediate metal layer 3. Therefore, in the ceramic base material 2 which is vulnerable to tensile stress, stress concentration often occurs in the portion corresponding to the corner portion C, cracks occur, and peeling often occurs.
これに対し、第８図に示すように、応力集中を避けるた
めに接合部分４に角部をつくらないように中間金属層３
の形状を円板状にする構造が考えられる。しかし、例え
ば、Al2O3の熱膨張率は7.8×10-6、Si3N4のそれは４×1
0-6というように、金属の熱膨張率はセラミックスの２
〜４倍もあるため、角部のない接合面の採用によって接
合面積をある程度減少して、換言すれば接合強度をある
程度犠牲にして行なう上記改良構造においても、第９図
に示すように、経時的に接合部分の外周に沿ってセラミ
ックス母材２にクラックが発生し、終には剥離してしま
うという経時的劣化現象を避けることができない。特
に、金属母材が外部からの熱や機械的外力を受け、大き
な変形を伴う場合は、一層セラミックス母材に力が加わ
り、クラックが発生しやすい。On the other hand, as shown in FIG. 8, in order to avoid stress concentration, the intermediate metal layer 3 should be formed so as not to form a corner at the joint portion 4.
It is conceivable that the disk shape is a disk shape. However, for example, the coefficient of thermal expansion of Al 2 O 3 is 7.8 × 10 -6 , that of Si 3 N 4 is 4 × 1
The thermal expansion coefficient of metal is 0 to 6 of that of ceramics.
Since it is about 4 times as large, the joining area is reduced to some extent by adopting a joining surface without corners, in other words, even in the above-mentioned improved structure in which the joining strength is sacrificed to some extent, as shown in FIG. Inevitably, the ceramic base material 2 is cracked along the outer periphery of the bonded portion and eventually peels off, which is a deterioration phenomenon over time. In particular, when the metal base material is subjected to a large amount of deformation due to external heat or mechanical external force, the ceramic base material is further subjected to a force, and cracks are likely to occur.
この発明は上記事情に鑑みてなされたもので、その目的
は特に金属母材の熱変動（熱衝撃）に伴う伸縮がセラミ
ックス母材にかかるのを減少させ、それによりセラミッ
クス母材のクラックを減少させ、製品の耐熱衝撃性、信
頼性の向上および高寿命化を図ることのできるセラミッ
クスと金属との高耐熱衝撃性接合方法および接合製品を
提供することにある。The present invention has been made in view of the above circumstances, and its purpose is to reduce the expansion and contraction of the metal base material due to thermal fluctuation (thermal shock) on the ceramic base material, thereby reducing cracks in the ceramic base material. In view of the above, it is an object of the present invention to provide a high thermal shock resistance joining method for a ceramic and a metal and a joined product capable of improving the thermal shock resistance and reliability of the product and extending the life of the product.
「問題点を解決するための手段」 本発明者らは、上記問題点を解決するために、鋭意研究
を重ねたところ、下記のような知見を得るに至った。"Means for Solving Problems" The inventors of the present invention have conducted intensive studies to solve the above problems, and have obtained the following findings.
（ｉ） 前記したように、銅などの高展延性金属からな
る中間金属層は、金属母材とセラミックス母材とを直接
接合すると、各々の熱膨張の差により応力が発生してセ
ラミックス母材に割れが発生するので、これを防ぐため
に、応力緩和を目的にセラミックス母材と金属母材との
間に介装されているものである。この中間金属層によっ
て接合した製品は、常温およびその近辺で使用している
場合には、中間金属層の働きにより大過なく使用するこ
とができる。しかし、この製品に熱衝撃、例えば350℃
〜室温の温度差を繰り返し与えると、中間金属層は高展
延性金属であるために大きく伸縮を繰り返し、その応力
により終にはセラミックス母材に割れが発生してしま
う。(I) As described above, when the metal base material and the ceramic base material are directly bonded to each other, the intermediate metal layer made of a highly malleable metal such as copper generates stress due to the difference in thermal expansion between the ceramic base material and the ceramic base material. Since cracks occur in the ceramics, in order to prevent this, it is interposed between the ceramic base material and the metal base material for the purpose of stress relaxation. The product joined by this intermediate metal layer can be used without a great deal by the action of the intermediate metal layer when used at room temperature and its vicinity. However, this product has a thermal shock, for example 350 ° C.
When the temperature difference between room temperature and room temperature is repeatedly applied, the intermediate metal layer repeatedly expands and contracts greatly because it is a highly malleable metal, and the stress eventually causes cracks in the ceramic base material.
したがって、前記のような熱衝撃が接合製品に加えられ
る場合、中間金属層のセラミックス母材に対する接合面
積は少なければ少ない程、熱変動に伴う中間金属層の伸
縮量が少なくなることになる。この考えに基づいて、中
間金属層を接合面長手方向に沿って板状に複数に分割
し、これらを間隔を設けてセラミックス母材と金属母材
との間に介装、接合すれば、少なくとも中間金属層自体
に起因する応力を緩和することができる。Therefore, when the above-described thermal shock is applied to the joined product, the smaller the joining area of the intermediate metal layer to the ceramic base material, the smaller the expansion and contraction amount of the intermediate metal layer due to the thermal fluctuation. Based on this idea, if the intermediate metal layer is divided into a plurality of plates in the longitudinal direction of the joint surface, and these are interposed and bonded between the ceramic base material and the metal base material, at least, The stress due to the intermediate metal layer itself can be relieved.
（ii） しかし、このままの構造であると、セラミック
ス母材に対して金属母材が接合面に平行に変位する場合
などに各分割中間金属片（高展延性金属片）の接合面に
大きな応力がかかってしまう。そこで、第１図に示すよ
うに、金属母材１とセラミックス母材２との間に介在さ
せる多数の中間金属片５…の各間にセラミックス片６…
を介装し、これらセラミックス片６を中間金属片５とと
もに、それらの端面がセラミックス母材２および金属母
材１に密着するように、換言すれば、各片５、６の長手
方向が金属母材１およびセラミックス母材２の接合面に
直交もしくは交差するように（以下、単に縦方向に、と
記す）接合したところ、接合面に平行な金属母材１およ
び各中間金属片５の変位を確実に抑えることができ、し
かも金属母材１および中間複合層７（中間金属片５…＋
セラミックス片６…）のセラミックス母材２へかかる応
力を大幅に緩和することができた。(Ii) However, with this structure as it is, when the metal base material is displaced parallel to the ceramic base material in parallel to the joint surface, large stress is applied to the joint surface of each split intermediate metal piece (highly ductile metal piece). It will cost you. Therefore, as shown in FIG. 1, the ceramic piece 6 is interposed between each of the plurality of intermediate metal pieces 5 which are interposed between the metal base material 1 and the ceramic base material 2.
And the ceramic pieces 6 together with the intermediate metal piece 5 so that their end faces are in close contact with the ceramic base material 2 and the metal base material 1, in other words, the longitudinal direction of each piece 5, 6 is the metal base material. When the materials 1 and the ceramic base material 2 were bonded to each other so as to be orthogonal or intersected (hereinafter simply referred to as a vertical direction), the displacement of the metal base material 1 and each intermediate metal piece 5 parallel to the bonding surface was confirmed. It can be surely suppressed, and moreover, the metal base material 1 and the intermediate composite layer 7 (the intermediate metal piece 5 ... +
The stress applied to the ceramic base material 2 of the ceramic pieces 6 ...) could be relieved significantly.
この発明は、上記知見に基づいてなされたものである。This invention was made based on the above findings.
すなわち、この発明に係るセラミックスと金属との高耐
熱衝撃性接合方法は、 セララミックス母材２の表面上にメタライズ層８を形成
し、このメタライズ層８に沿って多数の高展延性金属片
５とセラミックス片６とを交互に密着するとともに両者
の各端面が前記メラタイズ層と密着するように配置して
中間複合層７とし、この中間複合層７を前記メタライズ
層８上に接合するとともに、この中間複合層７上に金属
母材１を接合することを特徴とする ものである。That is, in the method for high thermal shock resistance joining of ceramics and metal according to the present invention, the metallized layer 8 is formed on the surface of the ceramic mix base material 2, and a large number of highly malleable metal pieces 5 are formed along the metallized layer 8. And ceramic pieces 6 are alternately adhered to each other, and the end faces of both are closely adhered to the melatize layer to form an intermediate composite layer 7, and the intermediate composite layer 7 is bonded onto the metallized layer 8 and It is characterized in that the metal base material 1 is bonded onto the intermediate composite layer 7.
また、この発明に係るセラミックスと金属との高耐熱衝
撃性接合製品は、 セラミックス母材２の接合面長手方向に沿って多数の高
展延性金属片５とセラミックス片６とを交互に配列、密
着してなる中間複合層７が前記セラミックス母材２上に
メタライズ層８を介して前記中間複合層を形成する高展
延性金属片とセラミックス片の各片の端面が密着するよ
うにして接合され、この中間複合層７上に金属母材１が
接合されていることを特徴とするものである。Further, the high thermal shock resistance joint product of ceramics and metal according to the present invention has a large number of highly malleable metal pieces 5 and ceramic pieces 6 alternately arranged and adhered along the longitudinal direction of the joint surface of the ceramic base material 2. The intermediate composite layer 7 thus formed is bonded onto the ceramic base material 2 through the metallized layer 8 so that the end faces of the highly spreadable metal piece and the ceramic piece forming the intermediate composite layer are in close contact with each other, The metal base material 1 is bonded onto the intermediate composite layer 7, which is a feature.
なお、上記構成において、中間複合層７を構成している
交互に重ねられている多数の高展延性金属片５およびセ
ラミックス片６は相互に接合した方がより効果的である
が、単に重ね合わせただけでも初期の効果は得られるの
で、特に互いに接合しなくてもよい。In the above-mentioned configuration, it is more effective to bond the large number of high-ductility metal pieces 5 and ceramic pieces 6 that are alternately stacked and form the intermediate composite layer 7 to each other. Since the initial effect can be obtained by just doing so, it is not necessary to particularly bond them together.
また、上記構成の中間複合層７の接合において、第２図
に示すように、セラミックス母材２上にメタライズ層８
を形成した後にロウ材10により中間複合層７を接合する
ことにより行なってもよいし、セラミックス母材２上に
ロウ材を介して中間複合層７を重ね、これを加熱するこ
とによりメタライズ層形成と中間複合層接合とを１回の
加熱処理により行なってもよい。一度で行なうには、例
えば、ロウ材としてAg−Cu−Ti系の活性金属ロウ材など
が使用される。また、メタライズ層形成と接合とを別々
に行なう場合は、Mo.Mn法によるメタライジング等の公
知の方法が用いられる。Further, in the joining of the intermediate composite layer 7 having the above structure, as shown in FIG. 2, the metallized layer 8 is formed on the ceramic base material 2.
Alternatively, the intermediate composite layer 7 may be joined with the brazing material 10 after the formation of the intermediate composite layer 7, or the intermediate composite layer 7 may be superposed on the ceramic base material 2 via the brazing material and heated to form a metallized layer. The intermediate composite layer bonding and the intermediate composite layer bonding may be performed once. To carry out at once, for example, an Ag—Cu—Ti based active metal brazing material is used as the brazing material. Further, when the metallization layer formation and the bonding are performed separately, a known method such as metalizing by the Mo.Mn method is used.
さらに、この発明において、ロウ付は、真空または不活
性ガス等の非酸化性雰囲気下、常圧で、700〜1250℃に
て行なわれる。また、メタライズ層単独形成の場合も、
非酸化性雰囲気下、700〜1400℃で行なわれる。Further, in the present invention, the brazing is performed at 700 to 1250 ° C. under normal pressure under vacuum or in a non-oxidizing atmosphere such as an inert gas. Also, in the case of forming the metallized layer alone,
It is carried out at 700 to 1400 ° C in a non-oxidizing atmosphere.
なお、本発明の接合製品においては、以下に示す実施例
から明らかなように、耐熱衝撃試験における強度低下率
は約15％以下という実測値を示す。これに対し、一般に
セラミックス、金属各母材の種類によっても異なるが、
通常、初期の接合強度（主として剪断強度）に対して測
定誤差も含め30％程度の強度低下は、実用上許容される
範囲である。従って、本発明の接合製品は実用上高い性
能をもつものと判断される。In the joined product of the present invention, the strength reduction rate in the thermal shock test shows a measured value of about 15% or less, as is clear from the examples shown below. On the other hand, in general, it depends on the type of ceramic and metal base materials,
Usually, a reduction in strength of about 30% including a measurement error with respect to the initial bonding strength (mainly shear strength) is within a practically acceptable range. Therefore, the joined product of the present invention is judged to have high performance in practical use.
次に、本発明を実施例によりさらに詳しく説明する。Next, the present invention will be described in more detail with reference to examples.
「実施例１〜２」 第２図の構造において、すなわち、セラミックス母材２
上にメタライズ層８を形成し、この上にロウ材10によっ
て高展延性金属片５およびセラミックス片６とからなる
中間複合層７を接合し、この上にさらにロウ材９によっ
て金属母材１を接合した構造の接合品を各々下記材質、
寸法により作成した （実施例１） 30×15×5t（mm）のSi3N4セラミックス母材上に銀、
金、チタン各粉の混合物を塗布し、これを真空下で1000
℃、15分間加熱して50μｍのメタライズ層を形成した。
この上にロウ材としてBAg−８（JIS Z3261）粉を塗布
し、この上に10×２×2t（mm）のCu片と10×２×0.6t
（mm）のアルミナセラミックス片とを横方向（セラミッ
クス母材の接合面に沿う方向）の交互に積み重ねるよう
に配列、密着してなる中間複合層をのせ、真空下、1000
℃、15分間加熱して接合した。さらに、前記中間複合層
上にBAg−８粉を塗布し、この上に金属母材として30×6
0×6t（mm）のS45Cをのせ、真空下、860℃、15分間加熱
して接合した。得られた接合品を次のような熱衝撃試験
にかけた。すなわち、室温から200℃/minで350℃まで昇
温し、その後350℃で15分間保持、続いて50℃/minで室
温まで降温し、室温で15分間保持の一続きを１サイクル
とする内容の試験である。"Examples 1 and 2" In the structure of FIG. 2, that is, the ceramic base material 2
A metallized layer 8 is formed on top of this, an intermediate composite layer 7 consisting of a highly malleable metal piece 5 and a ceramic piece 6 is joined by a brazing material 10, and a metal base material 1 is further formed by a brazing material 9 thereon. The joined products with the joined structure are
(Example 1) 30 × 15 × 5t (mm) Si 3 N 4 ceramic base material, silver,
Apply a mixture of gold and titanium powder, and apply 1000
It was heated at ℃ for 15 minutes to form a 50 μm metallized layer.
BAg-8 (JIS Z3261) powder is applied as a brazing material on this, and 10 × 2 × 2t (mm) Cu pieces and 10 × 2 × 0.6t are applied on this.
(Mm) Alumina ceramic pieces are arranged so as to be stacked alternately in the lateral direction (direction along the bonding surface of the ceramic base material), and an intermediate composite layer that is in close contact is placed, and the layer is placed under vacuum at 1000
Bonding was performed by heating at ℃ for 15 minutes. Further, BAg-8 powder was applied on the intermediate composite layer, and 30 × 6 as a metal base material was applied on this.
0 × 6t (mm) of S45C was put on it and heated under vacuum at 860 ° C. for 15 minutes to bond them. The obtained bonded product was subjected to the following thermal shock test. That is, the temperature is raised from room temperature to 200 ° C / min to 350 ° C, then kept at 350 ° C for 15 minutes, then lowered to room temperature at 50 ° C / min, and kept at room temperature for 15 minutes. Is a test of.
その結果、第３図に示すように、この実施例１の接合品
は、当初の剪断強度が10点の平均2.86kg/mm2（以下、強
度値は、同様にすべて10点の平均値を示す）であったの
が、500回のサイクルを加えた後は平均2.74kg/mm2とな
り、その耐熱強度低下率は、約４％以下という高性能を
示した。As a result, as shown in FIG. 3, the joined article of Example 1 had an average shear strength of 10 points at an average of 2.86 kg / mm 2 (hereinafter, the strength values are all the average values of 10 points). However, after 500 cycles, the average value was 2.74 kg / mm 2 , and the heat resistance strength reduction rate was about 4% or less, indicating high performance.
（実施例２） 上記実施例１のSi3N4セラミックス母材をアルミナセラ
ミックス母材に替えて、他の条件は同一にして接合品を
作成した。(Example 2) A bonded product was prepared under the same conditions except that the Si 3 N 4 ceramics base material of Example 1 was replaced with an alumina ceramics base material.
得られた接合品を上記同様の熱衝撃試験にかけた。The joined article thus obtained was subjected to the same thermal shock test as described above.
その結果、第４図に示すように、この実施例２の接合品
は、当初の剪断強度が平均3.05kg/mm2であったのが、50
0回のサイクルを加えた後は平均2.67kg/mm2となり、そ
の耐熱強度低下率は、13％以下という高性能を示した。As a result, as shown in FIG. 4, the joint product of Example 2 had an initial shear strength of 3.05 kg / mm 2 on average.
After 0 cycles, the average value was 2.67 kg / mm 2 , and the heat resistance strength reduction rate was 13% or less, indicating high performance.
「比較例」 次に前記従来例に基づいた比較例を示し、本発明の性能
の高さを確認する。"Comparative Example" Next, a comparative example based on the conventional example will be shown to confirm the high performance of the present invention.
第５図は、前記した第６図に示した従来例に相当する接
合品の熱衝撃試験における剪断強度変化を示すもので、
この接合品は30×15×5t（mm）のSi3N4セラミックス母
材上に13×13×2t（mm）のCu板をろう材（BAg−８）に
よって接合したものを、さらにBAg−８粉を用い、30×6
0×6t（mm）のS45Cに接合したものである。FIG. 5 shows changes in shear strength in a thermal shock test of a joined article corresponding to the conventional example shown in FIG.
This bonded product is made by bonding a 13 × 13 × 2t (mm) Cu plate to a 30 × 15 × 5t (mm) Si 3 N 4 ceramics base material with a brazing material (BAg-8). 30 x 6 using 8 powders
It is bonded to 0x6t (mm) S45C.
この接合品では、当初剪断強度が平均2.46kg/mm2であっ
たのが、50回目のサイクルで既に平均0.31kg/mm2にまで
低下してしまっており、前記本願発明品の性能の高さを
知ることができる。In this bonded product, the initial shear strength was 2.46 kg / mm 2 on average, but it has already dropped to 0.31 kg / mm 2 on average at the 50th cycle, and the high performance of the product of the present invention is obtained. You can know that.
「発明の効果」 以上説明したように、本発明によれば、耐熱衝撃性が高
く、信頼性に優れ、高寿命なセラミックスと金属との接
合製品を容易に得ることができる。[Advantages of the Invention] As described above, according to the present invention, it is possible to easily obtain a bonded product of ceramics and metal that has high thermal shock resistance, excellent reliability, and long life.
第１図ないし第４図は、この発明を説明するためのもの
で、第１図はこの発明に係る高耐熱衝撃性接合製品の一
例を示す側断面図、第２図は第１図の要部拡大図、第３
図および第４図はそれぞれこの発明の第１および第２の
実施例を示すもので、各々得られた接合品の熱衝撃試験
による剪断強度変化を示すグラフ、第５図は第６図に示
した従来例（比較例）における熱衝撃試験による剪断強
度変化を示すグラフ、第６図は従来の接合製品の一例を
示す側面構成図、第７図は第６図Ａ−Ａ線に沿う断面
図、第８図は他の従来例の要部平面図、第９図は同従来
例の要部側面図である。 １……金属母材、 ２……セラミックス母材、 ５……中間金属片、 ６……セラミックス片、 ７……中間複合層、 ８……メタライズ層、 ９、10……ロウ材。FIGS. 1 to 4 are for explaining the present invention. FIG. 1 is a side sectional view showing an example of a high thermal shock resistant joined product according to the present invention, and FIG. 2 is a main part of FIG. Part enlarged view, 3rd
FIG. 4 and FIG. 4 show the first and second embodiments of the present invention, respectively, and are graphs showing the shear strength change of the jointed products obtained by the thermal shock test, and FIG. 5 is shown in FIG. 6 is a graph showing a change in shear strength by a thermal shock test in a conventional example (comparative example), FIG. 6 is a side view showing an example of a conventional joined product, and FIG. 7 is a sectional view taken along line AA in FIG. FIG. 8 is a plan view of a main part of another conventional example, and FIG. 9 is a side view of the main part of the conventional example. 1 ... Metal base material, 2 ... Ceramic base material, 5 ... Intermediate metal piece, 6 ... Ceramic piece, 7 ... Intermediate composite layer, 8 ... Metallized layer, 9, 10 ... Brazing material.
Claims (2)
を形成し、このメタライズ層に沿って多数の高展延性金
属片とセラミックス片とを交互に密着するとともに両者
の各端面が前記メタライズ層と密着するように配置して
中間複合層とし、この中間複合層を前記メタライズ層上
に接合するとともに、この中間複合層上に金属母材を接
合することを特徴とするセラミックスと金属との高耐熱
衝撃性接合方法。1. A metallized layer is formed on the surface of a ceramic base material, and a large number of highly malleable metal pieces and ceramic pieces are alternately adhered along the metallized layer, and both end faces of the metallized layer and the ceramic piece are the metallized layer. Highly heat-resistant ceramics and metals, characterized in that they are arranged in close contact to form an intermediate composite layer, the intermediate composite layer is bonded onto the metallized layer, and a metal base material is bonded onto the intermediate composite layer. Impact bonding method.
て多数の高展延性金属片とセラミックス片とを交互に配
列、密着してなる中間複合層が前記セラミックス母材上
にメタライズ層を介して前記中間複合層を形成する高展
延性金属片とセラミックス片の各片の端面が密着するよ
うにして接合され、この中間複合層上に金属母材が接合
されていることを特徴とするセラミックスと金属との高
耐熱衝撃性接合製品。2. An intermediate composite layer formed by alternately arranging and adhering a large number of highly malleable metal pieces and ceramic pieces along the longitudinal direction of the joint surface of the ceramic base material and adhering them through a metallized layer on the ceramic base material. Ceramics characterized in that the highly malleable metal piece and the ceramic piece forming the intermediate composite layer are joined so that the end surfaces of the pieces are in close contact with each other, and the metal base material is joined onto the intermediate composite layer. High thermal shock resistance joint product of metal and metal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30707386A JPH0776137B2 (en) | 1986-12-23 | 1986-12-23 | High thermal shock resistance joining method of ceramics and metal and joining product |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30707386A JPH0776137B2 (en) | 1986-12-23 | 1986-12-23 | High thermal shock resistance joining method of ceramics and metal and joining product |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63159264A JPS63159264A (en) | 1988-07-02 |
| JPH0776137B2 true JPH0776137B2 (en) | 1995-08-16 |
Family
ID=17964716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30707386A Expired - Lifetime JPH0776137B2 (en) | 1986-12-23 | 1986-12-23 | High thermal shock resistance joining method of ceramics and metal and joining product |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0776137B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7521870B2 (en) | 2004-06-08 | 2009-04-21 | Ngk Insulators, Ltd. | Luminous containers and those for high pressure discharge lamps |
| US7288303B2 (en) | 2004-06-08 | 2007-10-30 | Ngk Insulators, Ltd. | Structures of brittle materials and metals |
-
1986
- 1986-12-23 JP JP30707386A patent/JPH0776137B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63159264A (en) | 1988-07-02 |
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