JPH0782617B2 - Non-magnetic substrate for magnetic head and manufacturing method thereof - Google Patents
Non-magnetic substrate for magnetic head and manufacturing method thereofInfo
- Publication number
- JPH0782617B2 JPH0782617B2 JP1214208A JP21420889A JPH0782617B2 JP H0782617 B2 JPH0782617 B2 JP H0782617B2 JP 1214208 A JP1214208 A JP 1214208A JP 21420889 A JP21420889 A JP 21420889A JP H0782617 B2 JPH0782617 B2 JP H0782617B2
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- magnetic
- magnetic head
- magnetic substrate
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Thin Magnetic Films (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Magnetic Heads (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、金属性磁性膜を蒸着するための非磁性の磁気
ヘッド用非磁性基板及びその製造方法に関するもので、
特に機械加工によるチッピング特性に優れた磁気ヘッド
用非磁性基板及びその製造方法に関するものである。TECHNICAL FIELD The present invention relates to a non-magnetic substrate for a non-magnetic magnetic head for depositing a metallic magnetic film, and a method for manufacturing the same.
In particular, the present invention relates to a non-magnetic substrate for a magnetic head having excellent chipping characteristics by machining and a method for manufacturing the same.
従来技術 従来この種の用途のものとして、本発明者等は、CoO−N
iO系セラミックスについて従来より研究を進め、CoxNi
2-xO2(ただし0≦x≦1.8)なる組成の酸化物が有効で
あるとして既に開示した。PRIOR ART Conventionally, for this type of application, the present inventors have proposed CoO-N
Research on iO-based ceramics has been advanced from the past, and CoxNi
It has already been disclosed that an oxide having a composition of 2- xO 2 (where 0 ≦ x ≦ 1.8) is effective.
さらに、MgO−CaO−CoO−NiO系セラミックスについても
研究を進め、MgO、CaOそれぞれが30モル%以下で、残部
がCoxNi2-xO2(ただし0≦x≦1.8)なる組成の酸化物
も有効であるとして開示した。Furthermore, studying the MgO-CaO-CoO-NiO ceramics, MgO, respectively CaO is 30 mol% or less, the balance being CoxNi 2- xO 2 (provided that 0 ≦ x ≦ 1.8) comprising an oxide composition effective also It was disclosed as being.
また、これらの酸化物に関する添加材について検討した
結果、MnO、TiO2、Al2O3、CaO、Y2O3、TiN、B2O3、SiO2
が有効であることを発見し、これも開示した。In addition, as a result of investigating additive materials related to these oxides, MnO, TiO 2 , Al 2 O 3 , CaO, Y 2 O 3 , TiN, B 2 O 3 , SiO 2
Have been found to be effective and also disclosed.
これらの酸化物の製造方法として、混合、仮焼、
微粉砕、造粒、CIP、雰囲気焼結、HIPを順次行
なうことが有効であるとして開示した。As a method for producing these oxides, mixing, calcination,
It has been disclosed that it is effective to carry out pulverization, granulation, CIP, atmospheric sintering, and HIP sequentially.
しかし、これらの酸化物は、その製造条件によりチッピ
ング特性が異なり、条件しだいでは、機械加工時に大き
なチッピングを生じる欠点があった。However, these oxides have different chipping characteristics depending on the production conditions, and depending on the conditions, there is a drawback that large chipping occurs during machining.
発明が解決しようとする問題点 本発明は、上記の欠点を解決したもので、具体的には結
晶粒径が5μm以下であり、しかも130x10-7/℃以上の
熱膨張率を有し、ビッカース硬度500〜700の特性を持
ち、さらに他のヘッド構成材料間で過度の化学的侵食反
応を起こさない材料を提供することが目的である。DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention The present invention solves the above-mentioned drawbacks, and specifically has a crystal grain size of 5 μm or less and a thermal expansion coefficient of 130 × 10 −7 / ° C. or more, and Vickers It is an object to provide a material having a hardness of 500 to 700 and not causing an excessive chemical erosion reaction between other head constituent materials.
また、上記の材料を製造する方法を提供することが目的
である。It is also an object to provide a method of manufacturing the above materials.
発明の構成 即ち、本発明は、(1)CoxNi2-xO2(ただし0<x≦1.
8)のセラミックスにおいて、その結晶粒径が5μm以
下であることを特徴とする磁気ヘッド用非磁性基板に関
する。Configuration of the Invention Namely, the present invention is, (1) CoxNi 2- xO 2 ( provided that 0 <x ≦ 1.
The non-magnetic substrate for a magnetic head according to 8), wherein the crystal grain size is 5 μm or less.
また、本発明は、(2)混合、仮焼、微粉砕、
造粒、CIP、雰囲気焼結、HIPを順次行うことから
なる磁気ヘッド用非磁性基板の製造方法の雰囲気焼結に
おいて、酸素雰囲気下、1150〜1300℃でホットプレス処
理を行なうことを特徴とする上記(1)の磁気ヘッド用
非磁性基板の製造方法に関する。The present invention also includes (2) mixing, calcination, fine pulverization,
In the atmosphere sintering of the method for manufacturing a non-magnetic substrate for a magnetic head, which comprises sequentially performing granulation, CIP, atmosphere sintering, and HIP, the hot press treatment is performed at 1150 to 1300 ° C. in an oxygen atmosphere. The present invention relates to the method (1) for manufacturing a non-magnetic substrate for a magnetic head.
さらに、本発明は、(3)混合、仮焼、微粉砕、
造粒、CIP、雰囲気焼結を順次行うことからなる
磁気ヘッド用非磁性基板の製造方法の雰囲気焼結におい
て、酸素雰囲気下、1150〜1300℃でホットプレス処理を
行なうことを特徴とする上記(1)の磁気ヘッド用非磁
性基板の製造方法に関する。Furthermore, the present invention provides (3) mixing, calcination, fine pulverization,
In the atmosphere sintering of the method for manufacturing a non-magnetic substrate for a magnetic head, which comprises sequentially performing granulation, CIP, and atmosphere sintering, hot pressing is performed at 1150 to 1300 ° C. in an oxygen atmosphere, as described above ( 1) A method for manufacturing a non-magnetic substrate for a magnetic head.
問題点を解決するための手段及び作用 本発明者等は、CoM−NiO系セラミックスについて従来よ
り研究を進めてきたが、機械加工時のチッピング特性と
結晶粒径の関係について詳細に検討した結果、結晶粒径
が5μm以下である場合、機械加工時のチッピングが小
さくかつ数も少なく、有効であることを見い出した。Means and Actions for Solving Problems The present inventors have been researching CoM-NiO ceramics from the past, but as a result of detailed study of the relationship between the chipping characteristics and the grain size during machining, It has been found that when the crystal grain size is 5 μm or less, chipping during machining is small and the number is small, which is effective.
CoO−NiO系セラミックスにおいて、機械加工時のチッピ
ング特性(チッピング量、チッピングの大きさ)は、結
晶粒径と密接な関係がある。即ち、結晶粒径が小さいほ
ど、チッピング特性は優れていることが発明者等の検討
より明らかになった。In CoO-NiO ceramics, the chipping characteristics (chipping amount, size of chipping) during machining are closely related to the crystal grain size. That is, the inventors have found that the smaller the crystal grain size, the better the chipping characteristics.
具体的には、結晶粒径の大きさ(G)と最大チッピング
の大きさ(T)には、砥粒径が2〜6μmの場合、およ
そ次式の関係があることを把握した。Specifically, it has been understood that the size (G) of the crystal grain size and the size (T) of the maximum chipping have a relationship of the following equation when the abrasive grain size is 2 to 6 μm.
T≦2G〜3G 機械加工時における最大チッピングの大きさの許容範囲
を10μm程度と考えると、上式より結晶粒径を5μm以
下に抑えることが必要である。T ≦ 2G to 3G Considering that the allowable range of the maximum chipping size during machining is about 10 μm, it is necessary to suppress the crystal grain size to 5 μm or less from the above equation.
また、上記の目的を達成するためにはその製造方法とし
て、ホットプレスを使用することが有効であることを見
い出した。Further, it has been found that it is effective to use a hot press as a manufacturing method for achieving the above object.
ホットプレスを用いた場合、常圧焼結の温度条件(1230
〜1400℃)より低い温度で緻密に焼結することが可能
で、従って焼結体の結晶粒の成長を抑える利点がある。When using a hot press, the temperature conditions for pressureless sintering (1230
It is possible to densely sinter at a temperature lower than (~ 1400 ℃), and therefore there is an advantage of suppressing the growth of crystal grains of the sintered body.
ホットプレスは、酸化物の挙動から酸素雰囲気下で行な
うのが望ましい。詳しくは、800〜1000℃で、不活性ガ
ス(低温側)と酸素(高温側)を切り替えることが望ま
しい。また、CoOとNiOとのモル比により最適な処理温度
は異なるが、1150〜1300℃が望ましい。Hot pressing is preferably performed in an oxygen atmosphere because of the behavior of oxides. Specifically, it is desirable to switch the inert gas (low temperature side) and oxygen (high temperature side) at 800 to 1000 ° C. The optimum treatment temperature varies depending on the molar ratio of CoO and NiO, but is preferably 1150 to 1300 ° C.
以下、製造方法を具体的に述べる。The manufacturing method will be specifically described below.
市販の各酸化物を原料として、所望組成になるよう秤量
し、ボールミルにより混合する。混合は例えばエタノー
ル中湿式ボールミルで10〜30時間行なう。Each commercially available oxide is used as a raw material, weighed to have a desired composition, and mixed by a ball mill. Mixing is carried out, for example, in a wet ball mill in ethanol for 10 to 30 hours.
乾燥後、CIP成形し、例えばAr中850〜1100℃で仮焼し、
次いで粗砕機を用いて粉砕し、100〜200μmの篩で篩分
けを行なう。After drying, CIP molding, calcination in Ar at 850-1100 ℃,
Then, it is crushed using a coarse crusher and sieved with a sieve of 100 to 200 μm.
仮焼粉はさらに例えばエタノール中湿式ボールミルで20
〜72時間処理し、1μm以下に微粉砕する。The calcined powder can be further processed, for example, in a wet type ball mill in ethanol.
Treat for ~ 72 hours and pulverize to 1 μm or less.
これを造粒後、CIP成形し、O2中、ホットプレス処理を
行なう。After granulating this, it is CIP molded and hot pressed in O 2 .
条件は、CoO/NiOモル比に対応させて1100〜1300℃で、1
00〜500kg/cm2、1〜2時間が望ましい。The conditions are 1100 to 1300 ° C, corresponding to the CoO / NiO molar ratio, and 1
00 to 500 kg / cm 2 , 1 to 2 hours is desirable.
この焼結体を更にHIP処理する。これは、強度を向上さ
せるために好ましい。条件としては、800〜1200kg/c
m2、1000〜1250℃、1〜2時間が望ましい。HIP処理温
度は、ホットプレス処理温度より低い方が望ましい。こ
れにより、HIP処理時の結晶粒径の成長を抑えることが
できる。This sintered body is further HIP processed. This is preferable for improving strength. The condition is 800-1200kg / c
m 2, 1000~1250 ℃, desirably 1 to 2 hours. The HIP treatment temperature is preferably lower than the hot press treatment temperature. This makes it possible to suppress the growth of the crystal grain size during the HIP treatment.
このようにして得られた焼結体は、緻密で結晶粒径が小
さく、チッピング特性が良好で、従来の材料よりも優れ
ていることが確認できた。It was confirmed that the sintered body thus obtained was dense, had a small crystal grain size, had good chipping characteristics, and was superior to conventional materials.
実施例 組成式CoxNi2-xO2(x=1.0)で表わされる酸化物をNi
O、CoOより調整した。これにAl2O3を1.5wt%、CaOを2.0
wt%、添加材として加えた。混合は、エタノール中湿式
ボールミルで22時間処理した。The oxide Ni represented by Example composition formula CoxNi 2- xO 2 (x = 1.0 )
Adjusted from O and CoO. 1.5 wt% of Al 2 O 3 and 2.0 of CaO
wt%, added as an additive. Mixing was done in a wet ball mill in ethanol for 22 hours.
乾燥後、CIP成形し、Ar中1000℃で仮焼後、150μm以下
に粉砕した。After drying, it was CIP molded, calcined in Ar at 1000 ° C., and then pulverized to 150 μm or less.
仮焼粉をさらにエタノール中湿式ボールミルで70時間処
理し、1μm以下に微粉砕した。これを造粒後、CIP成
形し、O2中1250℃でホットプレスにて焼結した。The calcined powder was further treated with a wet ball mill in ethanol for 70 hours and finely pulverized to 1 μm or less. This was granulated, then CIP molded and sintered by hot pressing in O 2 at 1250 ° C.
この焼結体の特性を以下に示す。The characteristics of this sintered body are shown below.
相対密度 98.5% 結晶粒径 最大5μm 硬度 Hv 625 抗折力 27kg/mm2 熱膨張率 132x10-7/℃ この焼結体を切削研磨して、26x26x0.7(mm)の基板を
作製した。これを、ダイヤモンド砥粒(#3000、C/C=1
00)を用いたブレードにより切削した。切削条件は、回
転数20,000rpm、切り込み、0.2mm、送り0.5mm/秒とし
た。Relative density 98.5% Crystal grain size Maximum 5 μm Hardness Hv 625 Transverse strength 27 kg / mm 2 Thermal expansion coefficient 132x10 -7 / ℃ This sintered body was cut and polished to prepare a 26x26x0.7 (mm) substrate. This is a diamond abrasive grain (# 3000, C / C = 1
00) was used for cutting with a blade. The cutting conditions were a rotation speed of 20,000 rpm, a cutting depth of 0.2 mm, and a feed of 0.5 mm / sec.
この時の、チッピングの最大値を表1に示す。また、基
板一辺(26mm)でのチッピング数をその大きさごとに測
定し表2に示す。比較例として、常圧焼結により焼結し
た最大結晶粒径の異なる焼結体のチッピング特性を示
す。The maximum value of chipping at this time is shown in Table 1. Further, the number of chippings on one side (26 mm) of the substrate was measured for each size and shown in Table 2. As a comparative example, the chipping characteristics of sintered bodies having different maximum crystal grain sizes which are sintered by atmospheric pressure sintering are shown.
発明の効果 (1)本発明に係る基板は、機械加工によるチッピング
特性に優れている。 EFFECTS OF THE INVENTION (1) The substrate according to the present invention has excellent chipping characteristics by machining.
(2)本製造方法で作成した磁気ヘッド用非磁性基板
は、結晶粒径を5μm以下に抑えることができる。(2) The crystal grain size of the non-magnetic substrate for a magnetic head manufactured by this manufacturing method can be suppressed to 5 μm or less.
これにより、切削時のチッピングの発生を抑止できる利
点がある。This has the advantage that chipping can be suppressed during cutting.
(3)さらに、強度を高めることにより磁気ヘッドの短
寿命化や非磁性基板の変形、割れ等を抑えることがで
き、ヘッドの耐摩耗性、耐久性にすぐれている利点があ
る。(3) Further, by increasing the strength, it is possible to shorten the life of the magnetic head and suppress the deformation and cracking of the non-magnetic substrate, and there is an advantage that the head has excellent wear resistance and durability.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平2−94408(JP,A) 特開 平2−94407(JP,A) 特開 平1−287811(JP,A) 特開 平2−168602(JP,A) ─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP-A-2-94408 (JP, A) JP-A-2-94407 (JP, A) JP-A 1-287811 (JP, A) JP-A-2- 168602 (JP, A)
Claims (3)
ミックスにおいて、その結晶粒径が5μm以下であるこ
とを特徴とする磁気ヘッド用非磁性基板。1. A CoxNi 2- xO 2 (provided that 0 <x ≦ 1.8) in ceramics, non-magnetic substrate for a magnetic head, characterized in that the crystal grain diameter of 5μm or less.
P、雰囲気焼結、HIPを順次行うことからなる磁気ヘ
ッド用非磁性基板の製造方法の雰囲気焼結において、酸
素雰囲気下、1150〜1300℃でホットプレス処理を行なう
ことを特徴とする特許請求の範囲第(1)項記載の磁気
ヘッド用非磁性基板の製造方法。2. Mixing, calcination, fine pulverization, granulation, CI
In the atmosphere sintering of the method for manufacturing a non-magnetic substrate for a magnetic head, which comprises sequentially performing P, atmosphere sintering, and HIP, in an oxygen atmosphere, hot pressing is performed at 1150 to 1300 ° C. A method of manufacturing a non-magnetic substrate for a magnetic head according to item (1).
P、雰囲気焼結を順次行うことからなる磁気ヘッド用
非磁性基板の製造方法の雰囲気焼結において、酸素雰囲
気下、1150〜1300℃でホットプレス処理を行なうことを
特徴とする特許請求の範囲第(1)項記載の磁気ヘッド
用非磁性基板の製造方法。3. Mixing, calcination, fine pulverization, granulation, CI
P, hot-pressing treatment at 1150 to 1300 ° C. in an oxygen atmosphere in the atmosphere sintering of the method for manufacturing a non-magnetic substrate for a magnetic head, which comprises sequentially performing atmosphere sintering. A method of manufacturing a non-magnetic substrate for a magnetic head according to the item (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1214208A JPH0782617B2 (en) | 1989-08-22 | 1989-08-22 | Non-magnetic substrate for magnetic head and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1214208A JPH0782617B2 (en) | 1989-08-22 | 1989-08-22 | Non-magnetic substrate for magnetic head and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0380413A JPH0380413A (en) | 1991-04-05 |
| JPH0782617B2 true JPH0782617B2 (en) | 1995-09-06 |
Family
ID=16652025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1214208A Expired - Lifetime JPH0782617B2 (en) | 1989-08-22 | 1989-08-22 | Non-magnetic substrate for magnetic head and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0782617B2 (en) |
-
1989
- 1989-08-22 JP JP1214208A patent/JPH0782617B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0380413A (en) | 1991-04-05 |
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