JPS5850322B2 - Optical filter manufacturing equipment - Google Patents
Optical filter manufacturing equipmentInfo
- Publication number
- JPS5850322B2 JPS5850322B2 JP14675477A JP14675477A JPS5850322B2 JP S5850322 B2 JPS5850322 B2 JP S5850322B2 JP 14675477 A JP14675477 A JP 14675477A JP 14675477 A JP14675477 A JP 14675477A JP S5850322 B2 JPS5850322 B2 JP S5850322B2
- Authority
- JP
- Japan
- Prior art keywords
- optical filter
- heating wire
- vapor deposition
- evaporation
- light transmittance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 title claims description 23
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 18
- 238000007740 vapor deposition Methods 0.000 claims description 14
- 230000008020 evaporation Effects 0.000 claims description 12
- 238000001704 evaporation Methods 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 11
- 238000002834 transmittance Methods 0.000 description 22
- 238000009826 distribution Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910001026 inconel Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Optical Elements Other Than Lenses (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Description
【発明の詳細な説明】
本発明は光学フィルタの製造装置に関し、特にカラー受
像管の発光スクリーンの形成時に用いられる露光量補正
用の光学フィルタの製造装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an apparatus for manufacturing an optical filter, and more particularly to an apparatus for manufacturing an optical filter for exposure correction used when forming a luminescent screen for a color picture tube.
3つの偏向中心を管軸と直角な一直線上にもつインライ
ン形カラー受像管の発光スクリーンの形成においては、
露光用光源は上記−直線上の3点に順次に配設される。In forming the luminescent screen of an in-line color picture tube with three deflection centers on a straight line perpendicular to the tube axis,
The exposure light sources are sequentially arranged at three points on the above-mentioned straight line.
このため、フェースパネルの内面に付設された感光性膜
上の任意の一生領域に与えられる露光量は3光源のそれ
ぞれにより異なり、この不均一性は、結果的に上記小領
域に形成される3色蛍光体の占有面積比を異ならしめ、
スクリーン上に再生される画像に色むらを生じさせる。Therefore, the amount of exposure given to any given area on the photosensitive film attached to the inner surface of the face panel differs depending on each of the three light sources, and this non-uniformity results in the By varying the occupied area ratio of the color phosphors,
This causes uneven coloring in the image played on the screen.
このような欠点を除くために本出願人は、露光処理時に
おける光源とシャドウマスクとの間に、露光量の配分を
適切ならしめるための2種の光学フィルタを二者択一的
に、従来の光学フィルタに併せて配設することを既に提
案した。In order to eliminate such drawbacks, the present applicant has proposed to install two types of optical filters between the light source and the shadow mask during exposure processing, in order to properly distribute the exposure amount. We have already proposed that it be installed in conjunction with the optical filter.
本出願人が提案した光学フィルタはその等透過率分布が
第1図または第2図のようになっている。The optical filter proposed by the present applicant has an equal transmittance distribution as shown in FIG. 1 or 2.
第1図に示す等透過率分布を有する光学フィルタは、フ
ェースパネルを、その中心を中心OとするX軸およびy
軸を考えて、X軸に対称に、X軸の正方向に向って透過
率は順次低くなり、中心で高くなっている。The optical filter having the equal transmittance distribution shown in FIG.
Considering the axis, the transmittance gradually decreases in the positive direction of the X-axis symmetrically with respect to the X-axis, and increases at the center.
また、第2図に示す光学フィルタは、上記と同様に考え
て、点0に対して対称で、中心で最も透過率が高く、周
辺にいくほど低くなっている。Further, considering the same as above, the optical filter shown in FIG. 2 is symmetrical with respect to point 0, and has the highest transmittance at the center and decreases toward the periphery.
第3図、第4図に上記2種の光学フィルタのX軸におけ
る光透過率分布を示す。FIGS. 3 and 4 show the light transmittance distributions of the above two types of optical filters along the X axis.
ところで、従来の光学フィルタは、その光透過率分布が
第5図に示すようなものであって、中央部において光透
過率が低く、周辺部に拡がるに従って高くなっている。By the way, the conventional optical filter has a light transmittance distribution as shown in FIG. 5, where the light transmittance is low in the center and increases as it spreads toward the periphery.
したがって、従来の光学フィルタを製造する装置は、そ
の構成が、蒸着基板の中央部にその周辺部より多くの蒸
着金属を蒸着するような構成となっているため、このよ
うな製造装置であっては、既述のような、中央部で最も
光透過率が高く、またフェースプレートの一方の軸にの
み対称で、かつ低くても80%程度という全体に高い光
透過率分布を有する光学フィルタは得られない。Therefore, conventional equipment for manufacturing optical filters has a structure in which more metal is deposited in the center of the deposition substrate than in the periphery. As mentioned above, the optical filter has the highest light transmittance in the center, is symmetrical only about one axis of the face plate, and has a high light transmittance distribution over the whole, at least about 80%. I can't get it.
本発明は、このような問題点を解決するもので、既述の
ような新規な光学フィルタを所望の光透過率分布でもっ
て得ることのできる新規な、光学フィルタの製造装置を
提供するものである。The present invention solves these problems and provides a novel optical filter manufacturing apparatus capable of producing the above-mentioned novel optical filter with a desired light transmittance distribution. be.
以下図面とともに本発明を実施例に基いて説明する。The present invention will be explained below based on examples together with the drawings.
第6図は本発明の一実施例を示す構成斜視図であって、
ガラス等の蒸着基板11とタングステン線等の加熱線1
2との間に蒸着マスク13が設けられている。FIG. 6 is a structural perspective view showing an embodiment of the present invention,
Vapor deposition substrate 11 such as glass and heating wire 1 such as tungsten wire
A vapor deposition mask 13 is provided between the two.
加熱線12はその要部拡大側面図および同正面図を第7
図a、bに示すように、加熱線12上にニッケル、クロ
ム、インコーネル等の蒸着金属14が溶接せられており
、これが蒸発源となる。The heating wire 12 is shown in the seventh enlarged side view and front view of its main part.
As shown in Figures a and b, a vapor-deposited metal 14 such as nickel, chromium, or inconel is welded onto the heating wire 12, and this serves as an evaporation source.
また、この加熱線12の形状は、その平面図を第8図に
示すように相対向する2個の側辺部12L121’とこ
れらを連結する連結部122.123,123’とから
なり、全体として一見コ字状を呈している。The shape of the heating wire 12, as shown in FIG. At first glance, it appears to be U-shaped.
そして、蒸着金属14は、その溶接位置を×印で示すよ
うに、連結部122で最も密で、同連結部122から連
結部123.123’、さらに側辺部121,121’
に進むほど疎に溶接される。The vapor deposited metal 14 is densest at the connecting part 122, as shown by the welding position marked with an x, and extends from the connecting part 122 to the connecting parts 123, 123', and then to the side parts 121, 121'.
The further the welding progresses, the more sparsely welded.
また、蒸着マスク13の形状は、第6図に示す構成図の
平面図を第9図に示すように、加熱線12で形成される
コ字状形の内部をしやへいするような舌状の形状を呈し
ている。Further, the shape of the vapor deposition mask 13 is a tongue-like shape that suppresses the inside of the U-shape formed by the heating wire 12, as shown in FIG. 9, which is a plan view of the configuration diagram shown in FIG. It has the shape of
本実施例では、加熱線12として直径0.5〜3關のダ
ンゲステン線を用い、蒸着金属14として直径が0,0
3〜0.3 mmで長さが1〜10關のインコーネルを
用い、連結部122では1〜2crrL間隔で密に、側
辺部12L121’では4〜5CrrL間隔で疎に溶接
を行ない、同金属14が蒸発してしまう完全蒸着を行っ
た。In this embodiment, a Dungesten wire with a diameter of 0.5 to 3 mm is used as the heating wire 12, and a diameter of 0.0 to 0.0 mm is used as the vapor-deposited metal 14.
Using an inconel with a length of 3 to 0.3 mm and a length of 1 to 10 cm, welding is performed densely at intervals of 1 to 2 crrL at the connecting part 122 and sparsely at intervals of 4 to 5 crrL at the side part 12L121'. Complete vapor deposition was performed in which the metal 14 was evaporated.
なお、蒸着マスク13はステンレス板を成形して得た。Note that the vapor deposition mask 13 was obtained by molding a stainless steel plate.
完全蒸着では光透過率は蒸着金属14の質量と密接な関
係があり、質量が一定であれば光透過率も一定となる。In complete vapor deposition, the light transmittance is closely related to the mass of the vapor-deposited metal 14, and if the mass is constant, the light transmittance is also constant.
なお、光透過率分布の制御は、(1)蒸発源となる加熱
線12と蒸着基板11および蒸着マスク13の距離、(
2)蒸着基板11の中心に対する蒸着マスク13および
加熱線12の位置、(3)加熱線12の形状、特に連結
部122,123,123’の形状、(4)蒸着マスク
13の形状、(5)蒸着金属14の取り付は方とその位
置を調整することにより行なわれる。The light transmittance distribution can be controlled by (1) the distance between the heating wire 12 serving as the evaporation source, the evaporation substrate 11, and the evaporation mask 13;
2) the position of the evaporation mask 13 and the heating wire 12 with respect to the center of the evaporation substrate 11; (3) the shape of the heating wire 12, especially the shape of the connecting portions 122, 123, 123'; (4) the shape of the evaporation mask 13; ) The vapor-deposited metal 14 is attached by adjusting its direction and position.
ところで、第2図、第4図に示された光透過率分布を有
する光源フィルタを製造するには、第1図、第3図に示
された光透過率分布を有する光学フィルタを作製した後
、蒸着基板11を1800回転して同様なる蒸着を行な
うことにより、同一の光透過率分布が1800回転され
た状態で同分布が得られ、その結果第2図、第4図に示
す同心円状で中央での光透過率が最も高い光学フィルタ
を得ることができる。By the way, in order to manufacture a light source filter having the light transmittance distribution shown in FIGS. 2 and 4, after manufacturing the optical filter having the light transmittance distribution shown in FIGS. 1 and 3, By performing the same vapor deposition while rotating the deposition substrate 11 by 1800 degrees, the same light transmittance distribution can be obtained after rotating the deposition substrate 11 by 1800 degrees, and as a result, the concentric circular shape shown in FIGS. 2 and 4 is obtained. An optical filter with the highest light transmittance at the center can be obtained.
以上説明したように本発明の光学フィルタの製造装置は
、加熱線の形状を相対向する2個の側辺部および連結部
として形成し、また蒸着マスクを加熱線の形状の内部を
覆う形状とし、また蒸着金属の形成位置も連結部で密に
、側辺部で疎としたことにより、蒸着基板上では、中央
部ではあまり蒸着されず最も光透過率が高くなり、フェ
ースプレートの一方の軸、例えば水平軸にのみ対称で、
かつ透過率が全体に高い光学フィルタが得られる。As explained above, in the optical filter manufacturing apparatus of the present invention, the shape of the heating wire is formed as two opposing side parts and a connecting part, and the vapor deposition mask is shaped to cover the inside of the shape of the heating wire. In addition, by forming the vapor-deposited metal densely at the joints and sparsely at the sides, on the vapor-deposited substrate, not much is vapor-deposited in the center, resulting in the highest light transmittance, and one axis of the face plate. , for example, symmetric only about the horizontal axis,
In addition, an optical filter with high overall transmittance can be obtained.
第1図〜第4図は本出願人が既に提案した光学フィルタ
の光透過率分布特性図、第5図は従来の光学フィルタの
光透過率分布特性図、第6図は本発明の光学フィルタの
製造装置の一実施例を示す構成斜視図、第7図a、bお
よび第8図は同実施例の加熱線の側面図、正面図、およ
び平面図、第9図は同実施例の平面図である。
11・・・・・・蒸着基板、12・・・・・・加熱線、
13・・・・・・蒸着マスク、14・・・・・・蒸着金
属、121,121’・・・・・・側辺部、122,1
23,123’・・・・・・連結部。1 to 4 are light transmittance distribution characteristic diagrams of an optical filter already proposed by the present applicant, FIG. 5 is a light transmittance distribution characteristic diagram of a conventional optical filter, and FIG. 6 is a light transmittance distribution characteristic diagram of an optical filter of the present invention. 7a, b, and 8 are side views, front views, and plan views of the heating wire of the same embodiment. FIG. 9 is a plan view of the same embodiment. It is a diagram. 11... Vapor deposition substrate, 12... Heating wire,
13... Vapor deposition mask, 14... Vapor deposition metal, 121, 121'... Side part, 122, 1
23,123'...Connection part.
Claims (1)
する連結部からなる加熱線と、前記加熱線上に形成され
た蒸着金属と、前記蒸着金属が蒸着される蒸着基板と、
前記加熱線および前記蒸着基板の間に設けられた蒸着マ
スクとを備え、前記蒸着金属は前記加熱線の側辺部より
連結部の方で密に形成せられ、前記蒸着マスクは前記加
熱線の両側辺部および前記連結部で形成される形状の内
部を覆う形状でなることを特徴とする光学フィルタの製
造装置。1. A heating wire consisting of two opposing side portions and a connecting portion connecting the both side portions, a vapor deposition metal formed on the heating wire, and a vapor deposition substrate on which the vapor deposition metal is vapor deposited;
an evaporation mask provided between the heating wire and the evaporation substrate, the evaporation metal is formed more densely at the connecting portion than at the side portions of the heating wire, and the evaporation mask is provided between the heating wire and the evaporation substrate. 1. An optical filter manufacturing apparatus characterized in that the optical filter has a shape that covers the inside of a shape formed by both side portions and the connecting portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14675477A JPS5850322B2 (en) | 1977-12-06 | 1977-12-06 | Optical filter manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14675477A JPS5850322B2 (en) | 1977-12-06 | 1977-12-06 | Optical filter manufacturing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5479052A JPS5479052A (en) | 1979-06-23 |
| JPS5850322B2 true JPS5850322B2 (en) | 1983-11-10 |
Family
ID=15414815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14675477A Expired JPS5850322B2 (en) | 1977-12-06 | 1977-12-06 | Optical filter manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5850322B2 (en) |
-
1977
- 1977-12-06 JP JP14675477A patent/JPS5850322B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5479052A (en) | 1979-06-23 |
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