JPH0810064B2 - Constant temperature air supply device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in a device for supplying air, which is adjusted to a constant temperature and a constant humidity, as clean air through an ultra-high performance filter, and more particularly to a filter support structure used for the device. Is.

[0002]

2. Description of the Related Art Semiconductor manufacturing, biotechnology, medicine,
In food production, medical care, and the like, there is often a need for fresh, conditioned air that is regulated to a constant temperature and humidity and that has an extremely high degree of cleanliness. As a constant temperature and constant humidity air supply device used for such a purpose, for example, as shown in FIG. 4, by partitioning the inside of the box body 150 with a partition plate 151, the outside air introduction port 152 is provided.
To a regulated air outlet 153, a series of air flow paths are formed, and a blower 154 is attached to the outside air inlet 152,
Blow air from the outside air inlet toward the adjusted air outlet 153,
An evaporative humidifier 155, an air cooler 157 composed of an evaporator of a refrigerator 156, and an electric heating heater 158 are provided adjacent to the outside air introduction port 152 in this order from the windward side to the leeward side. .

Reference numeral 161 is a temperature sensor, the output of which is input to the temperature controller 160 and controls the heater 158 so that a desired air temperature can be obtained. Similarly, 16
A humidity sensor 3 is configured to control the operation of the humidity controller 162 and the heater 155a of the humidifier 155 based on the detection signal thereof. 165 is a hose duct, which is a regulated air supply space 17 such as a clean bench.
It is provided for the purpose of freely connecting 0 and the main body of the constant temperature and constant humidity air supply device. Reference numeral 200 is a filter box that houses an ultra-high performance filter such as a HEPA filter provided at the end of the hose duct. (For example, Japanese Patent Laid-Open No. 4-1
39345).

This filter box 200 is, for example,
As shown in FIG. 5, a mounting seat 203 of the filter 300 is provided in a double box-shaped duct having a regulated air inlet 201 and a clean air supply port 202 so as to traverse the duct. Tightening bolt 204 fixed to the seat at one end,
The mounting member 205 is engaged with the other end of the filter 204, ... Between the mounting member 205 and the mounting seat 203.
Has a structure in which it is detachably sandwiched.

Generally, an ultra-high performance air filter, which is abbreviated as HEPA, ULPA, etc., needs to be replaced at least once or twice a year depending on the frequency of use. HEPA
Since ULPA and ULPA are easily damaged and have a certain weight, handling them in a narrow filter box requires skill and close attention, and before and after replacement, the outer top plate 206 of the filter box must be replaced. If it is necessary to enable the attachment / detachment, the attachment / detachment of the inner top plate 207, and the movement associated with the removal of the filter in the box, the side plate 20
The operations of displacing and removing 8, 209 are involved. Therefore, it takes a long time to perform the filter replacement operation, and the filter tends to be large in size in order to facilitate the handling of the filter in the filter box.

[0006]

SUMMARY OF THE INVENTION An object of the present invention is to provide a constant temperature air supply device having a compact filter mounting structure, which can easily replace the filter in a short time, has less risk of damage to the filter at the time of replacement. It is intended to be disclosed.

[0007]

According to a first aspect of the present invention, a series of air passages connecting an air inlet and a regulated air outlet are provided with a heater, a cooler and, if necessary, a humidifier, In a device for supplying regulated air under a predetermined constant temperature and constant humidity condition from an air outlet, above the base body in which the regulated air outlet is open upward, by a supporting means such as a frame standing on the base surface, Has a clean air supply port on its lower surface, and has a seat for abutting against one side peripheral edge of the air filter and a ventilation opening that opens inside the seat, and between the ventilation opening and the clean air supply port. An upper holding body having an outlet chamber formed therein is supported and fixed at a predetermined height, and below the upper holding body, on the upper surface, a bearing seat for supporting the peripheral edge of the other side of the air filter and the bearing seat are provided. And an adjustment air outlet on the lower surface. A lower sandwiching body is provided, which has a connection port with a telescopic duct connected at the lower end and has an inlet chamber formed between the connection port and the air inlet opening, and the abutment seat and the bearing seat are provided. In the constant temperature air or constant temperature and constant humidity air supply device, an air filter is sandwiched between and the lower sandwiching body is detachably fixed to the upper sandwiching body through a fixing tool.

According to a second aspect of the present invention, in the supply device defined in the first aspect, a regulated air outlet opening on the base also serving as a top plate of the device for supplying the regulated air. The constant temperature air is characterized in that an enclosure plate is erected in a state of enclosing, and the upper sandwiching body is fixed and supported by the vicinity of the upper portion of the enclosure plate, and a part of the enclosure plate is openable and closable. Or it is in a constant temperature and constant humidity air supply device. Hereinafter, the present invention will be described in detail based on examples.

[0009]

1 and 2 show an embodiment of the present invention. In the figure, 100 is a device that has the same configuration conditions as the conventional constant temperature and constant humidity air supply device shown in FIG. 4 and that supplies air that has been adjusted to a desired temperature and humidity condition. By partitioning, a series of air flow paths from the outside air inlet to the adjusted air outlet 2 are formed, and a blower is attached to the outside air inlet to blow air from the outside air inlet toward the adjusted air outlet 2 Adjacent to, an evaporative humidifier, an air cooler composed of an evaporator of a refrigerator, and an electric heating device are provided in this order from the windward side to the leeward side.

However, the adjusted air outlet 2 in the embodiment, which corresponds to the adjusted air outlet 153 of the apparatus shown in FIG.
4 is different from the device of FIG. 4 in that the top plate 1a of the box body 1 is opened upward in the vicinity of the central portion thereof, and the other configurations are substantially the same as those of the conventional device of FIG. The top plate 1a as the base of this air filter mounting structure has a regulated air outlet 2
To enclose the four enclosing plates 3,
4, 5, 6 are provided upright from the edge of the top plate 1a. Of these shrouds, any pair 4, 6 is erected with its lower end edges 4a, 6a fixed on the top plate 1a, and the other pairs 3, 5 are these shrouds 4. , 6 near the side edge portions 4b, 6b by snap coupling or the like, or a screw 8 as a fastener.
It is removably attached by… etc.

Inside the vicinity of the upper end of the rectangular tubular enclosure plate,
An upper clamp 10 of the air filter is provided. The upper sandwiching body 10 has a flat box shape having a narrow upper and lower width having an upper surface made of a larger rectangular plate according to the shape of the ultra-high performance air filter 9, and a clean air supply is provided at the center of the upper surface 11. On the lower surface where the mouth 12 is opened and which faces the upper surface 11, there is an abutment seat 13 on which the upper peripheral edge 9a of the filter 9 abuts in an airtight manner. The ventilation opening 14 having a shape corresponding to is opened. The space between the lower surface including the ventilation opening 14 and the upper surface including the clean air supply port 12 serves as the outlet chamber 16, which equalizes the pressure of the atmosphere facing the air filter 9 and supplies the air that has passed through the filter. Play a role of leading to 12. Furthermore, near the corner of the lower surface of the upper clamp,
Four bolts 17, 17, ... As fixtures are vertically provided at positions outside the abutment seat 13 in a state where the bolt heads are welded and integrated to the lower surface of the upper holding body.

The upper holding body 10 having such a structure is fixed to the upper side of the top plate 1a as a base by fixing the side surface 15 to the upper inside of the surrounding plates 4 and 6 standing on the top plate 1a. It is strongly supported with a distance of. Then, when the surrounding plates 3 and 5 are detachably fixed to the surrounding plates 4 and 6 by screwing or the like, the upper holding body 1 is placed on the top plate 1a.
A filter storage space surrounded by 0 and the surrounding plates 3 to 6 is formed. In this storage space, below the upper sandwiching body 10, a lower sandwiching body 20 supported by a bellows hose 30 is provided. Bellows hose 30
Is connected at its lower end to a regulated air outlet 2 opening in the top plate 1a.

On the upper surface of the lower sandwiching body 20, there is an air intake opening 21 and the opening 2 thereof which match the shape of the effective surface of the air filter 9.
1 is formed in a step-like shape in the peripheral portion of 1 and has a rectangular dish shape having a support seat 22 for an air filter, and a connection port 23 with a telescopic duct provided in the center of the lower surface of the lower holding body 20,
The bellows hose 30 as a telescopic duct has an upper end 3
In No. 1, it is airtightly fitted. The inlet chamber 26 sandwiched between the lower surface including the connection port 23 and the upper surface including the air inlet opening prevents deviation of the amount of air passing through the air filter depending on the location. The bellows hose 30 is an expandable hose provided with a rubber elastic material, a coil spring, or the like as a core material, and can be expanded and contracted in the vertical direction and can be swung in the left and right directions. It can be supported in the air. 32 is a tightening ring.

The lower peripheral edge portion 9b of the air filter 9 is supported by abutting against the bearing seat 22 of the lower clamp body 20 having such a structure, and the upper peripheral edge portion 9a of the filter is supported by the upper clamp body 10. The air filter 9 is replaceably attached by abutting against the abutment seat 13 and fixing the lower sandwiching body to the upper sandwiching body. As a fixing method, for example, depending on the position of the bolt 17, the bolts are inserted into the respective locking pieces 24, 24, which are projected from the support seat 22 of the lower holding body 20 toward the enclosing plates 4, 6. Holes 25, 2
5 are provided, the bolt 17 is inserted through this, and fixed with a fixing nut 28. 27 is a positioning nut.

In the above-described embodiment, the upper and lower sandwiching members and the enclosing plate having a substantially rectangular shape are adopted in accordance with the shape of the filter. However, depending on the shape of the air filter, for example, if it is circular, It is easy for each to adopt a cylindrical shape. Further, a bellows-shaped hose having elasticity, flexibility and elasticity was used as the telescopic duct.
A telescopic tube 40 having a double tube structure as shown in FIG. The enclosing plate is not always essential, and the upper holding body may be supported by a frame or the like at an appropriate height on the base.

[0016]

[Effect] In the device of the present application, if the part 3 or 5 of the enclosing plate is removed and the nut 28 is removed when removing the air filter, the air filter 9 is lowered by its own weight, so this is removed from the support seat of the lower holding body. , It can be taken out easily. When mounting, the reverse operation may be performed. In particular, if a hose having expansion / contraction elasticity is used as the expansion duct, the movement of the filter is buffered when the filter is attached / detached, so the operability is extremely good and it is possible to prevent the air filter from accidentally hitting a member and being damaged. . Further, unlike the conventional case, it is not necessary to disassemble and assemble the filter storage box, so that the time required for replacement can be remarkably shortened. Further, since the vertical widths of the outlet chamber and the inlet chamber and the required expansion / contraction width of the expansion / contraction duct may be very small, the volume of the storage portion of the air filter can be made compact.

[Brief description of drawings]

FIG. 1 is an exploded explanatory view showing a main part of an embodiment of the present invention.

FIG. 2 is a cross-sectional explanatory view showing a configuration of a main part of the embodiment shown in FIG.

FIG. 3 is a cross-sectional explanatory view showing another example of a telescopic duct.

FIG. 4 is an explanatory diagram showing an example of a conventional technique.

5 is an explanatory diagram showing a configuration of a filter box in FIG.

[Explanation of symbols]

 1a Top plate 2 Adjusted air outlets 3 to 6 Enclosure 9 Super high performance air filter 10 Upper clamp 12 Clean air supply port 20 Lower clamp 30 Telescopic duct 100 Adjusted air supply device

Claims (5)

[Claims] 1. A device comprising a heater and a cooler in a series of air passages connecting an air inlet and a regulated air outlet, and supplying regulated air of a predetermined condition from the regulated air outlet. Has a clean air supply port on the upper surface above the base plate that opens upward, and a lower surface has a contact seat with the peripheral edge of one side of the air filter and a ventilation opening that opens inward from the corresponding seat. And supporting and fixing an upper sandwiching body having an outlet chamber formed between the ventilation opening and the clean air supply port, below the upper sandwiching body, and on the upper surface of the other side of the air filter. Has a support seat for supporting the periphery of the support seat and an air inlet opening that opens inwardly from the support seat, and has a connection port on the lower surface for connection with an expansion duct connected to the adjusted air outlet at the lower end and the connection port. And an inlet chamber formed between the inlet opening and the inlet opening. A constant temperature air characterized in that a holding body is provided, an air filter is held between the abutment seat and the support seat, and the lower holding body is detachably fixed to the upper holding body via a fastener. Supply device. 2. An enclosure plate is erected on a base plate that also serves as a top plate of a device for supplying adjusted air, in a state of containing an adjusted air outlet opening to the base plate, and an upper holding member is provided with the enclosure plate. The constant temperature air supply device according to claim 1, wherein the surrounding plate is fixedly supported near the upper part thereof and at least a part of the surrounding plate is openable and closable. 3. The constant temperature air supply device according to claim 1, wherein the expansion duct is a bellows hose having expansion elasticity. 4. A plurality of bolts, which are vertically attached to the outer side of an abutment seat of an upper holding body, and a bolt passing through a bolt insertion hole provided on the outer side of a support seat of a lower holding body. The constant temperature air supply device according to any one of claims 1 to 3, wherein the constant temperature air supply device comprises a nut screwed to a lower end. 5. A humidifier is provided in addition to a heater and a cooler in a series of air passages connecting an air inlet and a regulated air outlet of a device for supplying regulated air. The constant temperature air supply device according to any one of the above.