JP7103015B2 - Table device - Google Patents

Description

The present invention relates to a rolling guide device and a table device.

As a transfer device, a machine tool, or a semiconductor manufacturing device, a table device for positioning by sliding a table in a process chamber having a vacuum atmosphere or a special gas atmosphere is used (see, for example, Patent Document 1). In such a table device, a rolling guide device may be used to move the table on a flat surface. Patent Document 2 describes casters for moving an installation object.

Japanese Unexamined Patent Publication No. 11-287880 Japanese Unexamined Patent Publication No. 2016-12944

When the rolling guide device is composed of a large number of parts in combination, friction between the parts may occur, making it difficult to move the table smoothly. Further, the table device may be used in a vacuum atmosphere, a process room in a special gas atmosphere, a clean environment, or the like. If foreign matter is generated by the operation of the rolling guide device, it may be difficult to use it in a clean environment, for example.

The present invention has been made in view of the above problems, and provides a rolling guide device and a table device capable of smoothly moving on the surface of a plate-shaped member and reducing the number of parts. The purpose is to do.

In order to achieve the above object, the rolling guide device according to one aspect of the present invention comprises a plate-shaped member that separates the first space and the second space, and a substrate that faces one surface of the plate-shaped member. A rolling guide device provided between them that movably supports the substrate along the one surface of the plate-shaped member, and is rotatably supported by a base connected to the substrate and the base. The first rolling shaft, which is a rotating shaft, has a first rolling bearing provided along the one surface, and the first rolling bearing has a first inner ring fixed to the base and the plate-shaped member. It has a first outer ring in contact with the one surface of the above, and a first rolling element provided between the first inner ring and the first outer ring.

As a result, the rolling guide device movably supports the substrate along one surface of the plate-shaped member by rotating the first outer ring in contact with the plate-shaped member. That is, the first rolling bearing itself can be used as a wheel. Therefore, the number of parts of the rolling guide device can be reduced. Further, no other component is interposed between the first outer ring and the plate-shaped member, and the first outer ring is in direct contact with the plate-shaped member. Therefore, the rolling guide device can smoothly move on the surface of the plate-shaped member.

A preferred embodiment of the rolling guide device is to have a second rolling bearing rotatably supported by the substrate and provided in a direction in which a second shaft, which is a rotating shaft, intersects one of the surfaces. Has a second inner ring fixed to the substrate, a second outer ring fixed to the base, and a second rolling element provided between the second inner ring and the second outer ring. According to this, the second outer ring and the base can rotate about the second axis as the central axis. Therefore, the rolling guide device can freely move on the surface of the plate-shaped member.

As a desirable embodiment of the rolling guide device, the first axis of the first rolling bearing does not intersect the extension line of the second axis of the second rolling bearing when viewed from a direction parallel to the first axis. It is provided at the position. According to this, even if the moving direction of the rolling guide device changes, the base can smoothly rotate around the second axis.

As a desirable embodiment of the rolling guide device, the base, the first rolling bearing and the second rolling bearing are materials having heat resistance and corrosion resistance. According to this, the base, the first rolling bearing and the second rolling bearing can be easily sterilized by high temperature steam sterilization, dry heat sterilization or the like.

As a preferred embodiment of the rolling guide device, the base is arranged with a gap between the base and the substrate, and is connected to the substrate via a fixing member. According to this, since the gap is provided between the base and the substrate, the rolling guide device can suppress the occurrence of friction between the base and the substrate and move smoothly.

As a desirable embodiment of the rolling guide device, the base is connected to a first member in which the second rolling bearing is provided internally and the first member, and is aligned along the first axis with the first rolling bearing interposed therebetween. It has a second member facing in the direction, and the first inner ring is fixed to a shaft provided on the second member. According to this, the base can fix the first inner ring of the first rolling bearing and rotatably support the first outer ring.

The table device according to one aspect of the present invention has the above-mentioned rolling guide device, a first surface, a second surface opposite to the first surface, and the first space on the first surface side. The plate-shaped member that separates the second space on the second surface side, the first substrate that faces the first surface of the plate-shaped member, and the first surface of the first substrate that faces the first surface. A first attractive force generating portion provided on the surface, a moving mechanism provided in the first space for moving the first substrate, and a second substrate facing the first substrate via the plate-shaped member. A second substrate provided on a surface of the second substrate facing the second surface, facing the first attractive force generating portion via the plate-shaped member, and generating an attractive force with the first attractive force generating portion. The rolling guide device has two attractive force generating portions, and is provided between the second substrate and the second surface to movably support the second substrate.

According to this, the first space provided with the moving mechanism and the like and the second space provided with the second substrate and the like are separated by a plate-shaped member. Then, due to the attractive force between the first attractive force generating portion and the second attractive force generating portion, the attractive force acts on the second substrate in the direction toward the first substrate. As a result, when the first substrate moves due to the operation of the moving mechanism, the second substrate provided in the second space moves following the first substrate. Further, the rolling guide device can movably support the second substrate and smoothly move on the surface of the plate-shaped member.

According to the present invention, the rolling guide device can smoothly move on the surface of the plate-shaped member, and the number of parts can be reduced.

FIG. 1 is a perspective view of the table device according to the embodiment. FIG. 2 is a cross-sectional view taken along the line AA in FIG. FIG. 3 is a plan view of the first substrate. FIG. 4 is a plan view of the second substrate. FIG. 5 is a perspective view of the rolling guide device included in the table device according to the embodiment. FIG. 6 is a perspective view showing a part of the rolling guide device in an exploded manner. FIG. 7 is a side view of the rolling guide device. FIG. 8 is a cross-sectional view taken along the line BB in FIG. FIG. 9 is a side view showing an example of the second moving mechanism. FIG. 10 is a cross-sectional view of the table device according to the modified example.

Hereinafter, the present invention will be described in detail with reference to the drawings. The present invention is not limited to the embodiments for carrying out the following inventions (hereinafter referred to as embodiments). In addition, the components in the following embodiments include those that can be easily assumed by those skilled in the art, those that are substantially the same, that is, those in a so-called equal range. Further, the components disclosed in the following embodiments can be appropriately combined.

FIG. 1 is a perspective view of the table device according to the embodiment. FIG. 2 is a cross-sectional view taken along the line AA in FIG. FIG. 3 is a plan view of the first substrate. FIG. 4 is a plan view of the second substrate.

As shown in FIG. 1, the table device 1 includes a housing 2, a first table 3, a second table 4, a first moving mechanism 6, and a second moving mechanism 7. The first table 3, the first moving mechanism 6, and the second moving mechanism 7 are provided in the first space P inside the housing 2. The second table 4 is provided in the second space R outside the housing 2. The second space R is a space for maintaining a specific environment and performing positioning, processing, inspection, and the like of an operation object (work). The second space R may be any space that can maintain a specific environment suitable for work. The second space R can be applied to various environments such as vacuum, depressurization, gas substitution (decompression or positive pressure), spaces having different temperatures, a clean environment, and a foreign matter environment. For example, the table device 1 is used for biotechnology applications such as collecting samples of cells and performing various tests. In this case, the second space R is a clean environment, and the second table 4 in the second space R is sterilized by high temperature steam sterilization, dry heat sterilization, or the like.

The housing 2 includes a plate-shaped member 21. The plate-shaped member 21 is a plate-shaped member extending in a direction perpendicular to the side surface of the housing 2, and is provided integrally with the housing 2. The first space P and the second space R are separated by a plate-shaped member 21. In the present embodiment, the plate-shaped member 21 is a non-magnetic material, and non-magnetic stainless steel or the like is used. Examples of non-magnetic stainless steel include alloy austenitic stainless steel (for example, SUS316).

In the present embodiment, one direction in the horizontal plane is the X direction, the direction intersecting the X direction in the horizontal plane is the Y direction, and the direction intersecting each of the X direction and the Y direction (that is, the vertical direction) is the Z direction. And. The plate-shaped member 21 is parallel to the plane formed by the X direction and the Y direction.

As shown in FIG. 2, the plate-shaped member 21 has a first surface 21a and a second surface 21b opposite to the first surface 21a. The first space P is a space on the first surface 21a side. The second space R is a space on the second surface 21b side. The first space P and the second space R are separated by the plate-shaped member 21. The plate-shaped member 21 is a continuous plate-shaped member that is not provided with a hole or the like that connects the first space P and the second space R. The plate-shaped member 21 is continuous at least in a region overlapping the movable range of the first table 3 and the second table 4, and is not provided with a hole or the like. As a result, it is possible to prevent the gas containing foreign matter generated by the operation of the first moving mechanism 6 and the second moving mechanism 7 from flowing from the first space P into the second space R. Therefore, the table device 1 can maintain the environment of the second space R.

The first table 3 includes a first substrate 31, a first attractive force generating unit 32, a first repulsive force generating unit 33, and a first rolling guide device 34. The first substrate 31 is a plate-shaped member having a first main surface 31a and a second main surface 31b opposite to the first main surface 31a. The first main surface 31a of the first substrate 31 faces the first surface 21a of the plate-shaped member 21 at a distance from each other. The second main surface 31b of the first substrate 31 is connected to the connecting portion 77 of the second moving mechanism 7. The first substrate 31 moves in a plane parallel to the first surface 21a of the plate-shaped member 21 by the operation of the first moving mechanism 6 and the second moving mechanism 7.

The first attractive force generating unit 32, the first repulsive force generating unit 33, and the first rolling guide device 34 are provided on the first main surface 31a of the first substrate 31. In the present embodiment, the first attractive force generating unit 32 and the first repulsive force generating unit 33 are magnets, and for example, a heat-resistant neodymium magnet or a cobalt magnet can be used. The heat-resistant temperature of the heat-resistant neodymium magnet is about 150 ° C. The heat resistant temperature of the cobalt magnet is about 200 ° C. The north pole of each of the first attractive force generating section 32 and the first repulsive force generating section 33 is in contact with the first main surface 31a. Further, in the first attractive force generating section 32 and the first repulsive force generating section 33, the S poles of the first attractive force generating section 32 and the first repulsive force generating section 33 face each other with the S pole separated from the plate-shaped member 21.

The first rolling guide device 34 includes a housing 341 and a ball 342. The housing 341 is fixed to the first substrate 31. The ball 342 is rotatably provided in the recess of the housing 341. The ball 342 is in contact with the first surface 21a of the plate-shaped member 21. The first rolling guide device 34 is, for example, a ball roller, and the rotation of the ball 342 allows the first substrate 31 to freely move along the first surface 21a of the plate-shaped member 21. Since the table device 1 is provided with the first rolling guide device 34, it is possible to prevent the first attractive force generating unit 32 and the first repulsive force generating unit 33 from coming into contact with the plate-shaped member 21, and the first substrate 31 is smooth. Can be moved to. The first rolling guide device 34 may have a plurality of rolling bearings as in the second rolling guide device 5.

As shown in FIG. 3, the first substrate 31 has a rectangular shape in a plan view. Note that FIG. 3 is a plan view of the first substrate 31 when viewed from the first main surface 31a side. The first substrate 31 has a first side surface 31c, a second side surface 31d, a third side surface 31e, and a fourth side surface 31f. The first side surface 31c, the second side surface 31d, the third side surface 31e, and the fourth side surface 31f are surfaces between the first main surface 31a and the second main surface 31b. The first side surface 31c faces the second side surface 31d. The third side surface 31e is a surface between the first side surface 31c and the second side surface 31d, and faces the fourth side surface 31f.

The plurality of first rolling guide devices 34 are provided at the four corners of the first main surface 31a of the first substrate 31, respectively. Four first attractive force generating portions 32-1, 32-2, 32-3, and 32-4 are provided on the first main surface 31a of the first substrate 31. Here, the virtual line connecting the midpoint of the third side surface 31e in the X direction and the midpoint of the fourth side surface 31f in the X direction is referred to as a virtual line B1. The virtual line connecting the midpoint of the first side surface 31c in the Y direction and the midpoint of the second side surface 31d in the Y direction is defined as the virtual line B2. The first attractive force generating portions 32-1 and 32-2 are located at positions overlapping the virtual line B1 and are provided on the outer edge of the first main surface 31a. Further, the first attractive force generating portions 32-3 and 32-4 are provided at positions overlapping the virtual line B2 and are provided on the outer edge of the first main surface 31a.

Four first repulsive force generating portions 33-1, 33-2, 33-3, 33-4 are provided on the first main surface 31a of the first substrate 31. The first repulsive force generating units 33-1 and 33-2 are provided at intermediate positions between the first rolling guide device 34 and the first attractive force generating unit 32-1 in the directions along the third side surface 31e, respectively. The first repulsive force generating units 33-1 and 33-2 are arranged at positions axisymmetric with the virtual line B1 as the axis of symmetry. The first repulsive force generating units 33-3 and 33-4 are provided in the vicinity of the fourth side surface 31f, similarly to the first repulsive force generating units 33-1 and 33-2. In the following description, when it is not necessary to distinguish and explain the first attractive force generating unit 32-1, 32-2, 32-3, 32-4, it is referred to as the first attractive force generating unit 32. The first repulsive force generating unit 33-1, 33-2, 33-3, 33-4 are also referred to as the first repulsive force generating unit 33.

As shown in FIG. 2, the second table 4 includes a second substrate 41, a second attractive force generating unit 42, a second repulsive force generating unit 43, and a second rolling guide device 5. The second substrate 41 is a plate-shaped member having a third main surface 41a and a fourth main surface 41b opposite to the third main surface 41a. The fourth main surface 41b of the second substrate 41 faces the second surface 21b of the plate-shaped member 21 at a distance from each other. That is, the second substrate 41 faces the first substrate 31 via the plate-shaped member 21. The third main surface 41a of the second substrate 41 is a surface on which the operation target is placed.

The second attractive force generating unit 42, the second repulsive force generating unit 43, and the second rolling guide device 5 are provided on the fourth main surface 41b of the second substrate 41. In the present embodiment, the second attractive force generating unit 42 and the second repulsive force generating unit 43 are magnets, and for example, a heat-resistant neodymium magnet or a cobalt magnet can be used. In the second attractive force generating portion 42, the S pole is in contact with the fourth main surface 41b. Further, in the second attractive force generating portion 42, the north pole faces the plate-shaped member 21 at a distance from each other. In the second repulsive force generating portion 43, the north pole is in contact with the fourth main surface 41b. Further, in the second repulsive force generating portion 43, the S pole faces the plate-shaped member 21 at a distance from each other.

The second attractive force generating unit 42 faces the first attractive force generating unit 32 via the plate-shaped member 21. That is, the second attractive force generating unit 42 is arranged at a position overlapping with the first attractive force generating unit 32 when viewed from the Z direction. The second attractive force generating unit 42 is arranged so that poles different from those of the first attractive force generating unit 32 face each other. In the example shown in FIG. 2, the north pole of the second attractive force generating unit 42 and the south pole of the first attractive force generating unit 32 face each other. As a result, an attractive force F1 is generated between the first attractive force generating unit 32 and the second attractive force generating unit 42. An attractive force F1 in the direction toward the first substrate 31 acts on the second substrate 41. As a result, the second substrate 41 can move along the second surface 21b of the plate-shaped member 21 following the movement of the first substrate 31.

The second repulsive force generating unit 43 faces the first repulsive force generating unit 33 via the plate-shaped member 21. That is, the second repulsive force generating unit 43 is arranged at a position overlapping the first repulsive force generating unit 33 when viewed from the Z direction. The second repulsive force generating unit 43 is arranged so that the same poles as the first repulsive force generating unit 33 face each other. In the example shown in FIG. 2, the S pole of the second repulsive force generating unit 43 and the S pole of the first repulsive force generating unit 33 face each other. As a result, a repulsive force F2 is generated between the first repulsive force generating unit 33 and the second repulsive force generating unit 43. A repulsive force F2 in the direction from the first substrate 31 toward the second substrate 41 acts on the second substrate 41.

In the present embodiment, the total force of the attractive force F1 is larger than the total force of the repulsive force F2. The attractive force F1 and the repulsive force F2 can adjust the force acting between the first substrate 31 and the second substrate 41. The attractive force F1 and the repulsive force F2 can be appropriately set according to the following performance (moving speed, acceleration, etc.) of the second substrate 41. The attractive force F1 and the repulsive force F2 can be set by changing the number of the first attractive force generating unit 32, the first repulsive force generating unit 33, the second attractive force generating unit 42 and the second repulsive force generating unit 43, and the magnetic force of each magnet. Alternatively, the attractive force F1 and the repulsive force F2 can be set by changing the distance between the first attractive force generating unit 32 and the second attractive force generating unit 42 and the distance between the first repulsive force generating unit 33 and the second repulsive force generating unit 43. The first attractive force generating unit 32 and the second attractive force generating unit 42 are magnets in which different electrodes are attracted to each other. The first repulsive force generating unit 33 and the second repulsive force generating unit 43 appropriately arrange magnets having a small size with respect to the magnets attracted by the different poles to generate the repulsive force. As a result, the attractive force in the Z direction and the followability in the XY direction can be finely adjusted.

The second rolling guide device 5 includes a base 51 and a first rolling bearing 52. The detailed configuration of the second rolling guide device 5 will be described later. The second rolling guide device 5 supports the second substrate 41 so as to be freely movable along the first surface 21a of the plate-shaped member 21. Further, since the second rolling guide device 5 is provided, it is possible to prevent the second attractive force generating portion 42 and the second repulsive force generating portion 43 from coming into contact with the plate-shaped member 21. Therefore, the second substrate 41 can smoothly move following the movement of the first substrate 31.

As shown in FIG. 4, the second substrate 41 has a rectangular shape in a plan view. Note that FIG. 4 is a plan view of the second substrate 41 when viewed from the fourth main surface 41b side. The second substrate 41 has a fifth side surface 41c, a sixth side surface 41d, a seventh side surface 41e, and an eighth side surface 41f. The fifth side surface 41c, the sixth side surface 41d, the seventh side surface 41e, and the eighth side surface 41f are surfaces between the third main surface 41a and the fourth main surface 41b. The fifth side surface 41c faces the sixth side surface 41d. The seventh side surface 41e is a surface between the fifth side surface 41c and the sixth side surface 41d, and faces the eighth side surface 41f.

The arrangement of the second rolling guide device 5, the second attractive force generating unit 42 and the second repulsive force generating unit 43 is the arrangement of the first rolling guiding device 34, the first attractive force generating unit 32 and the first repulsive force generating unit 33 shown in FIG. Is similar to. That is, the second rolling guide device 5 is provided at each of the four corners of the fourth main surface 41b of the second substrate 41. The four second rolling guide devices 5 are provided at positions overlapping with the first rolling guide device 34.

Four second attractive force generating portions 42-1, 42-2, 42-3, and 42-4 are provided on the fourth main surface 41b of the second substrate 41. Here, the virtual line connecting the midpoint of the seventh side surface 41e in the X direction and the midpoint of the eighth side surface 41f in the X direction is referred to as a virtual line B3. The virtual line connecting the midpoint of the fifth side surface 41c in the Y direction and the midpoint of the sixth side surface 41d in the Y direction is defined as the virtual line B4. The second attractive force generating portions 42-1 and 42-2 are located at positions overlapping the virtual line B3 and are provided on the outer edge of the fourth main surface 41b. Further, the second attractive force generating portions 42-3 and 42-4 are provided at positions overlapping the virtual line B4 and are provided on the outer edge of the fourth main surface 41b. The second gravitational force generating sections 42-1, 42-2, 42-3, and 42-4 overlap with the first gravitational force generating sections 32-1, 32-2, 32-3, and 32-4 shown in FIG. 3, respectively. It is provided at the position.

Similarly, four second repulsive force generating portions 43-1, 43-2, 43-3, and 43-4 are provided on the fourth main surface 41b of the second substrate 41. The second repulsive force generating units 43-1, 43-2, 43-3, and 43-4 overlap with the first repulsive force generating units 33-1, 33-2, 33-3, and 33-4 shown in FIG. 3, respectively. It is provided at the position.

In the present embodiment, the first attractive force generating unit 32, the second attractive force generating unit 42, the first repulsive force generating unit 33, and the second repulsive force generating unit 43 are magnets. Therefore, it is not necessary to provide a drive circuit or wiring for driving the first attractive force generating unit 32, the second attractive force generating unit 42, the first repulsive force generating unit 33, and the second repulsive force generating unit 43, and the first substrate 31 and The configuration of the second substrate 41 can be simplified. That is, it is not necessary to provide a moving mechanism, a drive circuit, wiring, or the like for moving the second substrate 41 in the second space R. Further, a material having excellent heat resistance is used for the second substrate 41, the second attractive force generating unit 42, the second repulsive force generating unit 43, and the second rolling guide device 5. Therefore, when the table device 1 is used in a clean environment such as for biotechnology, a second substrate 41, a second attractive force generating section 42, a second repulsive force generating section 43, and a second rolling guide device 5 are included. The table 4 can be easily sterilized by high temperature steam sterilization, dry heat sterilization, or the like.

Further, in the housing 2, at least the plate-shaped member 21 is made of a material having excellent heat resistance. As a result, the plate-shaped member 21 can also be easily sterilized. The second table 4 and the housing 2 can be easily removed from the table device 1. Therefore, sterilization can be performed by removing the second table 4 and the housing 2 from the table device 1 and putting them in a high-temperature steam sterilizer or a dry-heat sterilizer. In this case, a material having excellent heat resistance is used for the entire housing 2 including the plate-shaped member 21. Further, since the first space P and the second space R are separated by the housing 2, for example, gas can be injected to sterilize only the second space R.

Next, the configuration of the second rolling guide device 5 will be described. FIG. 5 is a perspective view of the rolling guide device included in the table device according to the embodiment. FIG. 6 is a perspective view showing a part of the rolling guide device in an exploded manner. FIG. 7 is a side view of the rolling guide device. FIG. 8 is a cross-sectional view taken along the line BB in FIG.

As shown in FIGS. 5 and 6, the second rolling guide device 5 includes a base 51, a first rolling bearing 52, a second rolling bearing 53, a wheel spacer 54, a shaft 55, and a fixing member 56. , A base fixing member 57, a base spacer 58, and a retaining ring 59.

The base 51 has a first member 511 and a second member 512 connected to the first member. The second rolling bearing 53 is provided inside the first member 511. The second member 512 has a pair of a first support portion 512a and a second support portion 512b. The first support portion 512a and the second support portion 512b face each other with a gap, and are plate-shaped members extending along the second axis AX2, which is the rotation axis of the second rolling bearing 53, respectively. Is. The first support portion 512a and the second support portion 512b face each other in the direction of the first axis AX1 with the first rolling bearing 52 and the wheel spacer 54 interposed therebetween. The first shaft AX1, which is the rotation shaft of the first rolling bearing 52, intersects the facing surfaces of the first support portion 512a and the second support portion 512b. Further, the wheel spacer 54 includes a first spacer 54a and a second spacer 54b. The first rolling bearing 52 is provided between the first spacer 54a and the second spacer 54b in the direction of the first axis AX1.

The first rolling bearing 52 has a first inner ring 521, a first outer ring 522, and a first rolling element 523. The first inner ring 521 is supported by the second members 512 and 513. The first outer ring 522 is provided so as to surround the outer circumference of the first inner ring 521. The plurality of first rolling elements 523 are provided between the first inner ring 521 and the first outer ring 522.

A first spacer 54a is provided between the first inner ring 521 and the first support portion 512a. A second spacer 54b is provided between the first inner ring 521 and the second support portion 512b. The first spacer 54a and the second spacer 54b are tubular members, and their respective axial ends are in contact with the first inner ring 521. The extension line of the first shaft AX1 of the first rolling bearing 52 is provided along the axial direction of the first spacer 54a and the second spacer 54b.

As shown in FIG. 6, the first support portion 512a is provided with an opening 513a penetrating in the direction of the first axis AX1. The second support portion 512b is provided with an opening 513b penetrating in the direction of the first axis AX1. The shaft portion 551 of the shaft 55 is inserted through the opening 513a, the first spacer 54a, the first inner ring 521, and the second spacer 54b. The screw shaft 561 of the fixing member 56 is inserted through the opening 513b and the second spacer 54b. By rotating the head 552 of the shaft 55 and the head 562 of the fixing member 56, the screw shaft 561 of the fixing member 56 is screwed into the screw hole 553 of the shaft portion 551.

As a result, the first inner ring 521 is sandwiched between the first spacer 54a and the second spacer 54b in the direction of the first axis AX1. As a result, the first inner ring 521 is fixed between the first support portion 512a and the second support portion 512b. On the other hand, since the first outer ring 522 is not in contact with the first spacer 54a and the second spacer 54b, the first outer ring 522 can rotate about the first axis AX1. With such a configuration, the first rolling bearing 52 is rotatably supported by the second member 512 of the base 51.

FIG. 7 is a side view of the second rolling guide device 5 when viewed from the direction of the first axis AX1. As shown in FIG. 7, in the present embodiment, the first rolling bearing 52 is attached to the base 51 so that the first shaft AX1 is parallel to the second surface 21b of the plate-shaped member 21 (see FIG. 2). Be done. The outer peripheral surface of the first outer ring 522 is in contact with the plate-shaped member 21. As a result, the second rolling guide device 5 can smoothly move on the second surface 21b of the plate-shaped member 21 by rotating the first outer ring 522. Further, the first outer ring 522 and the second surface 21b of the plate-shaped member 21 are in line contact with each other. Therefore, the wear of the second surface 21b can be suppressed as compared with the case where the ball roller is used as the rolling guide. Further, in the second rolling guide device 5, the first rolling bearing 52 has a function as a bearing for supporting the base 51 and a function of a wheel for moving the second rolling guide device 5. Therefore, the number of parts of the second rolling guide device 5 can be reduced.

As shown in FIGS. 7 and 8, the first member 511 has a side portion 511a and a lid portion 511b. The side portion 511a is provided so as to surround the circumference of the second rolling bearing 53. The lid portion 511b is provided on the upper portion of the side portion 511a in a direction intersecting the second axis AX2. The lid portion 511b is provided with an opening 511c at a position overlapping the second axis AX2.

As shown in FIG. 8, the second rolling bearing 53 has a second inner ring 531 and a second outer ring 532, and a second rolling element 533. The second inner ring 531 is provided at a position overlapping the opening 511c of the lid portion 511b when viewed from the second axis AX2. The second outer ring 532 is provided so as to face the inner peripheral surface of the side portion 511a. The plurality of second rolling elements 533 are provided between the second inner ring 531 and the second outer ring 532. The second shaft AX2 of the second rolling bearing 53 is provided in a direction intersecting the fourth main surface 41b of the second substrate 41.

The base fixing member 57 is a member for connecting the base 51 to the second substrate 41, and is, for example, a screw member. The base fixing member 57 has a screw shaft 571, an intermediate shaft 572, and a head head 573. The base fixing member 57 is inserted into the screw hole 411 of the second substrate 41 through the opening 511c. By rotating the head 573, the screw shaft 571 is screwed into the screw hole 411.

The base spacer 58 is a member for positioning the base 51 and the second rolling bearing 53. The base spacer 58 has a substantially annular shape and is provided so as to surround the outer periphery of the base fixing member 57. The base spacer 58 is provided inside the opening 511c, and is provided between the second substrate 41 and the second inner ring 531 in the direction of the second axis AX2. By screwing the base fixing member 57, the second inner ring 531 is sandwiched between the base spacer 58 and the head 573, and the position in the second axis AX2 direction is fixed.

The retaining ring 59 is a member for positioning the second outer ring 532. The retaining ring 59 has a substantially annular shape and is fitted into a groove 511d provided on the inner peripheral surface of the side portion 511a. The second outer ring 532 is sandwiched between the lid portion 511b and the retaining ring 59, and the position in the second axis AX2 direction is fixed. With such a configuration, the second outer ring 532 is fixed to the first member 511 of the base 51, and the second inner ring 531 is fixed to the second substrate 41 via the base fixing member 57. As a result, the base 51 is rotatably provided on the second substrate 41 with the second axis AX2 as the central axis. As a result, the second rolling guide device 5 can freely move on the second surface 21b of the plate-shaped member 21 by the operation of the first rolling bearing 52 and the second rolling bearing 53.

As shown in FIG. 8, a gap is formed between the first member 511 and the second substrate 41. Therefore, even when the base 51 is rotated by the operation of the second rolling bearing 53, the friction between the base 51 and the second substrate 41 can be suppressed. Therefore, the second rolling guide device 5 can move smoothly.

Further, as shown in FIG. 7, when viewed from a direction parallel to the first axis AX1, the first axis AX1 of the first rolling bearing 52 intersects with the extension line of the second axis AX2 of the second rolling bearing 53. It is installed in a position where it does not. Therefore, even when the traveling direction of the second rolling guide device 5 changes, that is, even when the base 51 rotates, the first rolling bearing 52 moves so as to follow the rotational operation of the base 51. Therefore, the second rolling guide device 5 can smoothly move on the second surface 21b of the plate-shaped member 21.

Further, in the second rolling guide device 5, a material having excellent heat resistance is used as each member of the base 51, the first rolling bearing 52, the second rolling bearing 53, and the like. The first rolling bearing 52 and the second rolling bearing 53 are made of a stainless steel material, and the surfaces thereof are subjected to a fluorine oil baking film treatment. Further, for the base 51 and the like, austenitic stainless steel (SUS304, SUS316, etc.) having high corrosion resistance is used. As a result, the second rolling guide device 5 has corrosion resistance and heat resistance. Therefore, the second rolling guide device 5 can be used in a sterilization environment by performing gas sterilization using a corrosive gas or high-temperature steam sterilization.

Here, the corrosion resistance indicates the resistance to corrosion by physiological saline and nitrogen oxide (NO _x ) gas. The strength of this resistance can be set according to the purpose, and the second rolling guide device 5 can use a resin having high corrosion resistance such as polyetheretherketone (PEEK) or fluororesin in order to impart resistance. .. That is, all the members such as the base 51, the first rolling bearing 52, and the second rolling bearing 53 constituting the second rolling guide device 5 are made of a material having heat resistance and corrosion resistance. Further, the second rolling guide device 5 may perform a fluorine oil baking film treatment on steel such as a high carbon chrome bearing steel material (SUJ2).

Further, the heat resistance indicates the resistance to heat when performing a sterilization process that can be in a high-pressure or high-temperature environment such as high-temperature steam sterilization or dry heat sterilization.

The configuration of each member of the base 51 can be changed as appropriate. The base 51 can rotatably support the first rolling bearing 52 so that the outer peripheral surface of the first outer ring 522 is in contact with the plate-shaped member 21, and the rotation of the second rolling bearing 53 causes the base 51 to be second. Any configuration may be used as long as it can rotate with respect to the substrate 41.

The first moving mechanism 6 and the second moving mechanism 7 shown in FIG. 1 are XY stages. The first moving mechanism 6 and the second moving mechanism 7 have the same configuration. For the following description, the second moving mechanism 7 will be taken as an example. The description of the second moving mechanism 7 can also be applied to the description of the first moving mechanism 6. As shown in FIG. 9, the second moving mechanism 7 is a ball screw mechanism including a motor 71, a ball screw 73, a nut 76, and a housing 74. The second moving mechanism 7 is a drive transmission unit that converts the rotational driving force transmitted from the motor 71 into a motion in the direction along the axial direction of the ball screw 73 and transmits it to the first substrate 31.

The ball screw 73 and the nut 76 are incorporated inside the housing 74. The ball screw 73 penetrates the nut 76. The ball screw 73 is rotatably supported by the housing 74, and one end side of the ball screw 73 is connected to the motor 71 via a shaft 72. As a result, the output of the motor 71 is transmitted to the ball screw 73, and the ball screw 73 can rotate.

The nut 76 is provided so as to be movable in the direction along the guide rail 75. Further, the rotation of the nut 76 is restricted by being incorporated into the guide rail 75. As a result, the nut 76 moves in the axial direction due to the rotation of the ball screw 73. The moving direction of the nut 76 is switched according to the rotation direction of the ball screw 73.

The connecting portion 77 is a member that connects the nut 76 and the first substrate 31, and is movable in the axial direction as the nut 76 moves. By appropriately changing the thickness and the planar shape of the connecting portion 77, the first substrate 31 and the nut 76 can be satisfactorily connected even when the planar shape and the height position of the first substrate 31 are changed.

With the above configuration, in the second moving mechanism 7, when the rotational drive of the motor 71 is transmitted to the ball screw 73, the first substrate 31 moves in the axial direction together with the nut 76. As shown in FIG. 1, a second moving mechanism 7 is movably fixed to the first moving mechanism 6. By the operation of the first moving mechanism 6, the second moving mechanism 7 and the first table 3 can be moved in the X direction. By the operation of the second moving mechanism 7, the first table 3 can be moved in the Y direction. In this way, the first table 3 can move in a plane parallel to the plate-shaped member 21.

The configurations of the first moving mechanism 6 and the second moving mechanism 7 are merely examples, and are not limited to the configurations shown in FIGS. 1 and 9. The first moving mechanism 6 and the second moving mechanism 7 may have a configuration capable of moving the first table 3 including the first substrate 31. As the first moving mechanism 6 and the second moving mechanism 7, various moving mechanisms can be used in addition to the above, and for example, a moving mechanism using a linear motor or the like can also be used.

As described above, the rolling guide device (second rolling guide device 5) includes a plate-shaped member 21 that separates the first space P and the second space R, and a substrate that faces one surface of the plate-shaped member 21. A second rolling guide device 5 provided between the second substrate 41 and movably supporting the second substrate 41 along one surface (second surface 21b) of the plate-shaped member 21. It has a base 51 and a first rolling bearing 52. The base 51 is connected to the second substrate 41. The first rolling bearing 52 is rotatably supported by the base 51, and the first shaft AX1 which is a rotation shaft is provided along the second surface 21b. The first rolling bearing 52 is provided between the first inner ring 521 fixed to the base 51, the first outer ring 522 in contact with the second surface 21b of the plate-shaped member 21, and the first inner ring 521 and the first outer ring 522. It has a first rolling element 523 and the like.

With such a configuration, the second rolling guide device 5 can move the second substrate 41 along the second surface 21b of the plate-shaped member 21 by rotating the first outer ring 522 in contact with the plate-shaped member 21. Support. That is, the first rolling bearing 52 itself can be used as a wheel. Therefore, the number of parts of the second rolling guide device 5 can be reduced. Further, the first outer ring 522 is in direct contact with the plate-shaped member 21 without any other component intervening between the first outer ring 522 and the plate-shaped member 21. Therefore, the second rolling guide device 5 can smoothly move on the surface of the plate-shaped member 21.

Further, the second rolling guide device 5 has a second rolling bearing 53. The second rolling bearing 53 is rotatably supported by the second substrate 41 and is provided in a direction in which the second shaft AX2, which is a rotation shaft, intersects the second surface 21b. The second rolling bearing 53 is provided between the second inner ring 531 fixed to the second substrate 41, the second outer ring 532 fixed to the base 51, and the second inner ring 531 and the second outer ring 532. It has two rolling elements 533 and. As a result, the second outer ring 532 and the base 51 can rotate about the second axis AX2 as the central axis. Therefore, the second rolling guide device 5 can freely move on the surface of the plate-shaped member 21.

Further, in the second rolling guide device 5, when viewed from a direction parallel to the first axis AX1, the first axis AX1 of the first rolling bearing 52 is an extension of the second axis AX2 of the second rolling bearing 53. It is installed at a position that does not intersect. According to this, even if the moving direction of the second rolling guide device 5 changes, the base can smoothly rotate about the second axis.

Further, in the second rolling guide device 5, the base 51 and the first rolling bearing 52 are heat-resistant materials. According to this, the base and the first rolling bearing 52 are easily sterilized by high-temperature steam sterilization, dry heat sterilization, or the like. Processing can be applied. Further, when the table device 1 having the second rolling guide device 5 is used in a clean environment such as for biotechnology, the second substrate 41, the second attractive force generating unit 42, the second repulsive force generating unit 43, and the second rolling The second table 4 including the guide device 5 can be easily sterilized by high temperature steam sterilization, dry heat sterilization, or the like.

Further, in the second rolling guide device 5, the base 51 is arranged with a gap between the base 51 and the second substrate 41, and is connected to the second substrate 41 via a fixing member (base fixing member 57). Will be done. According to this, since a gap is provided between the base 51 and the second substrate 41, the second rolling guide device 5 suppresses the occurrence of friction between the base 51 and the second substrate 41. , Can move smoothly.

Further, in the second rolling guide device 5, the base 51 is connected to the first member 511 in which the second rolling bearing 53 is provided inside and the first member 511, and the first axis AX1 sandwiches the first rolling bearing 52. The first inner ring 521 is fixed to a shaft 55 provided on the second member 512, which has a second member 512 facing in the direction along the second member 512.

Further, the table device 1 includes the above-mentioned second rolling guide device 5, a plate-shaped member 21, a first substrate 31, a first attractive force generating unit 32, and a moving mechanism (first moving mechanism 6 and second moving mechanism). 7), a second substrate 41, and a second attractive force generating unit 42. The plate-shaped member 21 has a first surface 21a and a second surface 21b on the opposite side of the first surface 21a, a first space P on the first surface 21a side, and a second space on the second surface 21b side. Separate from R. The first substrate 31 faces the first surface 21a of the plate-shaped member 21. The first attractive force generating portion 32 is provided on the surface (first main surface 31a) of the first substrate 31 facing the first surface 21a. The moving mechanism is provided in the first space P and moves the first substrate 31. The second substrate 41 faces the first substrate 31 via the plate-shaped member 21. The second attractive force generating unit 42 is provided on the surface of the second substrate 41 facing the second surface 21b (fourth main surface 41b), and faces the first attractive force generating unit 32 via the plate-shaped member 21. An gravitational force is generated between the gravitational force and the first gravitational force generating unit 32. The second rolling guide device 5 is provided between the second substrate 41 and the second surface 21b, and movably supports the second substrate 41.

With such a configuration, the second rolling guide device 5 can smoothly move on the surface of the plate-shaped member 21. Therefore, the table device 1 can suppress the occurrence of friction between the second rolling guide device 5 and the plate-shaped member 21, and can smoothly move the second substrate 41. Further, due to the attractive force between the first attractive force generating unit 32 and the second attractive force generating unit 42, the attractive force acts on the second substrate 41 in the direction toward the first substrate 31. As a result, when the first substrate 31 moves due to the operation of the moving mechanism, the second substrate 41 provided in the second space R moves following the first substrate 31. As a result, the table device 1 suppresses the inflow of gas from the first space P in which the moving mechanism or the like is provided into the second space R for positioning and inspecting the operation target object, and at the same time, the second space R is the second space R. The substrate 41 can be moved. That is, it is possible to prevent foreign matter generated by the operation of the first moving mechanism 6 and the second moving mechanism 7 of the first space P from flowing into the second space R. Therefore, the environment of the second space R can be maintained.

(Modification example)
FIG. 10 is a cross-sectional view of the table device according to the modified example. As shown in FIG. 10, the table device 1A of this modified example includes a housing 2A, a first table 3, a second table 4, and a moving mechanism (first moving mechanism 6 and second moving mechanism 7 (FIG. 1). See)) and. The space outside the housing 2A is the first space P, and the space inside the housing 2A is the second space R. The second space R can be used in various environments such as a vacuum, a reduced pressure, and a clean environment. The bottom plate of the housing 2A is a plate-shaped member 21A.

The first table 3 is arranged on the first surface 21Aa side of the plate-shaped member 21A, that is, on the first space P. Further, the second table 4 is arranged on the second surface 21Ab side of the plate-shaped member 21A, that is, on the second space R. That is, on the outside of the housing 2A, the first table 3 including the first substrate 31 and the first attractive force generating unit 32 and the moving mechanism (first moving mechanism 6 and second moving mechanism 7 (not shown in FIG. 6)). )) And are provided. Further, a second table 4 including a second substrate 41, a second attractive force generating portion 42, and a second rolling guide device 5 is provided inside the housing 2A. The configurations of the first table 3 and the second table 4 are the same as those shown in FIGS. 2 to 4, and detailed description thereof will be omitted.

Also in this modification, the second rolling guide device 5 can smoothly move on the surface of the plate-shaped member 21. Therefore, the table device 1A can smoothly move the second substrate 41 by suppressing the occurrence of friction between the second rolling guide device 5 and the plate-shaped member 21 in the second space R. Further, due to the attractive force between the first attractive force generating unit 32 and the second attractive force generating unit 42, the attractive force F1 acts on the second substrate 41 in the direction toward the first substrate 31. As a result, when the first substrate 31 moves due to the operation of the moving mechanism, the second substrate 41 provided in the second space R moves following the first substrate 31. As a result, the table device 1A suppresses the inflow of gas from the first space P in which the moving mechanism or the like is provided into the second space R for positioning and inspecting the operation target object, and at the same time, the second space R is the second space R. The substrate 41 can be moved.

1, 1A table device 2, 2A housing 21, 21A Plate-shaped member 21a, 21Aa 1st surface 21b, 21Ab 2nd surface 3 1st table 31 1st substrate 32 1st attractive force generating part 33 1st repulsive force generating part 34th 1 Rolling guide device 4 2nd table 41 2nd substrate 42 2nd attractive force generating part 43 2nd repulsive force generating part 5 2nd rolling guiding device 51 Base 511 1st member 512 2nd member 512a 1st support part 512b 2nd support part 52 1st rolling bearing 521 1st inner ring 522 1st outer ring 523 1st rolling element 53 2nd rolling bearing 531 2nd inner ring 532 2nd outer ring 533 2nd rolling element 54 Wheel spacer 54a 1st spacer 54b 2nd spacer 55 Shaft 56 Fixing member 57 Base fixing member 58 Base spacer 59 Retaining ring 6 1st moving mechanism 7 2nd moving mechanism P 1st space R 2nd space

Claims (7)

A plate-shaped member having a first surface and a second surface opposite to the first surface and separating the first space on the first surface side and the second space on the second surface side.
A first substrate facing the first surface of the plate-shaped member,
A first attractive force generating portion provided on a surface of the first substrate facing the first surface, and
A moving mechanism provided in the first space to move the first substrate, and
A second substrate facing the first substrate via the plate-shaped member,
A second substrate provided on a surface of the second substrate facing the second surface, facing the first attractive force generating portion via the plate-shaped member, and generating an attractive force with the first attractive force generating portion. 2 Gravity generator and
A first repulsive force generating portion provided on a surface of the first substrate facing the first surface, and
A second substrate provided on a surface of the second substrate facing the second surface, facing the first repulsive force generating portion via the plate-shaped member, and generating a repulsive force between the second substrate and the first repulsive force generating portion. 2 Repulsive force generator and
It has a rolling guide device provided between the plate-shaped member and the second substrate and movably supporting the second substrate along the second surface of the plate-shaped member .
The rolling guidance device is
The base connected to the second substrate and
It has a first rolling bearing that is rotatably supported by the base and has a first shaft that is a rotation shaft provided along the second surface .
The first rolling bearing is provided between the first inner ring fixed to the base, the first outer ring in contact with the second surface of the plate-shaped member, and the first inner ring and the first outer ring. Has a first rolling element,
Table device . It has a second rolling bearing that is rotatably supported by the second substrate and is provided in a direction in which a second shaft, which is a rotation shaft, intersects the second surface .
The second rolling bearing is a second rolling bearing provided between a second inner ring fixed to the second substrate, a second outer ring fixed to the base, and the second inner ring and the second outer ring. With a moving body,
The table device according to claim 1. When viewed from a direction parallel to the first axis, the first axis of the first rolling bearing is provided at a position not intersecting the extension line of the second axis of the second rolling bearing.
The table device according to claim 2. The base, the first rolling bearing, and the second rolling bearing are materials having heat resistance and corrosion resistance.
The table device according to claim 2 or 3. The base is arranged with a gap between the base and the second substrate, and is connected to the second substrate via a fixing member.
The table device according to any one of claims 1 to 4. The base includes a first member in which the second rolling bearing is provided inside, and a second member that is connected to the first member and faces the direction along the first axis with the first rolling bearing interposed therebetween. Have,
The first inner ring is fixed to a shaft provided on the second member.
The table device according to claim 2. The first attractive force generating unit, the second attractive force generating unit, the first repulsive force generating unit, and the second repulsive force generating unit are heat-resistant neodymium magnets or cobalt magnets.
The table device according to any one of claims 1 to 6 .

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