JP4884544B2 - Magnetic head suspension - Google Patents

Description

  The present invention relates to a magnetic head suspension for supporting a magnetic head slider that reads and / or writes data to a storage medium such as a hard disk.

  As the capacity of magnetic disk drives increases, the accuracy of positioning of the magnetic head slider with respect to the target track is required. For this reason, in addition to the coarse movement of the magnetic head slider in the seek direction by the main actuator such as a voice coil motor. Thus, a magnetic head suspension has been proposed that enables fine movement of the magnetic head slider in the seek direction by a piezoelectric element acting as a subactuator (see, for example, Patent Documents 1 to 3 below).

  In the magnetic head suspension provided with the piezoelectric element as described above, the support portion that is rocked directly or indirectly by a main actuator such as a voice coil motor in order to enable fine movement of the magnetic head slider by the piezoelectric element. It is necessary to provide a low rigidity region.

That is, the magnetic head suspension including the piezoelectric element includes a load bending portion that generates a load for pressing the magnetic head slider toward the disk surface, a load beam portion for transmitting the load to the magnetic head slider, A support portion that supports the load beam portion via the load bending portion and is swingable directly or indirectly around a swing center by a main actuator; and the load beam portion in a state where the magnetic head slider is supported, and A flexure portion supported by the support portion and the piezoelectric element attached to the support portion are provided.
The support portion connects a proximal end region directly or indirectly connected to the main actuator, a distal end region to which the load bending portion is connected, and the proximal end region and the distal end region. The low-rigidity region is provided, and the magnetic head slider can be finely moved by elastically deforming the low-rigidity region according to the expansion and contraction operation of the piezoelectric element.

  By the way, by reducing the rigidity of the low rigidity portion, the displacement in the seek direction of the magnetic head slider by the piezoelectric element (the displacement in the radial direction parallel to the disk surface) can be increased. The reduction in the rigidity of the rigid region causes an increase in stress on the piezoelectric element when an impact force is applied to the magnetic disk device on which the magnetic head suspension is mounted, and also causes a decrease in the resonance frequency of the magnetic head suspension.

Japanese Patent Laid-Open No. 02-227886 Japanese Patent Laid-Open No. 11-016311 JP 2001-307442 A

  The present invention has been made in view of the above prior art, and is a magnetic head suspension capable of performing fine movement of the magnetic head slider by a piezoelectric element in addition to coarse movement of the magnetic head slider by a main actuator. An object of the present invention is to provide a magnetic head suspension capable of reducing the stress applied to the piezoelectric element when an impact force is applied and improving the resonance frequency while improving the fine movement characteristics in the seek direction.

  In order to achieve the above object, the present invention provides a load bending portion for generating a load for pressing the magnetic head slider toward the disk surface, a load beam portion for transmitting the load to the magnetic head slider, A support portion that supports the load beam portion via a load bending portion and is directly or indirectly swung around a swing center by a main actuator; and the load beam portion and the magnetic head slider in a state of supporting the magnetic head slider. The flexure part supported by the support part and the support part so that the magnetic head slider is slightly slid in the seek direction and symmetrical with respect to each other with respect to the longitudinal center line of the suspension. A magnetic head suspension including a pair of left and right piezoelectric elements to be mounted, wherein the support portion is the main actuator. A base end region connected directly or indirectly to the head, a tip end region connected to the load bending portion, an opening region located between the base end region and the tip end region in the longitudinal direction of the suspension, and a suspension from the opening region. A pair of left and right connecting beams connecting the base end region and the tip end region on the outer side in the width direction, and the pair of piezoelectric elements is a plan view viewed along a direction orthogonal to the disk surface A proximal end portion and a distal end portion connected to the proximal end region and the distal end region, respectively, in a state where at least a part is located in the opening region, and a proximal end portion connected to the proximal end region of the connecting beam An imaginary straight line connecting the center point and the center point of the tip connected to the tip region is closer to the suspension longitudinal center line toward the suspension longitudinal tip. The distal end region is narrower in the suspension width direction than the distal end side of the proximal end region, and the connecting beam extends from the proximal end portion connected to the proximal end region to the distal end side in the suspension longitudinal direction. A side beam, a distal end side beam extending from the distal end portion connected to the distal end region to the proximal end side in the suspension longitudinal direction, and a distal end portion of the proximal end side beam and an intermediate beam coupling the proximal end portion of the distal end side beam. The connecting beam has a connecting point between the base end side beam and the intermediate beam, and an intermediate beam longitudinal line connecting the center point of the base end portion and the center point of the tip end portion of the intermediate beam straddles the virtual straight line; Provided is a magnetic head suspension that is bent at a connection point between the distal side beam and the intermediate beam.

  Preferably, the connection point of the base end side beam and the intermediate beam is positioned outward in the suspension width direction with respect to the virtual straight line, and the connection point of the distal end side beam and the intermediate beam is suspended from the virtual straight line. Located inward in the width direction.

  In one embodiment, the piezoelectric element is disposed so as to expand and contract along the suspension longitudinal direction, and the distal end side beam longitudinal line connecting the center point of the proximal end portion and the distal end center point of the distal end side beam is the suspension longitudinal direction. The base end side beam longitudinal line connecting the center point of the base end portion of the base end side beam and the center point of the tip end portion is separated from the suspension longitudinal direction center line toward the tip end side, and the suspension It is configured to be close to the longitudinal centerline.

  In another embodiment, the piezoelectric element is arranged so as to expand and contract along the suspension longitudinal direction, and the distal end beam longitudinal line connecting the center point of the proximal end portion and the distal end center point of the distal end beam is the suspension longitudinal direction. The base end side beam longitudinal line connecting the center point of the base end portion of the base end side beam and the center point of the tip end portion is separated from the suspension longitudinal direction center line toward the tip end side, and the suspension It is configured to be spaced from the longitudinal centerline.

  In the various configurations, preferably, the base end side beam is narrowed from the base end side to the front end side.

  According to the magnetic head suspension of the present invention, the suspension in the distal end region of the support portion is such that the imaginary straight line connecting the proximal end portion and the distal end portion of the connecting beam approaches the suspension longitudinal center line as it goes to the suspension longitudinal direction distal end side. Since the length in the width direction is shorter than the length in the suspension width direction on the distal end side of the base end region, the moment of inertia around the rotation center of the subactuator can be reduced, thereby reducing the resonance frequency of the main resonance mode. Can be increased. Further, according to the above configuration, since the mass on the front end side of the support portion can be reduced, the resonance frequency of the bending mode in the z direction perpendicular to the disk surface can be increased. The stress applied to the magnetic head suspension can be reduced, and the impact resistance of the magnetic head suspension can be improved.

  Furthermore, according to the magnetic head suspension of the present invention, the proximal beam and the intermediate beam are arranged such that the intermediate beam longitudinal line connecting the central point of the proximal end portion and the central point of the distal end portion of the intermediate beam straddles the virtual straight line IL. Since it is bent at the connection point of the beam and at the connection point of the tip side beam and the intermediate beam, the bending angle of the bent portion of the connection beam can be adjusted without greatly extending the connection beam outward in the suspension width direction. It can be set within a desired range where the elastic deformation operation of the beam can be performed without difficulty. Accordingly, the fine movement characteristic of the magnetic head slider by the piezoelectric element (that is, parallel to the disk surface of the magnetic head slider by the piezoelectric element) is prevented as much as possible from deterioration in rigidity in the z direction orthogonal to the disk surface. The ease of displacement in the proper seek direction) can be improved.

FIG. 1A is a top view of the magnetic head suspension according to the first embodiment of the present invention. FIG. 1B is a bottom view of the magnetic head suspension according to the first embodiment. FIG. 2 is an enlarged view of part II in FIG. 1A. FIG. 3 is a top view of the magnetic head suspension according to the second embodiment of the present invention. FIG. 4 is a top view of the magnetic head suspension according to the third embodiment of the present invention. FIG. 5 is a top view of a magnetic head suspension according to a modification of the third embodiment.

Embodiment 1
Hereinafter, preferred embodiments of a magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
1A and 1B are respectively a top view (a plan view seen from the side opposite to the disk surface) and a bottom view (a bottom view seen from the disk surface side) of the magnetic head suspension 1A according to the present embodiment. . In FIG. 1B, the ◯ marks indicate welding points.

  As shown in FIGS. 1A and 1B, the magnetic head suspension 1A transmits a load bending portion 20 that generates a load for pressing the magnetic head slider 50 toward the disk surface, and transmits the load to the magnetic head slider 50. A load beam portion 30 for supporting the load beam portion 30 via the load bending portion 20 and swinging directly or indirectly about a swing center by a main actuator, and the magnetic head The load beam portion 30 and the flexure portion 40 supported by the support portion 10 with the slider 50 being supported, and the suspension head longitudinal center line CL to make the magnetic head slider 50 finely move in the seek direction. The left and right ones mounted on the support unit 10 are symmetrical with respect to each other and have different expansion / contraction directions with respect to each other. And a piezoelectric element 60.

  The support portion 10 is a member that supports the load beam portion 30 via the load bending portion 20 in a state where the support portion 10 is directly or indirectly connected to the main actuator such as a voice coil motor. It is supposed to have.

In the present embodiment, the support portion 10 is a base plate provided with a boss portion 15 that is joined by caulking to the tip of a carriage arm (not shown) connected to the main actuator.
The support part 10 is preferably formed by a stainless plate having a thickness of 0.1 mm to 0.8 mm, for example.
As a matter of course, an arm whose base end is connected to the swing center of the main actuator can be adopted as the support portion 10.

The support portion 10 includes a base end region 11 connected directly or indirectly to the main actuator, a tip end region 12 to which the load bending portion 20 is connected, and the base end region 11 and the tip end in the suspension longitudinal direction. An opening region 13 located between the regions 12 and a pair of left and right connecting beams 14 connecting the base region 11 and the tip region 12 on both sides in the suspension width direction of the opening region 13 are provided.
The detailed structure of the pair of connecting beams 14 will be described later.

As described above, the load beam portion 30 is a member for transmitting the load generated by the load bending portion 20 to the magnetic head slider 50, and therefore requires a predetermined rigidity.
In the present embodiment, as shown in FIGS. 1A and 1B, the load beam portion 30 is bent from a flat plate-like main body portion 31 and both end portions in the width direction of the main body portion 31 to the side opposite to the disk surface. The flange portion 32 is formed, and the flange portion 32 ensures rigidity.
The load beam portion 30 is preferably formed by a stainless plate having a thickness of 0.02 mm to 0.1 mm, for example.

Specifically, the load beam portion 30 has a protrusion 33 called a dimple at the tip.
The protrusion 33 protrudes, for example, about 0.05 mm to 0.1 mm in a direction close to the disk surface. The protrusion 33 is in contact with the back surface (the surface opposite to the disk surface) of the head mounting area 43 in the flexure section 40, and the load is applied to the head mounting area 43 of the flexure section 40 via the protrusion 33. Is transmitted to.

  In the present embodiment, the load beam portion 30 further integrally has a lift tab 34 extending from the front end of the main body portion 31 to the front end side in the suspension longitudinal direction. The lift tab 34 is associated with a ramp provided in the magnetic disk device when the magnetic head suspension 1A is swung by the main actuator so that the magnetic head slider 50 is positioned radially outward of the disk surface. In addition, the magnetic head slider 50 is a member for separating the magnetic head slider 50 from the disk surface along the z direction (direction perpendicular to the disk surface).

  The load bending portion 20 has a proximal end portion connected to the support portion 10 and a distal end portion connected to the load beam portion 30, and the magnetic head slider 50 is moved to the disk surface based on its own elastic deformation. Generates a pressing load that pushes toward.

As shown in FIGS. 1A and 1B, in the present embodiment, the load bending portion 20 has a pair of left and right leaf springs 21 disposed so that the plate surface faces the disk surface.
Preferably, the pair of leaf springs 21 are bent in advance in a direction in which the magnetic head slider 50 approaches the disk surface before the magnetic head suspension 1A is mounted on the magnetic disk device, and the magnetic When the head suspension 1A is mounted on the magnetic disk device, the pressing load is generated by being bent back.

The load bending part 20 is formed of, for example, a stainless plate having a thickness of 0.02 mm to 0.1 mm.
In the present embodiment, as shown in FIGS. 1A and 1B, the load bending portion 20 is formed integrally with the load beam portion 30.

  That is, the magnetic head suspension 1A according to the present embodiment has a load beam portion forming member 300 that integrally forms the load beam portion 30 and the load bending portion 20, and the load beam portion forming member 300 includes the load beam portion forming member 300. The load beam portion forming member 300 is welded to the support portion 10 by welding or the like with the upper surface opposite to the disk surface in contact with the lower surface of the support portion 10 facing the disk surface in the tip region 12. It is joined.

The flexure unit 40 is joined to the load beam unit 30 and the support unit 10 while supporting the magnetic head slider 50.
Specifically, as shown in FIG. 1B, the flexure portion 40 extends from the main body region 41 to the front end side by a main body region 41 joined to a surface of the load beam portion 30 facing the disk surface by welding or the like. A pair of support pieces 42 and the head mounting area 43 supported by the support pieces 42 are provided.

As shown in FIG. 1B, the head mounting area 43 supports the magnetic head slider 50 on a surface facing the disk surface.
As described above, the protrusion 33 is in contact with the back surface of the head mounting area 43. Therefore, the head mounting area can flexibly swing in the roll direction and the pitch direction with the protrusion 33 as a fulcrum. ing.
The flexure portion 40 is made to be less rigid than the load beam portion 30 so that the head mounting region 43 can swing in the roll direction and the pitch direction.
The flexure portion 40 is preferably formed by a stainless plate having a thickness of about 0.01 mm to 0.025 mm, for example.

In the present embodiment, the flexure unit 40 is integrally provided with a wiring for transmitting a write signal and / or a read signal to the magnetic head slider 50 as a printed circuit.
That is, the flexure part 40 includes a flexure substrate 400 integrally including the main body region 41, the pair of support pieces 42, and the head mounting region 43, and a flexure wiring body at least partially laminated on the flexure substrate 400. 410.
The flexure wiring body 410 surrounds the conductor layer, an insulating layer stacked on the surface of the flexure substrate 400 facing the disk surface, a conductor layer stacked on the surface of the insulating layer facing the disk surface, and the conductor layer. And a protective layer.

  In the present embodiment, the flexure substrate 400 is joined to the main body region 31 of the load beam portion 30, the distal end region 12 and the proximal end region 11 of the support portion 10 by welding.

The piezoelectric element 60 has a main body made of PZT (lead zirconate titanate) and a pair of electrode layers disposed on both sides of the main body in the thickness direction.
The main body has a thickness of, for example, 0.05 mm to 0.3 mm, and the electrode layer is formed of, for example, Ag or Au having a thickness of 0.05 μm to several μm.

  As shown in FIGS. 1A and 1B, the pair of piezoelectric elements 60 has a base end portion in a state in which at least a part thereof overlaps the opening region 13 in a plan view viewed along a direction orthogonal to the disk surface. And the distal end portion is connected to the proximal end region 11 and the distal end region 12, respectively, and acts as a sub-actuator for finely moving the magnetic head slider 50 in the seek direction. Is stretched and the other is compressed.

In the present embodiment, as shown in FIGS. 1A and 1B, the pair of piezoelectric elements 60 is entirely disposed in the opening region 13 in a plan view viewed along a direction orthogonal to the disk surface. Yes.
That is, at least part of the end surfaces on the distal end side and the proximal end side of the pair of piezoelectric elements 60 are respectively opposed to the end surface on the proximal end side of the distal end region 12 and the end surface on the distal end side of the proximal end region 11. With the pair of piezoelectric elements 60 arranged in the opening region 13, the distal end side and the proximal end side of the pair of piezoelectric elements 60 are fixed to the distal end region 12 and the proximal end region 11, respectively.

According to such a configuration, the expansion / contraction operation of the pair of piezoelectric elements 60 can be transmitted as much as possible as the movement operation of the magnetic head slider 50 in the seek direction.
Further, according to the configuration, a part or all of the pair of piezoelectric elements 60 can overlap the support portion 10 in the thickness direction, and the entire magnetic head suspension 1A including the pair of piezoelectric elements 60 can be overlapped. The thickness can be made as thin as possible.

In the present embodiment, the pair of piezoelectric elements 60 are disposed in the opening region 13 in plan view, and the distal end side end surface of the pair of piezoelectric elements 60 and the proximal end of the distal end region 12 are arranged. The end face on the side is fixed by a fixing member 70 such as an insulating adhesive, and the end face on the base end side of the pair of piezoelectric elements 60 and the end face on the front end side of the base end region 11 are insulatively bonded. It is fixed by a fixing member 70 such as an agent.
That is, the expansion / contraction operation of the pair of piezoelectric elements 60 is transmitted to the distal end region 12 and the proximal end region 11 through the fixing member 70.

In this embodiment, as shown in FIGS. 1A and 1B, the pair of piezoelectric elements 60 are arranged so that the longitudinal direction (that is, the expansion / contraction direction) is along the suspension longitudinal direction. The invention is not limited to such a form.
That is, if the pair of piezoelectric elements 60 are symmetrical to each other with respect to the suspension longitudinal center line CL, and the longitudinal direction of the pair of piezoelectric elements 60 is within a range having a component along the suspension longitudinal direction. The longitudinal direction of the pair of piezoelectric elements 60 can be inclined with respect to the suspension longitudinal direction.

For example, voltage application to the pair of piezoelectric elements 60 can be performed using the flexure wiring body 410.
That is, the conductor layer in the flexure wiring body 410 includes a conductor member for piezoelectric element in addition to the conductor member for slider electrically connected to the magnetic head slider 50, and the pair of piezoelectric elements The electrode layer on the lower surface side of 60 (the side facing the disk surface) can be electrically connected to the conductor member for piezoelectric elements.
This electrical connection can be made using, for example, wire bonding 74 (see FIG. 1B) or using a conductive adhesive.
The electrode layer on the upper surface side (opposite to the disk surface) of the pair of piezoelectric elements 60 is grounded by being electrically connected to the support 10 through a conductive member such as a conductive adhesive. Potential.

Here, the configuration of the pair of connecting beams 14 will be described.
FIG. 2 is an enlarged view of a portion II in FIG. 1A.

  As shown in FIGS. 1A and 1B, the pair of connecting beams 14 have a symmetrical shape with respect to the suspension longitudinal direction center line CL.

  The connecting beam 14 has an imaginary straight line IL connecting a center point of a base end portion 14a connected to the base end region 11 and a center point of a tip end portion 14b connected to the tip end region 12 toward the distal end side in the suspension longitudinal direction. It is configured to approach the suspension longitudinal center line CL as it goes.

  In other words, in the present embodiment, the length in the suspension width direction of the distal end region 12 of the support portion 10 is shorter than the length in the suspension width direction on the distal end side of the proximal end region 11. The straight line IL approaches the suspension longitudinal center line CL as it goes to the front end side in the suspension longitudinal direction.

According to such a configuration, it is possible to reduce the moment of inertia around the rotation center of the subactuator, thereby increasing the resonance frequency of the main resonance mode.
Furthermore, according to the above configuration, since the mass on the tip side of the support portion 10 can be reduced, the resonance frequency of the bending mode with respect to the z direction orthogonal to the disk surface can be increased. The stress applied to the element 60 can be reduced, and the impact resistance of the magnetic head suspension 1A can be improved.

  Further, in the present embodiment, in order to improve the fine movement characteristic of the magnetic head slider 50 in the seek direction by the pair of piezoelectric elements 60, the pair of connecting beams 14 has the following configuration.

  That is, as shown in FIG. 1A, FIG. 1B, and FIG. 2, the connecting beam 14 includes a proximal end beam 141 that extends from the proximal end portion 14a connected to the proximal end region 11 to the distal end side in the suspension longitudinal direction, A distal end side beam 142 extending from the distal end portion 14b connected to the distal end region 12 to the proximal end side in the longitudinal direction of the suspension, and a middle portion connecting the distal end portion of the proximal end side beam 141 and the proximal end portion of the distal end side beam 142. And a beam 143.

  As shown in FIGS. 1A, 1B and 2, the connecting beam 14 has an intermediate beam longitudinal line 143 (L) connecting the center point of the proximal end portion and the center point of the distal end portion of the intermediate beam 143. The connection point of the base end side beam 141 and the intermediate beam 143 forms a first bent portion 14c and the connection point of the distal end side beam 142 and the intermediate beam 143 is a second bent portion so as to straddle the virtual straight line IL. 14d is formed.

  According to such a configuration, in the bent portions 14c and 14d existing between the proximal end portion 14a and the distal end portion 14b of the connecting beam 14 without greatly extending the connecting beam 14 outward in the suspension width direction. The bending angle can be set within a range in which the elastic deformation operation of the connecting beam 14 can be performed without difficulty (for example, a range of ± 60 ° with respect to 90 °), and thereby the z direction orthogonal to the disk surface. The fine movement characteristics of the magnetic head slider 50 by the piezoelectric element 60 (that is, the displacement of the magnetic head slider 50 by the piezoelectric element 60 in the seek direction parallel to the disk surface) is prevented as much as possible. Easiness) can be improved.

  More specifically, when the piezoelectric element 60 expands and contracts along the longitudinal direction of the suspension, the base end portion 14a and the distal end portion 14b of the connecting beam 14 are accordingly separated from or close to each other with respect to the longitudinal direction of the suspension. The connecting beam 14 is elastically deformed, and thereby the load bending portion 20 and the load beam portion 30 swing in the seek direction so that the magnetic head slider 50 moves along the seek direction.

  Therefore, in order to improve the fine movement characteristic of the magnetic head slider 50 in the seek direction by the piezoelectric element 60, the base end portion 14a and the tip end portion 14b of the connecting beam 14 are made to approach each other in the suspension longitudinal direction. The connecting beam 14 is formed so that the connecting beam 14 can easily perform both an elastic deformation operation and an elastic deformation operation in which the base end portion 14a and the distal end portion 14b are separated from each other in the longitudinal direction of the suspension. There is a need.

In this regard, first, a preferable range of bending angles in the bent portions 14c and 14d provided in the connecting beam 14 will be described.
For example, when the connecting beam 14 is linearly formed over the entire length (that is, when the connecting beam 14 is along the virtual straight line IL, and α1 or α2 in FIG. 2 is 180 °) It is difficult to elastically deform the connecting beam 14 so that the proximal end portion 14a and the distal end portion 14b of the connecting beam 14 approach or separate from each other by the expansion and contraction of the piezoelectric element 60. Become.

  On the other hand, when the bending angle of the bent portion of the connecting beam 14 is too small (that is, when α1 or α2 in FIG. 2 is too close to 0 °), the connecting beam 14 follows the virtual straight line IL. It becomes difficult to elastically deform the connecting beam 14 so that the base end portion 14a and the distal end portion 14b of the connecting beam 14 approach or separate from each other by the expansion and contraction of the piezoelectric element 60.

  From such a point of view, the bending portion provided in the connecting beam 14 has a preferable bending angle range (for example, a range of ± 60 ° with respect to 90 °, that is, 30 ° to 120 °).

Next, a preferable number of bent portions provided on the connecting beam 14 will be described.
As described above, in the present embodiment, the connecting beam 14 includes the bent portion 14c (hereinafter referred to as the first bent portion) and the distal end side beam 142 at the connecting point of the proximal end beam 141 and the intermediate beam 143. And a bent portion 14d (hereinafter referred to as a second bent portion) at the connection point of the intermediate beam 143.

  As shown in FIG. 2, the first bent portion 14c is bent at a first bent angle α1 (α1 = about 89 ° in the illustrated embodiment) included in the preferable bent angle range, and the second bent portion 14d is bent at a second bending angle α2 (α2 = about 81 ° in the illustrated embodiment) included in the preferable bending angle range.

Here, considering the connecting beam 240 having a single bent portion that is bent at the same bending angle as the first bending angle α1, the connecting beam 240 is formed as shown in FIG. It protrudes outward from the connecting beam 14 in the suspension width direction, and the rigidity in the z direction perpendicular to the disk surface is deteriorated.
Further, if the connecting beam 14 protrudes outward in the suspension width direction, there is a risk of causing interference with other components constituting the hard disk drive.

Further, as shown in FIG. 2, the connecting beam 241 having a single bent portion bent at the same bending angle as the second bending angle α2 is located more in the suspension width direction than the connecting beam 14 in the present embodiment. It protrudes toward the direction.
Therefore, in order to prevent interference with the piezoelectric element 60, the proximal end region 11 and the distal end of the support portion 10 are arranged such that the connecting beam 241 is positioned outward in the suspension width direction from the state shown in FIG. It is necessary to extend the region 12 outward in the suspension width direction, resulting in deterioration of rigidity in the z direction perpendicular to the disk surface.
Furthermore, if the proximal end region 11 and the distal end region 12 of the support portion 10 protrude outward in the suspension width direction, there is a risk of causing interference with other components constituting the hard disk drive.

On the other hand, in the present embodiment, as described above, the connecting beam 14 includes the first and second bent portions 14c and 14d so that the intermediate beam longitudinal line 143 (L) straddles the virtual straight line IL. It is bent at two places.
Therefore, the bending angle at the bent portions 14c and 14d can be set within a preferable range without greatly extending the connecting beam 14 outward in the suspension width direction, and thereby the z direction orthogonal to the disk surface. As a result, the fine movement characteristics of the magnetic head slider 50 by the piezoelectric element 60 can be improved.

  Further, in the present embodiment, as shown in FIGS. 1A, 1B, and 2, the first bent portion 14c to which the proximal end beam 141 and the intermediate beam 143 are connected is more suspended than the virtual straight line IL. The second bent portion 14d, which is located outward in the width direction and is connected to the distal end side beam 142 and the intermediate beam 143, is located inward in the suspension width direction with respect to the virtual straight line IL.

According to such a configuration, the distal end side beam 142 located on the distal end side of the coupling beam 14 is made as much as possible while realizing a configuration in which the intermediate beam longitudinal line 143 (L) straddles the virtual straight line IL. The suspension can be brought close to the longitudinal center line CL.
Therefore, the first bent portion 14c is located on the inner side in the suspension width direction than the virtual straight line IL and the second bent portion 14d is located on the outer side in the suspension width direction than the virtual straight line IL. The resonance frequency of the main resonance mode can be increased.

Embodiment 2
Hereinafter, another embodiment of a magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
FIG. 3 shows a top view (a plan view seen from the side opposite to the disk surface) of the magnetic head suspension 1B according to the present embodiment.
In the figure, the same members in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  The magnetic head suspension 1B according to the present embodiment is different from the magnetic head suspension 1A according to the first embodiment in that the connecting beam 14 is changed to a connecting beam 14B.

  Specifically, in the first embodiment, as shown in FIG. 1A, FIG. 1B and FIG. 2, the base end side beam 141 of the connecting beam 14 includes a base end portion center point 14a and a tip end center point. The proximal end side beam longitudinal line 141 (L) is connected to be substantially parallel to the expansion / contraction direction of the piezoelectric element 60.

  That is, in the first embodiment, in the configuration in which the expansion and contraction direction of the piezoelectric element 60 is arranged along the suspension longitudinal direction, the proximal end side beam 141 has the proximal end longitudinal line 141 (L). It is arranged along the suspension longitudinal direction.

  On the other hand, in the present embodiment, as shown in FIG. 3, the base end side beam 141B of the connecting beam 14B has a base end side beam longitudinal length connecting the center point 14a of the base end portion and the center point of the front end portion. The line 141B (L) is closer to the suspension longitudinal center line CL as it goes to the distal end side in the suspension longitudinal direction, and is inclined with respect to the expansion / contraction direction of the piezoelectric element 60.

  Specifically, as in the first embodiment, the piezoelectric element 60 is arranged such that the expansion / contraction direction is along the suspension longitudinal direction, but the proximal end beam longitudinal line 141B (L) is the suspension longitudinal direction. The piezoelectric element 60 is inclined with respect to the expansion / contraction direction so as to approach the suspension longitudinal center line CL as it goes to the tip side.

  Further, in the distal end side beam 142, the distal end side beam longitudinal line 142 (L) connecting the center point of the proximal end portion and the center point 14b of the distal end portion in both the first embodiment and the present embodiment has a suspension longitudinal length. It is arranged so as to be separated from the suspension longitudinal center line CL as it goes to the front end side in the direction.

  That is, in the present embodiment, the longitudinal lines 141B (L) and 142 (L) of both the proximal end beam 141B and the distal end side beam 142 of the connecting beam 14B are in the expansion / contraction direction of the piezoelectric element 60. Is inclined.

  According to such a configuration, the connecting beam 14B can be more easily elastically deformed by the expansion / contraction operation of the piezoelectric element 60, and the fine movement characteristics of the magnetic head slider 50 by the piezoelectric element 60 can be further improved. .

  Furthermore, since the base end side beam 141B is inclined so that the base end side longitudinal line 141B (L) approaches the suspension longitudinal direction center line CL as it goes to the suspension longitudinal direction distal end side, the first embodiment In comparison with the above, the moment of inertia around the suspension longitudinal center line CL of the base end side beam 141B can be reduced, and thereby the resonance frequency of the magnetic head suspension can be increased.

Embodiment 3
Hereinafter, another embodiment of a magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.
FIG. 4 shows a top view of the magnetic head suspension 1C according to the present embodiment (a plan view seen from the side opposite to the disk surface).
In the drawing, the same members in the first and second embodiments are denoted by the same reference numerals, and detailed description thereof is omitted.

  The magnetic head suspension 1C according to the present embodiment is different from the magnetic head suspensions 1A and 1B according to the first and second embodiments in that the connecting beams 14 and 14B are changed to connecting beams 14C. .

  In the present embodiment, the base end side beam 141C of the connecting beam 14C is separated from the suspension longitudinal center line CL as the base end beam longitudinal line 141C (L) goes to the distal end side in the suspension longitudinal direction. The piezoelectric element 60 is inclined with respect to the expansion / contraction direction.

  Also in such a configuration, the connecting beam 14C can be more easily elastically deformed by the expansion / contraction operation of the piezoelectric element 60, and the fine movement characteristics of the magnetic head slider 50 by the piezoelectric element 60 can be further improved.

  Furthermore, in the present embodiment, the connecting beam 14C has a suspension longitudinal direction center line as both the distal end side beam longitudinal line 142 (L) and the proximal end longitudinal line 141C (L) go to the distal end side in the suspension longitudinal direction. It is comprised so that it may space apart from CL.

That is, the distal side beam longitudinal line 142 (L) and the proximal side beam longitudinal line 141C (L) are inclined in the same direction with respect to the suspension longitudinal direction.
According to such a configuration, the connecting beam 14C can be elastically deformed without difficulty both when the piezoelectric element 60 is extended and compressed.

Preferably, as shown in FIG. 5, it is possible to employ a proximal-side beam 141C ′ that becomes narrower as it goes from the proximal side to the distal side.
According to the magnetic head suspension 1C ′ according to this modification, the resonance frequencies of the bending mode, the torsion mode, and the main resonance mode can be increased.

  The base end side beam 141C ′, which is narrowed from the base end side toward the front end side, can of course be applied to the magnetic head suspensions 1A and 1B according to the first and second embodiments. It is.

1A, 1B, 1C, 1C ′ Magnetic head suspension 10 Support portion 11 Base end region 12 Tip region 13 Open region 14 Connecting beam 20 Load bending portion 30 Load beam portion 40 Flexure portion 50 Magnetic head slider 60 Piezoelectric elements 141, 141B, 141C , 141C ′ Proximal end beam 141 (L), 141B (L), 141C (L) End side beam longitudinal line 142 End side beam 142 (L) End side longitudinal line 143 Intermediate beam 143 (L) Intermediate beam longitudinal line CL Suspension longitudinal center line IL Virtual straight line

Claims (5)

A load bending part for generating a load for pressing the magnetic head slider toward the disk surface, a load beam part for transmitting the load to the magnetic head slider, and supporting the load beam part via the load bending part And a support portion that is swung directly or indirectly by a main actuator around a swing center, a flexure portion that is supported by the load beam portion and the support portion while supporting the magnetic head slider, and the magnetic In order to finely move the head slider in the seek direction, a pair of left and right piezoelectric elements mounted on the support portion so as to be symmetrical with respect to each other with respect to the center line in the longitudinal direction of the suspension and to have different expansion / contraction directions with respect to each other A magnetic head suspension,
The support portion is positioned between the proximal end region and the distal end region with respect to the longitudinal direction of the suspension, a proximal end region connected directly or indirectly to the main actuator, a distal end region to which the load bending portion is connected, and the suspension longitudinal direction. And a pair of left and right connecting beams that connect between the base end region and the tip end region on the outer side in the suspension width direction from the opening region,
The pair of piezoelectric elements has a proximal end portion and a distal end portion that are located in the opening region in a plan view viewed along a direction orthogonal to the disk surface, and the proximal end portion and the distal end region are the proximal end region and the distal end region. Respectively,
Suspension longitudinal center line as the imaginary straight line connecting the center point of the base end portion connected to the base end region of the connecting beam and the center point of the tip end portion connected to the tip end region goes to the tip end side in the suspension longitudinal direction. The distal end region is narrower in the suspension width direction than the distal end side of the proximal end region,
The connecting beam extends from the base end connected to the base end region to the distal end side in the suspension longitudinal direction, and extends from the distal end connected to the tip end region to the suspension longitudinal base end side. A distal end side beam, and an intermediate beam connecting the distal end portion of the proximal end side beam and the proximal end portion of the distal end side beam;
The connecting beam is connected to the proximal side beam and the intermediate beam, and the distal end so that an intermediate beam longitudinal line connecting the center point of the proximal end portion and the center point of the distal end portion of the intermediate beam straddles the virtual straight line. A magnetic head suspension which is bent at a connection point between a side beam and the intermediate beam.   The connection point of the base end side beam and the intermediate beam is located outward of the virtual straight line in the suspension width direction, and the connection point of the distal end side beam and the intermediate beam is in the suspension width direction of the virtual straight line. The magnetic head suspension according to claim 1, wherein the magnetic head suspension is located on a first side. The piezoelectric element is arranged to expand and contract along the suspension longitudinal direction,
The distal end side beam longitudinal line connecting the center point of the proximal end portion of the distal end side beam and the center point of the distal end portion is separated from the suspension longitudinal direction center line toward the distal end side in the suspension longitudinal direction, and the proximal end of the proximal end beam 3. The magnetic head according to claim 2, wherein the base end side beam longitudinal line connecting the center point of the portion and the center point of the tip end portion is closer to the suspension longitudinal direction center line as it goes to the distal end side in the suspension longitudinal direction. suspension. The piezoelectric element is arranged to expand and contract along the suspension longitudinal direction,
The distal end side beam longitudinal line connecting the center point of the proximal end portion of the distal end side beam and the center point of the distal end portion is separated from the suspension longitudinal direction center line toward the distal end side in the suspension longitudinal direction, and the proximal end of the proximal end beam 3. The magnetic head according to claim 2, wherein a base end side beam longitudinal line connecting a center point of the first portion and a center point of the front end portion is separated from the suspension longitudinal direction center line toward the distal end side in the suspension longitudinal direction. suspension.   5. The magnetic head suspension according to claim 1, wherein the base end side beam is narrowed from the base end side toward the front end side.

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