JP4817467B2 - Magnetic head suspension - Google Patents

Description

  The present invention relates to a magnetic head suspension for supporting a magnetic head slider that reads and / or writes data to a storage medium such as a hard disk.

  As the capacity of magnetic disk drives increases, the accuracy of positioning of the magnetic head slider with respect to the target track is required. For this reason, in addition to the coarse movement of the magnetic head slider in the seek direction by the main actuator such as a voice coil motor. Thus, there has been proposed a magnetic head suspension that enables fine movement of the magnetic head slider in the seek direction by a piezoelectric element acting as a subactuator (see, for example, Patent Document 1 below).

  The magnetic head suspension described in Patent Document 1 enables the magnetic head slider to be finely moved by the piezoelectric element, and prevents the increase in the thickness direction of the suspension due to the provision of the piezoelectric element as much as possible. For this purpose, the following configuration is provided.

FIGS. 10A and 10B are a top view (plan view seen from the side opposite to the disk surface) and a bottom view (bottom view seen from the side close to the disk surface) of the conventional magnetic head suspension, respectively. Figure).
FIG. 10C is a cross-sectional view taken along line XX in FIG.

  As shown in FIGS. 10A to 10C, the conventional magnetic head suspension includes a load bending portion 20 for generating a load for pressing the magnetic head slider 50 toward the disk surface, and the load to the magnetic head suspension. A load beam portion 30 for transmitting to the head slider 50, and a support portion that supports the load beam portion 30 via the load bending portion 20 and is swung directly or indirectly around a swing center by a main actuator. 10, a flexure portion 40 supported by the load beam portion 30 and the support portion 10 while supporting the magnetic head slider 50, and the pair of piezoelectric elements 60.

The support part 10 has a plate-like support part forming plate 100.
The support portion forming plate 100 includes a support portion base end region 101 connected directly or indirectly to the main actuator, a support portion tip end region 105 to which the load bending portion 20 is connected, and the support in the longitudinal direction of the suspension. A support opening region 110 located between the base end region 101 and the support tip region 105 and surrounding the pair of piezoelectric elements 60 in a plan view orthogonal to the disk surface; and the support opening region 110. A pair of left and right support portion connecting beam regions 115 that connect the support portion base end region 101 and the support portion tip end region 105 are integrally provided on the outer side in the suspension width direction.

The support part 10 further includes at least a front end side support plate 850 fixed to a lower surface of the support part forming plate 100 adjacent to the disk surface so that at least a part thereof is positioned in the support part opening region 110. And a base end side support plate 860 fixed to the lower surface of the support portion forming plate 100 close to the disk surface so that a part thereof is located in the support portion opening region 110.
As shown in FIG. 10 (b), the distal end side support plate 850 is formed integrally with the load bending portion 20 and the load beam portion 30.

  The pair of piezoelectric elements 60 is placed on the upper surface opposite to the disk surface of the distal end side support plate 850 and has a proximal end side opposite to the disk surface of the proximal end support plate 860. In the state of being placed on the upper surface, the end surface on the proximal end side in the support portion distal end region 105, the upper surface of the distal end side support plate 850, the end surface on the distal end side in the support portion proximal end region 101, and the base At least a part of the pair of piezoelectric elements 60 is fixed to the upper surface of the end-side support plate 860 with an adhesive 70 so that the support portion forming plate 100 and the z-direction perpendicular to the disk surface It is supposed to overlap.

  According to such a configuration, the pair of piezoelectric elements 60 can displace the support portion distal end region 105 with respect to the support portion proximal end region 101, and the pair of piezoelectric elements 60 are provided. An increase in the thickness of the magnetic head suspension in the plate thickness direction can be prevented as much as possible.

  By the way, as shown in FIGS. 10B and 10C, the magnetic head suspension is provided with a flexure portion 40. The flexure unit 40 includes a flexure substrate 400 having a head mounting area 412 on which the magnetic head slider 50 is mounted, and a wiring body stacked on the flexure substrate 400 while being electrically connected to the magnetic head slider 50. 480.

  The flexure substrate 400 is welded to the support portion forming plate 100 to be fixed to the support portion 10 and is welded to a load beam forming plate 300 that forms the load beam portion 30, thereby the load beam portion 30. It is fixed to.

  Specifically, in order to prevent vibration of the flexure substrate 400 due to the elastic deformation operation of the load bending portion 20 as much as possible, the flexure substrate 400 is as close as possible to the load bending portion 20 in the suspension longitudinal direction. It is preferable that the support portion forming plate 100 is fixed to the support portion forming plate 100, that is, it is welded to the support portion tip end region 105 of the support forming plate 100.

  However, in the conventional magnetic head suspension, as shown in FIG. 10 (c), the tip side support plate 850 is overlapped with the entire region of the support portion tip region 105 of the support portion forming plate 100 in the longitudinal direction of the suspension. ing.

In such a conventional configuration, in order to weld the flexure substrate 400 to the support portion forming plate 100 at a position as close as possible to the load bending portion 20, as shown in part A in FIG. The flexure substrate 400 must be welded to both the front end side support plate 850 and the support portion forming plate 100.
That is, the three plate-like members of the flexure substrate 400, the distal end side support plate 850, and the support portion forming plate 100 must be welded.

  Therefore, the required welding strength is increased, and as a result, there is a risk that the flexure substrate 400, the distal end side support plate 850, and the support portion forming plate 100 are distorted due to welding. These distortions affect the flying characteristics and suspension vibration characteristics of the magnetic head slider 50.

JP 2002-050140 A

  The present invention has been made in view of the prior art, and in a plan view, the pair of piezoelectric elements is located in an opening region provided in the support section forming plate, and the pair of piezoelectric elements is the support section forming plate. A magnetic head suspension mounted on the support portion forming plate using a support plate fixed to the support portion forming plate, wherein a flexure substrate that forms a flexure portion is formed without requiring welding between three members. An object of the present invention is to provide a magnetic head suspension that can be welded at a position as close as possible to the leading edge of the head.

  In order to achieve the above object, the present invention provides a load bending portion for generating a load for pressing the magnetic head slider toward the disk surface, a load beam portion for transmitting the load to the magnetic head slider, A support portion that supports the load beam portion via a load bending portion and is directly or indirectly swung around a swing center by a main actuator; and the load beam portion and the magnetic head slider in a state of supporting the magnetic head slider. The flexure part supported by the support part and the support part so that the magnetic head slider is slightly slid in the seek direction and symmetrical with respect to each other with respect to the longitudinal center line of the suspension. A magnetic head suspension including a pair of left and right piezoelectric elements to be mounted, wherein the support portion includes the main actuator. A support portion base end region connected directly or indirectly to the motor, a support portion tip end region to which the load bending portion is connected, and the support portion base end region and the support portion front end region with respect to the suspension longitudinal direction. And a support opening region that surrounds the pair of piezoelectric elements in a plan view orthogonal to the disk surface, and the support portion proximal end region and the support portion distal end region on the outer side in the suspension width direction from the support opening region. A support portion forming plate integrally including a pair of left and right support portion connecting beam regions connecting the support portion, and the support portion in a state where at least a part thereof forms a tip side placement region located in the support portion opening region A state in which a front end side support plate fixed to a lower surface of the forming plate close to the disk surface and a proximal end side mounting region at least part of which is located in the support portion opening region are formed. A base end side support plate fixed to a lower surface of the support portion forming plate adjacent to the disk surface, and the pair of piezoelectric elements has a tip side opposite to the disk surface of the tip side mounting region. In a state where the base end side is placed on the upper surface opposite to the disk surface of the base end side placement region, the base end side end surface in the support portion tip end region, the tip end side mounting The upper surface of the mounting region, the end surface on the distal end side in the support portion proximal side region, and the upper surface of the proximal side mounting region are fixed via an adhesive, and the load bending portion is connected to the disk surface. A pair of left and right elastic plates whose base ends are connected to one end side and the other end side in the suspension width direction of the support portion distal end region so as to be substantially parallel and spaced apart from each other in the suspension width direction; The load beam portion is A load beam substrate having a plate-shaped load beam main body region that is substantially parallel to the disk surface and having a base end connected to the tip of the pair of elastic plates; A flexure substrate having a head mounting region on which a head slider is mounted, and a wiring body laminated on the flexure substrate, wherein the flexure substrate includes a load beam portion overlapping region superposed on the load beam portion main body region, and The head mounting region supported by the load beam portion overlapping region via a pair of arm regions, the support portion overlapping region overlapped by the support portion, and the load beam portion overlapping region and the support portion overlapping region are connected. As described above, it integrally has a connection region extending in the suspension longitudinal direction between the pair of elastic plates in the suspension width direction, The tip side support plate forms an exposed surface in which a lower surface adjacent to the disc surface of the tip part including a tip side edge in the support portion tip region is exposed to the disc surface at least in a central region in the suspension width direction. Is fixed to the lower surface of the support portion forming plate by welding, and the load beam portion overlapping region of the flexure substrate is welded to the load beam portion main body region at an appropriate welding point, and The support portion overlapping region provides a magnetic head suspension that is welded to the support portion forming plate at least at a welding point disposed on the exposed surface of the tip portion in the support portion tip region.

  Preferably, in the lower surface of the support portion forming plate, the support portion is configured such that a portion where the distal end side support plate abuts and a portion where the base end side support plate abuts are separated from the disk surface more than other portions. A recess is formed on the lower surface of the part forming plate.

The concave portion may include a distal-side concave portion with which the distal-side support plate abuts and a proximal-side concave portion with which the proximal-side support plate abuts.
The distal end side recess is formed so as to extend to the proximal end side of the support portion distal end region and the distal end side of the pair of support portion connecting beam regions.
The base end side recess is formed only in the support portion base end region and does not reach the base end side of the pair of support portion connecting beam regions.

  In one form, the depth of the said recessed part is made the same as or more than the plate | board thickness of the said front end side support plate.

The support portion overlapping region is positioned closer to the distal end side than the pair of piezoelectric elements, and a distal end side support portion overlapping region located at the same position as the exposed surface of the distal end portion in the support portion distal end region with respect to the suspension longitudinal direction. A proximal end support portion overlapping region and an intermediate support portion overlapping region connecting the distal end support portion overlapping region and the proximal end support portion overlapping region between the pair of piezoelectric elements in the suspension width direction may be included.
The depth of the concave portion is made smaller than the thickness of the front end side support plate, and a groove through which the intermediate support portion overlapping region passes is formed on the lower surface of the front end side support plate close to the disk surface.

For example, the distal end side support plate and the proximal end side support plate can be integrally formed in a state in which ends on the outer side in the suspension width direction are connected by a pair of connecting beams.
Instead of this, the distal end side support plate and the proximal end side support plate may be integrally formed in a state where the central portions in the suspension width direction are connected by a single connecting beam.

  In the various configurations, preferably, the front end side support plate has the support portion forming plate so that a gap exists between a front end side edge and a base end side edge of the support portion front end region in a plan view. The base end side support plate is fixed to the support part forming plate so that a gap exists between the base end side edge and the front end side edge of the support part base end side region in plan view. Is done.

  The present invention also provides a load bending portion that generates a load for pressing the magnetic head slider toward the disk surface, a load beam portion for transmitting the load to the magnetic head slider, and the load bending portion. A support portion that supports the load beam portion and swings directly or indirectly around a swing center by a main actuator, and is supported by the load beam portion and the support portion while supporting the magnetic head slider. In order to finely move the flexure portion and the magnetic head slider in the seek direction, a pair of left and right attached to the support portion so as to be symmetrical with respect to each other with respect to the center line in the longitudinal direction of the suspension and different in expansion and contraction directions with respect to each other. A magnetic head suspension including a piezoelectric element, wherein the support portion is directly or indirectly connected to the main actuator. A support base end region connected to the support portion, a support tip end region to which the load bending portion is connected, and a suspension longitudinal direction are located between the support portion base end region and the support portion front end region and orthogonal to the disk surface. A pair of left and right sides connecting the support portion base end region and the support portion tip end region on the outer side in the suspension width direction from the support portion opening region. The support portion forming plate integrally having the support portion connecting beam region and the support portion forming plate are fixed so as to form a placement region in which the pair of piezoelectric elements is placed in the support portion opening region. And a pair of piezoelectric elements mounted on the support plate, the end surface on the proximal end side in the distal end region of the support portion, and the disk surface of the support plate Are fixed to the upper surface on the opposite side and the end surface on the distal end side in the base end side region of the support portion via an adhesive, and the load bending portion is substantially parallel to the disk surface and the suspension width direction with respect to each other A pair of left and right elastic plates whose base end portions are respectively connected to one end side and the other end side in the suspension width direction of the support portion distal end region so that the load beam portion is substantially the same as the disk surface. A load beam substrate having a flat load beam main body region which is made parallel and a base end portion connected to the tip end portions of the pair of elastic plates is provided, and the flexure portion is mounted with the magnetic head slider. A flexure substrate having a head mounting region and a wiring body laminated on the flexure substrate, wherein the flexure substrate is superposed on the load beam portion main body region. A portion overlapping region, the head mounting region supported by the load beam portion overlapping region via a pair of arm regions, a support portion overlapping region overlapped by the support portion, the load beam portion overlapping region and the support A connecting region extending in the longitudinal direction of the suspension between the pair of elastic plates in the suspension width direction so as to connect the partial overlapping regions, and the support plate is formed on the disk surface in the tip end region of the support portion. The adjacent lower surfaces are welded to the lower surface of the support portion forming plate in a state of being separated from each other in the suspension width direction so as to form an exposed surface exposed to the disk surface at least in the central region in the suspension width direction. A pair of tip-side base stainless steel, and the pair of tip-side base stainless steel, the suspension length A pair of base end side base stainless steel welded to the lower surface of the support portion forming plate at a position spaced away from the proximal base side, and a pair of tip end side base stainless steel and a pair of base end side base stainless steel A pair of distal end side base stainless steels so as to face the end surface on the proximal end side of the distal end region of the support portion; and a laminated stainless steel layer laminated on the upper surface of the polyimide layer. A base end side extending in the suspension width direction between the pair of base end side base stainless steels so as to face the front end side width direction region extending in the suspension width direction between the pair of base end side base stainless steels A width direction region, and a connecting region that connects the distal side width direction region and the proximal side width direction region, and the reinforcing stainless steel is A distal end side reinforcing stainless steel extending in the suspension width direction on the base end side of the upper surface in the region, and a base end side reinforcing stainless steel extending in the suspension width direction on the front end side of the upper surface in the base end side width direction region, the flexure substrate The load beam portion overlapping region is fixed to the load beam portion by being welded to the load beam portion main body region, and the support portion overlapping region is welded to the exposed surface in the support portion tip end region. A magnetic head suspension fixed to the support portion is provided.

  According to the magnetic head suspension of one aspect of the present invention, the lower surface close to the disk surface of the tip portion including the tip side edge in the support portion tip region of the support portion forming plate is at least in the suspension width direction central region at the disk surface. A tip-side support plate that supports the tip sides of the pair of piezoelectric elements so as to form an exposed exposed surface is fixed to the lower surface of the support portion forming plate by welding, and the flexure substrate is a load beam at an appropriate welding point. Welded between the three members including the flexure substrate because the welded portion is welded to the support portion forming plate at a welding point disposed at the exposed surface of the tip portion in the support portion tip region. The flexure substrate is positioned as close as possible to the leading edge of the support portion forming plate. In can be welded to the support portion forming plate. Accordingly, it is possible to effectively prevent the flexure substrate, the distal end side support plate, and the support portion forming plate from being distorted due to welding, and suppress the vibration of the flexure substrate accompanying the elastic deformation operation of the load bending portion. Can do.

  According to the magnetic head suspension according to another aspect of the present invention, the lower surface of the support portion forming plate including the front end side in the support portion front end region that is close to the disk surface is at least in the central region of the suspension width direction. A support plate that supports a pair of piezoelectric elements so as to form an exposed surface exposed to the surface is fixed to the lower surface of the support portion forming plate by welding, and the flexure substrate has a load beam portion main body region at an appropriate welding point. And welded to the support portion forming plate at a welding point disposed at least on the exposed surface of the tip portion in the tip region of the support portion, and thus welding between three members including the flexure substrate is required. The flexure substrate is supported at a position as close as possible to the leading edge of the support portion forming plate. It can be welded to form plates. Accordingly, vibration of the flexure substrate accompanying the elastic deformation operation of the load bending portion can be suppressed while effectively preventing distortion caused by welding on the flexure substrate, the support plate, and the support portion forming plate. .

FIGS. 1A and 1B are a top view and a bottom view, respectively, of the magnetic head suspension according to the first embodiment of the present invention. FIG. 2 is an exploded top view of the magnetic head suspension according to the first embodiment. FIG. 3 is a bottom view of the support portion forming plate in the magnetic head suspension according to the first embodiment. FIG. 4A is a bottom view of the magnetic head suspension according to the first embodiment with a flexure portion removed. FIG. 4B is an enlarged cross-sectional view taken along line IV-IV in FIG. FIG. 4C is an enlarged cross-sectional view of a magnetic head suspension according to a modified embodiment. FIG. 5 is a bottom view of a magnetic head suspension according to another modification. 6A and 6B are partial bottom views of a magnetic head suspension according to still another modification. FIG. 7A is a bottom view of the magnetic head suspension according to the second embodiment of the present invention, and FIG. 7B is a partial longitudinal side view of the magnetic head suspension according to the second embodiment. FIG. 5 is a longitudinal side view corresponding to FIG. FIG. 8A is a bottom view of the magnetic head suspension according to the third embodiment of the present invention, and FIG. 8B is a cross-sectional view taken along the line VIII-VIII in FIG. FIG. 8C is a cross-sectional view of a magnetic head suspension according to a modification of the third embodiment. FIGS. 9A and 9B are a bottom view and a top view of a load beam portion, a load bending portion, and a support plate, respectively, in the magnetic head suspension according to the third embodiment. FIGS. 10A and 10B are a top view and a bottom view, respectively, of a conventional magnetic head suspension, and FIG. 10C is a cross-sectional view taken along line XX in FIG. 10B.

Embodiment 1
Hereinafter, preferred embodiments of a magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
1A and 1B are a top view (a plan view seen from the side opposite to the disk surface) and a bottom view (a bottom view seen from the disk surface side), respectively, of the magnetic head suspension 1A according to the present embodiment. Figure). In FIG. 1 (b), a circle indicates a welding point.
FIG. 2 is an exploded top view of the magnetic head suspension 1A.

  As shown in FIGS. 1 and 2, the magnetic head suspension 1 </ b> A transmits a load bending portion 20 that generates a load for pressing the magnetic head slider 50 toward the disk surface, and transmits the load to the magnetic head slider 50. A load beam portion 30 for supporting the load beam portion 30 via the load bending portion 20 and swinging directly or indirectly about a swing center by a main actuator, and the magnetic head The load beam portion 30 and the flexure portion 40 supported by the support portion 10 with the slider 50 being supported, and the suspension head longitudinal center line CL to make the magnetic head slider 50 finely move in the seek direction. A pair of left and right mounted on the support 10 so as to be symmetrical with respect to each other and have different expansion and contraction directions with respect to each other And a conductive element 60.

  The support portion 10 supports the load beam portion 30 via the load bending portion 20 while being directly or indirectly connected to the main actuator such as a voice coil motor, and the pair of piezoelectric devices to be mounted. The element 60 is configured such that the distal end side can be changed with respect to the proximal end side.

  Specifically, the support unit 10 is directly or indirectly connected to the main actuator and supports the load beam unit 30 via the load bending unit 20, and the support unit formation plate 100. A distal end side support plate 150 and a proximal end side support plate 160 fixed to the support portion forming plate 100 so as to support the pair of piezoelectric elements 60 in cooperation with each other.

FIG. 3 shows a bottom view of the support portion forming plate 100.
As shown in FIGS. 1 (a), 2, and 3, the support forming plate 100 includes a support base end region 101 that is directly or indirectly connected to the main actuator, and the load bending portion 20. The pair of piezoelectric elements 60 are arranged in a plan view, which is located between the support portion distal end region 105 to be connected and the support portion proximal end region 101 and the support portion distal end region 105 in the suspension longitudinal direction and orthogonal to the disk surface. A surrounding support portion opening region 110 and a pair of left and right support portion connecting beam regions connecting the support portion base end region 101 and the support portion tip end region 105 on the outer side in the suspension width direction from the support portion opening region 110. 115 integrally.
The support part forming plate 100 is preferably formed of, for example, a stainless steel plate having a thickness of 0.1 mm to 0.8 mm.

FIG. 4A shows a bottom view of the magnetic head suspension 1A with the flexure portion 40 removed.
FIG. 4 (b) shows an enlarged cross-sectional view along the line IV-IV in FIG. 4 (a).

  As shown in FIG. 4 (b), the front end side support plate 150 is formed on the support portion forming plate 100 in a state where at least a part forms a front end side placement region 151 located in the support portion opening region 110. It is fixed to the lower surface close to the disk surface.

  That is, as shown in FIG. 4B, the front end side support plate 150 includes a support part contact area 152 that is in contact with the lower surface of the support part forming plate 100 and the support part contact area 152. The front-end-side placement region 151 is located in the support-portion opening region 110 in contact with the lower surface of the support-portion forming plate 100.

In the present embodiment, as shown in FIG. 3, a portion of the lower surface of the support portion forming plate 100 that comes into contact with the tip side support plate 150 is separated from the disk surface more than other portions. A tip side recess 120 is provided on the lower surface of the support forming plate 100.
By forming the tip side recess 120, the tip side support plate 150 is fixed to the bottom surface of the support part forming plate 100 when the tip side support plate 150 is fixed to the bottom surface of the support part forming plate 100. Can be prevented from bulging out or the amount of bulging of the distal end side support plate 150 can be reduced.

As shown in FIG. 4B, the depth of the tip side recess 120 is preferably equal to or greater than the thickness of the tip side support plate 150.
According to such a configuration, it is possible to reliably prevent the distal end side support plate 150 from bulging from the lower surface of the support portion forming plate 100 in a direction approaching the disk surface.

In the present embodiment, the distal end side support plate 150 is in contact with the proximal end side of the support portion distal end region 105 and the distal end side of the pair of support portion connecting beam regions 115.
Therefore, as shown in FIG. 3, the distal end side recess 120 is provided so as to extend from the proximal end edge of the support portion distal end region 105 to the distal end side of the pair of support portion connecting beam regions 115.

  Similarly, the base end side support plate 160 is also fixed to the lower surface of the support portion forming plate 100 in a state where at least a part thereof forms a base end side placement region 161 located in the support portion opening region 110. ing.

  That is, as shown in FIG. 4B, the base-side support plate 160 includes a support part contact area 162 that contacts the lower surface of the support part forming plate 100 and the support part contact area 162. The base-side placement region 161 located in the support-portion opening region 110 in a state of being in contact with the lower surface of the support-portion forming plate 100.

In the present embodiment, as shown in FIG. 4 (b), a portion of the lower surface of the support portion forming plate 100 that contacts the base end side support plate 160 is separated from the disk surface more than other portions. As described above, a base-side concave portion 125 is provided on the lower surface of the support portion forming plate 100.
When the base end side support plate 160 is fixed to the lower surface of the support portion forming plate 100 by forming the base end side concave portion 125, the base end side support plate 160 is supported by the support portion forming plate 100. Can be prevented from bulging out from the lower surface, or the bulging amount of the base end side support plate 160 can be reduced.

As shown in FIG. 4B, the depth of the base end side recess 125 is preferably equal to or greater than the thickness of the base end side support plate 160.
According to such a configuration, it is possible to reliably prevent the proximal-side support plate 160 from bulging from the lower surface of the support portion forming plate 100 in a direction close to the disk surface.

In the present embodiment, the base end side support plate 160 is configured to contact only the distal end side of the support section base end area 101 and not to contact the pair of support section connecting beam areas 115. Has been. Therefore, as shown in FIG. 3, the base-side concave portion 125 is provided only on the distal end side of the support portion base end region 101, and reaches the base end side of the pair of support portion connecting beam regions 115. Not done.
According to such a configuration, it is possible to reduce the stress applied to the pair of piezoelectric elements 60 when an impact force is applied, thereby increasing the acceleration (limit acceleration) of the impact force when causing the pair of piezoelectric elements 60 to break. The impact resistance of the magnetic head suspension 1A can be improved. Furthermore, according to the above configuration, the resonance frequency of the bending mode of the magnetic head suspension 1A can be increased.

In the present embodiment, as shown in FIGS. 1A and 1B, the support portion forming plate 100 is joined by caulking to the tip of a carriage arm (not shown) connected to the main actuator. The supporting portion 10 is in the form of a base plate.
Alternatively, the support portion forming plate 100 may be formed so that the support portion 10 is in the form of an arm connected to the swing center of the main actuator.

Each of the pair of piezoelectric elements 60 includes a main body portion made of PZT (lead zirconate titanate) and a pair of electrode layers disposed on both sides in the thickness direction of the main body portion perpendicular to the disk surface. Yes.
The main body has a thickness of, for example, 0.05 mm to 0.3 mm, and the electrode layer is formed of, for example, Ag or Au having a thickness of 0.05 μm to several μm.

  One of the pair of piezoelectric elements 60 expands and the other compresses according to the applied voltage, and the support portion distal end side region 105 is displaced with respect to the support portion proximal end region 101 by the expansion and contraction operation. The magnetic head slider 50 is mounted on the support portion 10 so as to slightly move in the seek direction.

  In the present embodiment, the pair of piezoelectric elements 60 are positioned in the support portion opening region 110 in a plan view orthogonal to the disk surface, and the support portion forming plate 100 and the front end side support plate. 150 and the proximal support plate 160 are fixed to each other through an insulating adhesive 70.

  That is, as shown in FIG. 1A and FIG. 4B, the pair of piezoelectric elements 60 is placed on the top surface of the tip side placement region 151 opposite to the disk surface. In addition, in a state where the base end side is placed on the upper surface of the base end side placement region 161 opposite to the disk surface, the base end side end surface of the support portion tip end region 105, the tip end side placement region 151 Are fixed to the upper surface of the support portion proximal end region 101 and the upper end surface of the support portion proximal end region 101 via the adhesive 70.

According to such a configuration, the expansion / contraction operation of the pair of piezoelectric elements 60 can be transmitted as much as possible as the movement operation of the magnetic head slider 50 in the seek direction.
Further, according to the configuration, a part or all of the pair of piezoelectric elements 60 can be overlapped with the support forming plate 100 in the thickness direction, and the magnetic head suspension 1 </ b> A including the pair of piezoelectric elements 60. The overall thickness can be made as thin as possible.

In the present embodiment, as shown in FIG. 1A, the pair of piezoelectric elements 60 are arranged so that the longitudinal direction (that is, the expansion and contraction direction) is along the suspension longitudinal direction. The invention is not limited to such a form.
That is, the pair of piezoelectric elements 60 is symmetrical with respect to the suspension longitudinal center line CL, and the longitudinal direction of the pair of piezoelectric elements 60 is within a range having a component along the suspension longitudinal direction. For example, the longitudinal direction of the pair of piezoelectric elements 60 can be inclined with respect to the longitudinal direction of the suspension.

  The load bending portion 20 has a proximal end portion connected to the support portion 10 and a distal end portion connected to the load beam portion 30, and the magnetic head slider 50 is moved to the disk surface based on its own elastic deformation. Generates a pressing load that pushes toward.

As shown in FIGS. 1 and 2, in the present embodiment, the load bending portion 20 has a pair of left and right elastic plates 21.
The pair of elastic plates 21 are substantially parallel to the disk surface and separated from each other in the suspension width direction, and the base end portions are one end side and the other end side in the suspension width direction of the support portion tip region 105. Are connected to the load beam portion 30 at the tip.
The elastic plate 21 is formed of a stainless steel plate having a thickness of 0.02 mm to 0.1 mm, for example.

  Preferably, the pair of elastic plates 21 are bent in advance in a direction in which the magnetic head slider 50 approaches the disk surface before the magnetic head suspension 1A is mounted on the magnetic disk device, and the magnetic When the head suspension 1A is mounted on the magnetic disk device, the pressing load is generated by being bent back.

As described above, the load beam portion 30 is a member for transmitting the load generated by the load bending portion 20 to the magnetic head slider 50, and therefore requires a predetermined rigidity.
In the present embodiment, as shown in FIGS. 1 and 2, the load beam unit 30 has a load beam substrate 300.
The load beam substrate 300 has a base end portion connected to the distal end portions of the pair of elastic plates 21 and has a plate-like load beam portion main body region 310 substantially parallel to the disk surface.

Preferably, the load beam substrate 300 is provided with flange portions 320 that are bent from both ends in the width direction of the load beam portion main body region 310 to the opposite side of the disk surface. The rigidity of the portion 30 can be ensured.
The load beam substrate 300 is preferably formed of, for example, a stainless plate having a thickness of 0.02 mm to 0.1 mm.

Specifically, the load beam portion 30 has a protrusion 33 called a dimple at the tip.
The protrusion 33 protrudes, for example, about 0.05 mm to 0.1 mm in a direction close to the disk surface. The protrusion 33 is in contact with the back surface (the surface opposite to the disk surface) of the head mounting area 412 in the flexure portion 40, and the load is applied to the head mounting area 412 of the flexure section 40 through the protrusion 33. Is transmitted to.

  In the present embodiment, the load beam portion 30 further integrally has a lift tab 34 extending from the front end of the main body region 310 to the front end side in the suspension longitudinal direction. The lift tab 34 is associated with a ramp provided in the magnetic disk device when the magnetic head suspension 1A is swung by the main actuator so that the magnetic head slider 50 is positioned radially outward of the disk surface. In addition, the magnetic head slider 50 is a member for separating the magnetic head slider 50 from the disk surface along the z direction (direction perpendicular to the disk surface).

In the present embodiment, as shown in FIGS. 1A and 1B, the load bending portion 20 is formed integrally with the load beam portion 30.
That is, in the magnetic head suspension 1A according to the present embodiment, the pair of elastic plates 21 and the load beam substrate 300 are integrally formed by a single plate member.

Of course, as shown in FIG. 5, the pair of elastic plates 21 can be separated from the load beam substrate 300.
In the modification shown in FIG. 5, the load beam substrate 300 is connected to the distal ends of the pair of elastic plates 21 by welding.

The flexure unit 40 is joined to the load beam unit 30 and the support unit 10 while supporting the magnetic head 50.
Specifically, the flexure unit 40 includes a flexure substrate 400 that supports the magnetic head slider 50 and is fixed to the load beam unit 30 and the support unit 10 as shown in FIGS. And a wiring body 480 laminated on the flexure substrate 400.

  The flexure substrate 400 includes a load beam portion overlapping region 410 overlapped with the load beam portion main body region 310, a pair of arm regions 411 extending from the load beam portion overlapping region 410 to the front end side in the suspension longitudinal direction, and the pair of pairs. The head mounting region 412 supported by the arm region 411, the support portion overlapping region 420 overlapped with the support portion 10, the load beam portion overlapping region 410 and the support portion overlapping region 420 are connected to each other in the suspension width direction. And a connecting region 415 extending in the longitudinal direction of the suspension between the pair of elastic plates 21.

The head mounting area 412 supports the magnetic head 50 on a surface facing the disk surface.
As described above, the protrusion 33 is in contact with the back surface of the head mounting area 412. Therefore, the head mounting area 412 can flexibly swing in the roll direction and the pitch direction with the protrusion 33 as a fulcrum. It has become.
The flexure substrate 40 is less rigid than the load beam substrate 300 so that the head mounting area 412 can swing in the roll direction and the pitch direction.
The flexure substrate 400 is preferably formed by a stainless plate having a thickness of about 0.01 mm to 0.025 mm, for example.

  As shown in FIG. 1B, the wiring body 480 is laminated on the surface of the flexure substrate 400 facing the disk surface and the surface of the insulating layer 481 facing the disk surface. And a protective layer (not shown) surrounding the conductive layer 482.

In the present embodiment, voltage is applied to the pair of piezoelectric elements 60 using the wiring body 482.
That is, as shown in FIG. 1B, the conductor layer 482 is electrically connected to the magnetic head conductor layer 482a for transmitting signals between the magnetic head slider 50 and the outside, and the pair of piezoelectric elements 60. A piezoelectric element conductor layer 482b.

  Then, the electrode layer on the upper surface side (opposite to the disk surface) of the pair of piezoelectric elements 60 is applied to the support forming plate 100 by a conductive member 72 (see FIG. 1A) such as a conductive adhesive. The conductor layer for piezoelectric element 482b is electrically connected to the electrode layer on the lower surface side (the side facing the disk surface) of the pair of piezoelectric elements 60 in a state of being grounded by electrical connection. Yes.

  Preferably, as shown in FIG. 1B, a part of the insulating layer 481 is overlapped with the pair of piezoelectric elements 60 in a plan view viewed along a direction orthogonal to the disk surface, and the The connection end portions of the piezoelectric element conductor layer 482b with the pair of piezoelectric elements 60 can be disposed so as to overlap the pair of piezoelectric elements 60 in the plan view. According to such a configuration, voltage application to the electrodes on the lower surface side of the pair of piezoelectric elements 60 using the wiring body 480 can be easily performed.

In the present embodiment, as shown in FIG. 1B, the piezoelectric element conductor layer 482b in the wiring body 480 and the electrode layer on the lower surface side of the pair of piezoelectric elements 60 are electrically connected by wire bonding 74. Is bound to.
Note that reference numeral 76 in FIG. 1B denotes an opening formed in the insulating layer 481.

  Furthermore, in the magnetic head suspension 1A according to the present embodiment, the front end side support plate 150 has at least a suspension width at the lower surface close to the disk surface at the front end portion including the front end side edge in the support portion front end region 105. It is fixed to the lower surface of the support portion forming plate 100 by welding in a state in which it is allowed to form an exposed surface exposed to the disk surface in the direction center region.

  In other words, in the present embodiment, a region on the distal end side in the suspension longitudinal direction from the region in contact with the distal end side support plate 150 of the lower surface of the support portion distal end region 105 forms the exposed surface.

  The load beam portion overlap region 410 of the flexure substrate 400 is welded to the load beam portion main body region 310 at an appropriate welding point, and the support portion overlap region 420 is at least the tip of the support portion tip region 105. It is welded to the support portion forming plate 100 at a welding point 90 (see FIG. 1B) disposed on the exposed surface of the part.

According to such a configuration, in a state where the flexure substrate 400 is welded only to the support portion forming plate 100, the welding point of the flexure substrate 400 to the support portion 10 is made as close as possible to the distal end side of the support portion 10. Close to each other.
Therefore, while preventing the flexure substrate 400 from vibrating due to the elastic deformation operation of the load bending portion 20 as much as possible, the flexure substrate 400, the distal end side support plate 150, and the support portion forming plate 100 are welded. Distortion can be effectively prevented.

Furthermore, in the present embodiment, as described above, the tip side recess 120 is formed on the lower surface of the support part forming plate 100 at a portion where the tip side support plate 150 abuts.
According to such a configuration, the flexure substrate 400 can be extended to the base end side of the support portion forming plate 100 without difficulty while welding the flexure substrate 400 to the lower surface of the support portion distal end region 105.

  In the present embodiment, as shown in FIGS. 2 and 4 (b), the support portion overlapping region 420 is brought into contact with and welded to the exposed surface of the tip portion in the support portion tip region 105. A distal-side support portion overlapping region 421, a proximal-side support portion overlapping region 423 positioned on the proximal side in the suspension longitudinal direction from the pair of piezoelectric elements 60, the distal-side support portion overlapping region 421, and the proximal-side support portion And an intermediate support overlap region 422 extending between the overlap regions 423.

  In such a configuration, as shown in FIG. 4 (b), the formation of the tip side recess 120 causes a step between the tip side support portion overlapping region 421 and the intermediate support portion overlapping region 422. It is possible to prevent or reduce the height of the step, thereby effectively preventing an unreasonable stress from being applied to the flexure substrate 400.

  In the present embodiment, as shown in FIG. 4 (b), the depth of the tip side recess 120 is the same as the thickness of the tip side support plate 150. As shown in FIG. 4 (c), the depth of the tip side recess 120 is made smaller than the plate thickness of the tip side support plate 150, and the bottom surface of the tip side support plate 150 is close to the disk surface. It is also possible to provide a groove 155 through which the intermediate support portion overlapping region 422 passes.

Of course, a similar groove 165 can be provided in the proximal support plate 160.
That is, as shown in FIG. 4 (c), the depth of the base end side recess 125 is made smaller than the plate thickness of the base end side support plate 160, and the disc surface of the base end side support plate 160 is made. The groove 165 through which the intermediate support portion overlapping region 422 passes can be provided on the lower surface close to the surface.

Further, in the present embodiment, the distal end support portion overlapping region 421 and the support portion forming plate 100 which are welded to the support portion distal end side region 105 are positioned on the proximal end side with respect to the pair of piezoelectric elements 60. The base end side support portion polymerization region 423 that overlaps with the portion is connected via the intermediate support portion polymerization region 422.
In such a configuration, preferably, as shown in FIG. 1A, the intermediate support portion overlapping region 422 is disposed between the pair of piezoelectric elements 60 in the suspension width direction.

  According to such a configuration, it is possible to effectively prevent the intermediate support portion overlapping region 422 and the pair of piezoelectric elements 60 from contacting each other while improving the rigidity of the flexure substrate 400 by the intermediate support portion overlapping region 422. .

  In the present embodiment, the distal end side support plate 150 and the proximal end side support plate 160 are separated, but instead, the distal end side support plate 150 and the proximal end side support plate are separated. It is also possible to integrally mold 160.

  For example, as shown in FIG. 6A, ends of the distal end side support plate 150 and the proximal end side support plate 160 on the outer side in the suspension width direction can be connected by a pair of connecting beams 170. Alternatively, as shown in FIG. 6B, the suspension width direction central portions of the distal end side support plate 150 and the proximal end side support plate 160 can be coupled by a single coupling beam 175. is there. In FIGS. 6A and 6B, the pair of piezoelectric elements 60 are indicated by broken lines.

  As described above, the distal end side support plate 150 and the proximal end side support plate 160 are integrally formed, so that the distal end side support plate 150 and the proximal end side support plate 160 are attached to the support portion forming plate 100. The efficiency can be improved, and the stress applied to the pair of piezoelectric elements 60 when an impact force is applied can be reduced.

Embodiment 2
Hereinafter, another embodiment of a magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
FIG. 7A shows a bottom view (bottom view seen from the disk surface side) of the magnetic head suspension 2A according to the present embodiment. The circles in FIG. 7 (a) indicate welding points.
FIG. 7B is a partial longitudinal side view of the magnetic head suspension 2A, and shows a longitudinal side view corresponding to FIG. 4B in the first embodiment.
In the figure, the same members in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the magnetic head suspension 2 </ b> A according to the present embodiment, a gap 140 exists between the front end side edge of the front end support plate 150 </ b> B and the base end side edge of the support section front end region 105 in a plan view orthogonal to the disk surface. The first embodiment is that the gap 145 exists between the base end side edge of the base end side support plate 160B and the front end side edge of the support portion base end side region 101 in the plan view. This is different from the magnetic head suspension 1A according to FIG.

  Specifically, the magnetic head suspension 2A according to the present embodiment has a distal end instead of the distal end side support plate 150 and the proximal end side support plate 160 based on the magnetic head suspension 1A according to the first embodiment. A side support plate 150B and a base end side support plate 160B are provided.

  The tip side support plate 150B is configured such that it overlaps only on the tip side of the pair of support part connecting beams 115 and the gap 140 exists between the support part tip region 105.

In the present embodiment, the support part forming plate 100 has the tip side recess 120 only on the tip side of the pair of support part connecting beams 115, and the support part tip region 105 has a center in the suspension width direction. Is not provided with the tip side recess 120.
The front end side support plate 150B is superposed and welded to the pair of support part connection beams 115 only at the front end side recess 120 provided on the front end side of the pair of support part connection beams 115. The support portion tip region 105 is configured not to overlap.

  The base end side support plate 160B overlaps only on both sides of the support base end region 101 in the suspension width direction, and the gap 145 exists between the support base end region 101 and the center in the suspension width direction. ,It is configured.

In the present embodiment, the support part forming plate 100 has the base side recesses 125 only on both sides of the center part in the suspension width direction on the tip side of the support part base end region 101, The base-side recess 125 is not provided at the center of the base-end region 101 in the suspension width direction.
The base end side support plate 160B is overlapped and welded to the support portion base end region 101 only in the base end side recess 125, and does not overlap with the support portion base end region 101 at the center in the suspension width direction. It is configured as follows.

According to the magnetic head suspension 2A having such a configuration, the following effects can be obtained.
That is, in the configuration in which the tip side support plate 150 overlaps the support portion tip region 105 in plan view as in the first embodiment, the insulating adhesive 70 is applied to the upper surface of the tip side support plate 150. When the pair of piezoelectric elements 60 is placed on the upper surface of the distal end side support plate 150 after being applied and the pair of piezoelectric elements 60 are fixed to the support portion distal end region 105 and the distal end side support plate 150, There is a possibility that the insulating adhesive 70 may enter between the front end side support plate 150 and the support portion front end region 105 which are in close contact with each other. Since both the front end side support plate 150 and the support portion front end region 105 are formed of a rigid member such as SUS and ideally are in a close contact state, when the insulating adhesive 70 enters between the two, As the pair of piezoelectric elements 60 expand and contract, the filler included in the insulating adhesive 70 between them may be detached.
On the other hand, in the present embodiment, the gap 140 is provided between the distal end side edge of the distal end side support plate 150B and the proximal end side edge of the support portion distal end region 105. Can also be effectively prevented.

  Similarly, since the gap 145 is provided between the base side edge of the base side support plate 160B and the center in the suspension width direction of the front side edge of the support part base region 101, the base side It is possible to effectively prevent the insulating adhesive 70 from entering between the support plate 160B and the support portion base end region 101.

Embodiment 3
Hereinafter, another embodiment of a magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
FIG. 8A shows a bottom view (bottom view as viewed from the disk surface side) of the magnetic head suspension 3A according to the present embodiment. FIG. 8B shows a cross-sectional view along the line VIII-VIII in FIG. In FIG. 8A, the illustration of the flexure unit 40 is omitted. In FIG. 8 (a), a circle indicates a welding point.
In the figure, the same members in the first or second embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  The magnetic head suspension 3A according to the present embodiment mainly includes the magnetic head according to the first embodiment in that the distal end side support plate 150 and the proximal end side support plate 160 are changed to a support plate 200. It is different from the suspension 1A.

  9A and 9B are a bottom view and a top view of the load beam portion 30, the load bending portion 20, and the support plate 200, respectively, in the magnetic head suspension 3A according to the present embodiment. In FIGS. 9A and 9B, the pair of piezoelectric elements 60 are indicated by broken lines.

  Specifically, the support plate 200 is a pair of tip-side base stainless steel 210 that is welded to the lower surface of the support portion forming plate 100 while being spaced apart from each other in the suspension width direction, and the pair of tip-side base stainless steel 210. A pair of base end base stainless steel 220 welded to the lower surface of the support portion forming plate 100 in a state of being spaced apart from the suspension longitudinal direction proximal end side and spaced apart from each other in the suspension width direction, and the pair of distal end sides A polyimide layer 230 laminated on the upper surface of the base stainless steel 210 and the pair of base end side base stainless steels 220 (surface opposite to the disk surface), and a reinforced stainless steel 240 laminated on the upper surface of the polyimide layer 230. I have.

  As shown in FIGS. 8A and 8B, the pair of front end side base stainless steel 210 has at least a central region in the suspension width direction on the lower surface adjacent to the disk surface in the support portion front end region 105 on the disk surface. It is welded to the lower surface of the support portion forming plate 100 so as to form an exposed exposed surface.

  In the present embodiment, as shown in FIGS. 8A and 8B, the support portion forming plate 100 is formed with the front end side recess 120 and the base end side recess 125, and the pair of pairs The distal side base stainless steel 210 and the pair of proximal side base stainless steels 220 are disposed in the distal side recess 120 and the proximal side recess 125, respectively.

Instead, as shown in FIG. 8 (c), the distal end side recess 120 and the proximal end side recess 125 can be deleted.
That is, the pair of tip-side base stainless steel 210 is welded to both sides of the lower surface of the support portion tip region 105 in the suspension width direction, and the flexure substrate 400 is placed between the pair of elastic plates 21 and the bottom surface of the support portion tip region 105. And can pass between the pair of distal end base stainless steel 210 and extend to the proximal end side.

  The polyimide layer 230 has a distal end side width direction region 231 that extends in the suspension width direction between the pair of distal end base stainless steel 210 so that the end surface on the distal end side faces the end surface on the proximal end side of the support portion distal end region 105. And a base-side width direction region 233 extending in the suspension width direction between the pair of base-side base stainless steels 220 such that the base-side end surface faces the end-side end surface of the support base end region 101. And a connecting region 232 that connects the distal end side width direction region 231 and the proximal end side width direction region 233.

It is possible to configure the polyimide layer 230 so as to abut the support portion distal end region 105 and / or the support portion proximal end region 101. In such a configuration, the polyimide layer 230 and the support portion are supported. The insulating adhesive 70 enters between the front end region 105 and / or between the polyimide layer 230 and the support base end region 101, and the expansion and contraction of the pair of piezoelectric elements 60 causes the There is a possibility that the filler included in the insulating adhesive 70 may be detached.
On the other hand, in the present embodiment, as shown in FIGS. 8B and 8C, there is a gap between the polyimide layer 230 and the support tip region 105 in a plan view, and There is a gap between the polyimide layer 230 and the support base end region 101 in plan view. Therefore, such inconvenience can be effectively prevented.

  The reinforcing stainless steel 240 includes a distal-side reinforcing stainless steel 241 extending in the suspension width direction on the base end side of the upper surface in the distal-end-side width direction region 231, and a suspension-width direction in the suspension width direction on the distal-end side of the upper surface in the proximal-end width direction region 233. And extending proximal-side reinforced stainless steel 242.

Preferably, the front end side reinforcing stainless steel 241 is arranged so that one end side and the other end side thereof overlap with one and the other of the pair of front end side base stainless steel 210 in a plan view.
Similarly, the base end side reinforcing stainless steel 242 is arranged so that one end side and the other end side thereof overlap with one and the other of the pair of base end side base stainless steels 220 in a plan view.
According to such a configuration, the strength of the support plate 200 can be effectively improved.

  The pair of piezoelectric elements 60 is mounted on the top surfaces of the distal-side width direction region 231 and the distal-side reinforcing stainless steel 241 at the distal end side, and the proximal-side width direction region 233 and the proximal-side reinforced stainless steel 242 on the proximal end side. In the state of being placed on the upper surface of the support portion, the end surface on the base end side in the support portion front end region 105, the upper surface of the front end side width direction region 231 and the front end side reinforcing stainless steel 241, the base end side width direction region 233 It is fixed to the upper surface of the base end side reinforcing stainless steel 242 and the end surface on the front end side in the support portion base end side region 101 through the adhesive 70.

  The flexure substrate 400 is fixed to the load beam portion 40 by welding the load beam portion overlapping region 410 to the load beam portion main body region 310, and the support portion overlapping region 420 is at least the tip of the support portion. It is fixed to the support portion 10 by being welded to the exposed surface in the region 105.

According to such a configuration, the flexure substrate 400 can be welded only to the support portion forming plate 100 at a position as close as possible to the distal end side of the support portion 10.
Therefore, it is possible to prevent the flexure substrate 400 from vibrating due to the elastic deformation operation of the load bending portion 20 as much as possible. Further, the flexure substrate 400, the support plate 200, and the support portion forming plate 100 are distorted by welding. Can be effectively prevented.

Furthermore, in the present embodiment, as described above, the pair of front end side base stainless steel 210 is welded to the lower surface of the support portion forming plate 100 while being separated from each other in the suspension width direction. The tip base stainless steel 210 does not exist in the center of the direction.
Accordingly, the flexure substrate 400 welded to the lower surface of the support portion distal end region 105 can pass between the pair of distal end side base stainless steel 210 and extend to the proximal end side of the support portion forming plate 100. .
Furthermore, the distal end side reinforcing stainless steel 241 can effectively prevent the insulating adhesive 70 disposed on the distal end side of the pair of piezoelectric elements 60 from flowing out to the proximal end side, and The base end side reinforcing stainless steel 2542 can effectively prevent the insulating adhesive 70 disposed on the base end side from flowing out to the front end side.

1A to 3A Magnetic head suspension 10 Support section 20 Load bending section 21 Elastic plate 30 Load beam section 40 Flexure section 50 Magnetic head slider 60 Piezoelectric element 70 Adhesive 100 Support section forming plate 101 Support section base end area 105 Support section distal end area 110 Supporting portion opening region 115 Supporting portion connecting region 120 Tip side recess 125 Base end side recess 140 Clearance 145 between support portion tip region and tip side support plate Support portion base end region and gap between base end side support plates 150 Tip side support Plate 155 Groove 160 Base end support plate 170 Pair of connection beams 175 Single connection beam 200 Support plate 210 Front end base stainless steel 220 Base end side base stainless steel 230 Polyimide layer 231 Front end side width direction region 232 Connection region 233 Base end side Width direction region 240 Reinforced stainless steel 241 End side reinforcing stainless steel 242 Base end side reinforcing stainless steel 300 Load beam substrate 310 Load beam portion main body region 400 Flexure substrate 410 Load beam portion overlapping region 411 Arm region 412 Head mounting region 415 Connection region 420 Supporting portion overlapping region 421 Tip side supporting portion overlapping Region 422 Intermediate support portion overlap region 423 Base end side support portion overlap region 480 Wiring body

Claims (9)

A load bending part for generating a load for pressing the magnetic head slider toward the disk surface, a load beam part for transmitting the load to the magnetic head slider, and supporting the load beam part via the load bending part And a support portion that is swung directly or indirectly by a main actuator around a swing center, a flexure portion that is supported by the load beam portion and the support portion while supporting the magnetic head slider, and the magnetic In order to finely move the head slider in the seek direction, a pair of left and right piezoelectric elements mounted on the support portion so as to be symmetrical with respect to each other with respect to the center line in the longitudinal direction of the suspension and to have different expansion / contraction directions with respect to each other A magnetic head suspension,
The support portion includes a support portion base end region connected directly or indirectly to the main actuator, a support portion tip end region connected to the load bending portion, and the support base end region and the support portion with respect to a suspension longitudinal direction. A support opening region that is located between the tip regions and surrounds the pair of piezoelectric elements in a plan view orthogonal to the disk surface; and the support portion base end region on the outer side in the suspension width direction from the support opening region; A support portion forming plate integrally including a pair of left and right support portion connecting beam regions that connect between the support portion tip end regions, and a tip end side mounting region that is at least partially positioned within the support portion opening region are formed. The support portion forming plate is fixed to the lower surface of the support portion forming plate that is close to the disk surface, and at least a part of the support portion forming plate is located in the support portion opening region. And a base end side support plate which is fixed to the lower surface adjacent to the disk surface in the support portion forming plate in a state of forming a placing area proximal side that,
The pair of piezoelectric elements has a distal end side mounted on an upper surface opposite to the disk surface of the distal end side mounting area and a proximal end side upper surface opposite to the disk surface of the proximal end mounting area. In the state of being placed on the proximal end side surface in the support portion distal end region, the upper surface of the distal end side placement region, the distal end side end surface in the support portion proximal end region, and the proximal end side mounting. Fixed to the upper surface of the mounting area via an adhesive,
The load bending portion is connected to one end side and the other end side in the suspension width direction of the support portion tip region so that the load bending portion is substantially parallel to the disk surface and separated from each other in the suspension width direction. A pair of left and right elastic plates,
The load beam portion includes a load beam substrate having a plate-like load beam portion main body region substantially parallel to the disk surface and a base end portion connected to the tip end portions of the pair of elastic plates,
The flexure unit includes a flexure substrate having a head mounting area on which the magnetic head slider is mounted, and a wiring body laminated on the flexure substrate,
The flexure substrate is superposed on the load beam portion superposition region superposed on the load beam portion main body region, the head mounting region supported on the load beam portion superposition region via a pair of arm regions, and the support portion. And a connecting region extending in the suspension longitudinal direction between the pair of elastic plates with respect to the suspension width direction so as to connect the load beam portion overlapping region and the supporting portion overlapping region. And
In the front end side support plate, a lower surface adjacent to the disk surface of a front end portion including a front end side edge in the support unit front end region forms an exposed surface exposed to the disk surface at least in a central region in the suspension width direction. Is fixed to the lower surface of the support portion forming plate by welding,
The load beam portion overlap region of the flexure substrate is welded to the load beam portion main body region at an appropriate welding point, and the support portion overlap region is disposed at least on the exposed surface of the tip portion in the support portion tip region. A magnetic head suspension, wherein the magnetic head suspension is welded to the support portion forming plate at a welded point.   Of the lower surface of the support portion forming plate, the support portion forming plate is such that the portion with which the distal end side support plate abuts and the portion with which the base end side support plate abuts are further away from the disk surface than other portions. The magnetic head suspension according to claim 1, wherein a concave portion is formed on a lower surface of the magnetic head suspension. The recess includes a distal end side recess with which the distal end side support plate abuts and a proximal end side recess with which the proximal side support plate contacts
The distal end side recess is formed so as to extend to the proximal end side of the support portion distal end region and the distal end side of the pair of support portion connecting beam regions,
3. The magnetic head suspension according to claim 2, wherein the base-side concave portion is formed only in the support-portion base-end region and does not reach the base-end side of the pair of support-portion connecting beam regions. .   4. The magnetic head suspension according to claim 2, wherein the depth of the concave portion is equal to or greater than the thickness of the tip side support plate. 5. The support portion overlapping region is positioned closer to the distal end side than the pair of piezoelectric elements, and a distal end side support portion overlapping region located at the same position as the exposed surface of the distal end portion in the support portion distal end region with respect to the suspension longitudinal direction. A base end side support portion superposition region, and an intermediate support portion superposition region connecting the front end side support portion superposition region and the base end side support portion superposition region between the pair of piezoelectric elements in the suspension width direction,
The depth of the recess is smaller than the thickness of the tip side support plate,
4. The magnetic head suspension according to claim 2, wherein a groove through which the intermediate support portion overlapping region passes is formed in a lower surface close to the disk surface of the front end side support plate.   6. The front end side support plate and the base end side support plate are integrally formed in a state where ends on the outer side in the suspension width direction are connected by a pair of connecting beams. Any one of the magnetic head suspensions.   The said front end side support plate and the said base end side support plate are integrally formed in the state in which the suspension width direction center part was connected by the single connection beam. The magnetic head suspension described. The distal end side support plate is fixed to the support portion forming plate so that there is a gap between the distal end side edge and the proximal end side edge of the support portion distal end region in the plan view,
The base end side support plate is fixed to the support portion forming plate such that a gap exists between the base end side edge and the tip end side edge of the support portion base end side region in the plan view. The magnetic head suspension according to claim 1, wherein the magnetic head suspension is a magnetic head suspension. A load bending part for generating a load for pressing the magnetic head slider toward the disk surface, a load beam part for transmitting the load to the magnetic head slider, and supporting the load beam part via the load bending part And a support portion that is swung directly or indirectly by a main actuator around a swing center, a flexure portion that is supported by the load beam portion and the support portion while supporting the magnetic head slider, and the magnetic In order to finely move the head slider in the seek direction, a pair of left and right piezoelectric elements mounted on the support portion so as to be symmetrical with respect to each other with respect to the center line in the longitudinal direction of the suspension and to have different expansion / contraction directions with respect to each other A magnetic head suspension,
The support portion includes a support portion base end region connected directly or indirectly to the main actuator, a support portion tip end region connected to the load bending portion, and the support base end region and the support portion with respect to a suspension longitudinal direction. A support opening region that is located between the tip regions and surrounds the pair of piezoelectric elements in a plan view orthogonal to the disk surface; and the support portion base end region on the outer side in the suspension width direction from the support opening region; A support portion forming plate integrally having a pair of left and right support portion connecting beam regions connecting between the support portion tip end regions, and a placement region in which the pair of piezoelectric elements are placed in the support portion opening area A support plate fixed to the support part forming plate so as to form
The pair of piezoelectric elements are placed on the support plate, and are arranged at the base end side end surface of the support portion front end region, the top surface of the support plate opposite to the disk surface, and the support portion base. Fixed to the end surface on the tip side in the end region via an adhesive,
The load bending portion is connected to one end side and the other end side in the suspension width direction of the support portion tip region so that the load bending portion is substantially parallel to the disk surface and separated from each other in the suspension width direction. A pair of left and right elastic plates,
The load beam portion includes a load beam substrate having a plate-like load beam portion main body region substantially parallel to the disk surface and a base end portion connected to the tip end portions of the pair of elastic plates,
The flexure unit includes a flexure substrate having a head mounting area on which the magnetic head slider is mounted, and a wiring body laminated on the flexure substrate,
The flexure substrate is superposed on the load beam portion superposition region superposed on the load beam portion main body region, the head mounting region supported on the load beam portion superposition region via a pair of arm regions, and the support portion. And a connecting region extending in the suspension longitudinal direction between the pair of elastic plates with respect to the suspension width direction so as to connect the load beam portion overlapping region and the supporting portion overlapping region. And
The support plates are spaced apart from each other in the suspension width direction so that a lower surface close to the disk surface in the tip end region of the support portion forms an exposed surface exposed to the disk surface at least in a central region in the suspension width direction. A pair of tip-side base stainless steel welded to the lower surface of the support-portion forming plate, and the support portion-forming plate at a position spaced from the pair of tip-side base stainless steel toward the suspension longitudinal base end side. A pair of base end side base stainless steel welded to the lower surface, the pair of tip end side base stainless steel and the polyimide layer stacked on the upper surface of the pair of base end side base stainless steel, and the reinforcement stacked on the upper surface of the polyimide layer With stainless steel,
The polyimide layer includes a distal end side width direction region extending in a suspension width direction between the pair of distal end side base stainless steels so as to face an end surface on the proximal end side of the support portion distal end region, and a support portion proximal end region. The base end side width direction region extending in the suspension width direction, the tip end side width direction region, and the base end side width direction region are connected between the pair of base end side base stainless steels so as to face the end surface on the tip end side. A connected area,
The reinforced stainless steel includes a distal-side reinforced stainless steel extending in the suspension width direction on the proximal side of the upper surface in the distal-side width direction region, and a proximal-side side extending in the suspension width direction on the distal side of the upper surface in the proximal-side width direction region. Including reinforced stainless steel,
The flexure substrate is fixed to the load beam portion by welding the load beam portion overlap region to the load beam portion main body region, and the support portion overlap region is formed on the exposed surface in the tip end region of the support portion. A magnetic head suspension, wherein the magnetic head suspension is fixed to the support portion by welding.

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