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JPH0795158B2 - Projection optics - Google Patents
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JPH0795158B2 - Projection optics - Google Patents

Projection optics

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Publication number
JPH0795158B2
JPH0795158B2 JP26551293A JP26551293A JPH0795158B2 JP H0795158 B2 JPH0795158 B2 JP H0795158B2 JP 26551293 A JP26551293 A JP 26551293A JP 26551293 A JP26551293 A JP 26551293A JP H0795158 B2 JPH0795158 B2 JP H0795158B2
Authority
JP
Japan
Prior art keywords
image
plane
real image
optical
erecting real
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP26551293A
Other languages
Japanese (ja)
Other versions
JPH075391A (en
Inventor
敬介 荒木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP26551293A priority Critical patent/JPH0795158B2/en
Publication of JPH075391A publication Critical patent/JPH075391A/en
Publication of JPH0795158B2 publication Critical patent/JPH0795158B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Optical Systems Of Projection Type Copiers (AREA)
  • Exposure Or Original Feeding In Electrophotography (AREA)

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は電子写真複写機、ファク
シミリ等の光学機器において原画である物体面を像面上
に投影する際に好適な投影光学系に関し、特に集光性光
伝送体若しくはマイクロレンズ等から成るレンズ素子を
複数個、列状に配置した所謂複眼系を用い物体面を像面
上に縮少若しくは拡大等各種の倍率で投影させる際に好
適な投影光学系に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a projection optical system suitable for projecting an object plane which is an original image onto an image plane in an optical device such as an electrophotographic copying machine or a facsimile machine, and more particularly to a light-converging optical transmission body or The present invention relates to a projection optical system suitable for projecting an object surface onto an image surface at various magnifications such as reduction or enlargement, using a so-called compound eye system in which a plurality of lens elements including microlenses are arranged in a row. .

【0002】[0002]

【従来の技術】従来より電子写真複写機やファクシミリ
等の光学機器においては複眼系を利用して物体面を所定
の倍率で像面上に投影している。図2は例えば特開昭5
5−83001号公報で提案されている正立等倍におけ
る複眼系の概略図である。同図において20−1は複眼
系であり集光性光伝送体若しくはマイクロレンズ等から
成る複数の正立実像系21より成っている。そして個々
の正立実像系21により物体面1の所定範囲を像面2上
に正立等倍像として投影し、重ね合わせることにより一
体像を形成している。これにより単独の正立実像系では
カバー出来ない大きな物体面を像面上に投影している。
図2に示す複眼系は投影倍率が等倍である為各々の正立
実像系21の光軸が平行となるように構成され、かつ光
軸上の各光線が物体面1及び像面2と垂直に交わうよう
に構成されている。これにより各々の正立実像系21に
よる像面上の投影像、所謂多重像を像面上で互いに重ね
合わせて一体像を形成するのを可能としている。
2. Description of the Related Art Conventionally, in an optical device such as an electrophotographic copying machine or a facsimile, a compound eye system is used to project an object surface onto an image surface at a predetermined magnification. FIG. 2 shows, for example, JP-A-5
It is a schematic diagram of the compound eye system in the erecting equal-magnification type proposed by the 5-83001 gazette. In the figure, reference numeral 20-1 denotes a compound eye system, which is composed of a plurality of erecting real image systems 21 including a light-condensing optical transmission body or microlenses. Then, each erecting real image system 21 projects a predetermined range of the object plane 1 onto the image plane 2 as an erecting equal-magnification image, and superposes them to form an integral image. As a result, a large object surface that cannot be covered by a single erecting real image system is projected onto the image surface.
Since the compound eye system shown in FIG. 2 has the same projection magnification, the optical axes of the respective erect real image systems 21 are configured to be parallel, and each light ray on the optical axis forms an object plane 1 and an image plane 2. It is configured to intersect vertically. This makes it possible to form an integral image by superimposing projected images on the image plane, so-called multiple images, by the respective erecting real image systems 21 on the image plane.

【0003】しかしながら図2において投影光学系を縮
少系若しくは拡大系とする為に物体距離を変化させると
各々の正立実像系による多重像が像面上で重ならず、ず
れてしまい所謂『像ずれ』を起してくる。このときの像
ずれ現象は投影像の光学性能を著しく低下させる原因と
なっている。
However, in FIG. 2, when the object distance is changed in order to make the projection optical system a reduction system or an expansion system, the multiple images by the respective erect real image systems do not overlap on the image plane and are displaced, which is so-called ""Imageshift". The image shift phenomenon at this time is a cause of significantly deteriorating the optical performance of the projected image.

【0004】これに対し複眼系を用い縮少投影若しくは
拡大投影したときの多重像の像ずれを補正する方法が例
えば特開昭57−16415号公報で提案されている。
同公報では図3に示すように複眼系30を構成する複数
の正立実像系31をその光軸が中央の正立実像系310
の光軸311に対して序々に傾くように配置し、これに
よって多重像のずれを補正している。しかしながらこの
複眼系では正立実像系毎にその光学性能や光軸長(物体
面から像面までの光軸の光学的な長さ)が異っており、
又この複眼系では物体面周辺の投影を行う正立実像系の
光軸上の光線が物体面と像面に交わう際、垂直から大き
く外れてくる。この為図4に示すようにその傾きが大き
くなっている正立実像系41では、投影倍率が等しくな
る物体面が正規の物体面1より傾いて物体面42の如く
になってくる。
On the other hand, a method of correcting the image shift of the multiple images when performing the reduced projection or the enlarged projection using the compound eye system is proposed in, for example, Japanese Patent Laid-Open No. 57-16415.
In this publication, as shown in FIG. 3, a plurality of erecting real image systems 31 constituting a compound eye system 30 are provided, and an erecting real image system 310 whose optical axis is in the center.
Is arranged so as to gradually incline with respect to the optical axis 311 of the above, and thereby the shift of the multiple image is corrected. However, in this compound eye system, the optical performance and the optical axis length (optical length of the optical axis from the object plane to the image plane) differ for each erect real image system,
Further, in this compound eye system, when the light rays on the optical axis of the erecting real image system for projecting around the object plane intersect the object plane and the image plane, they largely deviate from the vertical. Therefore, as shown in FIG. 4, in the erecting real image system 41 whose inclination is large, the object surface having the same projection magnification is inclined from the normal object surface 1 and becomes like the object surface 42.

【0005】一方、投影倍率の等しくなる像面も同様に
正規の像面2に対して傾いて像面43の如くになってく
る。この結果、物体面周辺では図4に示す光路長LL41
とLL42の長さの差に相当する量だけ同一視野範囲内に
おいて部分的に結像倍率が異ってくる所謂『倍率ずれ』
が生じてくる。
On the other hand, the image plane having the same projection magnification is also inclined like the image plane 43 with respect to the regular image plane 2. As a result, the optical path length LL41 shown in FIG.
And LL42, the so-called "magnification deviation" in which the imaging magnification partially differs within the same field of view by an amount corresponding to the difference in length.
Will occur.

【0006】このように従来の複眼系を用いた投影光学
系では多重像のずれを補正しても倍率ずれが生じてお
り、等倍以外の投影では高い光学性能を有した投影像を
得るのが難しくなっている。
As described above, in the conventional projection optical system using the compound eye system, the magnification deviation occurs even if the deviation of the multiple images is corrected, and a projection image having high optical performance is obtained in the projection other than the equal magnification. Is getting harder.

【0007】又、同公報では必要に応じて各正立実像系
の入射端面若しくは射出端面を偏芯させたり、屈折力を
付加させたりして、倍率ずれを軽減しようとしている
が、これでは投影光学系全体が複雑になってくる。そし
て原理的にも、各正立実像系の光軸は物体面、像面に垂
直になり得ないので、こういう補正には限度があり、こ
うした手段では倍率ずれを大幅に除去することが困難で
ある。
Further, in the publication, if necessary, the entrance end surface or the exit end surface of each erecting real image system is eccentric or the refracting power is added to reduce the magnification deviation. The whole optical system becomes complicated. In principle, the optical axis of each erecting real image system cannot be perpendicular to the object plane and the image plane.Therefore, there is a limit to this kind of correction, and it is difficult to remove the magnification deviation by such means. is there.

【0008】この他、複数の正立実像系より成る複眼系
を用い縮少投影若しくは拡大投影を行った際の多重像の
像ずれを補正したものが、例えば特開昭59−4542
0号公報、特開昭59−216115号公報等で提案さ
れている。
In addition, a system in which a compound eye system composed of a plurality of erecting real image systems is used to correct the image shift of multiple images when performing reduced projection or enlarged projection is disclosed in, for example, Japanese Patent Laid-Open No. 59-4542.
No. 0, JP 59-216115 A and the like are proposed.

【0009】特開昭59−45420号公報では図5に
示すように複数の正立実像系51より成る複眼系50の
物体面1側若しくは像面2側の少なくとも一方に各々の
正立実像系毎に偏向角の異なるフレネルレンズ等から成
る光束偏向部材52、53を配置することによって多重
像の像ずれを補正した投影光学系を提案している。
In Japanese Patent Laid-Open No. 59-45420, as shown in FIG. 5, an erecting real image system is provided on at least one of the object plane 1 side and the image plane 2 side of a compound eye system 50 composed of a plurality of erecting real image systems 51. A projection optical system is proposed in which image deviation of a multiple image is corrected by arranging light beam deflecting members 52 and 53 each having a Fresnel lens having a different deflection angle.

【0010】又、特開昭59−216115号公報では
図6に示すように複数の正立実像系61より成る複眼系
60の物体面1側若しくは像面2側の少なくとも一方に
複数の球面レンズ62,63を配置して多重像の像ずれ
を補正した投影光学系を提案している。
Further, in Japanese Patent Laid-Open No. 59-216115, as shown in FIG. 6, a plurality of spherical lenses are provided on at least one of the object plane 1 side and the image plane 2 side of a compound eye system 60 composed of a plurality of erecting real image systems 61. A projection optical system is proposed in which 62 and 63 are arranged to correct the image shift of multiple images.

【0011】しかしながら前記2つの公報で提案されて
いる投影光学系はいずれも各々の正立実像系の光軸長が
異っており、しかも物体面周辺を投影する正立実像系の
光軸が物体面と像面に対して大きく傾いている。この
為、前述の如く多重像の像ずれを補正することはできる
が倍率ずれが生じ、投影像の光学性能を大きく低下させ
る原因となっている。
However, in the projection optical systems proposed in the above two publications, the optical axes of the erecting real image systems are different, and the optical axes of the erecting real image systems projecting the periphery of the object plane are different. It is greatly inclined with respect to the object plane and the image plane. Therefore, although the image shift of the multiple image can be corrected as described above, the magnification shift occurs, which causes a great decrease in the optical performance of the projected image.

【0012】[0012]

【発明が解決しようとする課題】本発明は複数の正立実
像系より成る複眼系を用いて物体面を縮少若しくは拡大
等の等倍以外の倍率を含んで投影する際、多重像の像ず
れを補正すると共に倍率ずれを同時に減少あるいは除去
させることにより投影像の光学性能の向上を図った投影
光学系の提供を目的とする。
SUMMARY OF THE INVENTION According to the present invention, when a compound eye system composed of a plurality of erect real image systems is used to project an object plane including a magnification other than equal magnification such as reduction or enlargement, an image of a multiple image is formed. An object of the present invention is to provide a projection optical system that improves the optical performance of a projected image by correcting the deviation and simultaneously reducing or eliminating the magnification deviation.

【0013】本発明の更なる目的は各々の正立実像系に
よる像面上での光量分布の重ね合わせより生ずる光量ム
ラを軽減させ、全体的に良好なる投影像の得られる投影
光学系の提供にある。
A further object of the present invention is to provide a projection optical system capable of reducing unevenness in light quantity caused by superimposing light quantity distributions on the image plane by respective erecting real image systems and obtaining a good projection image as a whole. It is in.

【0014】[0014]

【課題を解決するための手段】本発明の投影光学系は、
複数の正立実像系を有する複眼系により物体面を縮小又
は拡大倍率で像面上に投影し重ね合わせる際、物体面と
該複眼系との間及び該複眼系と像面との間の光路中に光
束を偏向させる複数の光学部材を有する偏向手段を配置
し、該複数の正立実像系の光軸上の各光線が物体面及び
像面と垂直となるように構成し、該複数の正立実像系を
各々同一のレンズ素子より構成し、各々異なった平面上
に配置して各々の光路長が同じになるようにしたことを
特徴としている。
The projection optical system of the present invention comprises:
Optical paths between the object plane and the compound eye system and between the compound eye system and the image plane when projecting and superimposing the object plane on the image plane with the compound eye system having a plurality of erecting real image systems at a reduced or magnified magnification A deflecting unit having a plurality of optical members for deflecting a light beam is disposed therein, and each light beam on the optical axis of the plurality of erecting real image systems is configured to be perpendicular to the object plane and the image plane. The erecting real image system is composed of the same lens element and arranged on different planes so that the respective optical path lengths are the same.

【0015】特に、前記複数の光学部材を各々前記複数
の正立実像系毎に対向させた複数の反射鏡より構成し、
該複数の反射鏡の角度を各々該正立実像系毎に変化させ
て配置したことや、前記光学部材を反射鏡より構成し、
該1つの反射鏡により前記複数の正立実像系のうちの少
なくとも2つを通過する光束を偏向させるようにしたこ
と等を特徴としている。
In particular, each of the plurality of optical members is composed of a plurality of reflecting mirrors facing each other for each of the plurality of erecting real image systems,
The angle of the plurality of reflecting mirrors is changed for each erecting real image system, and the optical member is composed of reflecting mirrors,
It is characterized in that a light flux passing through at least two of the plurality of erecting real image systems is deflected by the one reflecting mirror.

【0016】この他、本発明の特徴は実施例において記
載されている。
Besides, the features of the present invention are described in the embodiments.

【0017】[0017]

【実施例】図1は本発明の投影光学系を縮少系で構成し
たときの一実施例の光学系の概略図である。同図におい
て1は物体面、2は像面、10は複眼系であり、複数の
正立実像系11,12,13,‥‥より成っている。
FIG. 1 is a schematic view of an optical system of one embodiment when the projection optical system of the present invention is composed of a reduction system. In the figure, 1 is an object plane, 2 is an image plane, 10 is a compound eye system, and is composed of a plurality of erect real image systems 11, 12, 13 ,.

【0018】点A2,B2,C2,‥‥と点A3,B
3,C3,‥‥は各々正立実像系を通過した光束を各々
所定方向に偏向させる為の光学部材を列状に配置してい
る位置である。特に本実施例では光学部材を反射鏡より
構成し所定の傾きを有して配置している。
Points A2, B2, C2, ... And points A3, B
3, C3, ... Are positions where optical members for arranging the light beams passing through the erecting real image system in respective predetermined directions are arranged in rows. Particularly in this embodiment, the optical member is composed of a reflecting mirror and is arranged with a predetermined inclination.

【0019】尚、本実施例では反射鏡は簡単の為省略
し、反射鏡で反射したときの各正立実像系の光軸上の光
線の光路のみを示している。
In the present embodiment, the reflecting mirror is omitted for the sake of simplicity, and only the optical paths of light rays on the optical axis of each erecting real image system when reflected by the reflecting mirror are shown.

【0020】物体面1上における点A1,B1,C1,
‥‥及び像面2上における点A4,B4,C4,‥‥は
正立実像系11,12,13,‥‥の光軸上の光線L
1,L2,L3,‥‥が各々交わう位置である。
Points A1, B1, C1, on the object plane 1
... and the points A4, B4, C4, ... On the image plane 2 are the rays L on the optical axis of the erecting real image system 11, 12, 13 ,.
It is the position where 1, L2, L3, ...

【0021】本実施例では物体面1上の点A1〜E1の
1方向に対して点A2〜E2に各々光学部材を配置し、
1つの光学部材列を構成している。物体面1上の他の1
方向の点F1〜J1に対しても同様に点F2〜J2に各
々光学部材を配置し、1つの光学部材列を構成してい
る。そして2つの光学部材列を物体面1に対して上下方
向に段状に配置している。本実施例では2つの光学部材
列より1つの偏向手段を構成している。
In this embodiment, optical members are respectively arranged at points A2 to E2 with respect to one direction of points A1 to E1 on the object plane 1.
It constitutes one optical member row. The other one on the object plane 1
Similarly, with respect to the points F1 to J1 in the direction, the optical members are respectively arranged at the points F2 to J2 to form one optical member row. The two optical member rows are arranged in a step shape in the vertical direction with respect to the object plane 1. In this embodiment, one optical deflector is composed of two optical member rows.

【0022】像面2側においても物体面1側と同様に点
A3〜E3に配置した複数の光学部材より1つの光学部
材列を構成し、点F3〜J3に配置した複数の光学部材
より1つの光学部材列を構成し、これら2つの光学部材
列を像面2に対して上下方向に段状に設けている。これ
により像面側の偏向手段を構成している。
Also on the image plane 2 side, one optical member row is composed of a plurality of optical members arranged at points A3 to E3 similarly to the object plane 1 side, and one optical member row is made of a plurality of optical members arranged at points F3 to J3. One optical member row is configured, and these two optical member rows are provided in a step shape in the vertical direction with respect to the image plane 2. This constitutes the deflecting means on the image plane side.

【0023】又、本実施例では物体側及び像面側の複数
の光学部材列を各々段状に設けることにより各々の光学
部材に対する複数の正立実像系が空間内において互いに
干渉しないように構成している。
Further, in this embodiment, a plurality of optical member rows on the object side and the image surface side are provided in a stepwise manner so that a plurality of erecting real image systems for each optical member do not interfere with each other in space. is doing.

【0024】本実施例では物体面1の所定範囲を、例え
ば点C1近傍の物体面を位置C2に所定の傾きをもって
配置した反射鏡を介し、正立実像系13により点C3に
配置している反射鏡で反射させた後、像面2上の点C4
近傍に縮少投影させている。このとき本実施例では点C
1,C2,C3,C4が同一平面上に位置するように構
成している。これによって正立実像系の光軸の軌跡が同
一平面上に存在するようにして各正立実像系の投影像が
相対的に回転して『回転ぶれ』を起さないようにしてい
る。これらのことは他の正立実像系についても全く同様
であり、各々物体面1の所定範囲を像面上に縮少投影さ
せている。
In the present embodiment, the predetermined range of the object plane 1 is arranged at the point C3 by the erecting real image system 13 via a reflecting mirror in which the object plane near the point C1 is arranged at the position C2 with a predetermined inclination. After being reflected by a reflecting mirror, a point C4 on the image plane 2
Reduced projection in the vicinity. At this time, in this embodiment, point C
1, C2, C3, C4 are configured to be located on the same plane. Thus, the loci of the optical axes of the erecting real image systems exist on the same plane, and the projected images of the erecting real image systems are relatively rotated so as not to cause "rotation blur". These are exactly the same for other erecting real image systems, and a predetermined range of the object plane 1 is reduced and projected onto the image plane.

【0025】尚、投影倍率をmとしたとき物体面1上の
点A1と点B1との間隔DA1,B1と像面2上の点A4と
点B4との間隔DA4,B4との比がm倍となるようにして
いる。他の各点における間隔についても同様である。
The ratio of the distance D A1, B1 between the points A1 and B1 on the object plane 1 to the distance D A4, B4 between the points A4 and B4 on the image plane 2 when the projection magnification is m. Is multiplied by m. The same applies to the intervals at other points.

【0026】図1に示す座標系において、例えば点B
1,B2,B3,B4の座標を表わすと B1=(x,LL/2,h/2) B2=(x,LL/2,−h1) B3=(mx,−LL/2,h2 ) B4=(mx,−LL/2,−h/2) となる。
In the coordinate system shown in FIG. 1, for example, the point B
1, B2, B3, expressed the B4 coordinate B1 = (x, LL / 2 , h / 2) B2 = (x, LL / 2, -h 1) B3 = (mx, -LL / 2, h 2 ) B4 = (mx, -LL / 2, -h / 2).

【0027】このとき、点B2,B3のZ軸方向の座標
点h1 ,h2 はLを1つの正立実像系の光軸長とすると
At this time, regarding the coordinate points h 1 and h 2 of the points B2 and B3 in the Z-axis direction, let L be the optical axis length of one erecting real image system.

【0028】[0028]

【数1】 となるように構成されている。尚、ここで光軸長Lは投
影倍率mの関数として表わされ、投影倍率mにより種々
変化する値である。
[Equation 1] Is configured to be. Here, the optical axis length L is expressed as a function of the projection magnification m, and is a value that varies depending on the projection magnification m.

【0029】本実施例では各々の正立実像系によって形
成された像面上の投影像、所謂多重像を物体面1及び像
面2側に設けた複数の反射鏡の形状、傾きを各々変える
ことにより互いに重なり合わせて全体として一体像を形
成し、像ずれを防止している。
In the present embodiment, the projection image on the image plane formed by each erecting real image system, that is, a so-called multiple image, is changed in shape and inclination of a plurality of reflecting mirrors provided on the object plane 1 and image plane 2 sides. As a result, they are overlapped with each other to form an integral image as a whole, thereby preventing image shift.

【0030】又、本実施例では各々の正立実像系の光軸
上の光線L1〜L10が物体面1及び像面2と垂直に交
わうように各正立実像系と各反射鏡の傾きを設定してい
る。即ち各正立実像系の光軸上の光線L1〜L10が反
射鏡で反射した後、互いに平行となり物体面1及び像面
2に垂直に交わうように構成している。
In this embodiment, the inclination of each erecting real image system and each reflecting mirror is such that the light rays L1 to L10 on the optical axis of each erecting real image system intersect perpendicularly with the object plane 1 and the image plane 2. Is set. That is, the light beams L1 to L10 on the optical axis of each erecting real image system are reflected by a reflecting mirror and then become parallel to each other and intersect perpendicularly to the object plane 1 and the image plane 2.

【0031】これにより図4で説明した正立実像系の光
軸上の光線が物体面若しくは像面と傾いて交ったときに
生ずる『倍率ずれ』の発生を防止している。 図7はこ
のときの図1の点A1〜E1の1方向に相当する一部分
の上面図、図8は図1の物体面1上の点C1と点H1を
含む側面図である。
This prevents the occurrence of "magnification shift" which occurs when the light beam on the optical axis of the erecting real image system described in FIG. 4 intersects the object plane or the image plane at an angle. 7 is a top view of a portion corresponding to one direction of points A1 to E1 of FIG. 1 at this time, and FIG. 8 is a side view including points C1 and H1 on the object plane 1 of FIG.

【0032】図7,図8において各符番は図1で示した
ものと全く同様である。
In FIGS. 7 and 8, each reference numeral is exactly the same as that shown in FIG.

【0033】図7において物体面1上の各点A1〜E1
を結ぶ直線D11と像面2上の各点A4〜E4を結ぶ直
線D41は平行になっている。そして複数の正立実像系
11〜15の光軸を各々延長させたときに空間内におい
て一点Oで立体交差若しくは単に交差する各要素が設定
されている。
In FIG. 7, points A1 to E1 on the object plane 1
A straight line D11 connecting the points A4 to E4 on the image plane 2 is parallel to a straight line D41. Then, when the optical axes of the plurality of erecting real image systems 11 to 15 are respectively extended, each element is set so as to intersect or simply intersect at a point O in space.

【0034】尚、このときの投影光学系の投影倍率mを
図7に示す各要素間の距離D71,D72を用いて表わ
すと m=D72/D71 となっている。
When the projection magnification m of the projection optical system at this time is expressed by using the distances D71 and D72 between the elements shown in FIG. 7, m = D72 / D71.

【0035】本実施例では複数の正立実像系を各々同一
のレンズ素子より構成している。この為、各々の正立実
像系を各々異った平面上に3次元的に配置させて各々の
光軸長が同じになるようにしている。これにより全ての
正立実像系を同一条件で投影させて各正立実像系におけ
る光学諸特性の均一化を図っている。
In this embodiment, a plurality of erecting real image systems are composed of the same lens element. For this reason, the respective erecting real image systems are three-dimensionally arranged on different planes so that the respective optical axis lengths are the same. As a result, all erecting real image systems are projected under the same conditions, and the various optical characteristics in each erecting real image system are made uniform.

【0036】各々の反射鏡の位置A2,B2,C2,‥
‥と位置A3,B3,C3‥‥は(1) 式を満たす範囲で
任意に設定することが出来るが、一度一方の反射面の各
位置を決定すれば、あとは正立実像系の特性により順次
決めることができる。
Positions A2, B2, C2, ... Of the respective reflecting mirrors
, And the positions A3, B3, C3, ... Can be arbitrarily set within the range that satisfies the formula (1), but once each position of one reflecting surface is determined, the rest depends on the characteristics of the erect real image system. You can decide sequentially.

【0037】本実施例において光学部材列を2つ以上段
状に設けて構成しても良いことは言うまでもない。
It is needless to say that in this embodiment, two or more optical member rows may be provided in a step shape.

【0038】以上の構成により本実施例では物体面1の
複数の方向に対する広い面積を同時に像面2上に投影し
投影効率の向上を図ると共に各々の正立実像系による光
量分布の重ね合わせより生ずる光量ムラを軽減させ良好
なる投影像を得ている。
With the above-described structure, in this embodiment, a large area of the object plane 1 in a plurality of directions is simultaneously projected onto the image plane 2 to improve the projection efficiency, and at the same time, the light quantity distributions of the respective erecting real image systems are superposed. A good projection image is obtained by reducing the unevenness of the light amount that occurs.

【0039】本実施例では光学部材として反射鏡を用い
た場合を示したが、例えば図9に示すようにプリズム材
90,91を用いて正立実像系13の光軸上の光線L3
が物体面1と像面2に各々垂直に交わうように構成して
も、同様に像ずれや倍率ずれの発生を防止することがで
きる。
In this embodiment, the case where the reflecting mirror is used as the optical member is shown. For example, as shown in FIG. 9, the prism member 90, 91 is used to make the light ray L3 on the optical axis of the erecting real image system 13.
Even if the optical axis is configured to intersect the object plane 1 and the image plane 2 at right angles, the image shift and the magnification shift can be similarly prevented.

【0040】以上の実施例において各正立実像系に対す
る反射面が別個になっている最初の反射鏡から正立実像
系を通り、反射面が別個になっている最後の反射鏡まで
は各正立実像系のクロストークを防ぐ為に遮光部材を配
置するのが良い。
In the above embodiment, from the first reflecting mirror having a separate reflecting surface for each erecting real image system to the last reflecting mirror passing through the erecting real image system to the last reflecting mirror having a separate reflecting surface. It is preferable to dispose a light shielding member to prevent crosstalk in the standing image system.

【0041】又、以上の実施例では投影光学系を縮少系
に適用した場合について説明したが、拡大系に適用する
場合には縮少系全体を逆にした構成とすれば全く同様に
本発明を適用することができる。
In the above embodiment, the case where the projection optical system is applied to the reduction system has been described. The invention can be applied.

【0042】尚、本実施例において物体面と偏向手段と
の間若しくは像面と偏向手段との間の少なくとも一方
に、単に光束を偏向させる為の共通反射面を設けて投影
光学系全体の構成上の配置を任意に設定しても良い。
In this embodiment, a common reflecting surface for simply deflecting a light beam is provided on at least one of the object plane and the deflecting means or the image plane and the deflecting means, and the entire projection optical system is constructed. The above arrangement may be set arbitrarily.

【0043】こうした設定は物体面と像面の相対関係を
所定の位置関係にもってくる場合や像の表裏関係の補正
に有効である。
Such a setting is effective when the relative relationship between the object plane and the image plane is brought to a predetermined positional relationship and when the front-back relationship of the image is corrected.

【0044】本実施例において多少の像ずれや倍率ずれ
が許容されれば1つの反射鏡で複数の正立実像系からの
光束を偏向させるように構成しても良い。
In this embodiment, one reflecting mirror may be used to deflect the light beams from a plurality of erecting real image systems if a slight image shift or magnification shift is allowed.

【0045】本実施例では複眼系を10個の正立実像系
より成る場合について示したが、正立実像系を2つ以上
設ければ本発明の目的を達成することができる。
In the present embodiment, the case where the compound eye system is composed of 10 erecting real image systems is shown, but the object of the present invention can be achieved by providing two or more erecting real image systems.

【0046】本実施例では2つの偏向手段を用い、1つ
の偏向手段として1枚の反射鏡を用いた場合を示したが
前述の如く『回転ぶれ』、『像ずれ』、『倍率ずれ』等
を補正する構成と物体面、像面部分で各々独立に等価構
成にすれば複数枚の反射鏡又は屈折部材を用いて構成し
ても良い。例えば図10(A) に示すように物体面1から
の光線を一平面内に限らず一度他の平面内に導光し、再
び元の平面内に戻すように構成しても良い。又、図10
(B) のように偏向手段を構成する反射鏡の数を増加させ
て、物体面1の一方向の線分101が各々の正立実像系
により像面2上に投影させる際、各物体面の線分101
の像が像面2上で一方の線分102にして、所謂回転ず
れがないようにすれば物体面と像面の相対的位置関係に
応じた任意の構成をとることができる。
In this embodiment, two deflecting means are used and one reflecting mirror is used as one deflecting means, but as described above, "rotation blur", "image shift", "magnification shift", etc. It is also possible to use a plurality of reflecting mirrors or refracting members as long as they are independently equivalent to the configuration for correcting the above and the object plane and the image plane. For example, as shown in FIG. 10 (A), the light rays from the object plane 1 may be guided not only in one plane but in another plane and then returned to the original plane. Also, FIG.
As shown in (B), when the number of reflecting mirrors constituting the deflecting means is increased so that the line segment 101 in one direction of the object plane 1 is projected onto the image plane 2 by each erecting real image system, Line segment 101
If the image is formed as one line segment 102 on the image plane 2 so that there is no so-called rotational deviation, an arbitrary configuration can be taken according to the relative positional relationship between the object plane and the image plane.

【0047】これによれば配置上の自由度を増し、物体
面と像面の相対位置関係に応じた任意の構成をとること
ができるので好ましい。
This is preferable because the degree of freedom in arrangement can be increased and an arbitrary configuration can be adopted according to the relative positional relationship between the object plane and the image plane.

【0048】[0048]

【発明の効果】本発明によれば複数の正立実像系より成
る複眼系を用いて物体面を縮少投影若しくは拡大投影す
る際、光束を偏向させる複数の光学部材より成る偏向手
段を用いることにより像面上における多重像の像ずれ及
び倍率ずれの双方を良好に補正した投影光学系を達成す
ることができる。
According to the present invention, when a compound eye system including a plurality of erecting real image systems is used to perform reduced projection or enlarged projection of an object plane, a deflecting unit including a plurality of optical members for deflecting a light beam is used. As a result, it is possible to achieve a projection optical system in which both the image shift and the magnification shift of multiple images on the image plane are well corrected.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の一実施例の光学系の概略図FIG. 1 is a schematic diagram of an optical system according to an embodiment of the present invention.

【図2】 従来の投影光学系の一部分の説明図FIG. 2 is an explanatory view of a part of a conventional projection optical system.

【図3】 従来の投影光学系の一部分の説明図FIG. 3 is an explanatory diagram of a part of a conventional projection optical system.

【図4】 図3の一部分の投影像の説明図4 is an explanatory view of a projected image of a part of FIG.

【図5】 従来の投影光学系の一部分の説明図FIG. 5 is an explanatory diagram of a part of a conventional projection optical system.

【図6】 従来の投影光学系の一部分の説明図FIG. 6 is an explanatory view of a part of a conventional projection optical system.

【図7】 図1の一部分の上面図FIG. 7 is a top view of a portion of FIG.

【図8】 図1の一部側面図FIG. 8 is a partial side view of FIG.

【図9】 本発明の他の実施例の一部側面図FIG. 9 is a partial side view of another embodiment of the present invention.

【図10】 本発明の他の実施例の一部側面図FIG. 10 is a partial side view of another embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 物体面 2 像面 10,20−1,30,50,60 複眼系 11〜20,21,31,51,61 正立実像系 A2〜J2,A3〜J3 光学部材の配置されている位
置 L1〜L10 正立実像系の光軸上の光線
1 Object plane 2 Image plane 10, 20-1, 30, 50, 60 Compound eye system 11-20, 21, 31, 51, 61 Erect real image system A2-J2, A3-J3 Position L1 at which optical members are arranged ~ L10 Rays on the optical axis of the erecting real image system

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 複数の正立実像系を有する複眼系により
物体面を縮小又は拡大倍率で像面上に投影し重ね合わせ
る際、物体面と該複眼系との間及び該複眼系と像面との
間の光路中に光束を偏向させる複数の光学部材を有する
偏向手段を配置し、該複数の正立実像系の光軸上の各光
線が物体面及び像面と垂直となるように構成し、該複数
の正立実像系を各々同一のレンズ素子より構成し、各々
異なった平面上に配置して各々の光路長が同じになるよ
うにしたことを特徴とする投影光学系。
1. When projecting and superimposing an object plane on an image plane with a compound eye system having a plurality of erecting real image systems at a reduced or magnified magnification, between the object plane and the compound eye system and between the compound eye system and the image plane. A deflecting means having a plurality of optical members for deflecting a light beam is arranged in an optical path between the optical path and the optical path of the plurality of erecting real image systems so that each light ray is perpendicular to the object plane and the image plane. A projection optical system is characterized in that the plurality of erecting real image systems are respectively composed of the same lens element and are arranged on different planes so that the respective optical path lengths are the same.
【請求項2】 前記複数の光学部材を各々前記複数の正
立実像系毎に対向させた複数の反射鏡より構成し、該複
数の反射鏡の角度を各々該正立実像系毎に変化させて配
置したことを特徴とする特許請求の範囲第1項記載の投
影光学系。
2. The plurality of optical members are constituted by a plurality of reflecting mirrors facing each other for each of the plurality of erecting real image systems, and the angles of the plurality of reflecting mirrors are changed for each of the erecting real image systems. The projection optical system according to claim 1, wherein the projection optical system is arranged as follows.
【請求項3】 前記光学部材を反射鏡より構成し、該1
つの反射鏡により前記複数の正立実像系のうちの少なく
とも2つを通過する光束を偏向させるようにしたことを
特徴とする特許請求の範囲第1項記載の投影光学系。
3. The optical member comprises a reflecting mirror,
2. The projection optical system according to claim 1, wherein a light flux passing through at least two of the plurality of erecting real image systems is deflected by one reflecting mirror.
JP26551293A 1993-09-30 1993-09-30 Projection optics Expired - Fee Related JPH0795158B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26551293A JPH0795158B2 (en) 1993-09-30 1993-09-30 Projection optics

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26551293A JPH0795158B2 (en) 1993-09-30 1993-09-30 Projection optics

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP60296325A Division JPH0614145B2 (en) 1985-12-27 1985-12-27 Projection optics

Publications (2)

Publication Number Publication Date
JPH075391A JPH075391A (en) 1995-01-10
JPH0795158B2 true JPH0795158B2 (en) 1995-10-11

Family

ID=17418195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26551293A Expired - Fee Related JPH0795158B2 (en) 1993-09-30 1993-09-30 Projection optics

Country Status (1)

Country Link
JP (1) JPH0795158B2 (en)

Also Published As

Publication number Publication date
JPH075391A (en) 1995-01-10

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