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JPS6311738B2 - - Google Patents
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JPS6311738B2 - - Google Patents

Info

Publication number
JPS6311738B2
JPS6311738B2 JP15937979A JP15937979A JPS6311738B2 JP S6311738 B2 JPS6311738 B2 JP S6311738B2 JP 15937979 A JP15937979 A JP 15937979A JP 15937979 A JP15937979 A JP 15937979A JP S6311738 B2 JPS6311738 B2 JP S6311738B2
Authority
JP
Japan
Prior art keywords
glass panel
metal back
film
back film
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15937979A
Other languages
Japanese (ja)
Other versions
JPS5679833A (en
Inventor
Yasuo Iwasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15937979A priority Critical patent/JPS5679833A/en
Publication of JPS5679833A publication Critical patent/JPS5679833A/en
Publication of JPS6311738B2 publication Critical patent/JPS6311738B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/10Screens on or from which an image or pattern is formed, picked up, converted or stored
    • H01J29/18Luminescent screens
    • H01J29/28Luminescent screens with protective, conductive or reflective layers

Landscapes

  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)

Description

【発明の詳細な説明】 この発明はカラーブラウン管のメタルバツク膜
形成方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for forming a metal back film for a color cathode ray tube.

第1図はカラーブラウン管製造の一工程である
メタルバツク工程を説明するための図である。第
1図に示すように、カラーブラウン管のフエース
プレートを形成するガラスパネル1の内面に蛍光
体層2が形成され、かつ蛍光体層2上に有機質中
間膜3が形成されており、この有機質中間膜3の
表面にアルミニウムAlの平滑な蒸着薄膜すなわ
ちメタルバツク膜4を真空蒸着法によつて形成す
る。この工程をメタルバツク工程と称しており、
メタルバツク膜4はカラーブラウン管の動作時に
螢光体層2から発した光をできるだけ多く観視者
側へ取出し、カラーブラウン管の発光輝度を増大
させるための光反射面の役割を果すと同時に、蛍
光体のイオン焼けを防止する機能も有している。
具体的には蛍光体層2および有機質中間膜3が形
成されたガラスパネル1をメタルバツク機5のパ
ネル支持台6上に載置し、真空ポンプ8で蒸着槽
7の内部が高真空状態になるまで排気する。蒸着
槽7の内部には蒸発源としてアルミニウム棒11
をチヤージしたタングステンW線からなるコイル
状ヒータ10がガラスパネル1の中心線l上に位
置するようにヒータ支持電極9に固定されてい
る。蒸着槽7の内部が規定の真空度に達すると、
蒸着槽7の外部に設けられた電源装置12により
ヒータ支持電極9を通してコイル状ヒータ10の
両端に一定の電圧がかけられる。コイル状ヒータ
10は良好な抵抗加熱体であるため、その発熱に
よつてコイル状ヒータ10の内部にチヤージされ
たアルミニウム棒11が加熱、溶融、蒸発させら
れ、ガラスパネル1の内面に形成された有機質中
間膜3上にアルミニウムの蒸着薄膜すなわちメタ
ルバツク膜4が形成される。メタルバツク膜4の
形成が終ると、電源装置12からの電圧の供給を
停止し、蒸着槽7のリークを行つて蒸着槽7の内
部を大気圧に戻し、その後、メタルバツク工程が
完了したガラスパネル1をメタルバツク機から取
外す。コイル状ヒータ10に新しいアルミニウム
棒をチヤージし、次のガラスパネルをセツトし
て、以後は前述したと同様な手順で次々にアルミ
ニウムの蒸着を行う。なお、コイル状ヒータ10
は断線したり熱変形がひどくなつたりして使用不
可能なるまで繰返し使用する。
FIG. 1 is a diagram for explaining the metal back process, which is one process of manufacturing color cathode ray tubes. As shown in FIG. 1, a phosphor layer 2 is formed on the inner surface of a glass panel 1 forming the face plate of a color cathode ray tube, and an organic intermediate film 3 is formed on the phosphor layer 2. A smooth vapor-deposited thin film of aluminum, ie, a metal back film 4, is formed on the surface of the film 3 by vacuum evaporation. This process is called the metal back process.
The metal back film 4 serves as a light reflecting surface to extract as much light as possible from the phosphor layer 2 to the viewer when the color cathode ray tube is in operation, and to increase the luminance of the color cathode ray tube. It also has the function of preventing ion burn.
Specifically, the glass panel 1 on which the phosphor layer 2 and organic interlayer film 3 have been formed is placed on the panel support stand 6 of the metal bag machine 5, and the inside of the vapor deposition tank 7 is brought into a high vacuum state using the vacuum pump 8. exhaust to. Inside the vapor deposition tank 7, an aluminum rod 11 is installed as an evaporation source.
A coiled heater 10 made of a charged tungsten W wire is fixed to the heater support electrode 9 so as to be positioned on the center line l of the glass panel 1. When the inside of the vapor deposition tank 7 reaches a specified degree of vacuum,
A constant voltage is applied to both ends of the coiled heater 10 through the heater support electrode 9 by a power supply device 12 provided outside the vapor deposition tank 7 . Since the coiled heater 10 is a good resistance heating element, the aluminum rod 11 charged inside the coiled heater 10 is heated, melted, and evaporated by the heat generated by the coiled heater 10, and is formed on the inner surface of the glass panel 1. A vapor-deposited aluminum film, ie, a metal back film 4, is formed on the organic intermediate film 3. When the formation of the metal back film 4 is completed, the supply of voltage from the power supply device 12 is stopped and the vapor deposition tank 7 is leaked to return the inside of the vapor deposition tank 7 to atmospheric pressure, and then the glass panel 1 on which the metal back process has been completed is removed. Remove from the metal bag machine. A new aluminum rod is charged to the coiled heater 10, the next glass panel is set, and aluminum is deposited one after another in the same manner as described above. Note that the coiled heater 10
is used repeatedly until it becomes unusable due to disconnection or severe thermal deformation.

通常、ガラスパネル1の内面は大きな曲率半径
を有する球状弧面となつているが、コイル状ヒー
タ10とガラスパネル1との間の距離dは蒸着の
経済性を考えて、ガラスパネルの内面の曲率半径
に対してかなり小さい値に選ばれている。第2図
の線bは、前述のようにして形成されたメタルバ
ツク膜4のガラスパネル1の中央から周辺に向け
ての膜厚分布を示す。メタルバツク膜の性能は、
この膜の光反射効率と完成カラーブラウン管動作
時の電子ビームの透過性によつて決定され、最適
膜厚値が存在する。従つて、ガラスパネル1上の
各位置でメタルバツク膜の膜厚が異るのは好まし
くなく、第2図の線bのような場合には、ガラス
パネル1の中央部で最大膜厚値に合せると、周辺
部では最大膜厚値よりも薄くなり、光反射効率が
悪くなり、完成カラーブラウン管動作時の周辺部
の輝度が下がつてしまうので好ましくない。ま
た、逆にガラスパネル1の周辺部で最適膜厚値に
合せると、中央部では最適膜厚値より厚くなつ
て、完成カラーブラウン管動作時の電子ビームの
透過性が悪くなり、中央部の輝度が下がつてしま
うので好ましくない。さらに、膜厚が極端に厚く
なると、メタルバツク膜4形成後の有機質中間膜
3の熱分解工程でメタルバツク膜4が浮上がつた
り、剥離したりしてしまうという問題も生じ易
く。はなはだ好ましくない。これらのために、理
想的には、第2図の線aに示すように、ガラスパ
ネル1の中央から周辺まで一定の膜厚、すなわち
最適膜厚でメタルバツク膜4を形成することが好
ましい。そして、このようにするのに、理論的に
はコイル状ヒータ10とガラスパネル1間の距離
dをガラスパネル1内面の曲率半径まで大きくす
ればよいが、前述したようにガラスパネル1内面
の曲率半径は非常に大きいので、前記距離dをガ
ラスパネル1内面と曲率半径と等しい値にする
と、蒸着槽7の容積が非常に大きなものになつて
しまい、蒸着槽7の排気に多大のパワーを必要と
することになり、経済性が悪くなる。さらに、こ
のようなガラスパネル1の中央部と周辺部のメタ
ルバツク膜4の膜厚差は、ガラスパネル1の大き
さが大きくなるほど顕著になる。
Normally, the inner surface of the glass panel 1 is a spherical arc surface with a large radius of curvature. The radius of curvature is chosen to be quite small. Line b in FIG. 2 shows the film thickness distribution of the metal back film 4 formed as described above from the center of the glass panel 1 toward the periphery. The performance of metal back membrane is
There is an optimum film thickness value determined by the light reflection efficiency of this film and the electron beam transmittance during operation of the completed color cathode ray tube. Therefore, it is undesirable that the thickness of the metal back film differs at each position on the glass panel 1, and in a case like line b in FIG. This is undesirable because the peripheral area becomes thinner than the maximum film thickness value, the light reflection efficiency deteriorates, and the brightness of the peripheral area decreases when the completed color cathode ray tube is operated. Conversely, if the peripheral part of the glass panel 1 is adjusted to the optimum film thickness value, the film thickness will be thicker than the optimum value in the center part, which will deteriorate the transmission of electron beams when the completed color cathode ray tube is operated, and the brightness of the central part will be reduced. This is not desirable because it lowers the value. Furthermore, if the film thickness becomes extremely thick, the metal back film 4 tends to float or peel off during the thermal decomposition step of the organic intermediate film 3 after the metal back film 4 is formed. I really don't like it. For these reasons, it is ideal to form the metal back film 4 with a constant film thickness from the center to the periphery of the glass panel 1, that is, with an optimum film thickness, as shown by line a in FIG. 2. To do this, theoretically, the distance d between the coiled heater 10 and the glass panel 1 should be increased to the radius of curvature of the inner surface of the glass panel 1. Since the radius is very large, if the distance d is made equal to the inner surface of the glass panel 1 and the radius of curvature, the volume of the vapor deposition tank 7 will become very large, and a large amount of power will be required to exhaust the vapor deposition tank 7. This results in poor economic efficiency. Furthermore, such a difference in thickness between the metal back film 4 at the center and the periphery of the glass panel 1 becomes more significant as the size of the glass panel 1 increases.

そこで、前述のようなメタルバツク膜の膜厚差
をなくすための方法として、従来、第3図に示す
ように複数個の蒸着源を設置することが提案され
ている。蒸着源の個数を多くすればするほど、蒸
着されたメタルバツク膜4の膜厚分布が均一化さ
れ、第2図の線aに近い膜厚分布を得ることが可
能となるが、この方法によるとコイル状ヒータ1
0の個数を多くする必要があり、経済性に難点が
あるだけではなく、設置したコイル状ヒータ10
の個数が多い分だけ、アルミニウム棒11のチヤ
ージ時に余分な作業が必要となり、メタルバツク
工程の作業性にも問題が生じる。
Therefore, as a method for eliminating the above-mentioned difference in film thickness of the metal back film, it has been proposed to install a plurality of evaporation sources as shown in FIG. 3. As the number of vapor deposition sources increases, the thickness distribution of the deposited metal back film 4 becomes more uniform, and it becomes possible to obtain a film thickness distribution close to line a in FIG. 2, but according to this method, Coiled heater 1
It is necessary to increase the number of heaters, which is not only economically disadvantageous, but also reduces the number of installed coil heaters.
Since the number of aluminum rods 11 is large, extra work is required when charging the aluminum rods 11, and a problem arises in the workability of the metal bag process.

この発明は、前述した欠点を解消するためにな
されたもので、経済性および作業性に何ら問題を
生じることなく、均一な蒸着膜厚分布を有するメ
タルバツク膜を得ることが可能なカラーブラウン
管のメタルバツク膜の形成方法を提供しようとす
るものである。
This invention was made in order to eliminate the above-mentioned drawbacks, and it provides a metal back for color cathode ray tubes, which makes it possible to obtain a metal back film having a uniform deposition film thickness distribution without causing any problems in terms of economy and workability. The present invention aims to provide a method for forming a film.

以下、この発明の一実施例を図面に基いて説明
する。第4図はこの発明によるメタルバツク膜の
形成方法を説明するための図である。第4図に示
すように、アルミニウム棒11をチヤージしたコ
イル状ヒータ10がガラスパネル1のほぼ中心線
l上に配置してあり、とくにこのコイル状ヒータ
10とガラスパネル1との間にメツシユ構造すな
わちモザイク状の遮蔽体13を配設してある。こ
のメツシユ構造の遮蔽体13は、第5図に中央部
Aおよび周辺部Bを拡大して示すように、金属板
のメツシユ構造の開口14を形成したものであ
り、これらの開口14の開口率は第6図の線cに
示すように、遮蔽体13の中央から周辺に向つて
漸次増加するように設けられている。また、この
遮蔽体13はこれの中央点をガラスパネル1の中
心線lがほぼ通るように配置されている。なお、
アルミニウム棒11および遮蔽体13の中心点は
ガラスパネル1のほぼ中心線l上に配置するもの
である。
An embodiment of the present invention will be described below with reference to the drawings. FIG. 4 is a diagram for explaining the method of forming a metal back film according to the present invention. As shown in FIG. 4, a coiled heater 10 made of a charged aluminum rod 11 is arranged approximately on the center line l of the glass panel 1, and in particular, a mesh structure is provided between the coiled heater 10 and the glass panel 1. That is, a mosaic-like shield 13 is provided. This mesh-structured shielding body 13 has mesh-structured openings 14 made of metal plates, as shown in FIG. is provided so as to gradually increase from the center to the periphery of the shielding body 13, as shown by line c in FIG. Further, this shielding body 13 is arranged so that the center line l of the glass panel 1 substantially passes through its center point. In addition,
The center points of the aluminum rod 11 and the shield 13 are arranged approximately on the center line l of the glass panel 1.

前述のような構成にした以外は、第1図に示し
前述した従来法と同様に真空蒸着でメタルバツク
膜4を形成すると、メツシユ構造の遮蔽体13の
開口率分布を適切に選定することにより、第2図
の線aに示すようなガラスパネル1の中央から周
辺まで、均一な膜厚分布を有するメタルバツク膜
4を得ることができる。この場合、メタルバツク
膜4にメツシユ構造の遮蔽体13のシヤドウがパ
ターンとして形成される恐れがあるが、これは遮
蔽体13のメツシユ構造のパターンの大きさおよ
びこの遮蔽体13の設置位置、コイル状ヒータ1
0の蒸発源としての面積を適切に選ぶことによつ
て解決される。また、遮蔽体13は、その表面に
アルミニウムの蒸着膜が堆積されるが、かなりの
回数のメタルバツク工程に繰返し使用することが
可能である。
If the metal back film 4 is formed by vacuum evaporation in the same manner as the conventional method shown in FIG. A metal back film 4 having a uniform thickness distribution from the center to the periphery of the glass panel 1 as shown by line a in FIG. 2 can be obtained. In this case, there is a possibility that a shadow of the mesh-structured shielding body 13 may be formed as a pattern on the metal back film 4, but this depends on the size of the mesh-structured pattern of the shielding body 13, the installation position of this shielding body 13, and the shape of the coil. Heater 1
This can be solved by appropriately selecting the area as the evaporation source. Further, the shielding body 13 has an aluminum evaporated film deposited on its surface, and can be repeatedly used for a considerable number of metal backing processes.

以上説明したように、この発明のメタルバツク
膜の形成方法によれば、蒸着槽の容積を大きくし
たり、蒸発源の数を複数個にしたりすることな
く、均一な膜厚分布のメタルバツク膜を、どのよ
うな大きさのガラスパネル内面の有機質中間膜上
にも形成することができるので、メタルバツク工
程の経済性、合理性を高めつつ高性能をもつメタ
ルバツク膜を形成することができ、ひいては高品
位のカラーブラウン管をより安価に製造すること
ができるという効果が得られる。
As explained above, according to the method for forming a metal back film of the present invention, a metal back film with a uniform thickness distribution can be formed without increasing the volume of the vapor deposition tank or increasing the number of evaporation sources. Since it can be formed on the organic interlayer film on the inner surface of a glass panel of any size, it is possible to form a metal back film with high performance while increasing the economic efficiency and rationality of the metal back process. The effect is that color cathode ray tubes can be manufactured at a lower cost.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来のメタルバツク工程の一例を説明
するための断面図、第2図はメタルバツク膜の膜
厚分布を示す図、第3図はメタルバツク工程の他
例を説明するための断面図、第4図はこの発明の
一実施例によるメタルバツク工程を説明するため
の断面図、第5図は遮蔽体の構造を示す概略平面
図、第6図は遮蔽体の開口率分布を示す図であ
る。 1…ガラスパネル、2…蛍光体層、3…有機質
中間膜、4…メタルバツク膜、5…メタルバツク
機、6…パネル支持台、7…蒸着槽、8…真空ポ
ンプ、9…ヒータ支持電極、10…コイル状ヒー
タ、11…アルミニウム棒、12…電源装置、1
3…遮蔽体、14…開口。なお、図中同一符号は
同一または相当部分を示す。
FIG. 1 is a cross-sectional view for explaining an example of a conventional metal back process, FIG. 2 is a view showing the film thickness distribution of a metal back film, and FIG. 3 is a cross-sectional view for explaining another example of a metal back process. FIG. 4 is a cross-sectional view for explaining the metal bag process according to an embodiment of the present invention, FIG. 5 is a schematic plan view showing the structure of the shield, and FIG. 6 is a diagram showing the aperture ratio distribution of the shield. DESCRIPTION OF SYMBOLS 1... Glass panel, 2... Phosphor layer, 3... Organic interlayer, 4... Metal back film, 5... Metal back machine, 6... Panel support stand, 7... Vapor deposition tank, 8... Vacuum pump, 9... Heater support electrode, 10 ... Coiled heater, 11 ... Aluminum rod, 12 ... Power supply device, 1
3... Shielding body, 14... Opening. Note that the same reference numerals in the figures indicate the same or corresponding parts.

Claims (1)

【特許請求の範囲】[Claims] 1 蛍光体層および有機質中間膜を形成したガラ
スパネルの中心線上に蒸発源を配置すると共に、
開口率が中央より周辺に向けて漸次増加するメツ
シユ構造の遮蔽体を、その中央点を前記ガラスパ
ネルの中心線上に位置させ、かつ前記蒸発源とガ
ラスパネルとの間に配置して、真空蒸着を行うこ
とを特徴とするカラーブラウン管のメタルバツク
膜形成方法。
1. An evaporation source is placed on the center line of the glass panel on which the phosphor layer and organic interlayer film are formed, and
Vacuum evaporation is carried out by arranging a shielding member having a mesh structure in which the aperture ratio gradually increases from the center toward the periphery, with its center point located on the center line of the glass panel, and between the evaporation source and the glass panel. A method for forming a metal back film for a color cathode ray tube.
JP15937979A 1979-12-03 1979-12-03 Method for forming metalback film of color cathode-ray tube Granted JPS5679833A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15937979A JPS5679833A (en) 1979-12-03 1979-12-03 Method for forming metalback film of color cathode-ray tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15937979A JPS5679833A (en) 1979-12-03 1979-12-03 Method for forming metalback film of color cathode-ray tube

Publications (2)

Publication Number Publication Date
JPS5679833A JPS5679833A (en) 1981-06-30
JPS6311738B2 true JPS6311738B2 (en) 1988-03-15

Family

ID=15692521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15937979A Granted JPS5679833A (en) 1979-12-03 1979-12-03 Method for forming metalback film of color cathode-ray tube

Country Status (1)

Country Link
JP (1) JPS5679833A (en)

Also Published As

Publication number Publication date
JPS5679833A (en) 1981-06-30

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