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JPS6262436B2 - - Google Patents
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JPS6262436B2 - - Google Patents

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Publication number
JPS6262436B2
JPS6262436B2 JP56110139A JP11013981A JPS6262436B2 JP S6262436 B2 JPS6262436 B2 JP S6262436B2 JP 56110139 A JP56110139 A JP 56110139A JP 11013981 A JP11013981 A JP 11013981A JP S6262436 B2 JPS6262436 B2 JP S6262436B2
Authority
JP
Japan
Prior art keywords
insulating substrate
layer
display panel
lower electrode
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56110139A
Other languages
Japanese (ja)
Other versions
JPS5812288A (en
Inventor
Masayuki Wakitani
Kyotake Sato
Terunobu Miura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56110139A priority Critical patent/JPS5812288A/en
Publication of JPS5812288A publication Critical patent/JPS5812288A/en
Publication of JPS6262436B2 publication Critical patent/JPS6262436B2/ja
Granted legal-status Critical Current

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Description

【発明の詳細な説明】 本発明はエレクトロルミネツセンス(以下EL
と略称する)表示パネルに係り、特に低電圧駆動
化を図つたEL表示パネルの基板構造に関するも
のである。
[Detailed Description of the Invention] The present invention relates to electroluminescence (hereinafter referred to as EL).
The present invention relates to display panels (abbreviated as ), and in particular to the substrate structure of EL display panels that are driven at low voltages.

近年、EL層を誘電体層でサンドイツチ状には
さんだ、いわゆる二重絶縁膜三層構造で構成した
EL表示パネルが開発、実用化されている。この
ようなEL表示パネルの低電圧駆動化を図る一手
段として誘電体層をチタン酸鉛(PbTiO3)のよう
な強誘電体層で形成して、EL層に印加される電
圧を実質的に大きくするという方法が採られてい
る。
In recent years, a so-called double insulating three-layer structure has been developed in which the EL layer is sandwiched between dielectric layers in a sandwich-like pattern.
EL display panels have been developed and put into practical use. One way to drive such EL display panels at low voltages is to form the dielectric layer with a ferroelectric layer such as lead titanate (PbTiO 3 ), which substantially reduces the voltage applied to the EL layer. The method is to make it bigger.

このようなEL表示パネルの構成は一般に第1
図に示すように透明ガラス板からなる絶縁基板1
を用い、その絶縁基板1上に例えば線状のインジ
ウム錫酸化物(ITO)からなる透明な下部電極2
を平行に多数配設し、それら下部電極2表面を含
む絶縁基板1表面にPbTiO3からなる第1の誘電
体層3を介してマンガンを添加した硫化亜鉛
(ZnS:Mn)のようなEL材料からなるEL層4を
形成し、さらに該EL層4上に例えばアルミナ
(Al2O3)からなる第2の誘電体層5を介して線状
の例えばアルミニウム(Al)の上部電極6を前
記下部電極2と直交する関係で並設してある。そ
して下部電極2と上部電極6との間に選択的に電
圧を印加することにより、その交点部のEL層4
が発光することを利用して所望の形象を絶縁基板
1側から観察するようになつている。
The configuration of such an EL display panel is generally the first one.
As shown in the figure, an insulating substrate 1 made of a transparent glass plate
A transparent lower electrode 2 made of, for example, linear indium tin oxide (ITO) is placed on the insulating substrate 1.
An EL material such as zinc sulfide (ZnS:Mn) in which a large number of are arranged in parallel and manganese is added to the surface of the insulating substrate 1 including the surface of the lower electrode 2 through a first dielectric layer 3 made of PbTiO 3 . Further, a linear upper electrode 6 made of, for example, aluminum (Al) is formed on the EL layer 4 via a second dielectric layer 5 made of, for example, alumina (Al 2 O 3 ). It is arranged in parallel with the lower electrode 2 in a relationship perpendicular to it. By selectively applying a voltage between the lower electrode 2 and the upper electrode 6, the EL layer 4 at the intersection point is
A desired shape can be observed from the insulating substrate 1 side by utilizing the fact that it emits light.

ところで前述のような構成のEL表示パネルの
絶縁基板1として用いるガラス板は所定の耐熱性
ならびに熱膨張係数を有し、さらに表面が平滑で
あることが必要でである。すなわち第1の誘電体
層3となるPbTiO3膜は通常高周波スパツタリン
グで成膜するのであるが、その際基板温度を600
℃程度に保持した状態で成膜することから、その
温度において変形しないような耐熱ガラス板が必
要となる。またEL層4の形成後、そのEL層を
580℃程度で熱処理つまりアニール処理するの
で、その際のEL層のクラツク等を防止するため
に熱膨張係数が40〜90(×10-7-1)程度のもの
が必要となる。このような耐熱性ならびに熱膨張
係数を兼備したガラス板は極めて高価であり、ま
たそのような特性を有した大形のガラス板の入手
は困難であるのが実状であつて、低電圧駆動化を
図つたEL表示パネルの低価格化ならびに大形化
の大きな障害となつていた。
By the way, the glass plate used as the insulating substrate 1 of the EL display panel having the above-mentioned structure needs to have a predetermined heat resistance and coefficient of thermal expansion, and also need to have a smooth surface. In other words, the PbTiO 3 film that becomes the first dielectric layer 3 is usually formed by high-frequency sputtering, but at that time the substrate temperature is kept at 600°C.
Since the film is formed while being maintained at about 0.degree. C., a heat-resistant glass plate that does not deform at that temperature is required. Also, after forming the EL layer 4, the EL layer is
Since heat treatment, or annealing, is performed at approximately 580°C, a material with a thermal expansion coefficient of approximately 40 to 90 (x10 -7 °C -1 ) is required to prevent cracks in the EL layer during this process. Glass plates with such heat resistance and thermal expansion coefficient are extremely expensive, and it is difficult to obtain large glass plates with such characteristics. This has been a major obstacle to lowering the price and increasing the size of EL display panels that aim to achieve this.

本発明は前述の点に鑑みなされたもので、その
目的は安価な絶縁基板を用いた構造の低電圧駆動
可能なEL表示パネルを提供することであり、そ
の特徴は絶縁基板上に配設した所定形状の下部電
極と、該下部電極上に対向配置した上部電極との
間にEL層をそなえてなるEL表示パネルにおい
て、前記絶縁基板をアルミナ基体上にガラス層を
積層した多層絶縁基板で構成してなるところにあ
る。
The present invention has been made in view of the above-mentioned points, and its purpose is to provide an EL display panel that uses an inexpensive insulating substrate and can be driven at low voltage. In an EL display panel comprising an EL layer between a lower electrode of a predetermined shape and an upper electrode placed oppositely on the lower electrode, the insulating substrate is composed of a multilayer insulating substrate in which a glass layer is laminated on an alumina substrate. It's about to happen.

以下本発明の実施例につき図面を参照して説明
する。
Embodiments of the present invention will be described below with reference to the drawings.

第2図は本発明によるEL表示パネルの構造を
示す要部断面図であり、11は多層絶縁基板であ
つて、その多層絶縁基板11上には例えばモリブ
デン(Mo)のような高融点金属からなる線状の
下部電極12が並設され、その下部電極12表面
を含む多層絶縁基板11表面にはPbTiO3の第1
の誘電体層13、ZnS:MnからなるEL層14お
よびAl2O3からなる第2の誘電体層15が順次積
層され、さらに誘電体層15上にITOからなる線
状の透明な上部電極16が前記下部電極12と直
交する関係で並設してある。そして下部電極12
と上部電極16との各交点部で発光セルを画定し
ている点は従来のものと変らないが、本発明の
EL表示パネルの従来のものと大きく異なる点は
次の点である。すなわち絶縁基板として高価なガ
ラス板を用いる代りに多層絶縁基板11を用いた
ところにある。この多層絶縁基板11はアルミナ
基体11b上にガラス層11aを積層したもの
で、グレーズ被覆アルミナ基板と呼ばれてハイブ
リツド集積回路用等の基板として広く用いられて
いるものである。このようなグレーズ被覆アルミ
ナ基板は表面の平滑性ならびに耐熱性に優れかつ
熱膨張係数も40〜90(×10-7-1)のものが市販
されており、このような特性を有するガラス板に
比べて容易かつ安価に入手することができる。
FIG. 2 is a cross-sectional view of a main part showing the structure of an EL display panel according to the present invention. Reference numeral 11 denotes a multilayer insulating substrate. Linear lower electrodes 12 are arranged in parallel, and the surface of the multilayer insulating substrate 11 including the surface of the lower electrodes 12 is coated with a first layer of PbTiO 3 .
A dielectric layer 13 made of ZnS:Mn, an EL layer 14 made of ZnS:Mn, and a second dielectric layer 15 made of Al 2 O 3 are successively laminated, and a linear transparent upper electrode made of ITO is further formed on the dielectric layer 15. 16 are arranged in parallel with orthogonal to the lower electrode 12. and the lower electrode 12
The point that a light emitting cell is defined at each intersection between the upper electrode 16 and the upper electrode 16 is the same as in the conventional one, but the present invention
The major differences from conventional EL display panels are as follows. That is, instead of using an expensive glass plate as an insulating substrate, a multilayer insulating substrate 11 is used. This multilayer insulating substrate 11 has a glass layer 11a laminated on an alumina base 11b, and is called a glaze-coated alumina substrate and is widely used as a substrate for hybrid integrated circuits and the like. Such glaze-coated alumina substrates are commercially available with excellent surface smoothness and heat resistance, and have a coefficient of thermal expansion of 40 to 90 (×10 -7 °C -1 ). It is easier and cheaper to obtain than.

そこで本発明においてはEL表示パネルを製作
する上で極めて好都合な特性を有する前記のよう
なグレーズ被覆アルミナ基板を多層絶縁基板11
として用いている。ただこのような多層絶縁基板
11のアルミナ基体11bは不透明であるので、
発光セルからの光を基板11側から取り出すこと
ができない。そこで発光セルからの光を上部電極
16側から取り出すべく、本実施例のEL表示パ
ネルでは、上部電極16をITOのような透明導電
膜で形成し、下部電極12を光反射性に優れかつ
高融点の金属例えばMo膜で形成してある。
Therefore, in the present invention, a glaze-coated alumina substrate as described above, which has extremely advantageous characteristics in manufacturing an EL display panel, is used as a multilayer insulating substrate 11.
It is used as However, since the alumina base 11b of such a multilayer insulating substrate 11 is opaque,
Light from the light emitting cells cannot be extracted from the substrate 11 side. Therefore, in order to extract the light from the light emitting cells from the upper electrode 16 side, in the EL display panel of this embodiment, the upper electrode 16 is formed of a transparent conductive film such as ITO, and the lower electrode 12 is formed with a transparent conductive film such as ITO. It is made of a metal with a melting point, such as a Mo film.

かくして、絶縁基板として高価なガラス板の代
りに安価な多層絶縁基板11を用いて、従来の製
造工程を殆んど変更することなく低電圧駆動化を
図つたEL表示パネルを安価に製作することがで
きるのである。
In this way, an inexpensive multilayer insulating substrate 11 is used instead of an expensive glass plate as an insulating substrate, and an EL display panel that can be driven at a low voltage can be manufactured at low cost without changing the conventional manufacturing process. This is possible.

なお前述の実施例では第1の誘電体層13を
PbTiO3で形成した場合について述べたが、それ
に限らずY2O3等のその他の誘電体層で形成して
もよく、またEL層14を誘電体層13および1
5でサンドイツチ状にはさんだ二重絶縁膜三層構
造で構成したEL表示パネルに限らず、EL層を下
部電極と上部電極とで直接はさんだようなDC駆
動形式のEL表示パネルに適用しても同様の効果
を得ることができる。
Note that in the above embodiment, the first dielectric layer 13 is
Although the case where the EL layer 14 is formed of PbTiO 3 has been described, it is not limited thereto, and may be formed of other dielectric layers such as Y 2 O 3 .
The present invention can be applied not only to EL display panels constructed with a three-layer structure of double insulating films sandwiched in a sandwich pattern, but also to DC-driven EL display panels in which the EL layer is directly sandwiched between a lower electrode and an upper electrode. You can also get the same effect.

以上の説明から明らかなように要するに本発明
は、絶縁基板上に配設した所定形状の下部電極
と、該下部電極上に対向配置した上部電極との間
にEL層をそなえてなるEL表示パネルにおいて、
前記絶縁基板をアルミナ基体上にガラス層を積層
した多層絶縁基板で構成するようにしたもので、
従来の高価なガラス基板の代りに安価な多層絶縁
基板を用いることにより、低電圧駆動可能なEL
表示パネルが安価に実現できる利点を有する。
As is clear from the above description, in short, the present invention provides an EL display panel comprising an EL layer between a lower electrode of a predetermined shape disposed on an insulating substrate and an upper electrode disposed opposite to the lower electrode. In,
The insulating substrate is composed of a multilayer insulating substrate in which a glass layer is laminated on an alumina base,
EL that can be driven at low voltage by using an inexpensive multilayer insulating substrate instead of the conventional expensive glass substrate
This has the advantage that the display panel can be realized at low cost.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来のEL表示パネルの構造を説明す
るための要部断面図、第2図は本発明のEL表示
パネルの構造を説明するための要部断面図であ
る。 1:絶縁基板、2,12:下部電極、3,5,
13,15:誘電体層、4,14:EL層、6,
16:上部電極、11:多層絶縁基板、11a:
ガラス層、11b:アルミナ基体。
FIG. 1 is a sectional view of a main part for explaining the structure of a conventional EL display panel, and FIG. 2 is a sectional view of a main part for explaining the structure of an EL display panel of the present invention. 1: Insulating substrate, 2, 12: Lower electrode, 3, 5,
13, 15: dielectric layer, 4, 14: EL layer, 6,
16: Upper electrode, 11: Multilayer insulating substrate, 11a:
Glass layer, 11b: alumina substrate.

Claims (1)

【特許請求の範囲】[Claims] 1 絶縁基板上に配設した所定形状の下部電極
と、該下部電極上に対向配置した上部電極との間
にEL層をそなえてなるEL表示パネルにおいて、
前記絶縁基板をアルミナ基体上にガラス層を積層
した多層絶縁基板で構成してなることを特徴とす
るEL表示パネル。
1. In an EL display panel comprising an EL layer between a lower electrode of a predetermined shape disposed on an insulating substrate and an upper electrode disposed opposite to the lower electrode,
An EL display panel characterized in that the insulating substrate is a multilayer insulating substrate in which a glass layer is laminated on an alumina base.
JP56110139A 1981-07-14 1981-07-14 El display panel Granted JPS5812288A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56110139A JPS5812288A (en) 1981-07-14 1981-07-14 El display panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56110139A JPS5812288A (en) 1981-07-14 1981-07-14 El display panel

Publications (2)

Publication Number Publication Date
JPS5812288A JPS5812288A (en) 1983-01-24
JPS6262436B2 true JPS6262436B2 (en) 1987-12-26

Family

ID=14528013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56110139A Granted JPS5812288A (en) 1981-07-14 1981-07-14 El display panel

Country Status (1)

Country Link
JP (1) JPS5812288A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4563539B2 (en) * 2000-02-07 2010-10-13 アイファイヤー アイピー コーポレイション Composite substrate and EL device using the same

Also Published As

Publication number Publication date
JPS5812288A (en) 1983-01-24

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