JPS5843854B2 - Fluorescent surface exposure equipment - Google Patents
Fluorescent surface exposure equipmentInfo
- Publication number
- JPS5843854B2 JPS5843854B2 JP13881876A JP13881876A JPS5843854B2 JP S5843854 B2 JPS5843854 B2 JP S5843854B2 JP 13881876 A JP13881876 A JP 13881876A JP 13881876 A JP13881876 A JP 13881876A JP S5843854 B2 JPS5843854 B2 JP S5843854B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- light source
- filter
- striped
- light shielding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Description
【発明の詳細な説明】
本発明は、カラー陰極線管のカラー蛍光面、とくに多数
の蛍光体ストライプよりなるカラー蛍光面を光学プリン
トにて形成する際の蛍光面の露光装置に係わる。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a color phosphor screen of a color cathode ray tube, and particularly to a phosphor screen exposure apparatus for forming a color phosphor screen consisting of a large number of phosphor stripes by optical printing.
カラー陰極線管のストライプ状カラー蛍光面は、ブラウ
ン管のフェースプレート内に例えば多数のスリットを有
して成る色選択用電極を装着し、之を光学マスクとして
フェースプレート内面に塗布した感光性蛍光膜即ち感光
性結合剤を混入した蛍光体スラリーを各色の電子ビーム
と置換した光によって露光焼付して作成される。The striped color phosphor screen of a color cathode ray tube is a photosensitive phosphor film coated on the inner surface of the face plate by attaching a color selection electrode having a large number of slits to the face plate of the cathode ray tube, and using this as an optical mask. They are created by exposing and baking a phosphor slurry mixed with a photosensitive binder using light replaced by electron beams of each color.
この場合、色選択用電極は周辺でのビームのミスランデ
ィングを回避するために周辺に行くに従ってスリット巾
が小となるように形成されているために、この色選択用
電極を光学マスクとして用いた場合、周辺での露光量が
不足する。In this case, the color selection electrode is formed so that the slit width becomes smaller toward the periphery in order to avoid mislanding of the beam at the periphery, so this color selection electrode was used as an optical mask. In this case, the amount of exposure at the periphery is insufficient.
従って通常は中央部での光透過率を抑え周辺での光透過
率を増すようにした光量補正用フィルタを用いて露光の
際に蛍光面の各部で一様のストライプ巾となるようにし
ている。Therefore, a light intensity correction filter is usually used that suppresses the light transmittance in the center and increases the light transmittance in the periphery, so that the stripe width is uniform in each part of the phosphor screen during exposure. .
しかし従来光量補正用フィルタとしてはクロムCrを一
定の濃度分布をもたせてガラス板上に蒸着したものを用
いているが、成作が難かしく且つ再現性が悪いために、
蛍光面の露光焼付が精度よく行えない。However, conventional light intensity correction filters use chromium Cr deposited on a glass plate with a constant concentration distribution, but this is difficult to fabricate and has poor reproducibility.
Exposure printing on the phosphor screen cannot be performed accurately.
本発明は、上述の点に鑑み或作容易で再現性のよい光量
補正フィルタを用い、之と線状光源との組合せによって
ストライプ状蛍光面の露光焼付けを精度よく行えるよう
にした蛍光面の露光装置を提供するものである。In view of the above points, the present invention uses a light intensity correction filter that is easy to manufacture and has good reproducibility, and combines this with a linear light source to expose and print a striped phosphor screen with high precision. It provides equipment.
以下、本発明を詳細説明する。The present invention will be explained in detail below.
先づ第3図乃至第6図を用いて本発明に用いる光量補正
フィルタにつき述べる。First, the light amount correction filter used in the present invention will be described using FIGS. 3 to 6.
この光量補正用フィルタ1は第3図に示すように透明基
板例えばガラス基板2上に一方向に延びる多数のストラ
イプ状の遮光部3を配置(ルて遮光部3と光透過部4か
らなるパターンを形成し、補正せんとする光量に応じて
その遮光部3と光透過部4の面積比を変更して所望の光
透逼塞分布を得るように形成する。As shown in FIG. 3, this light amount correction filter 1 has a large number of striped light shielding parts 3 extending in one direction on a transparent substrate, for example, a glass substrate 2 (a pattern consisting of light shielding parts 3 and light transmitting parts 4). is formed, and the area ratio of the light shielding part 3 and the light transmitting part 4 is changed according to the amount of light to be corrected to obtain a desired light transmission blockage distribution.
遮光部3としては、例えば第3図のようにストライプの
延長方向に関して中心より端部に行くに従って階段的に
漸次ストライプ巾dが異なるようなパターンに形成し得
る。The light shielding portion 3 may be formed in a pattern such that the stripe width d gradually changes stepwise from the center to the end in the extending direction of the stripe, as shown in FIG. 3, for example.
このパターンによれば、遮光部3間のピンチをp、遮光
部3に挟まれた光透過部4の各部(遮光部3のストライ
プ巾が異なる各階段部に対応する部分)a、b、cの巾
を夫々X + ’l + Zまた各部a p b y
cの夫々の長さを11+ 12+ 13とするとき各部
a r b + cでの光透過率Tは光透過部4と遮光
部3の面積比となり
で表わされる。According to this pattern, the pinch between the light shielding parts 3 is p, and each part of the light transmitting part 4 sandwiched between the light shielding parts 3 (the part corresponding to each step part where the stripe width of the light shielding part 3 is different) is a, b, c. The width of each part is X + 'l + Z and each part a p b y
When the lengths of c are 11+12+13, the light transmittance T at each part a r b + c is expressed as the area ratio of the light transmitting part 4 and the light shielding part 3.
従って、中央部のストライブ巾dを犬となし、之より端
部に向って階段的に漸次ストライプ巾dを小となるよう
にしてX方向に延長して形成したストライプ状の遮光部
3をY方向に所定ピンチをもって多数配列せしめれば、
中央の光透過率を小にし之より周辺に向って光透過率が
犬となる光学フィルタが得られる。Therefore, the striped light shielding part 3 is formed by extending the stripe width d in the X direction so that the stripe width d at the center is set as a dog, and the stripe width d gradually decreases in steps toward the ends. If a large number of them are arranged with a predetermined pinch in the Y direction,
An optical filter can be obtained in which the light transmittance at the center is small and the light transmittance increases toward the periphery.
なお、Y方向に関する光透過率の変化は同一形成の遮光
部3を用いるときにはピッチPは周辺に向って漸次犬と
するか、或いは ソチPを一定としたときには遮光部3
の各部の巾dK周辺に向って小となすことにより得られ
る。Note that the change in light transmittance in the Y direction can be determined by changing the pitch P gradually toward the periphery when using light shielding parts 3 of the same shape, or by changing the light shielding parts 3 when the pitch P is constant.
This can be obtained by making the width dK of each part smaller toward the periphery.
フィルタの各点での透過率は露光・現象後の蛍光体スト
ライプの巾から近似的に計算で求められる。The transmittance at each point of the filter can be approximately calculated from the width of the phosphor stripe after exposure and phenomenon.
第4図はフィルタ1の光透過重分布の一例を示すもので
、透過率を10%間隔で、表わした場合である。FIG. 4 shows an example of the light transmission weight distribution of the filter 1, where the transmittance is expressed in 10% intervals.
数値は透過率を示す。尚この透過率を表わす等高線間隔
は更に小さくすることができる。The numerical value indicates the transmittance. Note that the contour interval representing the transmittance can be made even smaller.
即ち例えば第5図に示すように階段状をなす遮光部3に
おいてその上縁の階段と下縁の階段を略%だけずらした
ような形状となせば、透過率の等高線間隔は第4図の場
合の%になり、より精度の高いフィルタが得られる。That is, for example, if the step-shaped light shielding part 3 is shaped so that the steps at the upper edge and the steps at the lower edge are shifted by approximately % as shown in FIG. 5, the transmittance contour line spacing will be as shown in FIG. % of the case, and a more accurate filter can be obtained.
また、遮光部3としては第6図に示すような中央部より
端部に向ってストライプ巾dが連結して漸次小となるよ
うなパターンも可能であり、この場合にはさらに高精度
のフィルタが得られる。Furthermore, the light shielding part 3 can also have a pattern in which the stripe width d connects and gradually becomes smaller from the center toward the ends, as shown in FIG. is obtained.
この場合、遮光部の一側辺は直線状であるので製作も容
易である。In this case, since one side of the light shielding part is linear, manufacturing is easy.
又、フィルタの斯る遮光部のピッチPは露光装置のフィ
ルタの置かれる位置により若干相違があるが、最大3m
m程度で、出来るだけ狭い方が好ましい。Also, the pitch P of the light shielding part of the filter varies slightly depending on the position where the filter is placed in the exposure device, but it is up to 3 m.
It is preferable that the width be as narrow as possible.
遮光部のピッチPが粗くなり過ぎると蛍光面に投映され
た光源よりの光が輝線となり露光焼付けされた蛍光体ス
トライプのエツジ(縁部)を悪化させる′曜れがある。If the pitch P of the light-shielding portions becomes too coarse, the light from the light source projected onto the phosphor screen becomes a bright line, causing slanting that deteriorates the edges of the exposed and printed phosphor stripes.
そして、このフィルタは、蒸着法、印刷法等で容易に作
製できる。This filter can be easily produced by a vapor deposition method, a printing method, or the like.
例えば蒸着法の場合には、先づ遮光部3と光透過部4か
らなるパターンの原図を自動製図器を用いて拡大作図し
、之をカメラによって所望寸法に縮少撮影してマスター
パターン(写真乾板)を得る。For example, in the case of the vapor deposition method, first, an original drawing of a pattern consisting of a light-shielding part 3 and a light-transmitting part 4 is enlarged using an automatic drafting device, and then reduced to the desired size with a camera and photographed to create a master pattern (photograph). Obtain a dry plate).
次に透明ガラス基板上にクローム、アルミニウム等の金
属蒸着を施して後、マスターパターンを利用してフォト
エツチング技術にて金属蒸着層をエツチング除去すれば
目的のフィルタが得られる。Next, a metal such as chrome or aluminum is vapor-deposited on a transparent glass substrate, and then the metal vapor-deposited layer is etched away using a photo-etching technique using a master pattern to obtain the desired filter.
勿論マスターパターン自体を目的のフィルタとして利用
出来る。Of course, the master pattern itself can be used as a desired filter.
又遮光部3の形成にはカーボン粉をバインダーに分散せ
しめたインキを用いる事ができる。Further, to form the light shielding portion 3, an ink in which carbon powder is dispersed in a binder can be used.
或は蛍光体スラリーの感光波長域(450μm以下)を
遮断しそれ以上の長波長光を通すような染料又は顔料バ
インダーに混ぜたものを使用することができる。Alternatively, it is possible to use a phosphor slurry mixed with a dye or pigment binder that blocks the sensitive wavelength range (450 μm or less) and allows longer wavelength light to pass therethrough.
之等は印刷法等に利用できる。These can be used for printing methods, etc.
本発明による蛍光面の露光装置は上述した構成の光量補
正用フィルタ1を用いるもので、次に第1図及び第2図
を参照して述べる。The phosphor screen exposure apparatus according to the present invention uses the light amount correction filter 1 having the above-described configuration, and will be described next with reference to FIGS. 1 and 2.
第1図は本発明の露光装置の概略を示すもので、図中5
は内面に感光性蛍光膜9を塗布してなる陰極線管のフェ
ースプレートを示し、之は装置の支持台6上に載置固定
される。FIG. 1 schematically shows the exposure apparatus of the present invention.
1 shows a face plate of a cathode ray tube whose inner surface is coated with a photosensitive fluorescent film 9, which is placed and fixed on a support base 6 of the apparatus.
7はフェースプレート5の内面に対向配置した光学マス
クすなわち感光性蛍光膜9をストライプ状に露光し得る
光学マスク、8は露光用の線状光源である。Reference numeral 7 designates an optical mask disposed opposite to the inner surface of the face plate 5, that is, an optical mask capable of exposing the photosensitive fluorescent film 9 to light in a stripe pattern, and 8 represents a linear light source for exposure.
光量補正用フィルタ1は線状光源8と光学マスク7の間
に介挿される。The light amount correction filter 1 is inserted between the linear light source 8 and the optical mask 7.
なお図示せざるも線状光源8と光学マスク7の間にはさ
らに光路補正用のレンズが配される。Although not shown, a lens for optical path correction is further arranged between the linear light source 8 and the optical mask 7.
光学マスク7としては例えば第2図及び第7図に示すよ
うに所要の枠体に多数の帯状金属体7aを所定ピッチを
もって支持し多数の平行するスリット7bを形成して成
るマスクを用いることができる。As the optical mask 7, for example, as shown in FIGS. 2 and 7, a mask formed by supporting a large number of band-shaped metal bodies 7a at a predetermined pitch on a required frame and forming a large number of parallel slits 7b can be used. can.
本発明においては、線状光源8を第2図に示す如くその
長手方向が光学マスク7のスリ゛ノ1−7bの延長方向
に平行するように、或はそれに近い状態に配置すると共
に、光量補正用フィルタ1をそのストライプ状遮光部3
が線状光源8と交叉するように配置する。In the present invention, as shown in FIG. 2, the linear light source 8 is arranged so that its longitudinal direction is parallel to the extending direction of the grooves 1-7b of the optical mask 7, or in a state close to that, and the amount of light is controlled. The correction filter 1 is connected to its striped light shielding portion 3.
are arranged so that they intersect with the linear light source 8.
この場合、ストライプ状遮光部3と線状光源8は直交配
置が望ましいが、直交よりずれた角度で交叉してもよい
。In this case, it is desirable that the striped light shielding portion 3 and the linear light source 8 be arranged orthogonally, but they may intersect at an angle that is deviated from orthogonal.
ここで、線状光源8とストライプ状遮光部3が交叉して
いる場合、′ストライプ状遮光部3によって光源8から
の光が遮断され、即ちフィルタ1のストライプ状遮光部
3の影が感光性蛍光膜9上に投影されんとするも、この
投影されたフィルタの影が光学マスク7面上で打消され
る条件、即ち線状光源8の長さをある条件に選ぶことに
よって、蛍光面の露光時にフィルタ1のストライプ状遮
光部の投影の影響が無くなる。Here, when the linear light source 8 and the striped light shielding part 3 intersect, the light from the light source 8 is blocked by the striped light shielding part 3, that is, the shadow of the striped light shielding part 3 of the filter 1 becomes photosensitive. Although the projected filter shadow is projected onto the phosphor screen 9, by setting the length of the linear light source 8 to a certain condition, the shadow of the projected filter is canceled out on the surface of the optical mask 7. The influence of the projection of the striped light-shielding portion of the filter 1 during exposure is eliminated.
この場合の線状光源8の条件は、例えば線状光源8とス
トライプ状遮光部3が直交配置の場合、次のように選ぶ
。The conditions for the linear light source 8 in this case are selected as follows, for example, when the linear light source 8 and the striped light shielding part 3 are arranged orthogonally.
すなわら、第11図に示す如く線状光源8の長さをS、
線状光源8からフィルタ1までの距離fm、フィルタ1
のストライプ状遮光部3のピッチをPl フィルタ1か
ら光学マスク7までの距離をeとすると、線状光源8の
長さSは
となる。That is, as shown in FIG. 11, the length of the linear light source 8 is S,
Distance fm from linear light source 8 to filter 1, filter 1
If the pitch of the striped light shielding parts 3 is Pl, and the distance from the filter 1 to the optical mask 7 is e, then the length S of the linear light source 8 is as follows.
又、第12図に示すように線状光源8とフィルタ1のス
トライプ状遮光部3がある角度θをもって配置される場
合の線状光源8の条件は次のように選ぶ。Further, as shown in FIG. 12, when the linear light source 8 and the striped light blocking portion 3 of the filter 1 are arranged at a certain angle θ, the conditions for the linear light source 8 are selected as follows.
即ちストライプ状遮光部3の光源8に対するピンチをP
′とすると、
(但し、Oくθ<90°又は0〉θ>−90’)なお、
フィルタ1を線状光源8の長手方向に沿って揺動するよ
うにしても、フィルタ1の影の影響を無すことができる
。That is, the pinch of the striped light shielding part 3 with respect to the light source 8 is P.
′, (however, θ<90° or 0>θ>−90'),
Even if the filter 1 is oscillated along the longitudinal direction of the linear light source 8, the influence of the shadow of the filter 1 can be eliminated.
又、光学マスク7としては第7図の帯状金属体を支持し
て一方向に連続したスリットを多数設けるようにしたマ
スクの他、例えば第8図に示すように丁度第1図の帯状
金属体の隣同志を一部において連結した構造となる如く
薄い金属板10にスリント状の透孔11を多数列多数段
に穿設して成るマスク12、或は第9図及び第10図に
示すように円形式は方形あるいはこれらに準する形状の
透孔13を有しそれらが近接し、且つ一方向において直
線状に配列されて成るマスク14或は15等を用いるこ
とができる。In addition to the optical mask 7, which supports the strip-shaped metal body shown in FIG. 7 and has a large number of continuous slits in one direction, the optical mask 7 may also include, for example, the strip-shaped metal body shown in FIG. 1 as shown in FIG. A mask 12 is made of a thin metal plate 10 with a plurality of rows and stages of slint-like through holes 11 so as to have a structure in which adjacent parts of the mask 12 are partially connected, or as shown in FIGS. 9 and 10. For the circular type, a mask 14 or 15 having through holes 13 of a rectangular or similar shape, which are adjacent to each other and arranged linearly in one direction, can be used.
第7図及び第8図の光学マスクは実際の色選択用電極を
用いることができる。The optical masks of FIGS. 7 and 8 can use actual color selection electrodes.
上述せる構成によれば、多数のストライプ状遮光部3を
有してその遮光部3と光透過部4の面積比によって所望
の透過率分布を得るようにした光量補正フィルタ1を用
いるので正確にして再現性のよい光量補正ができ、且つ
露光用光源として線状光源8を用い之を光学マスク7の
スリン1−7bと平行となるように配し、またフィルタ
1をそのストライプ状遮光部3が線状光源8と交叉して
配するので感光性蛍光膜9上での露光分布が均一になり
、ストライプ露光が精度よく行える。According to the above-mentioned configuration, since the light quantity correction filter 1 having a large number of striped light shielding parts 3 and configured to obtain a desired transmittance distribution by the area ratio of the light shielding parts 3 and the light transmitting parts 4 is used, it is possible to accurately adjust the light quantity. In addition, a linear light source 8 is used as the exposure light source, and the linear light source 8 is arranged parallel to the liner 1-7b of the optical mask 7, and the filter 1 is connected to the striped light-shielding portion 3. Since the light source 8 is arranged to intersect with the linear light source 8, the exposure distribution on the photosensitive fluorescent film 9 becomes uniform, and stripe exposure can be performed with high precision.
又、線状光源8を用い所謂直接光源で露光が行えるので
露光光量が増加し、露光効率の向上も期待できる。Furthermore, since exposure can be performed using the linear light source 8 as a so-called direct light source, the amount of exposure light increases, and an improvement in exposure efficiency can also be expected.
さらtこ、線状光源8の長さを上述した条件に選ぶとき
はフィルタ1を揺動させずにフィルタ1の影を打消し、
良好なストライプ露光ができる。Additionally, when choosing the length of the linear light source 8 to meet the above conditions, cancel the shadow of the filter 1 without shaking the filter 1,
Good stripe exposure is possible.
第1図は本発明の露光装置の概略図、第2図はその要部
の斜視図、第3図は本発明で用いる光量補正用フィルタ
の一例を示す平面図、第4図はその光透逼塞分布図、第
5図及び第6図は光量補正フィルタの他の例を示す平面
図、第7図乃至第10図は本発明で用い得る光学マスク
の例を示す要部の平面図、第11図及び第12図は夫々
線状光源の条件の説明に供する線図である。
1は光量補正用フィルタ、3はストライプ状遮光部、5
はフェースプレート、7は光学マスク、8は線状光源、
9は感光性蛍光膜である。FIG. 1 is a schematic diagram of the exposure apparatus of the present invention, FIG. 2 is a perspective view of the main parts thereof, FIG. 3 is a plan view showing an example of a light amount correction filter used in the present invention, and FIG. 5 and 6 are plan views showing other examples of the light amount correction filter, and FIGS. 7 to 10 are plan views of main parts showing examples of optical masks that can be used in the present invention. 11 and 12 are diagrams for explaining the conditions of the linear light source, respectively. 1 is a light amount correction filter, 3 is a striped light shielding part, 5 is
is a face plate, 7 is an optical mask, 8 is a linear light source,
9 is a photosensitive fluorescent film.
Claims (1)
用の光学マスクと線状光源を配置し、該線状光源と上記
光学マスクの間に、多数のストライプ状遮光部を有して
該遮光部と光透過部の面積比による光量補正用フィルタ
を介挿し、該光量補正用フィルタをそのストライプ状遮
光部が上記線状光源と交叉するように配置し、上記フェ
ースプレート内面の感光性蛍光膜をストライプ状に露光
焼付けするようにして成る蛍光面の露光装置。1. An optical mask for stripe exposure and a linear light source are arranged opposite to the inner surface of the face plate, and between the linear light source and the optical mask, a large number of striped light shielding parts are provided so that the light shielding parts and the light A light amount correction filter is inserted based on the area ratio of the transmitting portion, and the light amount correction filter is arranged so that its striped light shielding portion intersects with the linear light source, and the photosensitive fluorescent film on the inner surface of the face plate is formed into a striped shape. A phosphor screen exposure device that exposes and prints a phosphor screen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13881876A JPS5843854B2 (en) | 1976-11-18 | 1976-11-18 | Fluorescent surface exposure equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13881876A JPS5843854B2 (en) | 1976-11-18 | 1976-11-18 | Fluorescent surface exposure equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5363865A JPS5363865A (en) | 1978-06-07 |
| JPS5843854B2 true JPS5843854B2 (en) | 1983-09-29 |
Family
ID=15230940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13881876A Expired JPS5843854B2 (en) | 1976-11-18 | 1976-11-18 | Fluorescent surface exposure equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5843854B2 (en) |
-
1976
- 1976-11-18 JP JP13881876A patent/JPS5843854B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5363865A (en) | 1978-06-07 |
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