JPH0534772B2 - - Google Patents
Info
- Publication number
- JPH0534772B2 JPH0534772B2 JP58227871A JP22787183A JPH0534772B2 JP H0534772 B2 JPH0534772 B2 JP H0534772B2 JP 58227871 A JP58227871 A JP 58227871A JP 22787183 A JP22787183 A JP 22787183A JP H0534772 B2 JPH0534772 B2 JP H0534772B2
- Authority
- JP
- Japan
- Prior art keywords
- particle
- field
- charged
- deflection
- energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002245 particle Substances 0.000 claims description 67
- 230000005684 electric field Effects 0.000 claims description 8
- 230000000694 effects Effects 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は、荷電粒子または中性粒子を電場、磁
場等の偏向場で偏向させることによつて前記各粒
子の質量またはエネルギを分析するようにした粒
子分析器に関する。[Detailed Description of the Invention] [Technical Field of the Invention] The present invention provides a method for analyzing the mass or energy of charged particles or neutral particles by deflecting them with a deflection field such as an electric field or a magnetic field. related to particle analyzers.
従来より、荷電粒子や中性粒子の質量またはエ
ネルギを分析する粒子分析器として、粒子ビーム
を電場または磁場等の偏向場中に入射させ、各粒
子の偏向量を検出することによつて、上記の物理
量の分析を行なうようにしたものが知られてい
る。このような粒子分析器、例えば一例として
H+、D+のような荷電子粒子の質量とエネルギと
を分析する荷電粒子質量エネルギ分析器は、通
常、第１図および第２図に示す如く構成されてい
る。
Conventionally, particle analyzers that analyze the mass or energy of charged particles and neutral particles have been used to analyze the above-mentioned results by injecting a particle beam into a deflection field such as an electric field or a magnetic field and detecting the amount of deflection of each particle. There is a known method that analyzes the physical quantities of . As an example, such a particle analyzer, e.g.
A charged particle mass energy analyzer for analyzing the mass and energy of charged electron particles such as H + and D + is generally constructed as shown in FIGS. 1 and 2.
すなわち、同図において１は真空容器であり、
この真空容器１の側壁には荷電粒子ビーム２の入
射口である入射ボート３が設けられている。真空
容器１の内部には、上記荷電粒子の軌道上にコリ
メータ４，５、磁極６ａ、６ｂ、電極７ａ，７
ｂ、粒子検出器８がそれぞれ収容されている。コ
リメータ４，５は前記荷電粒子ビーム２を所定の
太さにした後、平行ビームに整形するものであ
る。前記磁極６ａ，６ｂは、第１図中上下方向を
長手方向とする長方形の磁極面９ａ，９ｂを有
し、これら磁極面９ａ，９ｂは所定間隙を介して
対向配置されている。これら磁極６ａ，６ｂは
各々に巻装されたコイル１０ａ，１０ｂへの通電
によつて、第１図中紙面に直交する方向の磁場を
生成する。また、電極７ａ，７ｂは、第１図中上
方から下方へその幅が拡大する台形状の板体から
なり、前記磁極面９ａ，９ｂ間の所定間隔よりも
広い間隔を介して上記磁極面９ａ，９ｂと平行に
対向配置され、前記磁場と同一方向の電場を生成
する。なお、図中１１は、真空容器１内のガスＰ
を排気する図示しないポンプに通じる排気口であ
る。 That is, in the figure, 1 is a vacuum container,
An input boat 3, which is an input port for the charged particle beam 2, is provided on the side wall of the vacuum vessel 1. Inside the vacuum container 1, collimators 4 and 5, magnetic poles 6a and 6b, and electrodes 7a and 7 are arranged on the trajectory of the charged particles.
b, a particle detector 8 is housed, respectively. The collimators 4 and 5 are used to make the charged particle beam 2 a predetermined thickness and then shape it into a parallel beam. The magnetic poles 6a, 6b have rectangular magnetic pole faces 9a, 9b whose longitudinal direction is the vertical direction in FIG. 1, and these magnetic pole faces 9a, 9b are arranged to face each other with a predetermined gap therebetween. These magnetic poles 6a and 6b generate a magnetic field in a direction perpendicular to the plane of the paper in FIG. 1 by energizing coils 10a and 10b wound around them, respectively. Further, the electrodes 7a and 7b are made of trapezoidal plates whose width increases from the top to the bottom in FIG. , 9b, and generate an electric field in the same direction as the magnetic field. Note that 11 in the figure indicates the gas P in the vacuum container 1.
This is an exhaust port leading to a pump (not shown) that exhausts the air.
しかして、このように構成された荷電粒子質量
エネルギ分析器において、入射ボート３から真空
容器１内に導入された荷電粒子ビーム２は、コリ
メータ４，５によつて平行ビームに整形され、磁
極６ａ，６ｂで生成された磁場中に導入される。
磁場中に導入された荷電粒子ビーム２の各粒子
は、粒子の運動方向および磁場方向と直交する方
向の力を受け、円形軌道を辿つて180°偏向され
る。このとき各粒子の運動半径は、各粒子の運動
エネルギのよつて決定される。したがつて、180°
偏向された各粒子は、磁場の端部において、運動
エネルギに応じた位置に直線上に分布する。 In the charged particle mass energy analyzer configured in this way, the charged particle beam 2 introduced into the vacuum vessel 1 from the input boat 3 is shaped into a parallel beam by the collimators 4 and 5, and the charged particle beam 2 is shaped into a parallel beam by the collimators 4 and 5. , 6b.
Each particle of the charged particle beam 2 introduced into the magnetic field receives a force in a direction perpendicular to the direction of movement of the particle and the direction of the magnetic field, and is deflected by 180° following a circular trajectory. At this time, the radius of motion of each particle is determined by the kinetic energy of each particle. Therefore, 180°
Each deflected particle is distributed linearly at the edge of the magnetic field at a position according to its kinetic energy.
磁場を通過した各荷電粒子は、電極７ａ，７ｂ
で生成される電場中に導入されることによつて、
さらに電場の方向に偏向される。このときの各粒
子の偏向量は、各粒子の質量によつて決定され
る。 Each charged particle that has passed through the magnetic field is transferred to the electrodes 7a and 7b.
By being introduced into the electric field generated by
It is further deflected in the direction of the electric field. The amount of deflection of each particle at this time is determined by the mass of each particle.
かくして、各粒子は、粒子検出器８における各
粒子の質量とエネルギとによつて決まる二次元的
位置にそれぞれ入射され、ここに各粒子の質量お
よびエネルギが検出される。 Thus, each particle is incident on the particle detector 8 at a two-dimensional position determined by the mass and energy of each particle, and the mass and energy of each particle are detected here.
ところで、このような荷電粒子質量エネルギ分
析器では、磁極６ａ，６ｂ間または電極７ａ，７
ｂに生成される磁束、電束が、全て同一方向であ
ることが理想的であるが、実際には、各極の周縁
部分には、磁束または電束が外側へ湾曲した、い
わゆるフリンジ場が存在している。このため、コ
リメータ４，５を通過した粒子のうちエネルギの
小さいものは、磁場に導入される前に上記フリン
ジ場の影響を受けて、図中Ｑで示す如く、その軌
道を僅か曲げられてしまう。このような軌道のず
れは、粒子検出器８の近傍では無視できない程度
に増幅されてしまうので、従来のこの種の粒子分
析器では、上記フリンジ場の影響を考慮して、粒
子ビームの軌道を修正する必要があつた。ところ
が、このようなフリンジ場が荷電粒子に及ぼす影
響は、種々の複雑な要因が絡む問題であるだけ
に、容易に予想し得るものではなく、結局、従来
は個々の装置について調整を必要とする等の不具
合があつた。 By the way, in such a charged particle mass energy analyzer, there is a gap between the magnetic poles 6a and 6b or between the electrodes 7a and 7.
Ideally, the magnetic flux and electric flux generated at b are all in the same direction, but in reality, there is a so-called fringe field at the periphery of each pole, where the magnetic flux or electric flux curves outward. Existing. For this reason, particles with low energy that have passed through the collimators 4 and 5 are influenced by the fringe field before being introduced into the magnetic field, and their trajectory is slightly bent as shown by Q in the figure. . Such a deviation in the trajectory is amplified to a non-negligible extent in the vicinity of the particle detector 8, so in conventional particle analyzers of this type, the trajectory of the particle beam is determined by taking into account the influence of the fringe field. I needed to fix it. However, the influence of such fringe fields on charged particles cannot be easily predicted, as it is a problem involving various complex factors, and in the past conventional methods required adjustments for each individual device. There were other problems.
本発明はこのような事情を考慮してなされたも
ので、その目的とするところは、荷電粒子のフリ
ンジ場による影響を抑制でき、もつて粒子ビーム
の軌道修正のための調整を省略し得、使い易さに
優れ、かつ信頼性の高い粒子分析器を提供するこ
とにある。
The present invention has been made in consideration of these circumstances, and its purpose is to suppress the influence of fringe fields of charged particles, and to omit adjustments for trajectory correction of particle beams. The objective is to provide a particle analyzer that is easy to use and highly reliable.
本発明は、電場、磁場等の偏向場に至る被粒子
ビームの通路に近接させて、上記偏向場の影響を
阻止するシールド部材を設けたことを特徴として
いる。
The present invention is characterized in that a shield member is provided close to the path of the target particle beam to the deflection field, such as an electric field or a magnetic field, to block the influence of the deflection field.
このような構成であると、偏向場に至る粒子ビ
ームの経路は、磁気的または静電的に遮蔽される
ことになるので、フリンジ場の影響を受け難くな
る。このため、上記経路における被分析粒子ビー
ムの軌道を、磁気的にまたは静電的に安定させる
ことができ、この結果、測定の信頼性を向上させ
ることができるとともに、従来必要であつた調整
作業を省略できる等の効果を奏する。
With such a configuration, the path of the particle beam to the deflection field is magnetically or electrostatically shielded, making it less susceptible to the effects of the fringe field. Therefore, the trajectory of the particle beam to be analyzed along the above path can be stabilized magnetically or electrostatically, and as a result, the reliability of measurements can be improved, and the adjustment work that was previously required can be stabilized. This has the advantage that the process can be omitted.
以下、本発明の詳細を図示の実施例に基づき説
明する。
Hereinafter, details of the present invention will be explained based on illustrated embodiments.
第３図は、本発明を荷電粒子質量エネルギ分析
器に適用した一実施例を示すもので、第１図と同
一部分は同一符号で示してある。したがつて重複
する部分の説明は省くことにする。 FIG. 3 shows an embodiment in which the present invention is applied to a charged particle mass energy analyzer, and the same parts as in FIG. 1 are designated by the same reference numerals. Therefore, we will omit redundant explanations.
この実施例が、従来の分析器と異なる点は、真
空容器１内の入射ポート３から、磁極６ａ，６ｂ
の入射端の直前に至る荷電粒子ビーム２の通路を
囲むように筒状体１５を設けたことにある。この
筒状体１５は、例えば軟鉄等からなり、筒状体１
５内部の磁気シールド効果と、静電シールド効果
とを発揮するものである。筒状体１５の内部に
は、荷電粒子ビーム２の進行方向に所定間隔をお
いてコリメータ４，５が配置されている。なお、
第３図中１６，１７は、上記筒状体１５、入射ポ
ート３およびコリメータ４で囲まれた空間内部の
ガスと、上記筒状体１５、コリメータ４およびコ
リメータ５で囲まれた空間の内部のガスとを、そ
れぞれ真空容器１を介して容器１外部へ排気する
ための孔である。 This embodiment differs from conventional analyzers in that the magnetic poles 6a, 6b are
The reason is that the cylindrical body 15 is provided so as to surround the path of the charged particle beam 2 that reaches just before the incident end of the cylindrical body 15. This cylindrical body 15 is made of, for example, soft iron.
5 exhibits a magnetic shielding effect and an electrostatic shielding effect. Inside the cylindrical body 15, collimators 4 and 5 are arranged at a predetermined interval in the traveling direction of the charged particle beam 2. In addition,
In FIG. 3, reference numerals 16 and 17 indicate the gas inside the space surrounded by the cylindrical body 15, the entrance port 3, and the collimator 4, and the gas inside the space surrounded by the cylindrical body 15, the collimator 4, and the collimator 5. These holes are for exhausting gas to the outside of the container 1 through the vacuum container 1, respectively.
このような構成であると、コリメータ５から磁
極６ａ，６ｂで形成された磁場中に至る荷電粒子
の進行経路は、電磁的、静電的に遮蔽されること
になるので、エネルギの小さい荷電粒子でも、そ
の軌道は安定したものとなる。したがつて、本実
施例によれば、測定の信頼性が向上するととも
に、荷電粒子がフリンジ場によつて受ける影響を
考慮して、予め分析器の調整を行なう等の手間が
省ける等の効果を奏することができる。しかも、
この場合、真空容器１内の特定場所にシールド部
材からなる筒状体１５を設けるだけという、至つ
て簡単な構成であるので、分析器全体の複雑化を
招くようなこともない。 With such a configuration, the traveling path of charged particles from the collimator 5 to the magnetic field formed by the magnetic poles 6a and 6b is electromagnetically and electrostatically shielded, so charged particles with low energy However, its trajectory will be stable. Therefore, according to this embodiment, the reliability of measurement is improved, and there are advantages such as eliminating the need to adjust the analyzer in advance in consideration of the influence of the fringe field on charged particles. can be played. Moreover,
In this case, since the configuration is extremely simple in that only the cylindrical body 15 made of a shield member is provided at a specific location within the vacuum container 1, the analyzer as a whole does not become complicated.
なお、本発明は上記実施例に限定されるもので
はなく、例えば、第４図に示す如く、コリメータ
５と磁極６ａ，６ｂとの間の荷電粒子ビーム２の
経路と、電極７ａ，７ｂとの間に、例えばアルミ
ニウムなどの静電シールド材からなる板体２０を
設けるようにしても良い。このような簡単な構成
であつても、荷電粒子ビーム２の上記経路は、電
極７ａ，７ｂで発生するフリンジ場を静電内に遮
断するので、荷電粒子の運動軌道の安定化に供す
ることができる。また、上記経路を磁気的にのみ
シールドするようにしてもよい。 Note that the present invention is not limited to the above-mentioned embodiment, and for example, as shown in FIG. A plate 20 made of an electrostatic shielding material such as aluminum may be provided between them. Even with such a simple configuration, the path of the charged particle beam 2 blocks the fringe field generated at the electrodes 7a and 7b into the electrostatic field, so it can serve to stabilize the motion trajectory of the charged particles. can. Further, the above path may be shielded only magnetically.
なお、以上の例は荷電粒子質量エネルギ分析器
に本発明を適用した例であるが、例えばコリメー
タ４，５の設置された場所に荷電交換セルを設け
た中性粒子分析器にも本発明は適用可能である。
また、粒子質量エネルギ分析器のみに限らず、真
空容器内に磁場のみを形成した粒子エネルギ分析
器や、真空容器内に電場のみを形成した粒子質量
分析器に本発明を適用し得ることは言うまでもな
い。 Although the above example is an example in which the present invention is applied to a charged particle mass energy analyzer, the present invention can also be applied to a neutral particle analyzer in which a charge exchange cell is provided at the location where the collimators 4 and 5 are installed. Applicable.
It goes without saying that the present invention is applicable not only to particle mass energy analyzers, but also to particle energy analyzers in which only a magnetic field is formed in a vacuum container, and particle mass analyzers in which only an electric field is formed in a vacuum container. stomach.
第１図は従来の荷電粒子質量エネルギ分析器を
示す概略的な断面図、第２図は上記荷電粒子質量
エネルギ分析器を第１図におけるＡ−Ａ線に沿つ
て切断し矢印方向に見た図、第３図は本発明の一
実施例に係る荷電粒子質量エネルギ分析器を示す
概略的な断面図、第４図は本発明の他の実施例に
係る荷電粒子質量エネルギ分析器を示す概略的な
断面図である。
１……真空容器、２……荷電粒子ビーム、３…
…入射ポート、４，５……コリメータ、６ａ，６
ｂ……磁極、７ａ，７ｂ……電極、８……粒子検
出器、９ａ，９ｂ……磁極面、１０ａ，１０ｂ…
…コイル、１１……排気口、１５……筒状体、１
６，１７……孔、２０……板体。
Figure 1 is a schematic cross-sectional view of a conventional charged particle mass energy analyzer, and Figure 2 is a cross-sectional view of the charged particle mass energy analyzer taken along line A-A in Figure 1 and viewed in the direction of the arrow. 3 is a schematic sectional view showing a charged particle mass energy analyzer according to one embodiment of the present invention, and FIG. 4 is a schematic sectional view showing a charged particle mass energy analyzer according to another embodiment of the present invention. FIG. 1... Vacuum container, 2... Charged particle beam, 3...
...Incidence port, 4, 5...Collimator, 6a, 6
b... Magnetic pole, 7a, 7b... Electrode, 8... Particle detector, 9a, 9b... Magnetic pole surface, 10a, 10b...
... Coil, 11 ... Exhaust port, 15 ... Cylindrical body, 1
6, 17...hole, 20...plate.
Claims (1)
偏向させ、その偏向量を検出することによつて前
記ビームを構成する各粒子の質量またはエネルギ
を分析するようにした粒子分析器において、前記
偏向場に至る前記被分析粒子ビームの通路に近接
させて前記偏向場のフリンジ場の影響を阻止する
シールド部材を設けたことを特徴とする粒子分析
器。1. A particle analyzer configured to analyze the mass or energy of each particle constituting the beam by deflecting a particle beam to be analyzed using a deflection field such as an electric field or a magnetic field and detecting the amount of deflection. A particle analyzer characterized in that a shield member is provided in close proximity to the path of the particle beam to be analyzed leading to the deflection field to block the influence of a fringe field of the deflection field.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58227871A JPS60121659A (en) | 1983-12-02 | 1983-12-02 | Particle analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58227871A JPS60121659A (en) | 1983-12-02 | 1983-12-02 | Particle analyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60121659A JPS60121659A (en) | 1985-06-29 |
| JPH0534772B2 true JPH0534772B2 (en) | 1993-05-24 |
Family
ID=16867653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58227871A Granted JPS60121659A (en) | 1983-12-02 | 1983-12-02 | Particle analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60121659A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9813327D0 (en) * | 1998-06-19 | 1998-08-19 | Superion Ltd | Apparatus and method relating to charged particles |
-
1983
- 1983-12-02 JP JP58227871A patent/JPS60121659A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60121659A (en) | 1985-06-29 |
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