JPH084585B2 - Electrode plate for CT device and manufacturing method thereof - Google Patents
Electrode plate for CT device and manufacturing method thereofInfo
- Publication number
- JPH084585B2 JPH084585B2 JP3203776A JP20377691A JPH084585B2 JP H084585 B2 JPH084585 B2 JP H084585B2 JP 3203776 A JP3203776 A JP 3203776A JP 20377691 A JP20377691 A JP 20377691A JP H084585 B2 JPH084585 B2 JP H084585B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- electrode plate
- molybdenum
- manufacturing
- rolling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 16
- 229910052750 molybdenum Inorganic materials 0.000 claims description 16
- 239000011733 molybdenum Substances 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 12
- 238000005096 rolling process Methods 0.000 claims description 10
- 238000003763 carbonization Methods 0.000 claims description 5
- 238000010000 carbonizing Methods 0.000 claims description 3
- 238000002591 computed tomography Methods 0.000 description 11
- 238000010438 heat treatment Methods 0.000 description 9
- 238000001514 detection method Methods 0.000 description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 238000005097 cold rolling Methods 0.000 description 1
- 238000005098 hot rolling Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 210000000056 organ Anatomy 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
Landscapes
- Apparatus For Radiation Diagnosis (AREA)
- Measurement Of Radiation (AREA)
Description
【発明の詳細な説明】Detailed Description of the Invention
【０００１】[0001]
【産業上の利用分野】本発明は、コンピュータ断層撮影
（ＣＴ）装置に用いられる検出器の構造に関する。FIELD OF THE INVENTION This invention relates to the structure of detectors used in computed tomography (CT) devices.
【０００２】[0002]
【従来の技術】一般に、ＣＴ装置は被測定物（例えば、
人体）にＸ線を照射するＸ線照射手段と、被測定物内の
構成物（例えば、人体内の臓器、血液、蛋白質部分等）
を透過したＸ線を検出する検出手段と、検出手段からの
検出信号を処理して画像信号を出力する処理手段と、照
射手段と検出手段とを被測定物の周囲を移動させる駆動
手段とを有する。被測定物の測定を高精度に行うために
は、各手段の精度や安定性が要求される。検出手段は検
出器を有する。即ち、図３において、照射手段のＸ線が
出射される焦点Ｐから同心円円弧上に、圧縮されたＸｅ
ガスの封入された筐体を有する検出器１０が配設されて
いる。この筐体内には、図４において、焦点Ｐから同心
放射線上に陽極板１０１と陰極板１０２とが交互に所定
寸法の間隙部１０３（例えば、その幅Ｗは２ｍｍ）をお
いてセラミック基板１０５に支持されて配設されてい
る。陽極板１０１および陰極板１０２（以後、両板を総
称して電極板と呼ぶ）は、純タングステンや純モリブデ
ンから成り、その板厚は、例えば、０．１５乃至０．２
０ｍｍである。ＣＴ装置稼働時には、各陽極板１０１に
は直流電圧（例えば、５００Ｖ）が印加され、間隙部１
０３内のＸｅガスが被測定物９を透過したＸ線により電
離が生じ、陽極板１０１と陰極板１０２間に電流が流れ
る。これを検出器の検出信号として出力する。2. Description of the Related Art Generally, a CT device is a device to be measured (for example,
X-ray irradiating means for irradiating the human body) with X-rays, and constituents in the object to be measured (for example, organs in the human body, blood, protein portions, etc.)
A detection means for detecting X-rays transmitted through the laser beam, a processing means for processing a detection signal from the detection means and outputting an image signal, and a driving means for moving the irradiation means and the detection means around the object to be measured. Have. In order to measure the object to be measured with high accuracy, accuracy and stability of each means are required. The detection means has a detector. That is, in FIG. 3, the compressed Xe on the concentric circular arc from the focal point P from which the X-ray of the irradiation means is emitted.
A detector 10 having a housing filled with gas is arranged. In FIG. 4, the anode plate 101 and the cathode plate 102 are alternately concentrically radiated from the focal point P in this housing with a gap 103 (for example, the width W of which is 2 mm) having a predetermined dimension alternately arranged on the ceramic substrate 105. It is supported and arranged. The anode plate 101 and the cathode plate 102 (hereinafter, both plates are collectively referred to as an electrode plate) are made of pure tungsten or pure molybdenum, and the plate thickness thereof is, for example, 0.15 to 0.2.
It is 0 mm. When the CT device is operating, a DC voltage (for example, 500 V) is applied to each anode plate 101, and the gap portion 1
The Xe gas in 03 is ionized by the X-rays that have passed through the DUT 9, and a current flows between the anode plate 101 and the cathode plate 102. This is output as the detection signal of the detector.
【０００３】[0003]
【発明が解決しようとする課題】近年、測定の精細度化
に伴い電極板の板厚や間隙部の寸法の微小化が所望され
ている。また、被測定物を透過したＸ線の成分には、被
測定物内の構成物によって散乱したＸ線が含まれてい
る。このため、精度の高い検出を行うためには焦点Ｐか
ら真直ぐに透過したＸ線のみを検出する必要がある。換
言すれば、検出器には高い指向特性が必要である。しか
し、従来の電極板は純タングステンや純モリブデンから
成るため、板厚を薄くすると筐体内で圧縮されたＸｅガ
スの圧力により変形したり、駆動手段による振動に共振
して不要なＸ線を検出してしまうという問題点がある。
本発明の課題は、変形や共振することのないＣＴ装置の
検出器用電極板を提供することである。In recent years, it has been desired to reduce the plate thickness of the electrode plate and the size of the gap as the measurement becomes finer. Further, the X-ray component transmitted through the object to be measured includes X-rays scattered by the constituents in the object to be measured. Therefore, in order to perform highly accurate detection, it is necessary to detect only the X-rays that have been directly transmitted from the focus P. In other words, the detector needs high directional characteristics. However, since the conventional electrode plate is made of pure tungsten or pure molybdenum, if the plate thickness is made thin, it is deformed by the pressure of the Xe gas compressed in the housing, or it resonates with the vibration of the driving means to detect unnecessary X-rays. There is a problem that it does.
An object of the present invention is to provide an electrode plate for a detector of a CT device that does not deform or resonate.
【０００４】[0004]
【課題を解決するための手段】本発明によれば、真空雰
囲気下で所定温度にて炭化処理および矯正処理されたモ
リブデン焼結板材から成ることを特徴とするＣＴ装置用
電極板が得られる。本発明によれば、さらに、モリブデ
ン焼結体板材を所定の圧延率で圧延処理してモリブデン
圧延板とする圧延工程と、真空雰囲気下で所定温度にて
前記モリブデン圧延板を炭化処理して電極板とする炭化
処理工程とを有し、前記炭化処理工程は、前記モリブデ
ン圧延板を矯正処理するステップを含むことを特徴とす
るＣＴ装置用電極板の製造方法が得られる。According to the present invention, there is obtained an electrode plate for a CT device, which is made of a molybdenum sintered plate material carbonized and straightened at a predetermined temperature in a vacuum atmosphere. According to the present invention, further, a rolling process of rolling the molybdenum sintered body plate material at a predetermined rolling rate to obtain a molybdenum rolled plate, and a carbonization treatment of the molybdenum rolled plate at a predetermined temperature in a vacuum atmosphere to form an electrode. possess a carbonizing step of the plate, the carbonization step, the molybdenum
A method of manufacturing an electrode plate for a CT device is obtained, which comprises the step of straightening the rolled plate .
【０００５】[0005]
【実施例】以下、本発明による電極板の製造方法を説明
する。製造の手順を以下に示す。 モリブデンの焼結板材を熱間圧延処理と冷間圧延処理
とを連続して行う。板厚は、例えば、０．０５乃至０．
１５ｍｍとする。圧延率は９０％未満では後述する熱処
理後の引張り強さおよびヤング率が比較的低い。圧延率
は９０％以上が好ましい。 この焼結板材を真空雰囲気下で所定の熱処理温度Ｔ1
にて、炭化処理を行う。この時、焼結板材の全面に対し
垂直方向に所定の荷重を付加することにより矯正処理も
同時に行う。 熱処理温度Ｔ1 に対する本実施例および従来の焼結板材
の引張り強さおよびヤング率を、それぞれ図１および図
２に示す。尚、これら焼結板材は、手順で圧延率９
９．７％で板厚が０．１ｍｍに圧延処理されたものであ
る。図１および図２を参照すると、熱処理温度Ｔ1 が１
３７３Ｋ未満の熱処理では、ヤング率が比較的低い。こ
れは、１３７３Ｋ未満では表面部のみしか炭化されない
ためと考えられる。したがって、熱処理温度Ｔ1 は１３
７３Ｋ以上が好ましい。さらに、熱処理温度１６７３Ｋ
では引張り強さは９５０Ｎ／ｍｍ2 、ヤング率は８３０
０ＫＮ／ｍｍ2 と比較的高い値が得られた。尚、板材
は、モリブデンに限らずタングステン等であってもよい
ことはいうまでもない。The method for manufacturing an electrode plate according to the present invention will be described below. The manufacturing procedure is shown below. The molybdenum sintered plate material is continuously subjected to hot rolling processing and cold rolling processing. The plate thickness is, for example, 0.05 to 0.
15 mm. If the rolling ratio is less than 90%, the tensile strength and Young's modulus after heat treatment described later are relatively low. The rolling rate is preferably 90% or more. This sintered plate material is subjected to a predetermined heat treatment temperature T 1 in a vacuum atmosphere.
At, carbonization treatment is performed. At this time, a straightening process is simultaneously performed by applying a predetermined load to the entire surface of the sintered plate material in the vertical direction. The tensile strength and Young's modulus of the present example and the conventional sintered plate material with respect to the heat treatment temperature T 1 are shown in FIGS. 1 and 2, respectively. Note that these sintered plate materials are rolled at a rolling ratio of 9
It was rolled at a plate thickness of 0.1 mm at 9.7%. Referring to FIGS. 1 and 2, the heat treatment temperature T 1 is 1
If the heat treatment is less than 373 K, the Young's modulus is relatively low. It is considered that this is because only the surface portion is carbonized below 1373K. Therefore, the heat treatment temperature T 1 is 13
73K or more is preferable. Furthermore, heat treatment temperature 1673K
Then, the tensile strength is 950 N / mm 2 , and the Young's modulus is 830.
A relatively high value of 0 KN / mm 2 was obtained. Needless to say, the plate material is not limited to molybdenum and may be tungsten or the like.
【０００６】[0006]
【発明の効果】本発明によるＣＴ装置用電極板の製造方
法は、モリブデン焼結体板材を所定の圧延率で圧延処理
し、真空雰囲気下で所定温度にて炭化処理と矯正処理と
を行うから、引張り強さおよびヤング率が比較的高い電
極板が得られる。本発明によるＣＴ装置用電極板は、所
定温度にて炭化処理および矯正処理されたモリブデン焼
結板材から成り引張り強さおよびヤング率が比較的高い
から、板厚を薄くしても筐体内で圧縮されたＸｅガスの
圧力により変形したり、駆動手段による振動に共振して
不要なＸ線を検出してしまうことがない。したがって、
ＣＴ装置の高精度化を実現できる。According to the method of manufacturing an electrode plate for a CT apparatus according to the present invention, a molybdenum sintered plate material is rolled at a predetermined rolling rate and carbonized and straightened at a predetermined temperature in a vacuum atmosphere. An electrode plate having a relatively high tensile strength and Young's modulus can be obtained. The electrode plate for CT device according to the present invention is made of a molybdenum sintered plate material carbonized and straightened at a predetermined temperature, and has a relatively high tensile strength and Young's modulus. There is no possibility of being deformed by the pressure of the generated Xe gas or detecting unnecessary X-rays by resonating with the vibration of the driving means. Therefore,
It is possible to improve the accuracy of the CT device.
【図１】本発明および従来の電極板の熱処理温度に対す
る引張り強さを示す図である。FIG. 1 is a diagram showing the tensile strength of an electrode plate of the present invention and a conventional electrode plate with respect to a heat treatment temperature.
【図２】本発明および従来の電極板の熱処理温度に対す
るヤング率を示す図である。FIG. 2 is a diagram showing Young's modulus with respect to a heat treatment temperature of the present invention and the conventional electrode plate.
【図３】本発明および従来の電極板が使用されるＣＴ装
置を説明するための概略図である。FIG. 3 is a schematic view for explaining a CT device using the present invention and a conventional electrode plate.
【図４】図３に示す検出器を詳細に説明するための概略
図である。FIG. 4 is a schematic view for explaining the detector shown in FIG. 3 in detail.
９ 被測定物 １０ 検出器 １０１ 陽極板 １０２ 陰極板 １０３ 間隙部 １０５ セラミック基板 9 DUT 10 Detector 101 Anode plate 102 Cathode plate 103 Gap 105 Ceramic substrate
Claims (3)
よび矯正処理されたモリブデン焼結板材から成ることを
特徴とするＣＴ装置用電極板。1. A carbonization treatment at a predetermined temperature in a vacuum atmosphere .
And an electrode plate for a CT device, which is made of a molybdenum sintered plate material subjected to straightening treatment .
つ、ヤング率が４０００ＫＮ／ｍｍ2 以上であることを
特徴とする請求項１記載のＣＴ装置用電極板。2. A tensile strength of 800 N / mm 2 or more, and, CT device electrode plate according to claim 1, wherein the Young's modulus is 4000KN / mm 2 or more.
圧延処理してモリブデン圧延板とする圧延工程と、前記
モリブデン圧延板を真空雰囲気下で所定温度にて炭化処
理して電極板とする炭化処理工程とを有し、前記炭化処
理工程は、前記モリブデン圧延板を矯正処理するステッ
プを含むことを特徴とするＣＴ装置用電極板の製造方
法。3. A rolling process for rolling a molybdenum sintered plate material at a predetermined rolling rate to obtain a molybdenum rolled plate, and a carbonizing treatment for the molybdenum rolled plate at a predetermined temperature in a vacuum atmosphere to obtain an electrode plate. possess the carbonizing step, the carbonization treatment
The processing step is a step for straightening the molybdenum rolled plate.
A method of manufacturing an electrode plate for a CT device , comprising :
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3203776A JPH084585B2 (en) | 1991-07-19 | 1991-07-19 | Electrode plate for CT device and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3203776A JPH084585B2 (en) | 1991-07-19 | 1991-07-19 | Electrode plate for CT device and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0523327A JPH0523327A (en) | 1993-02-02 |
| JPH084585B2 true JPH084585B2 (en) | 1996-01-24 |
Family
ID=16479601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3203776A Expired - Lifetime JPH084585B2 (en) | 1991-07-19 | 1991-07-19 | Electrode plate for CT device and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH084585B2 (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5824904B2 (en) * | 1977-04-06 | 1983-05-24 | 株式会社東芝 | radiation detector |
-
1991
- 1991-07-19 JP JP3203776A patent/JPH084585B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0523327A (en) | 1993-02-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19960723 |