JP4884564B2 - Magnetic head suspension - Google Patents

Description

  The present invention relates to a magnetic head suspension for supporting a magnetic head slider that reads and / or writes data to a storage medium such as a hard disk.

  As the capacity of magnetic disk drives increases, the accuracy of positioning of the magnetic head slider with respect to the target track is required. For this reason, in addition to the coarse movement of the magnetic head slider in the seek direction by the main actuator such as a voice coil motor. Thus, a magnetic head suspension has been proposed that enables fine movement of the magnetic head slider in the seek direction by a piezoelectric element acting as a subactuator (see, for example, Patent Documents 1 to 3 below).

  In the magnetic head suspension provided with the piezoelectric element as described above, the support portion that is rocked directly or indirectly by a main actuator such as a voice coil motor in order to enable fine movement of the magnetic head slider by the piezoelectric element. It is necessary to provide a low rigidity region.

That is, the magnetic head suspension including the piezoelectric element includes a load bending portion that generates a load for pressing the magnetic head slider toward the disk surface, a load beam portion for transmitting the load to the magnetic head slider, A support portion that supports the load beam portion via the load bending portion and is swingable directly or indirectly around a swing center by a main actuator; and the load beam portion in a state where the magnetic head slider is supported, and A flexure portion supported by the support portion and the piezoelectric element attached to the support portion are provided.
The support portion connects a proximal end region directly or indirectly connected to the main actuator, a distal end region to which the load bending portion is connected, and the proximal end region and the distal end region. The low-rigidity region is provided, and the magnetic head slider can be finely moved by elastically deforming the low-rigidity region according to the expansion and contraction operation of the piezoelectric element.

  By the way, by reducing the rigidity of the low rigidity portion, the displacement in the seek direction of the magnetic head slider by the piezoelectric element (the displacement in the radial direction parallel to the disk surface) can be increased. The reduction in the rigidity of the rigid region causes an increase in stress on the piezoelectric element when an impact force is applied to the magnetic disk device on which the magnetic head suspension is mounted, and also causes a decrease in the resonance frequency of the magnetic head suspension.

Japanese Patent Laid-Open No. 02-227886 Japanese Patent Laid-Open No. 11-016311 JP 2001-307442 A

  The present invention has been made in view of the above-described prior art, and the base end region in which the support portion is directly or indirectly connected to the main actuator, the tip end region in which the load bending portion is connected, and the suspension longitudinal direction. An opening region located between the region and the tip region, and a pair of left and right connecting beams connecting the base region and the tip region on the outer side in the suspension width direction from the opening region, and a pair of piezoelectric elements A magnetic head suspension in which a base end portion and a tip end portion of an element are connected to the base end region and the tip end region, respectively, and each of the pair of connecting beams stably forms the support portion by pressing. The ease of displacement of the magnetic head slider in the seek direction by the piezoelectric element (hereinafter referred to as fine movement characteristics) can be satisfactorily maintained while having a width that allows the piezoelectric element to move. Further, it is an object to provide a magnetic head suspension to obtain achieving reduction and improvement of the resonance frequency of the stress applied to the piezoelectric element during the impact force applied.

  In order to achieve the above object, the present invention provides a load bending portion for generating a load for pressing the magnetic head slider toward the disk surface, a load beam portion for transmitting the load to the magnetic head slider, A support portion that supports the load beam portion via a load bending portion and is directly or indirectly swung around a swing center by a main actuator; and the load beam portion and the magnetic head slider in a state of supporting the magnetic head slider. The flexure part supported by the support part and the support part so that the magnetic head slider is slightly slid in the seek direction and symmetrical with respect to each other with respect to the longitudinal center line of the suspension. A magnetic head suspension including a pair of left and right piezoelectric elements to be mounted, wherein the support portion includes the main actuator. A proximal end region connected directly or indirectly to a motor, a distal end region to which the load bending portion is connected, an opening region located between the proximal end region and the distal end region with respect to a suspension longitudinal direction, A pair of left and right connecting beams that connect the base end region and the tip end region on the outer side in the suspension width direction from the opening region, and the pair of piezoelectric elements extends along a direction orthogonal to the disk surface. The base end portion and the tip end portion are connected to the base end region and the tip end region, respectively, in a state where at least a part is located in the opening region in a plan view as viewed, and the base end region is more than the tip end region. The length in the suspension width direction is large, and each of the pair of connecting beams extends from the base end portion connected to the suspension width direction outer end portion of the base end region to the tip end portion in a substantially linear shape. And a distal end side beam extending substantially linearly from a proximal end portion connected to the proximal end side beam to a distal end portion connected to an outer end portion in the suspension width direction of the distal end region, and the proximal end side beam Is located on the side closer to the suspension longitudinal center line than the imaginary line connecting the proximal end of the longitudinal center line of the proximal beam and the distal end of the longitudinal center line of the distal beam. And is inclined so as to approach the longitudinal center line of the suspension as it goes from the proximal end portion to the distal end portion, and the inclination angle α of the longitudinal center line of the distal end beam with respect to the longitudinal center line of the proximal end beam Provided is a magnetic head suspension in which the distal side beam is inclined with respect to the proximal side beam so that is less than −42 °.

  Preferably, the distal side beam is made wider as it goes from the proximal end to the distal end.

  Preferably, the pair of piezoelectric elements has the opening so that at least a part of end surfaces on the distal end side and the proximal end side respectively face an end surface on the proximal end side of the distal end region and an end surface on the distal end side of the proximal end region. The distal end side and the proximal end side are fixed to the distal end region and the proximal end region, respectively, in a state of being disposed in the region.

  According to the magnetic head suspension of the present invention, the support portion is connected to the base end region directly or indirectly connected to the main actuator, the load bending portion is connected, and the length in the suspension width direction is shorter than the base end region. A distal end region, an opening region located between the proximal end region and the distal end region with respect to the suspension longitudinal direction, and left and right connecting the proximal end region and the distal end region on the outer side in the suspension width direction from the opening region. A pair of connecting beams, and at least a part of the pair of piezoelectric elements is disposed so as to overlap the opening region in plan view, the proximal end side and the distal end side are the proximal end region and the distal end region. Each of the pair of connecting beams is connected to the distal end from the proximal end portion connected to the outer end portion in the suspension width direction of the proximal end region. A proximal end beam extending substantially linearly to the distal end side beam, and a distal end side beam extending substantially linearly from a proximal end portion connected to the proximal end side beam to a distal end portion connected to an outer end portion in the suspension width direction of the distal end region The proximal end side beam is suspended from an imaginary line whose longitudinal center line connects the proximal end portion of the longitudinal center line of the proximal end beam and the distal end portion of the longitudinal center line of the distal end beam. The distal end side of the proximal end beam with respect to the longitudinal center line is located on the side close to the longitudinal center line and is inclined so as to approach the suspension longitudinal center line as it goes from the proximal end portion to the distal end portion. Since the distal end side beam is inclined with respect to the proximal end side beam so that the inclination angle α of the longitudinal center line of the beam is −42 ° or less, each of the pair of connecting beams is subjected to press working. Width that enables stable formation of the support Fine motion characteristics while retaining can be maintained at a satisfactory level, further, it is possible to reduce and increase the resonance frequency of the stress applied to the piezoelectric element during the impact force applied.

FIGS. 1A to 1C are a top view, a bottom view, and a side view, respectively, of the magnetic head suspension according to the first embodiment of the present invention. FIG. 2 is a top view of the magnetic head suspension shown in FIG. 1 with a pair of piezoelectric elements removed. FIG. 3 is a cross-sectional view taken along line III-III in FIG. 4A to 4E are top views of the magnetic head suspension used in the finite element method analysis, respectively. 5A to 5E are top views of the magnetic head suspension used in the finite element method analysis, respectively. FIG. 6 shows a plurality of magnetic head suspensions shown in FIGS. 4A to 4E and FIGS. 5A to 5E in which the inclination angles of the proximal end beam and the distal end side beam in the connecting beam are different. It is a graph which shows the analysis result performed using the finite element method, and has shown the result of having analyzed the width | variety of the connection beam which can obtain a fixed fine motion characteristic (8.6 nm / V). FIG. 7 shows the results of analysis on impact resistance performed using the finite element method on the magnetic head suspensions shown in FIGS. 4 (a) to 4 (e) and FIGS. 5 (a) to 5 (e). It is a graph and shows the relative relationship between the inclination angle and the stress applied to the piezoelectric element when a predetermined shock wave is applied. FIG. 8 is a graph showing the analysis results regarding the resonance frequency performed by using the finite element method for the magnetic head suspensions shown in FIGS. 4 (a) to 4 (e) and FIGS. 5 (a) to 5 (e). 8 (a) to 8 (e) show the relative relationship between the tilt angle and the resonance frequency in the main resonance mode, bending primary mode, torsional primary mode, torsional secondary mode, and torsional tertiary mode, respectively. Yes. FIG. 9 is a top view of the magnetic head suspension according to the second embodiment of the present invention. 10A to 10C are a top view, a bottom view, and a side view, respectively, of the magnetic head suspension according to the third embodiment of the present invention. FIG. 11 is a top view of the magnetic head suspension shown in FIG. 10 with a pair of piezoelectric elements removed. 12 is an exploded top view of the magnetic head suspension shown in FIG. FIG. 13 is a cross-sectional view taken along line XIII-XIII in FIG. FIG. 14 is a top view of a magnetic head suspension according to a modification of the third embodiment. 15A to 15C are a top view, a bottom surface, and a side view of a magnetic head suspension according to a modification of the first embodiment, respectively.

Embodiment 1
Hereinafter, preferred embodiments of a magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
1A to 1C are a top view (a plan view as viewed from the side opposite to the disk surface) and a bottom view (a bottom surface as viewed from the disk surface side) of the magnetic head suspension 1A according to the present embodiment, respectively. Figure) and side view. In FIG. 1 (b), a circle indicates a welding point.

  As shown in FIG. 1, the magnetic head suspension 1 </ b> A includes a load bending portion 20 that generates a load for pressing the magnetic head slider 50 toward the disk surface, and a load for transmitting the load to the magnetic head slider 50. A beam portion 30; a support portion 10 that supports the load beam portion 30 via the load bending portion 20 and is directly or indirectly swung around a swing center by a main actuator; and the magnetic head slider 50. In order to finely move the load beam portion 30 and the flexure portion 40 supported by the support portion 10 in the supported state and the magnetic head slider 50 in the seek direction, they are symmetrical with respect to the center line CL in the longitudinal direction of the suspension. And a pair of left and right piezoelectric elements mounted on the support portion 10 so that the directions of expansion and contraction are different from each other. Has a 0 and.

  The support portion 10 is a member that supports the load beam portion 30 via the load bending portion 20 in a state where the support portion 10 is directly or indirectly connected to the main actuator such as a voice coil motor. It is supposed to have.

In the present embodiment, the support portion 10 is a base plate provided with a boss portion 15 that is joined by caulking to the tip of a carriage arm (not shown) connected to the main actuator.
The support part 10 is preferably formed by a stainless plate having a thickness of 0.1 mm to 0.8 mm, for example.

FIG. 2 shows a top view of the magnetic head suspension 1A with the pair of piezoelectric elements 60 removed.
As shown in FIGS. 1 and 2, the support portion 10 includes a proximal end region 11 that is directly or indirectly connected to the main actuator, a distal end region 12 to which the load bending portion 20 is connected, and a suspension longitudinal length. A pair of left and right openings connecting the base region 11 and the tip region 12 on both sides in the suspension width direction of the opening region 13 with respect to the direction, the opening region 13 located between the base region 11 and the tip region 12. And a connecting beam 14.
The detailed structure of the pair of connecting beams 14 will be described later.

As described above, the load beam portion 30 is a member for transmitting the load generated by the load bending portion 20 to the magnetic head slider 50, and therefore requires a predetermined rigidity.
In the present embodiment, as shown in FIG. 1 and FIG. 2, the load beam portion 30 is bent from a flat plate-like main body portion 31 and both end portions in the width direction of the main body portion 31 to the side opposite to the disk surface. The flange portion 32 is formed, and the flange portion 32 ensures rigidity.
The load beam portion 30 is preferably formed by a stainless plate having a thickness of 0.02 mm to 0.1 mm, for example.

Specifically, the load beam portion 30 has a protrusion 33 called a dimple at the tip.
The protrusion 33 protrudes, for example, about 0.05 mm to 0.1 mm in a direction close to the disk surface. The protrusion 33 is in contact with the back surface (the surface opposite to the disk surface) of the head mounting area 43 in the flexure section 40, and the load is applied to the head mounting area 43 of the flexure section 40 via the protrusion 33. Is transmitted to.

  In the present embodiment, the load beam portion 30 further integrally has a lift tab 34 extending from the front end of the main body portion 31 to the front end side in the suspension longitudinal direction. The lift tab 34 is associated with a ramp provided in the magnetic disk device when the magnetic head suspension 1A is swung by the main actuator so that the magnetic head slider 50 is positioned radially outward of the disk surface. In addition, the magnetic head slider 50 is a member for separating the magnetic head slider 50 from the disk surface along the z direction (direction perpendicular to the disk surface).

  The load bending portion 20 has a proximal end portion connected to the support portion 10 and a distal end portion connected to the load beam portion 30, and the magnetic head slider 50 is moved to the disk surface based on its own elastic deformation. Generates a pressing load that pushes toward.

As shown in FIGS. 1 and 2, in the present embodiment, the load bending portion 20 has a pair of left and right leaf springs 21 arranged so that the plate surface faces the disk surface.
Preferably, the pair of leaf springs 21 are bent in advance in a direction in which the magnetic head slider 50 approaches the disk surface before the magnetic head suspension 1A is mounted on the magnetic disk device, and the magnetic When the head suspension 1A is mounted on the magnetic disk device, the pressing load is generated by being bent back.

The load bending part 20 is formed of, for example, a stainless plate having a thickness of 0.02 mm to 0.1 mm.
In the present embodiment, as shown in FIGS. 1 and 2, the load bending portion 20 is formed integrally with the load beam portion 30.

  That is, the magnetic head suspension 1A according to the present embodiment has a load beam portion forming member 300 that integrally forms the load beam portion 30 and the load bending portion 20, and the load beam portion forming member 300 includes the load beam portion forming member 300. The load beam portion forming member 300 is welded to the support portion 10 in a state in which the upper surface opposite to the disk surface is in contact with the lower surface of the support portion 10 facing the disk surface in the tip region 12. Yes.

The flexure unit 40 is joined to the load beam unit 30 and the support unit 10 while supporting the magnetic head 50.
Specifically, as shown in FIG. 1 (b), the flexure portion 40 includes a main body region 41 joined to a surface of the load beam portion 30 facing the disk surface by welding or the like, and a tip from the main body region 41. A pair of support pieces 42 extending to the side and the head mounting region 43 supported by the support pieces 42 are provided.

The head mounting area 43 supports the magnetic head 50 on a surface facing the disk surface.
As described above, the protrusion 33 is in contact with the back surface of the head mounting area 43. Therefore, the head mounting area 43 can flexibly swing in the roll direction and the pitch direction with the protrusion 33 as a fulcrum. It has become.
The flexure portion 40 is made to be less rigid than the load beam portion 30 so that the head mounting region 43 can swing in the roll direction and the pitch direction.
The flexure portion 40 is preferably formed by a stainless plate having a thickness of about 0.01 mm to 0.025 mm, for example.

In the present embodiment, the flexure unit 40 is integrally provided with a wiring for transmitting a write signal and / or a read signal to the magnetic head 50 as a printed circuit.
That is, the flexure unit 40 includes a flexure substrate 400 integrally including the main body region 41, the pair of support pieces 42, and the head mounting region 43, and a flexure wiring body 410 stacked on the flexure substrate 400. is doing.
Although not shown, the flexure wiring body 410 includes an insulating layer stacked on a surface of the flexure substrate 400 facing the disk surface, a conductor layer stacked on a surface of the insulating layer facing the disk surface, And a protective layer surrounding the conductor layer.

  In the present embodiment, the flexure substrate 400 includes the body region 41 of the load beam unit 40, the tip region 12 of the support unit 10, and the support unit 10 as shown in FIG. Each is joined to the base region 11 by welding.

The piezoelectric element 60 has a main body made of PZT (lead zirconate titanate) and a pair of electrode layers disposed on both sides of the main body in the thickness direction.
The main body has a thickness of, for example, 0.05 mm to 0.3 mm, and the electrode layer is formed of, for example, Ag or Au having a thickness of 0.05 μm to several μm.

  As shown in FIG. 1A, the pair of piezoelectric elements 60 has a base end portion in a state where at least a part thereof overlaps the opening region 13 in a plan view as viewed along a direction orthogonal to the disk surface. And the distal end portion is connected to the proximal end region 11 and the distal end region 12, respectively, and acts as a sub-actuator for finely moving the magnetic head slider 50 in the seek direction. Is stretched and the other is compressed.

FIG. 3 is a sectional view taken along line III-III in FIG.
In the present embodiment, as shown in FIGS. 1 and 3, the pair of piezoelectric elements 60 is entirely disposed in the opening region 13 in a plan view as viewed along a direction orthogonal to the disk surface. Yes.

  That is, at least a part of the end surfaces on the distal end side and the proximal end side of the pair of piezoelectric elements 60 are respectively opposed to the end surface on the proximal end side of the distal end region 12 and the end surface on the distal end side of the proximal end region 11. With the pair of piezoelectric elements 60 arranged in the opening region 13, the distal end side and the proximal end side of the pair of piezoelectric elements 60 are fixed to the distal end region 12 and the proximal end region 11, respectively.

According to such a configuration, the expansion / contraction operation of the pair of piezoelectric elements 60 can be transmitted as much as possible as the movement operation of the magnetic head slider 50 in the seek direction.
Further, according to the configuration, a part or all of the pair of piezoelectric elements 60 can overlap the support portion 10 in the thickness direction, and the entire magnetic head suspension 1A including the pair of piezoelectric elements 60 can be overlapped. The thickness can be made as thin as possible.

In the present embodiment, the pair of piezoelectric elements 60 are disposed in the opening region 13 in plan view, and the distal end side end surface of the pair of piezoelectric elements 60 and the proximal end of the distal end region 12 are arranged. The end face on the side is fixed by a fixing member 70 such as an insulating adhesive, and the end face on the base end side of the pair of piezoelectric elements 60 and the end face on the front end side of the base end region 11 are insulatively bonded. It is fixed by a fixing member 70 such as an agent.
That is, the expansion / contraction operation of the pair of piezoelectric elements 60 is transmitted to the distal end region 12 and the proximal end region 11 through the fixing member 70.

In the present embodiment, as shown in FIG. 1, the pair of piezoelectric elements 60 are arranged so that the longitudinal direction (that is, the expansion and contraction direction) is along the suspension longitudinal direction. It is not limited to such a form.
That is, if the pair of piezoelectric elements 60 are symmetrical to each other with respect to the suspension longitudinal center line CL, and the longitudinal direction of the pair of piezoelectric elements 60 is within a range having a component along the suspension longitudinal direction. The longitudinal direction of the pair of piezoelectric elements 60 can be inclined with respect to the suspension longitudinal direction.

For example, voltage application to the pair of piezoelectric elements 60 can be performed using the flexure wiring body 410.
In the present embodiment, the electrode layer on the upper surface side (opposite to the disk surface) of the pair of piezoelectric elements 60 is supported by the conductive member 72 (see FIG. 1A) such as a conductive adhesive. A voltage is applied to the electrode layer on the lower surface side (the side facing the disk surface) of the pair of piezoelectric elements 60 using the flexure wiring body 410 in a state in which the ground potential is established by being electrically connected to the body 10. Yes.

  Preferably, as shown in FIGS. 1B and 2, a part of the flexure portion 40 overlaps with the pair of piezoelectric elements 60 in a plan view viewed along a direction orthogonal to the disk surface. Can be placed. According to such a configuration, voltage application to the electrodes on the lower surface side of the pair of piezoelectric elements 60 using the flexure wiring body 410 can be easily performed.

In the present embodiment, as shown in FIGS. 1B and 3, the conductor layer in the flexure wiring body 410 and the electrode layer on the lower surface side of the pair of piezoelectric elements 60 are electrically connected by wire bonding 74. Is bound to.
Reference numeral 76 in FIG. 1B is an opening formed in the protective layer to expose the conductor layer.

Here, the configuration of the pair of connecting beams 14 will be described.
The pair of connecting beams 14 have a symmetrical shape with respect to the suspension longitudinal center line CL.
As shown in FIGS. 1 and 2, the connecting beam 14 includes a proximal end beam 141 that extends from the proximal end portion connected to the proximal end region 11 to the distal end portion in a substantially linear shape, and the proximal end beam 141. And a distal end side beam 142 extending substantially linearly from the proximal end portion connected to the distal end portion 12 to the distal end portion connected to the distal end region 12.

As shown in FIG. 1A, a connection point CP between the proximal end beam 141 and the distal end beam 142 (the longitudinal center line of the proximal end beam 140 and the longitudinal center line of the distal end beam 142). An imaginary line IL (intersection point) connecting the proximal end portion of the proximal end side beam 141 and the distal end portion of the distal end side beam 142 (the center point in the width direction of the proximal end portion of the proximal end side beam 141 and the distal end side beam 142) The longitudinal direction of the distal end side beam 142 is inclined in a plan view with respect to the longitudinal direction of the proximal end side beam 141 so that the longitudinal direction center line CL is closer to the suspension longitudinal direction center line CL. .
That is, the connecting beam 14 is refracted at the connecting point CP so that the connecting point CP of the base end side beam 141 and the distal end side beam 142 is closer to the suspension longitudinal center line than the virtual line IL. .

  According to the magnetic head suspension 1A having such a configuration, the fine movement characteristics in the seek direction of the magnetic head slider 50 by the pair of piezoelectric elements 60 are well maintained and applied to the piezoelectric element 60 when an impact force is applied. Stress and the resonance frequency of the magnetic head suspension 1A can be improved.

In the present embodiment, the distal end region 12, the pair of connecting beams 14, and the proximal end region 11 are integrally formed by a single member.
That is, the support portion forming member 100 that forms the support portion 10 integrally has a portion that forms the distal end region 12, a portion that forms the pair of connecting beams 14, and a portion that forms the proximal end region 11. is doing.
The support part forming member 100 can be formed by, for example, pressing from a plate substrate.

Here, an analysis result performed using the finite element method in order to verify the effect of the magnetic head suspension 1A will be described.
FIGS. 4A to 4E and FIGS. 5A to 5E are top views of the magnetic head suspension used in this analysis.

  4 (a) to 4 (e) show the state of the distal side beam 142 so that the connection point CP of the proximal side beam 141 and the distal side beam 142 is closer to the suspension longitudinal center line CL than the imaginary line IL. The magnetic head suspensions 1a to 1e whose longitudinal direction is inclined in a plan view with respect to the longitudinal direction of the base end side beam 141 are shown.

  On the other hand, FIG. 5 (a) shows a magnetic head suspension 9a in which the longitudinal direction of the distal end side beam 142 is positioned coaxially with the longitudinal direction of the proximal end side beam 141 in plan view. In (b) to (e), the longitudinal direction of the distal end side beam 142 is such that the connection point CP between the proximal end side beam 141 and the distal end side beam 142 is separated from the suspension longitudinal center line CL from the virtual line IL. Magnetic head suspensions 9b to 9e that are inclined in plan view with respect to the longitudinal direction of the base end side beam 141 are shown.

In the magnetic head suspensions 1a to 1e, the longitudinal inclination angles Δα of the distal end side beam 142 with respect to the longitudinal direction of the proximal end side beam 141 are −84.5 °, −68.4 °, and −50, respectively. .1 °, −25.8 °, and −5.4 °.
On the other hand, in the magnetic head suspensions 9a to 9e, the inclination angles Δα are 0 °, + 21.8 °, + 41.7 °, + 63.7 °, and + 88.0 °, respectively.

In the display of the tilt angle Δα, “− (minus)” means that the connection point CP between the base end side beam 141 and the front end side beam 142 is closer to the suspension longitudinal center line CL than the virtual line IL. Means that the longitudinal direction of the distal end side beam 142 is inclined with respect to the longitudinal direction of the proximal end side beam 141, and “+ (plus)” indicates the proximal end side beam 141 and the distal end side beam 141. This means that the longitudinal direction of the distal end side beam 142 is inclined with respect to the longitudinal direction of the proximal end side beam 141 so that the connection point CP of 142 is separated from the suspension longitudinal direction center line CL from the imaginary line IL. is doing.
Further, in this analysis, when the suspension longitudinal direction distance from the proximal end portion of the proximal end side beam 141 to the distal end portion of the distal end side beam 142 is L, the connection point CP and the proximal end side beam 141 are used. The suspension longitudinal direction position of the connection point CP was determined so that the suspension longitudinal distance between the base ends of each of the base ends was 1/4 × L.

  In this analysis, the thicknesses of the load beam section 30, the piezoelectric element 60, the support section 10, the flexure substrate 400, and the flexure wiring body 410 are 0.025 mm, 0.12 mm, 0.15 mm, and 0, respectively. .018 mm and 0.018 mm.

  First, in order to make the fine movement characteristics by the pair of piezoelectric elements 60 constant in all of the magnetic head suspensions 1a to 1e and the magnetic head suspensions 9a to 9e, the connecting beam 14 is set to some extent in each magnetic head suspension. We asked if it was necessary to make it wide.

Specifically, the width of the pair of connecting beams 14 required for setting the displacement in the seek direction of the magnetic head slider 50 with respect to the applied voltage to the pair of piezoelectric elements 60 to 8.6 nm / V is set to the magnetic head. It was determined for all of the suspensions 1a to 1e and the magnetic head suspensions 9a to 9e.
The analysis result is shown in FIG.

Note that the width 0.30 mm of the connecting beam 14 indicated by a broken line in FIG. 6 indicates the minimum width necessary for stably forming the support portion 10 including the pair of connecting beams 14 by pressing. .
That is, in order to stably form a shape having a beam portion from a plate by pressing, the width of the beam portion needs to be twice or more the plate thickness of the plate.
As described above, the pair of connecting beams 14 is provided on the support portion 10. In this analysis, the thickness of the support portion 10 including the pair of connecting beams 14 is 0.15 mm.
Therefore, under the conditions of this analysis, in order to stably form the support portion 10 including the pair of connecting beams 14 by press working, the width of the pair of connecting beams 14 is 0.30 mm or more. There is a need.

As apparent from FIG. 6, in the magnetic head suspension 9a in which Δα is zero (that is, the connecting beam 14 is linear in plan view), the width of the connecting beam 14 needs to be minimized. On the other hand, the width of the connecting beam 14 can be increased even if Δα is increased from zero to either the − side or the + side.
That is, the configuration in which the pair of connection beams 14 is refracted at the connection point CP has the same fine movement characteristics as compared with the configuration in which the pair of connection beams 14 are linear, and the connection beams 14 14 can be wide.
From this, the configuration in which the pair of connecting beams 14 is refracted at the connecting point CP obtains the same fine movement characteristics as compared with the configuration in which the pair of connecting beams 14 are linear, and press. It is understood that processability by processing can be improved.

  Further, as apparent from FIG. 6, the longitudinal direction of the distal end side beam 142 is set to the longitudinal direction of the proximal end side beam 141 so that the connection point CP is separated from the suspension longitudinal direction center line CL from the imaginary line IL. On the other hand, in a configuration inclined in a plan view (that is, a configuration of Δα> 0), Δα needs to be 62 ° or more in order to make the pair of connecting beams 14 have a width of 0.30 mm or more.

  On the other hand, the longitudinal direction of the distal end side beam 142 is inclined in plan view with respect to the longitudinal direction of the proximal end side beam 141 such that the connection point CP is closer to the suspension longitudinal center line CL than the imaginary line IL. In the configuration (that is, the configuration of Δα <0), the width of the pair of connecting beams 14 can be set to 0.30 mm or more by setting Δα to −42 ° or less.

  That is, the longitudinal direction of the distal end side beam 142 is inclined with respect to the longitudinal direction of the proximal end side beam 141 in plan view so that the connection point CP is closer to the suspension longitudinal center line CL than the imaginary line IL. The longitudinal direction of the distal end side beam 142 is inclined with respect to the longitudinal direction of the proximal end side beam 141 in plan view so that the connection point CP is separated from the suspension longitudinal direction center line CL from the virtual line IL. The desired fine movement characteristics can be obtained in a state where the inclination angle of the distal end side beam 141 with respect to the proximal end side beam 141 is smaller than that of the configuration.

Therefore, in the magnetic head suspension 1A according to the present embodiment, the longitudinal direction of the distal end side beam 142 is the proximal end side so that the connection point CL is separated from the suspension longitudinal center line CL from the imaginary line IL. It is understood that the fine movement characteristics can be improved as compared with the magnetic head suspension inclined in a plan view with respect to the longitudinal direction of the beam 141.
Further, the longitudinal direction of the distal end side beam 142 is inclined with respect to the longitudinal direction of the proximal end side beam 141 in plan view so that the connection point CP is closer to the suspension longitudinal direction center line CL than the imaginary line IL. The longitudinal direction of the distal end side beam 142 is inclined with respect to the longitudinal direction of the proximal end side beam 141 in plan view so that the connection point CP is separated from the suspension longitudinal direction center line CL from the virtual line IL. Compared to the configuration, the size in the suspension width direction can be reduced.

Next, analysis results regarding impact resistance of the magnetic head suspensions 1a to 1e and the magnetic head suspensions 9a to 9e will be described.
In this analysis, the boss portion 15 is restrained with respect to the magnetic head suspensions 1a to 1e and the magnetic head suspensions 9a to 9e, and the magnetic head slider 50 is not moved in the z direction perpendicular to the disk surface. When a shock wave (sine half wave) in a direction toward the disk surface in a restrained state and having a pulse width of 1.0 msec and a peak value of 1000 G (sine half wave) is applied, The maximum stress among the stresses generated in the piezoelectric element 60 was obtained.
The analysis results are shown in FIG.

As is apparent from FIG. 7, when Δα = 0 (when the pair of connecting beams 14 are linear in a plan view), the pair of piezoelectric elements 60 are subjected to the greatest stress, and the + side and the − side In any of these directions, as Δα is increased, the stress applied to the pair of piezoelectric elements 60 is reduced.
From this, the configuration in which the pair of connecting beams 14 are refracted at the connecting point CP can improve the impact resistance as compared with the configuration in which the pair of connecting beams 14 are linear. Is understood.

Further, as is apparent from FIG. 7, the stress applied to the pair of piezoelectric elements 60 can be reduced by increasing Δα to the − side rather than increasing it to the + side.
Therefore, in the magnetic head suspension 1A according to the present embodiment, the longitudinal direction of the distal end side beam 142 is the proximal end side so that the connection point CP is separated from the suspension longitudinal center line CL from the imaginary line IL. It is understood that the impact resistance can be improved as compared with the magnetic head suspension inclined in a plan view with respect to the longitudinal direction of the beam 141.

  Finally, analysis results regarding resonance frequencies of the magnetic head suspensions 1a to 1e and the magnetic head suspensions 9a to 9e will be described.

In this analysis, the resonance frequency related to the main resonance mode, the bending primary mode, the torsional primary mode, the torsional secondary mode, and the torsional tertiary mode of the magnetic head suspensions 1a to 1e and the magnetic head suspensions 9a to 9e is determined using eigenvalue analysis. Asked.
The analysis results are shown in FIGS. 8 (a) to 8 (e), respectively.

  The main resonance mode is a vibration mode related to the seek direction of the magnetic head suspension, and the bending primary mode is a vibration mode related to a bending operation in the z direction (direction perpendicular to the disk surface) of the magnetic head suspension. Is a vibration mode related to the torsional motion about the suspension longitudinal centerline of the load bending portion, the torsional secondary mode is a vibration mode related to the torsional motion about the suspension longitudinal centerline of the support portion, and the torsional tertiary mode is the above-mentioned This is a vibration mode related to a torsional motion around the suspension longitudinal center line of the load beam portion.

  From FIG. 8 (b), the configuration in which the pair of connecting beams 14 is refracted at the connecting point CP is resonant with respect to the bending primary mode as compared with the configuration in which the pair of connecting beams 14 are linear. It is understood that the frequency can be improved.

  Further, as is apparent from FIGS. 8A to 8E, the longitudinal direction of the distal side beam 142 is set to the proximal end so that the connection point CP is closer to the suspension longitudinal center line CL than the imaginary line IL. The configuration in which the side beam 141 is inclined in plan view with respect to the longitudinal direction of the side beam 141 is such that the longitudinal direction of the distal side beam 142 is such that the connection point CP is separated from the suspension longitudinal center line CL from the virtual line IL. Compared to the configuration inclined in plan view with respect to the longitudinal direction of the proximal end beam 141, the primary resonance mode, the torsional primary mode, and the torsional tertiary mode have equivalent resonance frequency characteristics and the bending primary mode. In addition, the torsional secondary mode has better resonance frequency characteristics.

  Therefore, in the magnetic head suspension 1A according to the present embodiment, the longitudinal direction of the distal end side beam 142 is the proximal end side so that the connection point CP is separated from the suspension longitudinal center line CL from the imaginary line IL. It is understood that the resonance frequency characteristic can be improved as compared with the magnetic head suspension that is inclined in a plan view with respect to the longitudinal direction of the beam 141.

Further, in the magnetic head suspension 1A according to the present embodiment, as shown in FIGS. 1 and 2, the base end beam 141 extends to the suspension longitudinal center line CL from the base end to the front end. It is inclined so as to be close.
According to such a configuration, the distance in the suspension width direction between the base end portions of the base end side beams 141 in the pair of connecting beams 14 can be increased, and thereby the tip region by the pair of connecting beams 14 can be increased. 12 support stabilization can be achieved.

Embodiment 2
Hereinafter, another embodiment of a magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
FIG. 9 shows a top view (a plan view seen from the side opposite to the disk surface) of the magnetic head suspension 1B according to the present embodiment.
In the figure, the same members in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 9, the magnetic head suspension 1B according to the present embodiment is different from the magnetic head suspension 1A according to the first embodiment only in that the shape of the distal end side beam 142 is changed. Yes.

That is, in the first embodiment, the distal end side beam 142 has substantially the same width over the entire longitudinal direction.
On the other hand, in the present embodiment, the distal end side beam 142 is widened from the proximal end portion connected to the proximal end side beam 141 to the distal end portion.

  Finite element analysis of the magnetic head suspension 1B according to the present embodiment and the magnetic head suspension 1A according to the first embodiment regarding the fine movement characteristics of the magnetic head slider 50 in the seek direction and the resonance frequency of the main resonance mode. As for fine movement characteristics, the former was 8.3 nm / V and the latter was 8.5 nm / V. As for the resonance frequency of the main resonance mode, the former was 26.5 kHz and the latter was 26.3 kHz.

  Therefore, the magnetic head suspension 1B according to the present embodiment can improve the resonance frequency of the main resonance mode of the magnetic head slider 50 as compared with the magnetic head suspension 1A according to the first embodiment. Understood.

Embodiment 3
Hereinafter, another embodiment of a magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
10A to 10C are a top view (a plan view seen from the side opposite to the disk surface) and a bottom view (a bottom view seen from the disk surface side), respectively, of the magnetic head suspension 1C according to the present embodiment. Figure) and side view. In FIG. 10B, the ◯ marks indicate welding points.

  The magnetic head suspension 1C according to the present embodiment further includes a distal end side support plate 80 and a proximal end side support plate 90 on which the distal end side and the proximal end side of the pair of piezoelectric elements 60 can be respectively placed. This is mainly different from the magnetic head suspension according to the first embodiment.

FIG. 11 shows a top view of the magnetic head suspension 1C with the pair of piezoelectric elements 60 removed.
FIG. 12 is an exploded top view of the magnetic head suspension 1C.
Further, FIG. 13 shows a cross-sectional view along the line XIII-XIII in FIG.

  As shown in FIGS. 9 to 13, the front end side support plate 80 is connected to the lower surface of the support portion 10 (the surface facing the disk surface), and the front end side of the pair of piezoelectric elements 60. Is configured such that a lower surface facing the disk surface can be placed.

By providing the distal end side support plate 80, the mounting work efficiency of the pair of piezoelectric elements 60 to the distal end region 12 can be improved.
That is, the insulating adhesive 70 is applied to the upper surface of the front end side support plate 80 (the surface opposite to the disk surface), and then the pair of piezoelectric elements 60 is placed on the upper surface of the front end side support plate 80. By doing so, the insulating adhesive 70 can be spread between the end surfaces on the distal end side of the pair of piezoelectric elements 60 and the end surface on the proximal end side of the distal end region 12 of the support portion 10.

  When the distal end side support plate 80 is separate from the support portion 10 as in the present embodiment, the distal end side support plate 80 is preferably as shown in FIGS. 11 and 13. Is a gap 81 between the distal end side edge of the distal end side support plate 80 and the proximal end side edge of the distal end region 12 of the support portion 10 in a plan view as viewed along a direction orthogonal to the disk surface. As shown, it is connected to the support 10.

According to such a configuration, the following effects can be obtained.
That is, the distal end side support plate 80 is configured to straddle the proximal end edge of the distal end region 12 in plan view, that is, the distal end side of the distal end side support plate 80 and the distal end region 12 are viewed in plan view. The front end side support plate 80 can be provided so as to overlap, but according to such a configuration, an insulating adhesive is applied to the upper surface of the front end side support plate 80 and then the pair of piezoelectric elements 60 is applied. Is placed on the top surface of the tip side support plate 80 to fix the pair of piezoelectric elements 60 to the tip region 12, the tip side support where the insulating adhesive 70 is ideally in close contact. There is a risk of entering between the plate 80 and the tip region 12. Since the distal end side support plate 80 and the distal end region 12 are both formed of a rigid member such as SUS and ideally in a close contact state, when the insulating adhesive 70 enters between them, the pair of the pair As the piezoelectric element 60 expands and contracts, the filler contained in the insulating adhesive 70 between them may be detached.
On the other hand, when the distal end side support plate 80 is arranged such that a gap 81 exists between the distal end side edge of the distal end side support plate 80 and the proximal end side edge of the distal end region 12 in a plan view. Such inconvenience can be effectively prevented.

  In the present embodiment, the tip support plate 80 is integrally formed with a load beam portion forming member 300C that integrally forms the load beam portion 30 and the load bending portion 20.

  That is, the load beam portion forming member 300C forms a load beam portion forming region 330 that forms the load beam portion 30 and a pair of leaf springs 21 that act as the load bending portion 20, as shown in FIG. A pair of load bending portion forming regions 320, a pair of support portion joining regions 310 extending from the pair of load bending portion forming regions 320 to the proximal end side and joined to the support portion 10, and the distal end region 12 in plan view. A pair of support portion joints on the base end side from the connection region 350 so as to form a connection region 350 that connects the pair of support portion joint regions 310 so as to overlap with each other, and the distal end side support plate 80 A distal end support plate forming region 380 that connects the regions 310 to each other.

  In the configuration in which the distal end side support plate 80 is provided as in the present embodiment, the inner side surface of the distal end side beam 142 facing inward in the suspension width direction is preferably the distal end portion of the corresponding piezoelectric element 60. Is formed so as to be closest to the outer surface of the piezoelectric element 60 facing outward in the suspension width direction at a position separated from the base end by a predetermined distance.

  According to such a configuration, the insulating adhesive 70 is applied to the upper surface of the distal end side support plate 80, and then the pair of piezoelectric elements 60 is placed on the upper surface of the distal end side support plate 80. When the element 60 is fixed to the distal end region 12, the insulating adhesive 70 flows out from the space between the inner side surface of the distal end side beam 142 and the corresponding outer side surface of the piezoelectric element 60 to the proximal end side in the suspension longitudinal direction. This can effectively prevent the variation in the fine movement characteristic of the magnetic head slider 50 in the seek direction and the resonance frequency characteristic of the magnetic head suspension 1C.

  In the present embodiment, as shown in FIG. 10A, FIG. 11 and FIG. 12, the inner side surface of the distal end side beam 142 is moved from the distal end portion of the corresponding piezoelectric element 60 to the proximal end side by a predetermined distance. An inward projecting portion 142a projecting inward in the suspension width direction is provided at a spaced position, and the inward projecting portion 142a prevents the insulating adhesive 70 from flowing out to the base end side in the suspension longitudinal direction. Yes.

  As shown in FIGS. 10 to 13, the base end side support plate 90 is connected to the lower surface of the support portion 10 (the surface facing the disk surface), and the base of the pair of piezoelectric elements 60. A lower surface facing the disk surface on the end side can be placed.

By providing the base end side support plate 90, the mounting work efficiency of the pair of piezoelectric elements 60 to the base end region 11 can be improved.
That is, after applying the insulating adhesive 70 to the upper surface (the surface opposite to the disk surface) of the base end side support plate 90, the pair of piezoelectric elements 60 is applied to the upper surface of the base end side support plate 90. By mounting the insulating adhesive 70, the insulating adhesive 70 can be spread between the proximal end surfaces of the pair of piezoelectric elements 60 and the distal end surface of the proximal region 11 of the support portion 10.

  When the base end side support plate 90 is separate from the support portion 10 as in the present embodiment, preferably, the base end side support is provided as shown in FIGS. The plate 90 is located between the proximal edge of the proximal support plate 90 and the distal edge of the proximal region 11 of the support portion 10 in a plan view viewed along a direction orthogonal to the disk surface. The support portion 10 is connected so that a gap 91 exists.

According to such a configuration, the following effects can be obtained.
That is, the base end side support plate 90 is configured to straddle the front end side edge of the base end region 11 in a plan view, that is, the base end side of the base end side support plate 90 and the base end region 11 The base end side support plate 90 can be provided so as to overlap in plan view. However, according to such a configuration, the insulating adhesive 70 is applied to the upper surface of the base end side support plate 90. When the pair of piezoelectric elements 60 are placed on the upper surface of the base end side support plate 90 and the pair of piezoelectric elements 60 are fixed to the base end region 11, the insulating adhesive 70 is ideally used. May enter between the proximal end support plate 90 and the proximal end region 11 in close contact with each other. Since the base end side support plate 90 and the base end region 11 are both formed of a rigid member such as SUS and ideally in a close contact state, when the insulating adhesive 70 enters between the two, As the pair of piezoelectric elements 60 expand and contract, the filler included in the insulating adhesive 70 between them may be detached.
On the other hand, if the base end side support plate 90 is arranged such that a gap 91 exists between the base end side edge of the base end side support plate 90 and the front end side edge of the base end region 11, Such inconvenience can be effectively prevented.

  In the present embodiment, the base end side support plate is integrally formed with a support part forming member 100 </ b> C that forms the support part 10.

Specifically, as shown in FIG. 12, the support forming member 100C includes first and second plate-like members 110 and 120 that are joined to each other.
The first plate-like member 110 integrally includes a portion 111 corresponding to the proximal end region 11, a portion 114 corresponding to the pair of connecting beams 14, and a portion 112 corresponding to the distal end region 12.

On the other hand, the second plate-like member 120 is integrally provided with a part 121 corresponding to the base end region 11 and a part 129 corresponding to the base end side support plate 90.
The first and second plate-like members 110 and 120 are joined by welding in a state in which the portions 111 and 121 corresponding to the base region 11 are superposed.

  As shown in FIG. 12, in the present embodiment, the boss portion 15 is formed on the first plate-like member 110, and the second plate member 120 has a boss hole of the boss portion 15. A large-diameter opening 16 is also formed.

  Further, in the present embodiment, as shown in FIGS. 10 (a), 11 and 12, the suspension width direction central portion 12a of the base side edge of the distal end region 12 has a suspension longitudinal direction base in plan view. It is a concave shape that opens to the end side.

  That is, the suspension width direction central portion 12a of the proximal end edge of the distal end region 12 has a center position intersecting the suspension longitudinal center line CL located closest to the suspension longitudinal direction distal end side and is outside the suspension width direction from the center position. It has a concave shape in plan view so as to be located on the base end side in the longitudinal direction of the suspension as it goes in the direction.

  By providing such a configuration, it is possible to alleviate stress concentration on the suspension width direction central portion 12a of the tip region 12 during the expansion / contraction operation of the pair of piezoelectric elements 60, and the insulating adhesive 70 can be peeled off or dropped off. Inconvenience can be prevented.

  Similarly, as shown in FIG. 10A, FIG. 11 and FIG. 12, the suspension width direction central portion 11a of the distal end side edge of the base end region 11 has a concave shape that opens to the distal end side in the suspension longitudinal direction in plan view. ing.

  That is, the suspension width direction central portion 11a of the distal end side edge of the base end region 11 has a center position intersecting the suspension longitudinal direction center line closest to the suspension longitudinal direction base end side and is outside the suspension width direction from the center position. It has a concave shape in plan view that is located on the distal end side in the longitudinal direction of the suspension as it goes.

  By providing such a configuration, it is possible to alleviate the concentration of stress on the central portion 11a in the suspension width direction of the base end region 11 during the expansion / contraction operation of the pair of piezoelectric elements 60, and the insulating adhesive 70 is peeled off or dropped off. Inconvenience can be prevented.

  It should be noted that the suspension width direction central portion 12a of the proximal end side edge of the distal end region 12 and / or the suspension width direction central portion 11a of the distal end side edge of the proximal end region 11 is of course a concave shape in plan view. The present invention is also applicable to the magnetic head suspensions 1A and 1B according to the first and second embodiments and the magnetic head suspensions according to the following modifications.

In each of the above embodiments, the support portion 10 is in the form of the base plate, but the present invention is not limited to such form. In other words, as the support portion 10, an arm whose base end portion is connected to the swing center of the main actuator can be employed.
FIG. 14 shows a top view of a magnetic head suspension 1C ′ according to a modification of the present invention in which the support portion 10 is changed to an arm in the magnetic head suspension 1C according to the third embodiment.

Further, in each of the above embodiments, the pair of piezoelectric elements 60 are disposed in the opening region 13, but the present invention is not limited to such a form.
That is, the pair of piezoelectric elements is arranged such that the distal end side is placed on the upper surface of the distal end region 12 and the proximal end side is placed on the upper surface of the proximal end region 11 with the opening region 13 straddling the suspension longitudinal direction. It is also possible to arrange the element 60.

FIGS. 15A to 15C are a top view and a bottom view of a magnetic head suspension 1A ′ according to a modified embodiment of the present invention in which such a modification is added to the magnetic head suspension 1A according to the first embodiment. A figure and a side view are shown.
According to the magnetic head suspension 1A ′ shown in FIG. 15, although the thickness in the z direction increases, it is possible to facilitate the fixing operation of the pair of piezoelectric elements 60 to the support portion 10.

1A, 1A ′, 1B, 1C, 1C ′ Magnetic head suspension 10 Support portion 11 Base end region 12 End region 13 Open region 14 Connecting beam 20 Load bending portion 30 Load beam portion 40 Flexure portion 50 Magnetic head slider 60 Piezoelectric element 141 base End side beam 142 End side beam CL Suspension longitudinal center line CP Connection point IP of base end side beam and front end side beam Virtual line

Claims (3)

A load bending part for generating a load for pressing the magnetic head slider toward the disk surface, a load beam part for transmitting the load to the magnetic head slider, and supporting the load beam part via the load bending part And a support portion that is swung directly or indirectly by a main actuator around a swing center, a flexure portion that is supported by the load beam portion and the support portion while supporting the magnetic head slider, and the magnetic In order to finely move the head slider in the seek direction, a pair of left and right piezoelectric elements mounted on the support portion so as to be symmetrical with respect to each other with respect to the center line in the longitudinal direction of the suspension and to have different expansion / contraction directions with respect to each other A magnetic head suspension,
The support portion is positioned between the proximal end region and the distal end region with respect to the longitudinal direction of the suspension, a proximal end region connected directly or indirectly to the main actuator, a distal end region to which the load bending portion is connected, and the suspension longitudinal direction. And a pair of left and right connecting beams that connect between the base end region and the tip end region on the outer side in the suspension width direction from the opening region,
The pair of piezoelectric elements has a proximal end portion and a distal end portion that are located in the opening region in a plan view viewed along a direction orthogonal to the disk surface, and the proximal end portion and the distal end region are the proximal end region and the distal end region. Are connected to each other,
The base end region has a longer suspension width direction length than the tip end region,
Each of the pair of connecting beams is connected to the base end side beam extending from the base end portion connected to the outer end portion in the suspension width direction of the base end region to the front end portion, and to the base end side beam. A distal end side beam extending substantially linearly from the proximal end portion to the distal end portion connected to the outer end portion in the suspension width direction of the distal end region;
The proximal end side beam has a longitudinal center line that is closer to a suspension longitudinal center line than a virtual line connecting a proximal end portion of the longitudinal center line of the proximal end beam and a distal end portion of the longitudinal center line of the distal end side beam. It is positioned so as to be close to the suspension longitudinal center line as it goes from the proximal end to the distal end,
The distal side beam is inclined with respect to the proximal side beam so that the inclination angle α of the longitudinal center line of the distal side beam with respect to the longitudinal center line of the proximal side beam is −42 ° or less. Magnetic head suspension characterized by that.   The magnetic head suspension according to claim 1, wherein the distal side beam has a width that increases from the proximal end to the distal end.   The pair of piezoelectric elements are arranged in the opening region so that at least a part of the end surfaces on the distal end side and the proximal end side respectively face the end surface on the proximal end side of the distal end region and the end surface on the distal end side of the proximal end region. 3. The magnetic head suspension according to claim 1, wherein the tip end side and the base end side are respectively fixed to the tip end region and the base end region in the disposed state.

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