JPH0330252B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a discharge lamp used as a light source of an exposure apparatus.

In the manufacture of integrated circuits and color picture tubes, fine pattern processing is performed optically, and a discharge lamp that emits stable light is used as a light source for an exposure device used at this time.

FIG. 1 is a plan sectional view of a conventional light emitting device used in an exposure apparatus, and FIG. 2 is a sectional view taken along the line taken from FIG. 1. In the figure, 1 is a lamp house stand, which is positioned by guide pins 2a, 2b, and 2c.
It is set on the base by tightening the fixing parts 3a and 3b. On lamp house stand 1,
An arcuate tube accommodating part 1a recessed from the top surface, electrode accommodating parts 1b and 1c at both ends thereof, and an electrode accommodating part 1b,
Penetrating diagonally downward from 1c, there is an entrance 1d and an exit 1e.
are formed respectively, and furthermore, an input route 1d and an output route 1e are formed.
An inflow pipe 4a and an outflow pipe 4b are connected to each open end of the pipe. Further, power supply terminals 5a and 5b are screwed into the lower surface of the lamp house stand 1 so that their tips are disposed within the electrode accommodating parts 1b and 1c, and are fixed with epoxy resin to maintain airtightness. A discharge lamp with an arc-shaped discharge section is composed of a transparent insulating tube (hereinafter referred to as a glass tube) 6 made of glass or ceramic and stems 7a and 7b fixed to both ends of the tube.The stems 7a and 7b are fixed to a locator 9. It is attached to the locator 9 by soldering and fixing it to the attached attachment plates 8a and 8b. The locator 9 has pin holes 10a, 10b at both ends, and by fitting the pin holes 10a, 10b into guide pins 11a, 11b planted on the top surface of the lamp house base 1, the locator 9 can be mounted on the lamp house base 1. Correctly positioned and installed. At this time, the glass tube 6 and the stems 7a, 7b are accommodated in the tube accommodating part 1a and the electrode accommodating parts 1b, 1c, respectively. Further, 12a and 12b are lead wires, one end of which is soldered to the mounting plates 8a and 8b, and the other end of which is connected to the power supply terminal 5 by means of setscrews 13a and 13b.
It is screwed to a and 5b.

On the other hand, a face plate 14 made of glass is provided on the upper surface of the lamp house base 1, and a lid 15 having an opening 15a is provided on the face plate 14, and the lid 15 is pressed against the lamp house base 1 via O-rings 16a and 16b. has been done. Therefore,
The tube accommodating portion 1a and the electrode accommodating portions 1b and 1c are kept airtight.

With this configuration, when cooling water flows in from the inflow pipe 4a, the water flows through the inlet channel 1d, as shown by the arrow.
Electrode accommodating part 1b, tube accommodating part 1a, electrode accommodating part 1
c, it flows out from the outflow pipe 4b via the outlet path 1e.
This water cools the discharge lamp. When the power supply terminals 5a and 5b are connected to a power source, the center of the glass tube 6 emits light, and this light is emitted through the face plate 14 and the opening 15a.

In this case, since the stem is connected to the electrodes of the discharge lamp, there is a problem that the high voltage part is exposed in the water.

FIG. 3 is a sectional view of the electrode portion of the discharge lamp. Mercury 18 is housed in the electrode section at the tip of the glass tube 6,
Furthermore, an electrode 19 whose tip protrudes into the tube from the surface of the mercury 18 is sealed. The other end of the electrode 19 is drawn out of the glass tube 6, and a bare lead wire 20 is welded to this portion. Stems 7a and 7b are placed over the outer peripheral surface of the glass tube 6 to cover the welded portion of the electrode 19 and lead wire 20.
The space between them is filled with epoxy resin 21 and fixed to each other. A sealing metal 22 is fitted into the ends of the stems 7a, 7b, and further, the stems 7a, 7b and the lead wire 20 are connected by solder 23.

As described above, in conventional discharge lamps, the vicinity of the electrode sealing portion of the glass tube and the joint portion are surrounded by resin in a wide space within the stem, which poses a problem in that the strength may be reduced.

The present invention was devised to solve such conventional problems, and its purpose is to:
It is an object of the present invention to provide a discharge lamp in which a joint part of an electrode and an end part of a glass tube are surrounded and reinforced with an insulating tube.

In the present invention, an insulating tube is provided around the joint of the electrode and the end of the glass tube, and the insulating tube has one end that engages with the outer peripheral surface of the glass tube and the other end that extends in a direction that surrounds the joint. The insulating tube is filled with insulating resin.

Hereinafter, the present invention will be explained in detail based on examples.

FIG. 4 is a sectional view of an embodiment of the discharge lamp according to the present invention. In the figure, the same parts as in FIG. 3 are given the same reference numerals. 25 is an external lead conductor, and one end side 25a thereof is connected to the outward protrusion 1 of the electrode 19.
9a and the joint portion 19b are welded. 25b is an insulating coating of the external lead conductor 25. An insulating tube 26 made of silicone rubber and having a predetermined length covers the joint 19b between the electrode 19 and the external lead conductor 25, and one end is tightly engaged with the outer peripheral surface of the glass tube 6. Inside the insulating tube 26, the tip of the glass tube 6, the outward protrusion 19a of the electrode 19, the external lead conductor 25, and the joint 19b are disposed.
Epoxy resin 27 is filled to fill the
Further, the gap between the stems 7a, 7b and the insulating tube 26 is also filled with epoxy resin 28. Note that 29 is a sealing material.

FIG. 5 is a sectional view of another embodiment. In the figure, the same parts as in FIG. 4 are given the same reference numerals. Reference numeral 31 denotes a reinforcing coil elastically engaged over the outer peripheral surface of the joint 19b between the electrode 19 and the external lead conductor 25 and the outer peripheral surface of the tip of the glass tube 6. This prevents external force from being applied to the tip. This coil 31 has a solder layer formed on its surface, and the wires are soldered to each other so that the coil 31 acts as an integral rigid body. The insulating tube 26 is provided so as to cover the outer periphery of the coil 31. The inside of the insulating tube 26 is filled with epoxy resin 2.
7 is filled. Furthermore, epoxy resin 28 is filled between the stem 32 and the insulating tube 26 and the glass tube 6, and the stem 32 and the glass tube 6 are joined by a coil 33. This coil 33 may also be configured to form a solder layer and act as an integral rigid body. In addition, 34
is a sealing member. In this example, only a coil is provided, but the operation is the same as in the previous embodiment.

As described above, according to the discharge lamp according to the present invention, since the joint part of the electrodes and the tip part of the glass tube are covered with the insulating tube, the excellent effect that the mechanical strength of these parts can be maintained is achieved. be.

[Brief explanation of the drawing]

Figure 1 is a plan sectional view of the light emitting device, and Figure 2 is a cross-sectional view of the light emitting device.
3 is a sectional view of a conventional discharge lamp, FIG. 4 is a sectional view of one embodiment of the discharge lamp according to the present invention, and FIG. 5 is a sectional view of another embodiment. 6...Glass tube, 7a, 7b...Stem, 18
... Mercury, 19 ... Electrode, 25 ... External lead-out conductor, 26 ... Insulation tube, 27, 28 ... Epoxy resin, 31 ... Coil.

Claims (1)

[Claims] 1 A discharge tube in which mercury is sealed inside a transparent insulating tube and electrodes are sealed at both ends, a stem fixed to the end of the discharge tube, and an insulating coating joined to the external force protrusion of the electrode. An insulating tube that surrounds the joint portion and a part of the transparent insulating tube and has one end fixed to the transparent insulating tube; A discharge lamp characterized in that it has a resin filled with an insulating material.