JP4454983B2 - Clean room construction method - Google Patents

Description

  The present invention relates to a clean room construction method capable of obtaining a high-quality clean room with high air quality.

In the construction of clean rooms, measures are taken to prevent dust and chemical contamination from the building construction stage in order to bring the clean room air quality to the final level with low cost and short construction period. In other words, daily cleaning during construction and weekly cleaning are thoroughly conducted, and after completion of the building frame construction and steel frame construction, the occupants are required to put on their shoes, and each time the construction proceeds, On the other hand, the clean room is required to be cleanly constructed by wearing a clean suit and making it mandatory to enter the room through an air shower.
However, in the conventional clean room construction, there has been a problem that short-term clean-up construction cannot be achieved because the dust continues to float in the space of the clean room construction area after the completion of the frame construction and steel construction. Therefore, the present applicant has filed a patent application for an invention that efficiently removes dust by spraying water into the space of the construction area of the clean room after completion of the building frame construction and steel construction ( Japanese Patent Application No. 2002-329426).

  In the clean room construction method described above, air is not shut off between the clean room construction area and the outside during the clean room construction. Therefore, it is exposed to air pollutants such as NOX, SOX, ammonia, etc. contained in exhaust gas, such as sodium in construction near the coast, calcium chloride in snow melting agent in construction in snowy areas. Since the clean room was being constructed, the air quality of the clean room could not be improved and a high quality clean room could not be obtained.

The present invention is, after building the exterior of a building a clean room is provided, feeding subjected clean air outside air filters and air washers processed by the air conditioner in the internal space is a clean room construction area bounded by the exterior of the building Then, the internal space and the outside air are shut off by making the internal space positive, and then the clean room is constructed in this internal space by closing the clean room wall and ceiling by constructing the clean room. Do.
In addition, materials and equipment that are carried into the clean room construction area before the building exterior is constructed, and materials and equipment that are carried into the clean room construction area after the building exterior is built and before the clean room construction area is positively pressurized with clean air Is transported in a cured state so as not to be exposed to the outside air, and is carried into a clean room construction area, and a clean room is constructed with the cured materials and equipment.
Also, clean air is supplied to the interior space, which is the clean room construction area surrounded by the exterior of the building, and the internal space is made positive pressure to shut off the internal space and the outside air before entering the front room at the entrance of the clean room construction area. And supply clean air to the front room to create positive pressure in the front room, carry the equipment that has been cured so that it does not touch the outside air, and remove the curing of the equipment in the front room. After that, the equipment is carried into the clean room construction area and the clean room is constructed with the equipment.
We also provide clean air through the air conditioner into the clean room by extending the clean air supply pipe of the air conditioner in a clean room after a section of clean room is constructed.

Since the clean room is constructed after the air is cut off between the clean room construction area and the outside, a high-quality clean room with high air quality can be obtained.
In addition, for materials and equipment to be brought into the clean room construction area before shutting off the air between the clean room construction area and the outside, thoroughly cure and after shutting off the clean room construction area surrounded by the exterior and the outside air The materials and equipment to be carried into the clean room construction area are thoroughly cured and removed from the previous room and carried into the clean room construction area, so that a high quality clean room with high air quality can be obtained.
In addition, since clean air via the air conditioner is finally supplied into the clean room, the air conditioner can be used as it is as an air conditioner for operation after completion of the clean room.

  First, an outline of a clean room will be described with reference to FIG. 2 by taking a clean room of a semiconductor manufacturing facility as an example. The clean room has a structure divided into, for example, three areas. That is, it includes a process area 10 in which precision equipment required for semiconductor manufacturing and inspection is installed, an underfloor area 20, and a ceiling area 30. The floor of the process area 10 is a perforated floor (grating) 11, and the ceiling of the process area 10 is formed by a ceiling plate 12. In the ceiling area 30, an air conditioner 31 and an air cleaning filter 32 are provided. An air circulation area 10A is provided on the side of the process area 10 so that the air is purified by the air cleaning filter 32 and circulates in each area 10, 20, 10A, 30 as indicated by arrows. Yes. In addition, a front room equipped with an air shower, pure water cleaning facilities, etc. is provided between the entrance 40 and the outside, and a person entering the clean room enters the clean room after performing air cleaning in the front room. . The front room becomes a sealed space by a double door including a door 40a on the clean room side and a door on the outside side. Incidentally, 41 is an entrance / exit between the air circulation space 10A and the process area 10, 41a is a door of the entrance / exit 41, 42 is a steel column, 42a is a steel joist of a perforated floor (grating) 11, 43 and 44 are fireproof coatings. A beam, 45 is a double window, 46 is a corridor, and 47 is a wiring pit for storing wiring.

Next, the construction method of the clean room will be described in order based on FIGS. 1 (a) to 1 (d).
First, work will be done on the lower housing and upper housing of the building where the clean room will be installed. In other words, the lower frame 1 is constructed by placing concrete and placing reinforcing bars outside the figure, and constructing the lower frame 1 by constructing the steel frame, constructing the rooftop concrete, installing the fire-resistant coated beam, etc. To do. After that, exterior construction of the building will be performed. That is, the exterior 3 is constructed by attaching exterior panels, joinery, glass, etc. and performing waterproofing work (see FIG. 1A). When the exterior 3 of the building is constructed, clean air 5 is supplied into the internal space 4 that is a clean room construction area surrounded by the exterior 3 of the building as shown in FIG. By doing so, the internal space 4 and the outside air are shut off. That is, clean air 5 obtained by filtering the outside air 7 by the air conditioner 6 including the blower 6a and the air filter 6b is supplied to the clean room construction area through the clean air supply pipe 6c. Instead of the filter processing, the clean air 5 may be supplied by processing with an air washer (not shown). In addition, before the exterior 3 of the building is constructed, and after the exterior 3 is constructed, the equipment 8A to be carried into the clean room construction area before the clean room construction area is made positive with clean air 5 is exposed to the outside air. While being cured 8a, it is transported from the manufacturing site of the equipment 8A and carried into the clean room construction area, and the clean room is constructed with the equipment 8A while being cured (see FIG. 1 (a)). The material 8A is, for example, an ALC plate used for an internal semi-container construction, a base component such as a molded cement plate, a steel column 42 of a clean room, a steel joist 42a, or the like. As shown in FIG. 1 (b), the clean air 5 is supplied into the internal space 4, which is a clean room construction area surrounded by the exterior 3, by the air conditioner 6 so as to make the internal space 4 positive pressure. After cutting off, the curing 8a of the material 8A is removed. Next, as shown in FIG. 1 (c), a front chamber 9 is created at the entrance / exit of the clean room construction area, and clean air is introduced into the front chamber 9 with an air conditioner not shown in the figure in the same manner as described above. Make the inside positive pressure. The equipment 8B transported with the curing 8b applied is carried into the front room 9, the curing equipment 8b is removed in the front room 9, and then the equipment 8B is carried into the clean room construction area. A clean room will be constructed. The front chamber 9 may be provided outside the exterior 3 of the building. The material 8B is, for example, a lightweight base steel frame, a material for the perforated floor 11 or the ceiling board 12, an interior material such as a wall board, a ceiling board, a cloth, a joinery, and an air cleaning filter 32. As shown in FIG. 1 (d), when the clean room 100 is constructed by closing the clean room wall and ceiling, the supply pipe 6 d is added to the clean air supply pipe 6 c of the air conditioner 6. By extending the clean air supply pipe, the clean air supply pipe is extended into the clean room 100, the clean air 5 is supplied into the clean room 100 via the air conditioner 6, and the clean room 100 is air-conditioned and dust-removed to complete the clean room. Used as clean room air conditioning later. An extendable / contractable clean air supply pipe 6c may be used.

In this way, since the clean room was constructed after shutting off the air between the clean room construction area and the outside, the clean room can be constructed in a clean environment from an early stage, and the air quality is high. A high quality clean room 100 can be obtained. In the conventional construction method, air is not shut off between the clean room construction area and the outside during the construction of the clean room. For example, semiconductor manufacturing and research are easy to attach air pollutants to semiconductor products produced in the clean room. Although there existed problems, such as a cause which inhibits, according to this invention, since the high quality clean room 100 with high air quality can be obtained, such a problem can be eliminated.
In addition, the equipment 8A to be carried into the clean room construction area before the exterior 3 is constructed, and the equipment 8A to be carried into the clean room construction area after the exterior is constructed and before the clean room construction area is made positive by the clean air 5 As for, by thoroughly carrying out the curing 8a, a high-quality clean room can be obtained. In addition, parts that cannot be cured in practice, such as bolts and joints, are cleaned with pure water.
In addition, the equipment 8B to be carried into the clean room construction area after shutting off the clean room construction area surrounded by the exterior 3 and the outside air was thoroughly cured, and further placed under clean air management via the front room 9 Since the curing 8b is later removed and carried into the clean room construction area, a high quality clean room can be obtained.
Moreover, since the clean air 5 by the air conditioner 6 is finally supplied into the clean room 100, the air conditioner 6 can be used as it is as an air conditioner for operation after completion of the clean room, and the introduction cost of the air conditioner can be reduced.

  It can be applied to construction of clean rooms such as semiconductor manufacturing facilities and operating rooms where air quality is required.

It is a figure which shows one Embodiment of the construction method of the clean room of this invention. It is a figure which shows the structural example of the clean room constructed | assembled by the construction method of the clean room of this invention.

Explanation of symbols

3 Exterior of building where clean room is established, 4 interior space,
5 Clean air, 6 Air conditioner, 7 Outside air, 8A, 8B Equipment, 9 Front room,
100 clean room, 101 clean room compartment.

Claims (4)

After building the exterior of a building a clean room is provided, the internal space clean air outside air filters and air washers processed sheet subjected to the internal space is a clean room construction area bounded by the exterior of the building by the air conditioner The interior of the interior space and the outside air are shut off by making the pressure positive, and then the clean room is constructed in the interior space by closing the clean room wall and ceiling to construct the clean room compartment. A clean room construction method.   Equipment and materials that are carried into the clean room construction area before the building exterior is constructed, and materials that are carried into the clean room construction area before the clean room construction area is made positive with clean air after the building exterior is constructed are open air The clean room construction method according to claim 1, wherein the clean room is transported in a state of being cured so as not to be touched and carried into a clean room construction area, and a clean room is constructed with the material and equipment in a cured state.   Clean air is supplied to the interior space, which is the clean room construction area surrounded by the exterior of the building, and the internal space is made positive pressure to shut off the internal space and outside air, and then the front room is created at the entrance of the clean room construction area Then, clean air is supplied to the front room to bring the front room to positive pressure, and the equipment that has been cured so as not to touch the outside air is brought into the front room, and the equipment is removed from the front room. 3. The clean room construction method according to claim 1, wherein the equipment is carried into a clean room construction area and the clean room is constructed with the equipment. Claims 1 to compartment clean room is characterized in that to supply clean air through the air conditioner into the clean room by extending the clean air supply pipe of the air conditioner in a clean room after being built 4. A clean room construction method according to any one of 3 above.

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