JPH03739B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a discharge lamp used as a light source of an exposure apparatus.

In the manufacture of integrated circuits and color picture tubes, fine pattern processing is performed optically, and the light source of the exposure apparatus used at this time is a discharge lamp that emits stable light, for example under a water-cooled structure.

FIG. 1 is a plan sectional view of an example of a conventional light emitting device used in an exposure apparatus, and FIG. 2 is a sectional view taken along the line taken from FIG. 1. In the figure, reference numeral 1 denotes a lamp house stand, which is positioned by guide pins 2a, 2b, 2c, and set on the base by tightening fixing parts 3a, 3b. The lamp house stand 1 includes an arcuate tube housing portion 1a recessed from the top surface;
Electrode accommodating parts 1b, 1c at both ends thereof and an entrance path 1d penetrating diagonally downward from the electrode accommodating parts 1b, 1c;
An exit path 1e is formed, and an input path 1d,
An inflow pipe 4a and an outflow pipe 4b are provided at each open end of the outlet path 1e.
are connected to each other. Further, power supply terminals 5a and 5b are screwed into the lower surface of the lamp house stand 1 so that their tips are disposed within the electrode accommodating portions 1b and 1c, and are fixed with epoxy resin to maintain airtightness. A discharge lamp whose discharge part is formed in an arc shape consists of a transparent insulating tube (hereinafter referred to as a glass tube) made of glass, ceramic, etc. and stems 7a and 7b fixed to both ends of the tube.
Mounting plates 8a and 8b fixed to locator 9
By soldering and fixing the locator 9
mounted on. Locator 9 has pin holes 10 on both ends.
a, 10b, and pin holes 10 are formed in guide pins 11a, 11b planted on the top surface of the lamp house stand 1.
By fitting a and 10b, the locator 9 is correctly positioned and mounted on the lamp house base 1. At this time, the glass tube 6, stems 7a, 7
b is accommodated in the tube accommodating portion 1a and electrode accommodating portions 1b and 1c, respectively. Further, 12a and 12b are lead wires, one end of which is soldered to the mounting plates 8a and 8b, and the other end of which is screwed to the power supply terminals 5a and 5b with setscrews 13a and 13b.

On the other hand, a face plate 14 made of glass is provided on the upper surface of the lamp house base 1, and a lid 15 having an opening 15a is provided on the face plate 14, and the lid 15 is pressed against the lamp house base 1 via O-rings 16a and 16b. ing. Therefore,
The tube accommodating portion 1a and the electrode accommodating portions 1b and 1c are kept airtight.

With such a configuration, when cooling water flows in from the inflow pipe 4a, the water flows through the inlet channel 1d, as shown by the arrow.
Electrode accommodating part 1b, tube accommodating part 1a, electrode accommodating part 1
c, it flows out from the outflow pipe 4b via the outlet path 1e.
This water cools the discharge lamp. When the power supply terminals 5a and 5b are connected to a power source, the center of the glass tube 6 emits light, and this light is emitted through the face plate 14 and the opening 15a.

In this case, since the stem is connected to the electrodes of the discharge lamp, there is a problem that the high voltage part is exposed in the water.

FIG. 3 is a sectional view of an electrode portion of a discharge lamp used in the above-described device. Mercury 18 is housed in an electrode portion at the tip of the glass tube 6, and an electrode 19 made of, for example, tungsten, whose tip portion protrudes into the tube from the surface of the mercury 18 is sealed. The other end of the electrode 19 is drawn out of the glass tube 6, and is connected to an external lead conductor, in this example, a lead wire 20, which is a bare conductor, by means such as welding. Stems 7a and 7 are provided on the outer peripheral surface of the glass tube 6 so as to cover the welded portion of the electrode 19 and the lead wire 20.
b, and the space between them is filled with epoxy resin 21 and fixed to each other. Then, a sealing metal 22 is fitted into the ends of the stems 7a and 7b,
Further, the stems 7a, 7b and the lead wires 20 are connected by solder 23.

As described above, in conventional discharge lamps, the electrodes sealed in the glass tube and the external lead conductor are joined by means such as welding, so there is a possibility that the welding will come off due to the material. There was a problem that the reliability of the bonding was low.

The present invention was devised to solve these conventional problems, and its purpose is to:
An object of the present invention is to provide a discharge lamp in which the connection between an electrode and an external conductor is extremely reliable.

In order to achieve such an objective, the present invention
A coil is arranged and fixed around the glass tube from the joint between the electrode and the external conductor to the end of the glass tube.

Hereinafter, the present invention will be explained in detail based on examples.

FIG. 4 is a sectional view of a main part of an embodiment of the discharge lamp according to the present invention, and the same parts as in FIG. 3 are given the same reference numerals. In the figure, reference numeral 25 denotes an external lead-out conductor, the tip end 25a of which is welded to the outward protrusion 19a of the electrode 19 at a joint 26. 27 is electrode 1
This reinforcing coil is elastically engaged from the outer circumferential surface of the joint 26 between the glass tube 9 and the tip 25a to the outer circumferential surface of the tip of the glass tube 6, and this coil 27 is connected with solder 28 after installation as shown in the figure. The windings of the coil 27 are soldered to each other so that the coil 27 forms an integral rigid body. Moreover, the coil 27
By soldering the windings together (referred to as soldering), the solder flows into the joint itself, which also has the effect of strengthening the joint between the electrode and the external conductor. This arrangement and configuration improves the reliability of the joint. Reference numeral 29 denotes an insulating tube made of silicone rubber formed to a predetermined length. This insulating tube 29 surrounds the coil 27, and one end is tightly engaged with the outer peripheral surface of the glass tube 6, and the other end is It faces and surrounds the extended portion 25b of the external lead conductor 25. And insulation tube 29
Inside are the tip of the glass tube 6, the outward protrusion 19a of the electrode 19, and the tip 25 of the external conductor 25.
a. Apply epoxy resin 3 to fill the joint 26.
Also, the gaps between the stems 7a, 7b and the insulating tube 29 are filled with epoxy resin 3.
1 is filled. A coil 32 connects the stems 7a, 7b and the glass tube 6, and is soldered in the same manner as the coil 27 described above. Note that 33 is a sealing material.

In a discharge lamp with such a structure, the stem itself is insulated from the electrodes, and the joints between the external lead conductor and the electrodes are covered with an insulating tube, and the inside is filled with epoxy resin, etc. Of course, even if the discharge lamp is placed in water, insulation failure will not occur, and in the discharge lamp according to the present invention, the end of the glass tube from the joint between the electrode and the external conductor By arranging a coil around the discharge lamp and configuring the coil to act as an integral rigid body, an excellent discharge lamp that can ensure the reliability of the joint at the joint portion has been made possible.

In addition, in the above-mentioned embodiment, the coil 27 is connected to the joint part 2.
6 to the end of the glass tube 6, but it is also possible to surround only the joint, or from the end of the glass tube to the outward protrusion of the electrode, individually or in combination. Of course, it is good to do so.

As described above, the discharge lamp according to the present invention has an excellent feature that the reliability of the connection between the electrode and the external conductor can be ensured.

[Brief explanation of the drawing]

Figure 1 is a plan sectional view of the light emitting device, and Figure 2 is a cross-sectional view of the light emitting device.
3 is a sectional view of a conventional discharge lamp, and FIG. 4 is a sectional view of an embodiment of a discharge lamp according to the present invention. 6...Glass tube, 7a, 7b...Stem, 18
... Mercury, 19 ... Electrode, 19a ... Outward protrusion, 25 ... External lead-out conductor, 25a ... Tip part,
25b...Extension portion, 26...Joint portion, 27...
Coil, 28...Solder, 29...Insulation tube,
30, 31...Epoxy resin, 32...Coil, 33...Sealing material.

Claims (1)

[Claims] 1. Seal electrodes on both ends of a transparent insulating tube so that one end is inside the tube and the other end projects outward, and one end of an external lead conductor is joined to the outward protrusion of this electrode, and this joint is A discharge lamp characterized in that a coil is arranged and fixed around the end of the transparent insulating tube.