JPS6037638B2 - gas laser equipment - Google Patents
gas laser equipmentInfo
- Publication number
- JPS6037638B2 JPS6037638B2 JP11007880A JP11007880A JPS6037638B2 JP S6037638 B2 JPS6037638 B2 JP S6037638B2 JP 11007880 A JP11007880 A JP 11007880A JP 11007880 A JP11007880 A JP 11007880A JP S6037638 B2 JPS6037638 B2 JP S6037638B2
- Authority
- JP
- Japan
- Prior art keywords
- output
- reference voltage
- current
- gas laser
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 14
- 230000002265 prevention Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 12
- 230000006378 damage Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 235000006732 Torreya nucifera Nutrition 0.000 description 1
- 244000111306 Torreya nucifera Species 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/09705—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser with particular means for stabilising the discharge
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Description
【発明の詳細な説明】
本発明はガスレーザ装置に関し、特にレーザ出力を安定
化させるためにガスレーザ管の放電電流を定電流制御す
る定電流制御回路を具備するガスレーザ装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a gas laser device, and more particularly to a gas laser device equipped with a constant current control circuit that controls the discharge current of a gas laser tube at a constant current in order to stabilize the laser output.
レーザはその多くの用途のうえで出力の安定化が要求さ
れる場合が多い、レーザ出力の変動は、放電電流の変化
によって起る場合が多く、特にアルゴンレーザ、クリプ
トンレーザ等のィオンレ−ザにあっては、レーザ出力は
放電電流の２〜４乗に比例して変動するため、放電電流
の安定化は不可欠である。ガスレーザ管の放電電流を定
電流制御するには、基準電圧発生器の基準電圧Ｖｓ，と
放電電流によって生ずる電流検出抵抗両端電圧Ｖ，Ｎの
差電圧信号を制御素子に加えて放電電流が一定になるよ
う制御する。すなわち、前記の定電流制御状態では、入
力電源電圧の上昇やガスレーザ管の放電電圧の下降によ
って、電流制御素子の負担電圧や増加し、電流制御素子
の負担電圧が増加し電流制御素子の耐圧や出力容量超過
による破壊が起こる。０ 従来この種のガスレーザ装置
では、第１図に示すように入力電源電流が過大となった
時、プレイカー２８によって主直流電源１の入力を遮断
する方式を用いていたため、電流制御素子２の耐圧力出
力容量超過による破壊は防ぐことはできなかった。Laser output is often required to be stabilized for many of its applications. Fluctuations in laser output are often caused by changes in discharge current, especially for ion lasers such as argon lasers and krypton lasers. Since the laser output varies in proportion to the second to fourth power of the discharge current, stabilization of the discharge current is essential. To control the discharge current of the gas laser tube at a constant current, a voltage difference signal between the reference voltage Vs of the reference voltage generator and the voltage V, N across the current detection resistor generated by the discharge current is applied to the control element to keep the discharge current constant. control so that That is, in the constant current control state described above, the burden voltage of the current control element increases due to an increase in the input power supply voltage and a fall in the discharge voltage of the gas laser tube. Destruction occurs due to excess output capacity. 0 Conventionally, this type of gas laser device used a method in which the input of the main DC power supply 1 was cut off by the play car 28 when the input power supply current became excessive as shown in FIG. It was not possible to prevent damage caused by exceeding the pressure output capacity.
本発明の目的は、定電流制御回路の電流制御素子の耐圧
や出力容量による破壊を防ぐための保護回路を具備する
ガスレーザ装置を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a gas laser device equipped with a protection circuit for preventing breakdown due to breakdown voltage or output capacitance of a current control element of a constant current control circuit.
本発明は、ガスレーザ管と、このレーザ管を放電させる
電力を供給するための２組の直列に接続された整流回路
と、レーザ管の放電電流回路に挿入された第１の電流検
出低抗の出力電圧と基準電圧発生器からの基準電圧を入
力とする第１の比較増幅器と、放電電流回路に挿入され
第１の比較増幅器の出力により制御される定電流素子と
を具備するガスレーザ装置において、２組の直列に接続
された整流回路の中点と定電流素子出力端との間に逆流
防止用のダイオードを介して接続された第２の電流検出
抵抗と、第２の電流検出抵抗の出力電圧と基準電圧発生
器からの基準電圧を入力とする第２の比較増幅器と、第
２の比較増幅器の出力により整流回路の入力を切断する
手段とを具備したことを特徴とする。The present invention includes a gas laser tube, two series-connected rectifier circuits for supplying power to discharge the laser tube, and a first current detection resistor inserted into the discharge current circuit of the laser tube. A gas laser device comprising a first comparison amplifier which receives an output voltage and a reference voltage from a reference voltage generator as input, and a constant current element inserted into a discharge current circuit and controlled by the output of the first comparison amplifier, A second current detection resistor connected via a backflow prevention diode between the midpoint of the two series-connected rectifier circuits and the output terminal of the constant current element, and the output of the second current detection resistor. The present invention is characterized by comprising a second comparator amplifier which inputs the voltage and a reference voltage from a reference voltage generator, and means for cutting off the input of the rectifier circuit using the output of the second comparator amplifier.
以下第２図の実施例について本発明を具体的に説明する
。The present invention will be specifically described below with reference to the embodiment shown in FIG.
図の整流回路１９の（十）側を電流制御用トランジスタ
２、電流検出抵抗３を通してガスレーザ管のアノード９
に接続し、整流回路１９の（一）側を整流回路２０、ト
リガ回路１４、トランス１５のヒータ差線１６を通して
レーザ管４のカソード８に接続する。The (10) side of the rectifier circuit 19 shown in the figure is passed through the current control transistor 2 and the current detection resistor 3 to the anode 9 of the gas laser tube.
The (1) side of the rectifier circuit 19 is connected to the cathode 8 of the laser tube 4 through the rectifier circuit 20, the trigger circuit 14, and the heater difference wire 16 of the transformer 15.
また整流回路１９の（一）側と整流回路２０の（十）側
との接続点にダイオード２５のアノード側を電流検出抵
抗２６を通して電流制御用トランジスタ２のェミッタに
接続する。定電流制御状態では、基準電圧発生器７の基
準電圧Ｖｓｌと電流検出抵抗３の出力電圧ＶＩＮとの差
電圧を第１の比較増幅器６の増幅し、電流制御用トラン
ジスタ２のベースに供給し、差電圧が川こなるように制
御している。ここでレーザ管４のアノード９、カソード
８間の放電電圧が下降や入力電源電圧の上昇等で、電流
制御用トランジスタ２の負担電圧ＶＴＲが整流回路１９
の出力電圧Ｖｏｌより大きくなると、ダイオード２５は
ＯＮとなり、電流検出抵抗２６，３を通して放電電流は
流れ電流制御用トランジスタ２には電流は流れなくなり
電流検出抵抗２６の出力電圧Ｖ。は第２の比較増幅器１
０で増幅され、切断回路１２に加えられ、開閉器１３を
開き整流回路１９，２０の出力電源を断つ。よって、整
流回路１９の出力電圧Ｖ。Further, the anode side of the diode 25 is connected to the emitter of the current control transistor 2 through a current detection resistor 26 at the connection point between the (1) side of the rectifier circuit 19 and the (10) side of the rectifier circuit 20. In the constant current control state, the difference voltage between the reference voltage Vsl of the reference voltage generator 7 and the output voltage VIN of the current detection resistor 3 is amplified by the first comparison amplifier 6 and supplied to the base of the current control transistor 2, It is controlled so that the voltage difference is constant. Here, due to a drop in the discharge voltage between the anode 9 and cathode 8 of the laser tube 4 or an increase in the input power supply voltage, the burden voltage VTR of the current control transistor 2 increases to the rectifier circuit 19.
When the output voltage becomes higher than the output voltage Vol of the current detection resistor 26, the diode 25 is turned on, a discharge current flows through the current detection resistors 26 and 3, and no current flows to the current control transistor 2, and the output voltage of the current detection resistor 26 becomes V. is the second comparator amplifier 1
0 and is applied to the disconnection circuit 12, which opens the switch 13 and cuts off the output power of the rectifier circuits 19 and 20. Therefore, the output voltage V of the rectifier circuit 19.
，を電流制御用トランジスタ２の負担許容電圧以下に設
定しておくことにより、電流制御用トランジスタ２の負
担電圧上昇と放電電流による耐圧、出力容量超過による
破壊を防止し、整流回路１９，２０の破壊をも防止する
。またトランス１５を使用せず、整流回路１９の出力電
圧Ｖｏ，が電流制御用トランジスタ２の負担電圧以下に
なるような設計でも、抵抗２３を分圧抵抗として使用し
、抵抗２３の中間点をダイオード２５のアノードに接続
する方法も本発明に含まれる。, below the allowable load voltage of the current control transistor 2, it is possible to prevent an increase in the load voltage of the current control transistor 2, withstand voltage due to the discharge current, and damage due to an excess of the output capacity, and to prevent the rectifier circuits 19 and 20 It also prevents destruction. Furthermore, even in a design in which the transformer 15 is not used and the output voltage Vo of the rectifier circuit 19 is below the burden voltage of the current control transistor 2, the resistor 23 can be used as a voltage dividing resistor, and the midpoint of the resistor 23 can be connected to a diode. A method of connecting to 25 anodes is also included in the invention.
第１図は従来のガスレーザ装置を示すブロック図、第２
図は本発明の一実施例を示すブロック図である。
１・・…・主直流電源、２・・・・・・電流制御素子（
電流制御用トランジスタ）、３，２６・・・…電流検出
抵抗、４・・・・・・し−ザ管、５，５′・・・・・・
光共振器、６・・・・・・第１の比較増幅器、７・・・
・・・基準電圧発生器、８・・・・・・カソード、９・
・・・・・アノード、１１…・・・基準電圧発生器、１
０・・・・・・第２の比較増幅器、１２・・・・・・切
断回路、１３・・・・・・開閉器、１４・・・・・・ト
リガ回路、１５・・・・・・電源トランス、１６……ヒ
ータ巻線、１７，１８・・・・・・２次巻線、１９，２
０・・・・・・整流回路、２１，２２・・・・・・平滑
コンデンサ、２３，２４……抵抗、２５…・・・ダイオ
ード、２７，２７′，２７″・・・・・・一次巻線、２
８・・・・・・プレイカー。
球ノ図茅２図Figure 1 is a block diagram showing a conventional gas laser device, Figure 2 is a block diagram showing a conventional gas laser device.
The figure is a block diagram showing one embodiment of the present invention. 1... Main DC power supply, 2... Current control element (
current control transistor), 3, 26... current detection resistor, 4... the tube, 5, 5'...
Optical resonator, 6... First comparison amplifier, 7...
...Reference voltage generator, 8...Cathode, 9.
... Anode, 11 ... Reference voltage generator, 1
0... Second comparison amplifier, 12... Cutting circuit, 13... Switch, 14... Trigger circuit, 15... Power transformer, 16... Heater winding, 17, 18... Secondary winding, 19, 2
0... Rectifier circuit, 21, 22... Smoothing capacitor, 23, 24... Resistor, 25... Diode, 27, 27', 27''... Primary winding, 2
8... Play car. Kyu no zu kaya 2
Claims (1)
供給するための２組の直列に接続された整流回路と、前
記レーザ管の放電電流回路に挿入された第１の電流検出
低抗の出力電圧と基準電圧発生器からの基準電圧を出力
とする第１の比較増幅器と、前記放電電流回路に挿入さ
れ前記第１の比較増幅器の出力により制御される定電流
素子とを具備するガスレーザ装置において、前記２組の
直列に接続された整流回路の中点と前記定電流素子出力
端との間に逆流防止用のダイオードを介して接続された
第２の電流検出抵抗と、第２の電流検出抵抗の出力電圧
と基準電圧発生器からの基準電圧を入力とする第２の比
較増幅器と、前記第２の比較増幅器の出力により前記整
流回路の入力を切断する手段とを具備したことを特徴と
するガスレーザ装置。1. A gas laser tube, two series-connected rectifier circuits for supplying power to discharge the laser tube, and an output voltage of a first current detection resistor inserted into the discharge current circuit of the laser tube. and a first comparison amplifier that outputs a reference voltage from a reference voltage generator, and a constant current element inserted into the discharge current circuit and controlled by the output of the first comparison amplifier, a second current detection resistor connected via a backflow prevention diode between the midpoint of the two series-connected rectifier circuits and the output terminal of the constant current element; and a second current detection resistor. and a second comparison amplifier which inputs the output voltage of the reference voltage generator and the reference voltage from the reference voltage generator, and means for cutting off the input of the rectifier circuit by the output of the second comparison amplifier. Gas laser equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11007880A JPS6037638B2 (en) | 1980-08-11 | 1980-08-11 | gas laser equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11007880A JPS6037638B2 (en) | 1980-08-11 | 1980-08-11 | gas laser equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5735390A JPS5735390A (en) | 1982-02-25 |
| JPS6037638B2 true JPS6037638B2 (en) | 1985-08-27 |
Family
ID=14526468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11007880A Expired JPS6037638B2 (en) | 1980-08-11 | 1980-08-11 | gas laser equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6037638B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02145340U (en) * | 1989-05-11 | 1990-12-10 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0682875B2 (en) * | 1986-10-15 | 1994-10-19 | フアナツク株式会社 | High frequency discharge excitation laser device |
-
1980
- 1980-08-11 JP JP11007880A patent/JPS6037638B2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02145340U (en) * | 1989-05-11 | 1990-12-10 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5735390A (en) | 1982-02-25 |
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