JPS6351344B2 - - Google Patents
Info
- Publication number
- JPS6351344B2 JPS6351344B2 JP55135888A JP13588880A JPS6351344B2 JP S6351344 B2 JPS6351344 B2 JP S6351344B2 JP 55135888 A JP55135888 A JP 55135888A JP 13588880 A JP13588880 A JP 13588880A JP S6351344 B2 JPS6351344 B2 JP S6351344B2
- Authority
- JP
- Japan
- Prior art keywords
- tube
- electrode
- insulating
- discharge lamp
- glass tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
- H01J61/822—High-pressure mercury lamps
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Description
【発明の詳細な説明】
本発明は露光装置の光源として用いられる放電
灯に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a discharge lamp used as a light source of an exposure apparatus.
集積回路やカラー受像管の製造において、微細
なパターン加工を光学的に行なうが、このとき使
用される露光装置の光源としては安定に発光する
放電灯が用いられる。 In the manufacture of integrated circuits and color picture tubes, fine pattern processing is performed optically, and a discharge lamp that emits stable light is used as a light source for an exposure device used at this time.
第１図は露光装置に用いられる従来の発光装置
の平面断面図、第２図は第１図の−断面図で
ある。図において、１はランプハウス台で、ガイ
ドピン２ａ，２ｂ，２ｃによつて位置決めされ、
固定部３ａ，３ｂを締めつけることにより基台上
にセツテイングされる。ランプハウス台１には、
上面から凹んで円弧状の管収容部１ａ、その両端
の電極収容部１ｂ，１ｃおよび電極収容部１ｂ，
１ｃから斜め下方に貫通して入路１ｄ、出路１ｅ
がそれぞれ形成され、さらに入路１ｄ、出路１ｅ
の各開口端には流入管４ａ、流出管４ｂがそれぞ
れ接合されている。また、ランプハウス台１の下
面からは先端が電極収容部１ｂ，１ｃ内に配置さ
れるように電力供給端子５ａ，５ｂがねじ込ま
れ、気密性を保持するためにエポキシレジンで固
定されている。放電部が円弧状に形成された放電
灯は、ガラス管６とその両端に固定されたステム
７ａ，７ｂからなり、ステム７ａ，７ｂをロケー
タ９に固定された取付板８ａ，８ｂにはんだ付け
して固定することによりロケータ９に取付けられ
る。ロケータ９は両端にピン孔１０ａ，１０ｂを
有し、ランプハウス台１の上面に植設されたガイ
ドピン１１ａ，１１ｂにピン孔１０ａ，１０ｂを
はめ込むことにより、ロケータ９はランプハウス
台１上に正しく位置決めして取付けられる。この
とき、ガラス管６、ステム７ａ，７ｂは管収容部
１ａ、電極収容部１ｂ，１ｃ内にそれぞれ収容さ
れる。また、１２ａ，１２ｂはリード線で、一端
は取付板８ａ，８ｂにはんだ付けされ、他端は止
めねじ１３ａ，１３ｂによつて電力供給端子５
ａ，５ｂにねじ止めされている。 FIG. 1 is a plan sectional view of a conventional light emitting device used in an exposure apparatus, and FIG. 2 is a sectional view taken along the line taken from FIG. 1. In the figure, 1 is a lamp house stand, which is positioned by guide pins 2a, 2b, and 2c.
It is set on the base by tightening the fixing parts 3a and 3b. On lamp house stand 1,
An arcuate tube accommodating part 1a recessed from the top surface, electrode accommodating parts 1b and 1c at both ends thereof, and an electrode accommodating part 1b,
Penetrating diagonally downward from 1c, there is an entrance 1d and an exit 1e.
are formed respectively, and furthermore, an input route 1d and an output route 1e are formed.
An inflow pipe 4a and an outflow pipe 4b are connected to each open end of the pipe. Further, power supply terminals 5a and 5b are screwed into the lower surface of the lamp house stand 1 so that their tips are disposed within the electrode accommodating portions 1b and 1c, and are fixed with epoxy resin to maintain airtightness. The discharge lamp whose discharge part is formed in an arc shape consists of a glass tube 6 and stems 7a and 7b fixed to both ends of the glass tube.The stems 7a and 7b are soldered to mounting plates 8a and 8b fixed to a locator 9. It is attached to the locator 9 by fixing it. The locator 9 has pin holes 10a and 10b at both ends, and by fitting the pin holes 10a and 10b into the guide pins 11a and 11b planted on the top surface of the lamp house base 1, the locator 9 can be mounted on the lamp house base 1. Correctly positioned and installed. At this time, the glass tube 6 and the stems 7a and 7b are accommodated in the tube accommodating part 1a and the electrode accommodating parts 1b and 1c, respectively. Further, 12a and 12b are lead wires, one end of which is soldered to the mounting plates 8a and 8b, and the other end of which is connected to the power supply terminal 5 by means of setscrews 13a and 13b.
It is screwed to a and 5b.
一方、ランプハウス台１の上面にはガラスから
なるフエースプレート１４、およびフエースプレ
ート１４上に開口１５ａを有する蓋１５が設けら
れ、蓋１５はＯリング１６ａ，１６ｂを介してラ
ンプハウス台１に圧接されている。したがつて、
管収容部１ａ、電極収容部１ｂ，１ｃは気密に保
持される。 On the other hand, a face plate 14 made of glass is provided on the upper surface of the lamp house base 1, and a lid 15 having an opening 15a is provided on the face plate 14, and the lid 15 is pressed against the lamp house base 1 via O-rings 16a and 16b. has been done. Therefore,
The tube accommodating portion 1a and the electrode accommodating portions 1b and 1c are kept airtight.
このような構成で、流入管４ａから冷却水を流
入させると、矢印に示すように、水は入路１ｄ、
電極収容部１ｂ、管収容部１ａ、電極収容部１
ｃ、出路１ｅを経て流出管４ｂから流出される。
この水によつて放電灯は水冷される。そして、電
力供給端子５ａ，５ｂを電源に接続するとガラス
管６の中心部は発光し、この光はフエースプレー
ト１４、開口１５ａを経て放射される。 With this configuration, when cooling water flows in from the inflow pipe 4a, the water flows through the inlet channel 1d, as shown by the arrow.
Electrode accommodating part 1b, tube accommodating part 1a, electrode accommodating part 1
c, it flows out from the outflow pipe 4b via the outlet path 1e.
This water cools the discharge lamp. When the power supply terminals 5a and 5b are connected to a power source, the center of the glass tube 6 emits light, and this light is emitted through the face plate 14 and the opening 15a.
この場合、ステムは放電灯の電極に接続されて
いるので高電圧部分が水中に露出するという問題
がある。 In this case, since the stem is connected to the electrodes of the discharge lamp, there is a problem that the high voltage part is exposed in the water.
第３図は放電灯の電極部の断面図である。ガラ
ス管６の先端の電極部には水銀１８が収容され、
さらにこの水銀１８の面から管内に先端部が突き
出した電極１９が封着されている。電極１９の他
方の端はガラス管６の外に引出され、この部分に
裸導線のリード線２０が溶接されている。ガラス
管６の外周面には電極１９とリード線２０の溶接
部分を覆うようにステム７ａ，７ｂがかぶされ、
その間にはエポキシレジン２１が充填され互いに
固定されている。そして、ステム７ａ，７ｂの端
には封止金具２２がはめ込まれ、さらに、ステム
７ａ，７ｂとリード線２０の間がはんだ２３によ
つて接続されている。 FIG. 3 is a sectional view of the electrode portion of the discharge lamp. Mercury 18 is housed in the electrode section at the tip of the glass tube 6,
Furthermore, an electrode 19 whose tip protrudes into the tube from the surface of the mercury 18 is sealed. The other end of the electrode 19 is drawn out of the glass tube 6, and a bare lead wire 20 is welded to this portion. Stems 7a and 7b are placed over the outer peripheral surface of the glass tube 6 to cover the welded portion of the electrode 19 and lead wire 20.
The space between them is filled with epoxy resin 21 and fixed to each other. Sealing fittings 22 are fitted into the ends of the stems 7a, 7b, and the stems 7a, 7b and the lead wires 20 are connected by solder 23.
このように従来の放電灯においては、ステムと
電極が接続されているため、水冷時に放電灯が水
中に置かれると高圧の電圧が印加される部分が水
に露出されることになり絶縁保持の点から問題が
あつた。 In conventional discharge lamps, the stem and electrodes are connected, so if the discharge lamp is placed in water during water cooling, the part to which high voltage is applied will be exposed to water, making it difficult to maintain insulation. There was a problem from that point on.
本発明はこのような従来の問題を解決するため
に考えられたもので、その目的とするところは、
電極に接続された導電部品が外部に露出しないよ
うにした放電灯を提供することにある。 The present invention was devised to solve these conventional problems, and its purpose is to:
An object of the present invention is to provide a discharge lamp in which conductive parts connected to electrodes are not exposed to the outside.
このような目的を達成するために、本発明は、
電極の外方突出部に絶縁被覆を施されたリード線
の芯線の先端を接合し、この接続部の周囲に絶縁
チユーブを設け、この絶縁チユーブは一端がガラ
ス管の外周面にかん合し他端がリード線の絶縁被
覆に対向するように形成し、絶縁チユーブ内に絶
縁レジンを充填したものである。さらに、本発明
は電極と芯線の接合部の外周面およびガラス管の
先端部の外周面にまたいでコイルスプリングを弾
力でかん合したものである。 In order to achieve such an objective, the present invention
The tip of the core wire of the lead wire coated with insulation is joined to the outward protruding part of the electrode, and an insulating tube is provided around this connection part. The end is formed to face the insulating coating of the lead wire, and the insulating tube is filled with insulating resin. Further, in the present invention, a coil spring is elastically engaged with the outer circumferential surface of the joint between the electrode and the core wire and the outer circumferential surface of the tip of the glass tube.
以下、本発明を実施例にもとずいて詳細に説明
する。 Hereinafter, the present invention will be explained in detail based on examples.
第４図は本発明に係る放電灯の一実施例の断面
図である。図において、第３図と同一部分には同
一符号を付してある。２５は芯線２５ａの上に絶
縁被覆２５ｂを施したリード線であり、芯線２５
ａの先端は電極１９の外方突出部に溶接されてい
る。２６は所定の長さに形成されたシリコンゴム
からなる絶縁チユーブで、電極１９と芯線２５ａ
の接合部を覆い、一端はガラス管６の外周面に強
くかん合しており、他端はリード線２５の絶縁被
覆２５ｂと対向して重なるようになつている。そ
して、絶縁チユーブ２６の内には、ガラス管６の
先端部、電極１９の外方突出部、リード線２５の
芯線２５ａ、絶縁被覆２５ｂの端部を埋めるよう
にエポキシレジン２７が充填され、また、ステム
７ａ，７ｂと絶縁チユーブ２６との間隙にも同じ
くエポキシレジン２８が充填されている。なお、
２９はシール材である。 FIG. 4 is a sectional view of an embodiment of the discharge lamp according to the present invention. In the figure, the same parts as in FIG. 3 are given the same reference numerals. 25 is a lead wire in which an insulating coating 25b is applied on the core wire 25a;
The tip of a is welded to the outward protrusion of the electrode 19. 26 is an insulating tube made of silicone rubber formed to a predetermined length, and is connected to the electrode 19 and the core wire 25a.
One end is tightly engaged with the outer peripheral surface of the glass tube 6, and the other end faces and overlaps the insulating coating 25b of the lead wire 25. The inside of the insulating tube 26 is filled with epoxy resin 27 so as to fill the tip of the glass tube 6, the outward protrusion of the electrode 19, the core wire 25a of the lead wire 25, and the end of the insulating coating 25b. The gap between the stems 7a, 7b and the insulating tube 26 is also filled with epoxy resin 28. In addition,
29 is a sealing material.
このような構造の放電灯では、ステム自身は電
極から絶縁され、しかもステムから外方に出てい
る部分はすべて絶縁材で電極に接続された導電部
分は全く露出されない。したがつて、放電灯を水
中に配置しても高圧電界が漏れるようなことはな
くなる。 In a discharge lamp with such a structure, the stem itself is insulated from the electrodes, and all parts of the stem extending outward are made of insulating material, so that the conductive parts connected to the electrodes are not exposed at all. Therefore, even if the discharge lamp is placed underwater, the high-voltage electric field will not leak.
第５図は他の実施例の断面図である。図におい
て、第４図と同一部分には同一符号を付してあ
る。３１は電極１９と芯線２５ａの接合部外周面
上およびガラス管６の先端部の外周面上にまたい
で弾力でかん合した補強用のコイルスプリング
で、リード線２５を引張つたり曲げたりしても電
極１９の接合部に外力が加わわらないようにした
ものである。絶縁チユーブ２６はこのコイルスプ
リング３１の外周を覆うように設けられている。
そして、絶縁チユーブ２６の内にはエポキシレジ
ン２７が充填されている。また、ステム３２と絶
縁チユーブ２６およびガラス管６との間にはエポ
キシレジン２８が充填され、かつ、ステム３２と
ガラス管６との間はコイルスプリング３３によつ
て接合されている。なお、３４はシール部材であ
る。コイルスプリングが設けられただけで作用は
前記実施例と同様である。 FIG. 5 is a sectional view of another embodiment. In the figure, the same parts as in FIG. 4 are given the same reference numerals. Reference numeral 31 denotes a reinforcing coil spring elastically engaged over the outer circumferential surface of the joint between the electrode 19 and the core wire 25a and the outer circumferential surface of the tip of the glass tube 6. Also, external force is not applied to the joints of the electrodes 19. The insulating tube 26 is provided so as to cover the outer periphery of the coil spring 31.
The inside of the insulating tube 26 is filled with epoxy resin 27. Further, epoxy resin 28 is filled between the stem 32 and the insulating tube 26 and the glass tube 6, and the stem 32 and the glass tube 6 are joined by a coil spring 33. Note that 34 is a sealing member. The operation is the same as in the previous embodiment except that a coil spring is provided.
このように、本発明に係る放電灯によると、電
極に接続された導電部品が外部には全く露出しな
いので、放電灯を水冷するために水中に配置して
も絶縁不良を起こしたりすることはないという優
れた効果がある。 As described above, according to the discharge lamp according to the present invention, the conductive parts connected to the electrodes are not exposed to the outside at all, so even if the discharge lamp is placed in water for water cooling, insulation failure will not occur. There is an excellent effect that there is no
第１図は発光装置の平面断面図、第２図は第１
図の−断面図、第３図は従来の放電灯の断面
図、第４図は本発明に係る放電灯の一実施例の断
面図、第５図は他の実施例の断面図である。
６……ガラス管、７ａ，７ｂ……ステム、１８
……水銀、１９……電極、２５……リード線、２
５ａ……芯線、２５ｂ……絶縁被覆、２６……絶
縁チユーブ、２７，２８……エポキシレジン、３
１……コイルスプリング。
Figure 1 is a plan sectional view of the light emitting device, and Figure 2 is a cross-sectional view of the light emitting device.
3 is a sectional view of a conventional discharge lamp, FIG. 4 is a sectional view of one embodiment of the discharge lamp according to the present invention, and FIG. 5 is a sectional view of another embodiment. 6...Glass tube, 7a, 7b...Stem, 18
... Mercury, 19 ... Electrode, 25 ... Lead wire, 2
5a... Core wire, 25b... Insulating coating, 26... Insulating tube, 27, 28... Epoxy resin, 3
1...Coil spring.
Claims (1)
に突出するようにそれぞれ電極を封着し、この電
極の外方突出部に絶縁被覆を施されたリード線の
芯線の先端を接合し、この接続部の周囲に一端が
前記ガラス管の外周面にかん合し他端が前記絶縁
被覆に対向する長さを有する絶縁チユーブを設
け、この絶縁チユーブの内に絶縁材料のレジンを
充填したことを特徴とする放電灯。1 Seal electrodes on both ends of the glass tube so that one end is inside the tube and the other end projects outward, and the tip of the core wire of the lead wire coated with insulation is joined to the outwardly projecting part of the electrode. An insulating tube having a length such that one end engages with the outer circumferential surface of the glass tube and the other end faces the insulating coating is provided around this connection part, and the inside of this insulating tube is filled with a resin of an insulating material. A discharge lamp characterized by:
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13588880A JPS5763758A (en) | 1980-10-01 | 1980-10-01 | Discharge lamp |
| US06/306,714 US4482842A (en) | 1980-10-01 | 1981-09-29 | Curved tube type ultra high pressure mercury arc discharge lamp device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13588880A JPS5763758A (en) | 1980-10-01 | 1980-10-01 | Discharge lamp |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1232829A Division JPH02119028A (en) | 1989-09-11 | 1989-09-11 | discharge lamp |
| JP1232828A Division JPH02119042A (en) | 1989-09-11 | 1989-09-11 | discharge lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5763758A JPS5763758A (en) | 1982-04-17 |
| JPS6351344B2 true JPS6351344B2 (en) | 1988-10-13 |
Family
ID=15162132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13588880A Granted JPS5763758A (en) | 1980-10-01 | 1980-10-01 | Discharge lamp |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5763758A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02119028A (en) * | 1989-09-11 | 1990-05-07 | Hitachi Ltd | discharge lamp |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4974783U (en) * | 1972-10-12 | 1974-06-28 | ||
| JPS6351344A (en) * | 1986-08-20 | 1988-03-04 | Daicel Chem Ind Ltd | Recovering method for dialkylene glycol monoethers |
-
1980
- 1980-10-01 JP JP13588880A patent/JPS5763758A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5763758A (en) | 1982-04-17 |
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