JPH0797682B2 - Laser oscillator - Google Patents
Laser oscillatorInfo
- Publication number
- JPH0797682B2 JPH0797682B2 JP62147582A JP14758287A JPH0797682B2 JP H0797682 B2 JPH0797682 B2 JP H0797682B2 JP 62147582 A JP62147582 A JP 62147582A JP 14758287 A JP14758287 A JP 14758287A JP H0797682 B2 JPH0797682 B2 JP H0797682B2
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- output
- laser
- semi
- laser output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000000087 stabilizing effect Effects 0.000 claims description 4
- 230000010355 oscillation Effects 0.000 claims 1
- 238000002834 transmittance Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000000284 extract Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、レーザ出力を自動制御して利用するレーザ発
振装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser oscillating device that automatically controls and uses a laser output.
従来の技術 従来のレーザ発振装置は、平行におかれた２枚のミラー
の間で特定波長の光を増幅して取り出すものである。こ
の場合、２枚のミラーを常に平行に保持し、かつミラー
の経済的な反射率の変化に対応して必要なレーザ出力を
安定に取り出すことはほとんど不可能であった。という
のも、近年レーザ出力を用いたほとんどの応用分野で
は、高精度に安定したレーザ出力を常に必要としている
からである。2. Description of the Related Art A conventional laser oscillating device amplifies and extracts light of a specific wavelength between two parallel mirrors. In this case, it was almost impossible to always hold the two mirrors parallel to each other and to stably take out the required laser output corresponding to the economical change of the reflectance of the mirrors. This is because, in recent years, most of the application fields using the laser output always require a highly accurate and stable laser output.
そこで考え出されたのが、レーザ出力の一部を検出し、
その出力変化に応じて常にレーザ出力が一定になるよう
にするセンサを具備したレーザ発振装置であった。Then, the idea was to detect a part of the laser output,
The laser oscillating device is provided with a sensor that keeps the laser output constant according to the output change.
発明が解決しようとする問題点 ところが、センサは非常に感度が高く、周囲温度などの
環境の変化に敏感なものでないと、高速に応答すること
が不可能なわけで、常に周囲環境による温度ドリフトが
生じ、レーザ出力を不安定なものにしていた。The problem to be solved by the invention is that the sensor is very sensitive and cannot respond quickly unless it is sensitive to changes in the environment such as the ambient temperature. Caused the laser output to become unstable.
問題点を解決するための手段 以上のような欠点に鑑み、本発明は、透過率の異なる２
枚の半透過鏡を正対させ、透過率の大きい方の第１半透
過鏡より大部分のレーザ出力を出し、透過率の小さい方
の第２半透過鏡より一部のレーザ出力を出すレーザ発振
装置を構成し、前記第２半透過鏡の後方に、一部のレー
ザ出力を検出する第１センサを配設し、前記第１センサ
の近傍に前記第１センサの温度を検出する第２センサを
配設し、第１センサの出力信号の温度ドリフト分を前記
第２センサの出力信号で補正する出力安定化手段を具備
してなるものである。Means for Solving the Problems In view of the above-mentioned drawbacks, the present invention has two different transmittances.
A laser that directly opposes one semi-transmissive mirror and emits most of the laser output from the first semi-transmissive mirror with the larger transmittance and emits part of the laser output from the second semi-transparent mirror with the smaller transmissivity. A second sensor that configures an oscillator, includes a first sensor that detects a part of laser output behind the second semi-transmissive mirror, and detects a temperature of the first sensor in the vicinity of the first sensor. A sensor is provided, and output stabilization means is provided for correcting the temperature drift component of the output signal of the first sensor with the output signal of the second sensor.
作用 上記構成において、第２センサによって第１センサの温
度ドリフト分を除外し、安定したレーザ出力を与える。Operation In the above configuration, the second sensor excludes the temperature drift component of the first sensor and gives a stable laser output.
実 施 例 第１図に本発明の一実施例を示す。１は、透過率の大き
い方の第１半透過鏡、２は透過率の小さい方の第２半透
過鏡で、この間でレーザビームは増幅される。増幅され
た一部のレーザ出力は、透過率の小さい方の第２半透過
鏡２より出て、フィルター３を通り第１センサ４に入射
する。また、第センサ５によって検出した第１センサ４
の温度ドリフト分を出力安定化手段６により回路処理
し、この出力に基づいて制御回路７によりレーザ出力を
常に一定に制御する。Practical Example FIG. 1 shows an embodiment of the present invention. Reference numeral 1 denotes a first semi-transmissive mirror having a higher transmittance, and 2 denotes a second semi-transmissive mirror having a lower transmittance, during which the laser beam is amplified. A part of the amplified laser output is emitted from the second semi-transmissive mirror 2 having the smaller transmittance, passes through the filter 3, and is incident on the first sensor 4. In addition, the first sensor 4 detected by the first sensor 5
The temperature stabilizing portion is subjected to circuit processing by the output stabilizing means 6, and the laser output is constantly controlled by the control circuit 7 based on this output.
第２図は、出力の安定度を示す特性図である。曲線８
は、従来の出力安定度，直線９は本発明の一実施例によ
る出力安定度を示す。本実施例によれば明らかに安定度
が良くなっていることが判る。FIG. 2 is a characteristic diagram showing the stability of the output. Curve 8
Indicates the conventional output stability, and the straight line 9 indicates the output stability according to the embodiment of the present invention. According to this example, it is clear that the stability is improved.
発明の効果 本発明は、いかなるレーザ発振装置自身のばらつき、か
つ周囲環境の変化に対応し、高精度に安定したレーザ出
力を供給でき、あらゆるレーザ応用分野において、その
効果は絶大なるものである。EFFECTS OF THE INVENTION The present invention can supply a stable laser output with high accuracy in response to any variations in the laser oscillator itself and changes in the surrounding environment, and its effects are great in all laser application fields.
第１図は本発明の一実施例を示すレーザ発振装置の回路
図、第２図は出力の安定度を示す特性図である。 １……第１半透過鏡、２……第２半透過鏡、３……フィ
ルター、４……第１センサ、５……第２センサ、６……
出力安定化手段、７……制御回路。FIG. 1 is a circuit diagram of a laser oscillating device showing an embodiment of the present invention, and FIG. 2 is a characteristic diagram showing output stability. 1 ... First semi-transmissive mirror, 2 ... Second semi-transmissive mirror, 3 ... Filter, 4 ... First sensor, 5 ... Second sensor, 6 ...
Output stabilizing means, 7 ... Control circuit.
Claims (1)
せ、透過率の大きい方の第１半透過鏡より大部分のレー
ザ出力を出し、透過率の小さい方の第２半透過鏡より一
部のレーザ出力を出すレーザ発振装置を構成し、第２半
透過鏡の後方に、一部のレーザ出力を検出する第１セン
サを配設し、前記第１センサの近傍に前記第１センサの
温度を検出する第２センサを配設し、前記第１センサの
出力信号の温度ドリフト分を前記第２センサの出力信号
で補正する出力安定化手段を具備したレーザ発振装置。1. Two semi-transmissive mirrors having different transmissivities are directly opposed to each other, and most of the laser output is emitted from the first semi-transmissive mirror having the higher transmissivity, and the second semi-transmissive mirror having the lower transmissivity is emitted. A laser oscillation device that outputs a part of the laser output from the mirror is configured, a first sensor that detects a part of the laser output is disposed behind the second semi-transmissive mirror, and the first sensor is provided in the vicinity of the first sensor. A laser oscillating device comprising a second sensor for detecting the temperature of one sensor, and an output stabilizing means for correcting a temperature drift amount of an output signal of the first sensor with an output signal of the second sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62147582A JPH0797682B2 (en) | 1987-06-12 | 1987-06-12 | Laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62147582A JPH0797682B2 (en) | 1987-06-12 | 1987-06-12 | Laser oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63311781A JPS63311781A (en) | 1988-12-20 |
| JPH0797682B2 true JPH0797682B2 (en) | 1995-10-18 |
Family
ID=15433610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62147582A Expired - Lifetime JPH0797682B2 (en) | 1987-06-12 | 1987-06-12 | Laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0797682B2 (en) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56102430U (en) * | 1980-01-07 | 1981-08-11 | ||
| JPS5714584A (en) * | 1980-06-28 | 1982-01-25 | Chisso Corp | Compound having tetrazine skeleton |
| JPS60217679A (en) * | 1984-04-13 | 1985-10-31 | Mitsubishi Electric Corp | Laser output controller |
| JPH0760912B2 (en) * | 1986-03-28 | 1995-06-28 | 三菱電機株式会社 | Laser output controller |
-
1987
- 1987-06-12 JP JP62147582A patent/JPH0797682B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63311781A (en) | 1988-12-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4128760A (en) | Ambient light compensating circuit | |
| KR970063848A (en) | Photodetector | |
| US8269972B2 (en) | Beam intensity detection in a cavity ring down sensor | |
| US4982078A (en) | Beam position sensor with time shared normalizing circuit | |
| JPH0797682B2 (en) | Laser oscillator | |
| EP0185385B1 (en) | Phase modulation fiber optic gyroscope | |
| JPS6179285A (en) | Control method of temperature of semiconductor laser | |
| JPH033397B2 (en) | ||
| US5327212A (en) | Acceleration sensing ring laser gyroscope | |
| JPH04111370A (en) | Laser output control device | |
| JPS6015351Y2 (en) | Ion laser device | |
| JPH01238083A (en) | Oscillation wavelength stabilization of semiconductor laser | |
| JP2002148121A (en) | Wavelength monitoring device, wavelength stabilized light source using the same, and wavelength detection method | |
| US4836679A (en) | Rotation sensors based on symmetrical electro-magnetic oscillators | |
| JPS62226684A (en) | Controller for laser output | |
| JPH0411315B2 (en) | ||
| JP3927064B2 (en) | Non-contact displacement meter | |
| JPH0456479B2 (en) | ||
| JPH04256382A (en) | laser processing equipment | |
| SU482377A1 (en) | Sensor for positioning material edge | |
| JPS5840123B2 (en) | Object position measuring device | |
| JPH05126586A (en) | Optical fiber interferometer type sensor | |
| JPS6396541A (en) | Gas concentration measuring instrument | |
| JPH0711484B2 (en) | Atomic absorption spectrophotometer | |
| JPS62282474A (en) | Semiconductor laser device |