JPH082506B2 - Welding equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention, when welding a first member and a second member, which are objects to be welded after positioning, changes the position when the objects to be welded melt. The present invention relates to a welding device having a position deviation prevention function for preventing displacement.

[Conventional technology]

FIG. 3 is a diagram for explaining a conventional welding device.
In the figure, 1 is an upper electrode which is a first electrode, 2 is a lower electrode which is a second electrode, 3 and 4 are first and second members, for example, a cap and a base of a semiconductor element, and 5 is Current contact surface, 6 is upper platen, 7 is lower platen, 8 is sliding part, 9 is support part, 1
0 is the base lock, 11 is the lead wire, 12 is the cap lock, 13
Is a groove.

Conventionally, the resistance welding between the cap 3 and the base 4 of the semiconductor device is performed by fixing the base 4 of the semiconductor device to the base engaging hole 10 formed in the lower electrode 2 and the upper electrode as shown in FIG. The cap 3 of the semiconductor element is engaged with the cap engaging hole 12 formed in the first part 1, and then the sliding part 8 is slid along the groove 13 of the supporting part 9 to bring the upper electrode 1 and the lower electrode 2 into contact with each other. Then, the pressure was applied to the electrode.

[Problems to be solved by the invention]

However, in this conventional welding device, in order to slide the sliding portion 8 along the groove 13 of the supporting portion 9, a gap is required between the groove 13 of the supporting portion 9 and the sliding portion 8, Since the welding location moves during the welding by the amount of the gap, there is a drawback that high-precision and good welding such as optical axis alignment welding of 10 μm or less cannot be performed.

[Means for solving problems]

In order to eliminate the above drawbacks, the present invention is provided with a pair of opposing units.
In a welding device for welding a first member and a second member, which are respectively engaged with a second electrode, a fixed-side end plate fixed to a supporting part via a sliding part, and the fixed-side end plate. A plate composed of a pair of elastic plates, one end of which is fixed to the end plates and arranged to be parallel to each other, and a free-side end plate fixed between the free ends of the elastic plates so as to keep the elastic plates parallel to each other. A flexible elastic body, the first electrode is supported by the free-side end plate and is disposed between the fixed-side end plate and the free-side end plate, and the free-side end plate is connected to the first electrode. The present invention provides a welding device characterized by being biased in the melting direction by pressure.

[Action]

According to such a welding apparatus, the upper electrode follows the melting of the welding point by the action of the pressing force applied to the electrode and the elastic force of the plate-like elastic body, and the response is good and the accurate position is maintained. Since it descends, it is possible to perform highly accurate and favorable welding.

〔Example〕

FIG. 1 is a diagram for explaining one embodiment of the present invention. In the figure, the plate-like elastic body 14 is a fixed side end plate 14a fixed to the support part 9 via the sliding part 8, and one end is fixed to this end plate, and the plate side elastic members 14 are arranged in parallel to each other. It is composed of a pair of equivalent elastic plates 14b and 1c, and a free side end plate 14d fixed between their free ends so as to keep these elastic plates parallel to each other. A fixing device 15 fixes the fixed side end plate 14a to the support 9 by fixing the sliding portion 8 to the support 9.

Next, the operation of actually resistance-welding the cap 3 and the base 4 of the semiconductor device with such a welding device will be described. First, the sliding portion 8 is fixed by the fixing device 15.
The base 4 of the semiconductor element is attached to the base attachment port 10 and the cap 3 of the semiconductor element is attached to the cap attachment port 12 formed on the upper electrode 1 with the base fixed to above the supporting portion 9. To wear. Then, the fixing device 15 is loosened and the sliding portion 8 is slid along the groove 13 of the supporting portion 9 to bring the upper electrode 1 and the lower electrode 2 into contact with each other. Thereafter, a predetermined pressing force is applied to the electrode while the sliding portion 8 is fixed to the supporting portion 9 by the fixing device 15, and a welding current is passed between the upper and lower electrodes 1 and 2 while maintaining the state. . The welded portion between the cap 3 and the base 4 melts with the passage of time, but due to the action of the pressing force applied to the electrode and the elastic force of the plate-like elastic body 14, the upper electrode follows the melted portion of the welded portion. It responds well and descends while maintaining an accurate position.
Good welding with high accuracy can be performed. Incidentally, if the fixed position of the sliding portion 8 is further lowered before applying a pressing force to the electrode, the followability of the plate-like elastic body 14 can be improved. Further, the fixed side end plate 14a and the free side end plate 1 of the plate-like elastic body 14 with respect to the penetration depth of the welding point.
Since the distance between 4d is sufficiently long, the inward deviation due to the bending of the elastic plates 14b and 14c can be ignored for the upper and lower deviations.

FIG. 2 is a diagram for explaining another embodiment of the present invention. In this embodiment, the upper electrode 1 of the welding device penetrates the central portion of the plate-like elastic body 14, and the upper electrode is the free side end plate 14.
Since it is supported by d and is disposed between the fixed side end plate 14a and the free side end plate 14d, compared with the embodiment of FIG. 1 in which the upper electrode is disposed outside the free side end plate. The distance between the fixed-side end plate and the free-side end plate can be further increased, and more accurate and favorable welding can be performed.

〔The invention's effect〕

As described above, according to the present invention, in the welding device for welding the first member and the second member, which are respectively engaged with the opposed first and second electrodes, the sliding portion is provided on the support portion. A fixed side end plate, a pair of elastic plates fixed at one end to the fixed side end plate and arranged so as to be parallel to each other, and a pair of elastic plates for maintaining the elastic plates in parallel. A plate-shaped elastic body including a free side end plate fixed between the ends is provided, and the first electrode is supported by the free side end plate and disposed between the fixed side end plate and the free side end plate. The welding device is characterized in that the free-side end plate is biased in the melting direction by the pressing force of the first electrode. Since the present invention has such features, the upper electrode follows the melting of the welded portion by the action of the pressing force applied to the electrode and the elastic force of the plate-like elastic body 14 to provide a responsive and accurate position. Since it descends while holding it, it is possible to perform good welding with high accuracy.

[Brief description of drawings]

FIG. 1 is a diagram for explaining an embodiment of the present invention, FIG. 2 is a diagram for explaining another embodiment of the present invention, and FIG. 3 is a diagram for explaining a conventional welding apparatus. Is. 1 ... First electrode, 2 ... Second electrode 3 ... First member, 4 ... Second member 5 ... Electrical contact surface, 6 ... Upper platen 7 ... Lower platen, 8 ... … Sliding part 9 …… Supporting part, 10 …… Base engaging port 11 …… Lead wire, 12 …… Cap engaging port 13 …… Groove, 14 …… Plate-like elastic body 14a …… Fixed side end plate, 14b, 14c …… elastic plate 14d …… free end plate, 15 …… fixing device

Claims (1)

[Claims] 1. A welding device for welding a first member and a second member, which are respectively engaged with opposing first and second electrodes, and fixed to a supporting portion via a sliding portion. A fixed end plate, a pair of elastic plates having one end fixed to the fixed end plate and arranged in parallel to each other, and fixed between their free ends so as to keep these elastic plates parallel to each other. A plate-shaped elastic body composed of a free side end plate, the first electrode supported by the free side end plate and disposed between the fixed side end plate and the free side end plate, A welding device in which an end plate is biased in a melting direction by a pressing force of the first electrode.