JPH0328987B2 - - Google Patents
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- Publication number
- JPH0328987B2 JPH0328987B2 JP62034182A JP3418287A JPH0328987B2 JP H0328987 B2 JPH0328987 B2 JP H0328987B2 JP 62034182 A JP62034182 A JP 62034182A JP 3418287 A JP3418287 A JP 3418287A JP H0328987 B2 JPH0328987 B2 JP H0328987B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- plate
- laser beam
- irradiated
- island
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 239000000758 substrate Substances 0.000 claims description 66
- 239000000463 material Substances 0.000 claims description 55
- 229910045601 alloy Inorganic materials 0.000 claims description 26
- 239000000956 alloy Substances 0.000 claims description 26
- 238000003466 welding Methods 0.000 claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 230000001678 irradiating effect Effects 0.000 claims description 7
- 238000005096 rolling process Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 description 18
- 229910003271 Ni-Fe Inorganic materials 0.000 description 14
- 238000005253 cladding Methods 0.000 description 12
- 239000010410 layer Substances 0.000 description 10
- 239000000853 adhesive Substances 0.000 description 9
- 230000001070 adhesive effect Effects 0.000 description 9
- 238000004140 cleaning Methods 0.000 description 9
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 8
- 239000003566 sealing material Substances 0.000 description 8
- 238000005498 polishing Methods 0.000 description 7
- 239000002344 surface layer Substances 0.000 description 7
- 239000002390 adhesive tape Substances 0.000 description 6
- 239000003921 oil Substances 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- 229910000881 Cu alloy Inorganic materials 0.000 description 5
- 238000005219 brazing Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229910000833 kovar Inorganic materials 0.000 description 5
- 229910000838 Al alloy Inorganic materials 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 238000000137 annealing Methods 0.000 description 4
- 230000001680 brushing effect Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 239000003925 fat Substances 0.000 description 4
- 238000005097 cold rolling Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910000640 Fe alloy Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000005238 degreasing Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910020598 Co Fe Inorganic materials 0.000 description 1
- 229910002519 Co-Fe Inorganic materials 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- -1 foreign matter Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/04—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a rolling mill
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
Description
利用産業分野
この発明は、金属または合金基板上に、被着材
料を、長手方向に不連続的に、例えば、一定間隔
で島状や縞状に圧着してなる、所謂電子部品用ア
イランド状クラツド板の製造方法に係り、冷間圧
接後の拡散焼なまし処理を必要とせず、品質およ
び密着性良好に、被着材料を高能率にクラツドし
てなる電子部品用アイランド状クラツド板の製造
方法に関する。
背景技術
電子部品用クラツド材料として、
Fe−Ni系封着材料(40〜55%Ni−Fe)−Al板、
(基板−被着材料、以下同配列)
Fe−Ni系封着材料(40〜55%Ni−Fe)−Au
板、
Fe−Ni系封着材料(40〜55%Ni−Fe)−Cu板、
Fe−Ni系封着材料(40〜55%Ni−Fe)−Cu合
金板、
Fe−Ni系封着材料(40〜55%Ni−Fe)−Agろ
う板、
Fe−Ni系封着材料(40〜55%Ni−Fe)−Ag
板、
コバール合金板(25〜50%Ni−10〜20%Co−
Fe)−Agろう板、
等からなるアイランド状クラツド板(第1図a図
参照)、
または、Fe−Ni系封着材料(40〜55%Ni−Fe)
−Al板、コバール合金板(25〜50%Ni−10〜20
%Co−Fe)−Agろう板、等からなる横縞クラツ
ド板(第1図b図参照)、あるいはさらに、積層
基板に被着材料を同様に圧着または、めつき、蒸
着した多層クラツド板が利用されている。
例えば、Alアイランド状クラツド材料の製造
には、42%Ni−Fe合金の金属基板帯を還元雰囲
気中で焼鈍し、基板表面の清浄化処理を施したの
ち、さらに冷間圧接すべき表面の被着予定部分に
バフ研摩を施して清浄化した後、Al板を被着予
定部分を含む長手方向の所要位置に重ね合せ、冷
間圧接し、その後、被着予定以外のAl板をブラ
シの機械的研摩あるいはアルカリ等による化学的
な除去方法を用いて除去し、少なくとも1回の冷
間圧延を行なつた後、600℃以下で拡散焼なまし
処理して、Al条と金属基板との接合を完全にし、
さらに、クラツド材料の寸法、形状を調整するた
め、少なくとも1回の冷間圧延を行ない、つぎ
に、アイランド状にクラツドすることによる基板
内部に不均一に残留した内部応力歪を除去するた
め、550℃以下で熱処理したり、あるいは550℃以
下で加熱してクラツド条に張力を付与し、伸びを
付加して矯正する製造方法、あるいは、基板表面
をアルカリ脱脂、電解脱脂などの化学的方法で清
浄化した後、真空蒸着法により所要部分以外をマ
スキングし、、スポツト状にAlを積層させる方
法、あるいはレジストを印刷後、基板表面を化学
的方法にて、脱脂、研摩した後、Au、Ag湿式め
つきする方法等が、一般に採用されている。
しかし、ワイマバフ研摩等の機械的研摩では、
所要部分にのみ限定して研摩を行なうことが困難
なため、所要圧接予定表面以外の基板表面、例え
ば全表面まで研摩され、研摩によつて研摩表面に
割れの発生や鱗片状金属粉の発生付着及び異物が
残存する恐れがあり、被着材の圧接の際に圧接面
に金属粉、該異物あるいは気体の巻き込みが起
り、被着材表面の膨れを生じる問題がある。
また、前記割れが冷間圧接または後続の冷間圧
延時に金属微粉を生成して、前記金属微粉がクラ
ツド板に付着する原因となり、クラツド板表面の
品質を劣化させる等の問題を有するほか、従来の
製造方法では、多大の工程や熱処理を要し、製造
コストの上昇、並びに拡散焼なまし時のAl及び
Al合金面等の疵や表面品質の低下が問題となつ
ていた。
また、真空蒸着法が電気めつき法では冷間圧接
法に比べて生産性が悪く、真空装置使用によるコ
スト上昇や、緻密なAl面が得られず、また、電
気めつき液の処理等の問題があつた。
発明の目的
この発明は、従来の電子部品用アイランド状ク
ラツド板の製造方法において、金属基板表面の清
浄化に起因する問題点を解消し、また、従来困難
であつた被着予定部分のみの清浄化が容易に実施
でき、被着材表面の膨れ防止とすぐれたクラツド
板表面品質が得られるとともに、従来、不可欠で
あつた冷間圧接後の拡散焼なまし処理工程を省略
でき、冷間圧接工程のみで完全な接合が可能な電
子部品用アイラント状クラツド板の製造方法を目
的としている。
発明の構成と効果
この発明は、電子部品用アイランド状クラツド
材料の基板表面の清浄化とクラツド板の被着材表
面の品質改善並びに被着強度の向上を目的に種々
検討した結果、走行中の基板表面の被着予定所要
表面にのみに、レーザービームの照射を行ない、
被着予定面以外ではレーザービーム照射を止め、
あるいは遮光して非照射として、接合不良の原因
となる異物、油脂、水分に吸収され易い波長のレ
ーザービームを照射することにより、所要の被着
予定部分の表面に付着している異物、油脂、水分
がレーザー光を吸収してガス化し、除去されるた
め、清浄な表面が得られ、前記表面に被着材料を
圧接すると、表面が清浄なために容易に原子間結
合が起り、実用上、差支えない範囲の充分な接着
強度が得られ、また、レーザービームの非照射部
分は表面清浄化が行なわれていないため、原子間
結合が発生せず、容易に剥離可能となり、簡単に
かつ品質性状のすぐれた電子部品用アイランド状
クラツド板が得られることを知見した。
さらに、異物等だけでなく、基板にも吸収され
易い波長、すなわち、波長5μm以下のレーザー
ビームを用いれば、2μm以下、望ましくはサブ
ミクロンオーダーの極表面層を、溶融凝固させて
硬化層を形成し、被着材の冷間圧接時に、基板表
面の硬化層に内部のすべり変形によつて表面に微
細な亀裂を生じさせることにより、内部の新生面
を露出させて基板と被着材料との密着強度を著し
く向上させることができ、従来の機械的研摩にと
もなう表面の割れ、金属粉、残留異物の発生、付
着を防止でき、気体の巻き込みが発生せずにクラ
ツド材表面の膨れがなくなり、特に、被着材料が
Alの場合は、前記の拡散焼なまし処理工程が不
要となり、冷間圧接のまま、あるいは冷間圧接後
の冷間圧延のみで、被着予定部分以外はブラツシ
ング等により、容易に被着材を除去できるため、
容易に長手方向に不連続な電子部品用アイランド
状クラツド板が得られることを知見し、この発明
を完成したものである。
この発明は、金属あるいは合金基板の少なくと
も1主面の不連続的な被着予定部にのみ、少なく
とも1条のレーザービームを照射した後、前記照
射面を含む基板長手方向に連続した所要の条部全
面に被着材料を圧下率25%〜70%にて冷間圧接
後、被着予定部以外の被着材料を除去してアイラ
ンド状クラツド板を得ることを特徴とする電子部
品用クラツド板の製造方法である。
さらに詳述すれば、金属あるいは合金基板、例
えば、42%Ni−Fe合金やコバール合金の少なく
とも1主面の被着予定部分にのみ、少なくとも1
条のレーザービームを種々の照射形態にて断続的
に照射し、また、被着予定面以外の部分はレーザ
ービームの照射を行なわない非照射面となし、該
照射面を含む基板長手方向の所要の条部全面に、
AlまたはAl合金条の被着材料を25%〜70%の圧
下率で冷間圧接すると、被着予定面である照射面
では、レーザービームの照射に伴なう表面の溶融
凝固硬化層に亀裂を生じ、この亀裂内にAlまた
はAl合金条が、冷間圧接時に押込まれた状態と
なり、圧接が完全となる。
一方、被着予定面以外では、かかる溶融凝固硬
化層が形成されておらず、被着材料と基板の接合
は弱く、容易に剥離させることが可能となつてい
る。
従つて、被着材料の圧接後に、例えば、被着予
定面以外の被着材料を真空吸着にて剥がしたり、
ブラシ等で研摩したり、あるいは超音波を印加し
て浮き上がらせて真空吸着、またはブラツシング
を行なつたり、さらには粘着テープを挿入しなか
らコイルに巻き取りし、巻き戻しの際に前記テー
プを引き剥がす等の手段により、レーザービーム
照射を行なつた被着予定面以外の被着材料は、簡
単に除去でき、所要パターンの電子部品用アイラ
ンド状クラツド板を得ることができる。
この発明による電子部品用アイランド状クラツ
ド板から得られるリードフレームにおけるガラス
封着については、被着予定面以外に被着された材
料の除去後面が均一に荒れており、ガラス封着性
が良好となる効果がある。
また、所要パターンのアイランド状クラツド板
を得るために、従来法によるワイヤーバフ研摩を
被着予定面に限つて、基板の長手方向に不連続に
実施することは困難であるが、この発明によるレ
ーザービームによる場合は、光であるため任意に
遮断でき、基板長手方向に、所要のパターンで被
着予定箇所にのみ照射でき、種々形態のアイラン
ド状クラツド板を製造できる利点がある。
この発明より基板表面の高清浄化とクラツド板
の被着材表面の品質改善ならびに密着強度向上が
得られ、電子部品用アイランド状クラツド板を高
能率で得ることができる。
発明の好ましい実施態様
この発明による電子部品用アイランド状クラツ
ド板は、基板の少なくとも1主面に、その長手方
向に不連続的に被着材料を圧接被着してなるもの
で、第1図a図に示す如く、正方形状の被着材料
2を基板1幅方向の中央部に長手方向に所定間隔
で被着したクラツド板のほか、同b図に示す如
く、基板1の全幅にわたる長方形状の被着材料2
を、基板1の長手方向に一定間隔で被着したクラ
ツド板とするのもよく、さらには、第1図c図に
示す如く、a図のパターンを基板1の幅方向に繰
り返し、正方形状の被着材料2を基板1幅方向に
3箇所被着し、長手方向に3条相当部分に不連続
的に被着材料を圧着した電子部品用アイランド状
クラツド板とすることもできる。
被着材料の被着形状、寸法及び長手方向の間隔
等は、用途等に応じて任意に選定でき、用途等に
応じて所要の不連続的パターンを採用できるが、
同一形状の被着材料を等間隔で配置する被着パタ
ーンが製造性の面から好ましいが、パターンの形
状は任意でよく、さらに、同じ形状を繰り返さな
くともよく、また、パターン間隔も一定でなくて
もよい。
また、比較的広い幅の基板に、b,c図のパタ
ーンで被着材料を被着したのち、スリツターにて
所要幅の電子部品用アイランド状クラツド板に製
造することもできる。
この発明において、レーザービームの照射方法
は、被着材料の被着予定表面にスポツト状のビー
ムをミラーを用いて2次元的に走行、あるいはレ
ンズ、ミラーを用いて、ビームを拡げて板幅方向
に一括照射を行ない、被着予定表面の全面に均一
に照射するか、あるいは被着予定表面上に少なく
とも1条のレーザービームを、全面状、ジグザグ
状、蛇行あるいは縞状等の種々照射形態にて照射
する。また、被着予定面以外の面では、該レーザ
ービームを照射しない非照射面とする。
また、基板の被着予定表面に、例えば、ジグザ
グ状にレーザービームを照射した場合、基板の照
射面の表面状態は、前記の如く、照射表面の清浄
化と極表面層の溶融凝固硬化層を形成し、被着予
定面における非照射部分は、上記の該レーザービ
ームを照射しない、すなわち、被着予定面以外の
非照射面とは全く異なり、ジグザグ状のレーザー
ビーム照射に伴なう熱影響により、その表面が清
浄化されている。このため、全面的な照射でない
ジグザグ状のレーザービームの照射部分に被着材
料を冷間圧接すると、前述の如く、照射部分にお
いて、被着材料と基板材料が強固に接着し、非照
射部分も表面が清浄化されるため、被着材料と基
板材料との密着性が向上して充分な接着強度が得
られる。
この発明において、基板及び被着材料の種類や
組み合せは、任意でクラツドできる組み合せであ
ればよく、また、レーザービームの照射は、表面
の付着物、油脂、水分の除去ができればよく、好
ましくは2μm以下の極表面層の溶融凝固が可能
であれば、いかなる方法でもよく、例えば、スポ
ツト状にビームを集光させて基板表面の直交方向
に照射し、基板とレーザービームとを基板の長手
方向に同方向あるいは逆方向に移動させたり、さ
らには、レーザービームを基板幅方向に振幅させ
ながら基板長手方向に移動させ、レーザービーム
を断続的に発振、停止させ、所要パターンのアイ
ランド状の照射面を得たり、あるいは被着予定面
以外を遮光するか、被着予定面以外でレーザービ
ームを基板外にはずす等の方法が採用できる。
また、レーザービームは、レーザー発振器から
発振されて、コリメータ、レンズにより集光し、
光フアイバーにて所要位置に導いて照射する方法
も採用できる。
この発明において、レーザービームの照射条件
として、ビームのパワー密度は、100kW/mm2〜
1500kW/mm2の範囲が好ましく、さらに好ましく
は、300kW/mm2〜900kW/mm2である。
レーザービームのパワー密度が100kW/mm2未
満では、圧接に対する表面清浄化効果がなく、ま
た、1500kW/mm2を越えると、表面の凹凸が激し
くなり、パワー密度の上昇に伴ない基板に孔が生
成し好ましくない。
また、レーザー波長は、5μm以下であれば有
効であるが、2μmを越えると基板への吸収効果
が悪いため、2μm以下の波長を用いることが望
ましい。
この発明における金属または合金基板は、
Fe−Ni系封着材料(40〜55%Ni−Fe)、
コバール合金板(25〜50%Ni−10〜20%Co−
Fe)、
Cu合金板(Be1.1%以下、Ti1.0%以下、Cr1.6
%以下、Fe6.0%以下、Ni15.0%以下、Zn43%以
下、B0.5%以下、Si6.0%以下、Pb0.08%以下、
P0.5以下、Te0.6%以下、Mg0.6%以下、Zr0.7%
以下、Mn7%以下、Co2%以下、Ag1.5%以下、
Cd1.3%以下、Al12%以下、Sn12%以下の少なく
とも1種を含有し、但し、添加元素を2種以上含
有する場合、その総量は45%以下、残部Cuから
なる)が好ましい。
この発明において、金属または合金の基板は、
単板でもよく、また、導電性、耐食性、強度向上
のため、例えば、前記Cu合金と42%Ni−Fe合
金、あるいは前記Cu合金とコバール合金の積層
板を用いることもできる。
なお、前記積層基板は、レーザービームを使用
して、表面清浄後に圧接してもよく、従来のワイ
ヤブラツシングにより表面清浄後に圧接してもよ
い。
また、被着材料として、Au板、Al板、Al合金
板、Cu板、Cu合金板、Ag板、Agろう板、黄銅
ろう板、はんだ板が好ましい。
また、この発明による電子部品用アイランド状
クラツド板の板厚は、0.05〜1.0mmが好ましく、
目的用途に応じて板厚を適宜選定するとよい。
発明の図面に基づく開示
第2図と第3図はそれぞれこの発明による電子
部品用アイランド状クラツド板の製造方法を示す
基板の斜視説明図である。ここでは、42%Ni−
Fe合金板の幅方向中央に矩形状のAl板を、1条
相当部に一定間隔でアイランド状に冷間圧接する
例を説明する。
第2図と第3図aに示す如く、42%Ni−Fe合
金板10コイルは、アンコイリングされて冷間圧
接ロール11へ進行する。圧接ロール11後方に
は、通過する合金板10の上面にレーザービーム
を照射するための照射ボツクス12が配置され、
照射ボツクス12は合金板10全体を包囲し、内
部にArガスを通気してあり、Arガス雰囲気中で
レーザービームを照射できる構成である。
レーザービームは、例えば、YAGレーザーの
レーザー発振器13から発振されてコリメーター
14、ガルバニツクミラー15を介して、fθレン
ズ16により集光し焦点を結んだのち、焦点より
所要距離、離間した位置で、合金板10の幅方向
中央位置の所要幅部分を照射できるよう、fθレン
ズ16位置が調整される。
レーザービームは、ガルバニツクミラー15と
fθレンズ16間に配置したシヤツター18の開閉
により、断続的に基板に照射でき、基板長手方向
に不連続な照射部分を形成することができる。
また、第3図aの場合は、レーザービームを断
続して発振することにより、照射面と合金板10
の長手方向に不連続に設けることができる。
なお、この発明に使用されるレーザービーム発
生装置は、ガルバニツクミラー15に代えて、多
面体ミラーもしくはセグメントミラーを用いるこ
とにより、レーザー走査速度を速くすることがで
き、また、シリンドリカルレンズを用いて、板幅
方向を一括して照射することにより、加工速度の
向上を図ることができる。
巻き戻された合金板10は幅方向中央位置の一
定間隔の被着予定面部分を、ジグザグ状あるいは
縞状に、レーザービームが照射されて、極表面層
が溶融凝固し、表面の付着物、油脂、水分が除去
された新生面となる。
また、被着予定面以外では、シヤツター18を
閉じるか、ガルバニツクミラー15にオフセツト
を与えてレーザービームを合金板10外に導く
か、あるいはレーザービームの発振を止め、照射
を行なわない。
一方、Al板17は巻き戻されたのち、合金板
10上方より圧接ロール11へ送給され、前記の
レーザービーム照射による照射面上に圧接され
る。
この際、圧延により被着予定面では、照射面の
溶融凝固層が内部のすべり変形の影響により表面
に微細な亀裂を生じ、内部の新生面が露出して
Al板17が圧接されるため、従来の機械的研摩
表面に比較して、清浄度がすぐれ、合金板10と
Al板17がより強固に密着する。
しかし、被着予定面以外の箇所は、レーザービ
ームによる照射を施していないため、被着材料は
基板に密着しておらず、圧接後に、例えば、第2
図に示す如く、ブラシロール19によつてブラツ
シングすると、容易に除去でき、被着予定面にの
み、Al板17が被着したアイランド状クラツド
板を高効率で得ることができる。
また、第3図aに示す如く、Al板17の圧接
ロール11による圧接後、コイル20に巻き取る
際、粘着テープ21の粘着面22が被着したAl
板上に貼られるようにして巻き取る。
その後、コイル20を巻き戻す際に、第3図b
に示す如く、粘着テープ21を剥がすことによ
り、被着予定面以外の箇所は、レーザービームに
よる照射を施していないため、被着材料は容易に
引き剥がすことができ、被着予定面にのみ、Al
板17が被着したアイランド状クラツド板を高効
率で得ることができる。
なお、アイランド状パターンについて、第1図
では、合金板上に被着材料を矩形状に一定間隔で
冷間圧接した例を説明したが、基板幅方向に複数
パターンで、あるいは長手方向に不等間隔で設け
る場合であつても同様に製造でき、すぐれた密着
強度と製品性状を得ることができる。また、1主
面のみならず、他主面にも圧接した両面クラツド
板についても同様に製造できる。
従つて、基板となる材料の材質や寸法、さらに
被着材料の材質寸法等により、レーザービームの
発振方法や照射出力、feレンズによる焦点と照射
表面までの距離、被照射側の移動速度などを適宜
選定する必要がある。
実施例
実施例 1
金属基板には、
板厚0.38mm、板幅27mmの42%Ni−Fe合金板、
被着材料には、
板厚0.02mm、板幅10mm、純度99.7%のAl板を使
用した。
照射ボツクス内雰囲気ガス、Arガス、
基板移動速度10m/minであつた。
レーザー照射装置には、100W出力、10kHzQ
スイツチYAGレーザーを用い、上述した第2図
に示す方法で、
レンズ焦点間距離100mm、波長が1.00μm、レー
ザーパワー密度500kW/mm2の条件にて、
基板幅方向に10.5mm、基板長手方向に7mm寸法
の長方形のスポツト状部分に、断続的にレーザー
ビームを照射し、基板長手方向に40mm間隔の不連
続の照射面を形成して、第1図a図に示すパター
ンにて、照射面と非照射面とを形成し、同照射面
を含む長手方向の1条相当部に、前記Al板を圧
接ロールにて、圧延率30%で冷間圧接した。
その後、0.15mmφのナイロンブラシを用いるブ
ラツシングにて、不要なAl板を除去し、さらに、
1回の冷間圧延を施して、板厚0.25mm、板幅27mm
寸法のアイランド状クラツド板を得た。なお、全
圧延率は34.2%であつた。
この時の被着材料部の形状は、
10.3mm×10.7mm寸法の略正方形状からなり、そ
の間隔はその長手方向に60mmであつた。
得られたこの発明による電子部品用アイランド
状クラツド板の寸法、外観性状及び機械的性質を
調べ、その結果を第1表に示す。
実施例 2
金属基板には、
板厚0.45mm、板幅35mmの42%Ni−Fe合金板、
被着材料には、
板厚0.02mm、板幅30mm、純度99.7%のAl板を使
用した。
照射ボツクス内雰囲気ガス、Arガス、
基板移動速度5m/minであつた。
レーザー照射装置には、100W出力、10kHzQ
スイツチYAGレーザーを用い、上述した第3図
に示す方法で、
レンズ焦点間距離100mm、波長が1.06μm、レー
ザーパワー密度500kW/mm2の条件にて、
基板幅方向に7mm、基板長手方向に3.9mm寸法
の長方形のスポツト状部分に、発振器断続的に作
動させてレーザービームを照射し、基板長手方向
に20mm間隔の不連続の照射面を形成して、第1図
a図に示すパターンにて、照射面と非照射面とを
形成し、同照射面を含む長手方向の1条相当部
に、前記Al板を圧接ロールにて、圧延率44%で
冷間圧接した。
その後、第3図aに示す如く、Al板17の圧
接ロール11による圧接後、コイル20に巻き取
る際、粘着テープ21の粘着面22が被着した
Al板上に貼られるようにして巻き取り、コイル
20を巻き戻す際に、第3図bに示す如く、粘着
テープ21を引き剥がし、不要なAl板を除去し、
さらに、連続的に歪取り焼鈍を施して、板厚0.25
mm、板幅35mm寸法のこの発明によるアイランド状
クラツド板を得た。なお、全圧延率は47%であつ
た。
この時の被着材料部の形状は、7.1mm×7.0mm寸
法の略正方形状からなり、その間隔はその長手方
向に36mmであつた。
得られたこの発明によるアイランド状クラツド
板の寸法、外観性状及び機械的性質を調べ、その
結果を第1表に示す。
第1表から明らかなように、この発明の製造方
法により、従来では製造が困難であつた電子部品
用アイランド状クラツド板を容易に得ることがで
き、かつ外観性状がすぐれ、すこぶる品質のよい
電子部品用アイランド状クラツド板が得られるこ
とが分る。
Field of Application This invention relates to a so-called island-like cladding for electronic components, which is formed by pressing an adherend material onto a metal or alloy substrate discontinuously in the longitudinal direction, for example, in the form of islands or stripes at regular intervals. A method for manufacturing an island-shaped clad plate for electronic components, which does not require diffusion annealing after cold welding, has good quality and adhesion, and clads adherend materials with high efficiency. Regarding. Background technology As a clad material for electronic components, Fe-Ni sealing material (40~55% Ni-Fe)-Al plate, (substrate-adherent material, hereinafter the same arrangement) Fe-Ni sealing material (40~55% Ni-Fe) is used as a cladding material for electronic components. 55%Ni−Fe)−Au
plate, Fe-Ni sealing material (40-55% Ni-Fe) - Cu plate, Fe-Ni sealing material (40-55% Ni-Fe) - Cu alloy plate, Fe-Ni sealing material (40~55%Ni-Fe)-Ag brazing plate, Fe-Ni sealing material (40~55%Ni-Fe)-Ag
Plate, Kovar alloy plate (25~50%Ni−10~20%Co−
Fe)-Ag brazing plate, etc. (see Figure 1a), or Fe-Ni sealing material (40-55% Ni-Fe)
−Al plate, Kovar alloy plate (25~50% Ni−10~20
%Co-Fe)-Ag brazing plate, etc. (see Figure 1b), or a multilayer clad plate in which a material is similarly crimped, plated, or vapor-deposited on a laminated substrate. has been done. For example, in the production of Al island-like cladding materials, a metal substrate strip of 42% Ni-Fe alloy is annealed in a reducing atmosphere, the substrate surface is cleaned, and then the surface to be cold-welded is coated. After buffing and cleaning the area to be adhered, the Al plates are stacked at the desired length in the longitudinal direction including the area to be adhered, and cold pressure welded. The aluminum strip is removed using a chemical removal method using alkali or the like, cold rolled at least once, and then diffusion annealed at 600℃ or less to bond the Al strip and the metal substrate. complete,
Furthermore, in order to adjust the dimensions and shape of the cladding material, cold rolling is performed at least once, and then, in order to remove the internal stress strain that remains unevenly inside the substrate due to the cladding in an island shape, a 550mm Manufacturing methods include heat treatment at temperatures below 30°F, or heating below 550°C to apply tension to the clad strips to add elongation and straightening, or cleaning the substrate surface using chemical methods such as alkaline degreasing or electrolytic degreasing. After coating, mask off the necessary parts using vacuum evaporation method and layer Al in spots, or after printing the resist, degrease and polish the substrate surface by chemical method, then Au, Ag wet method. A method such as plating is generally employed. However, with mechanical polishing such as Waima buff polishing,
Because it is difficult to polish only the required areas, the substrate surface other than the required pressure-welding surface, for example, the entire surface, may be polished, resulting in the occurrence of cracks on the polished surface or the generation and adhesion of scaly metal powder. There is also a risk that foreign matter may remain, and when the adherends are pressure welded, metal powder, foreign matter, or gas may be drawn into the pressure contact surface, causing a problem that the surface of the adherend material may swell. In addition, the cracks generate metal fine powder during cold welding or subsequent cold rolling, causing the metal fine powder to adhere to the clad plate, causing problems such as deterioration of the surface quality of the clad plate. The manufacturing method of
Problems were problems such as scratches on the Al alloy surface and deterioration of surface quality. In addition, when the vacuum evaporation method is the electroplating method, the productivity is lower than that of the cold pressure welding method, the cost increases due to the use of vacuum equipment, a dense Al surface cannot be obtained, and the processing of the electroplating solution, etc. There was a problem. Purpose of the Invention The present invention solves the problems caused by cleaning the surface of a metal substrate in the conventional manufacturing method of island-shaped cladding plates for electronic components, and also solves the problem of cleaning only the part to be adhered, which was difficult in the past. In addition to preventing blistering on the surface of the adherend and achieving excellent clad plate surface quality, it is also possible to omit the conventionally indispensable diffusion annealing process after cold welding. The purpose is to provide a manufacturing method for eyelint-like cladding plates for electronic components that can be completely bonded in just one process. Structure and Effects of the Invention The present invention was developed as a result of various studies aimed at cleaning the substrate surface of an island-shaped cladding material for electronic parts, improving the quality of the surface of the adherend of the cladding plate, and increasing the adhesion strength. The laser beam is irradiated only on the desired surface of the substrate surface to be coated.
Stop the laser beam irradiation on areas other than the intended surface.
Alternatively, by shielding the light and not irradiating it, irradiating a laser beam with a wavelength that is easily absorbed by foreign matter, oil, fat, and moisture that causes bonding defects, removes foreign matter, oil, and fat attached to the surface of the desired adhering area. Moisture absorbs laser light, gasifies, and is removed, resulting in a clean surface. When an adherend material is pressed against the surface, interatomic bonds easily occur because the surface is clean, and in practical use, Sufficient adhesion strength is obtained, and since the surface of the area not irradiated with the laser beam is not cleaned, interatomic bonds do not occur and it can be easily peeled off, making it easy to maintain quality and properties. It has been found that an island-shaped clad plate for electronic parts with excellent properties can be obtained. Furthermore, by using a laser beam with a wavelength that is easily absorbed not only by foreign objects but also by the substrate, that is, a wavelength of 5 μm or less, the extreme surface layer of 2 μm or less, preferably on the submicron order, can be melted and solidified to form a hardened layer. During cold pressure welding of adherends, internal sliding deformation of the hardened layer on the substrate surface causes minute cracks on the surface, exposing the new internal surface and establishing close contact between the substrate and the adherend. It can significantly improve the strength, prevent cracks on the surface, the generation and adhesion of metal powder and residual foreign matter caused by conventional mechanical polishing, eliminate gas entrainment, eliminate blistering on the surface of the clad material, and especially , the adherend material is
In the case of Al, the above-mentioned diffusion annealing process is not necessary, and the adherend material can be simply cold-welded or cold-rolled after cold welding, and the parts other than the areas to be adhered can be brushed etc. Since it is possible to remove
The present invention was completed based on the discovery that an island-shaped clad plate for electronic components that is discontinuous in the longitudinal direction can be easily obtained. This invention involves irradiating at least one laser beam only on discontinuous areas to be deposited on at least one main surface of a metal or alloy substrate, and then applying a desired laser beam continuous in the longitudinal direction of the substrate including the irradiated surface. A clad plate for electronic components, characterized in that an island-shaped clad plate is obtained by cold welding an adherend material to the entire surface of the part at a rolling reduction rate of 25% to 70%, and then removing the adherend material other than the intended part. This is a manufacturing method. More specifically, at least one layer of varnish is applied only to a portion of at least one principal surface of a metal or alloy substrate, for example, a 42% Ni-Fe alloy or a Kovar alloy.
Laser beams of stripes are intermittently irradiated in various irradiation formats, and parts other than the surface to be adhered are treated as non-irradiated surfaces that are not irradiated with laser beams, and the required distance in the longitudinal direction of the substrate including the irradiated surfaces is On the entire surface of the striations,
When Al or Al alloy strip materials are cold welded at a reduction rate of 25% to 70%, the molten solidified hardened layer on the surface due to laser beam irradiation cracks on the irradiated surface, which is the intended surface to be adhered to. occurs, and the Al or Al alloy strip is pushed into this crack during cold pressure welding, completing the pressure welding. On the other hand, such a molten solidified and hardened layer is not formed on surfaces other than the intended surface to be adhered, and the bond between the adherend material and the substrate is weak and can be easily peeled off. Therefore, after pressure bonding of the adherend material, for example, the adherend material other than the surface to be adhered to is peeled off by vacuum suction, or
Polishing with a brush, applying ultrasonic waves to make it float, vacuum suction, or brushing, or inserting adhesive tape and winding it into a coil, and then unwinding the tape. By means such as peeling off, the adhered material other than the surface to be adhered to which the laser beam was irradiated can be easily removed, and an island-like clad plate for electronic components having a desired pattern can be obtained. Regarding the glass sealing in the lead frame obtained from the island-shaped clad plate for electronic components according to the present invention, the surface after removing the material deposited on areas other than the intended deposition surface is uniformly rough, indicating that the glass sealing property is good. There is a certain effect. In addition, in order to obtain an island-like clad plate with a desired pattern, it is difficult to conduct wire buffing using the conventional method only on the surface to be coated and discontinuously in the longitudinal direction of the substrate, but the laser polishing according to the present invention In the case of using a beam, since it is light, it can be blocked arbitrarily, and it can be irradiated only to the intended areas to be adhered in a desired pattern in the longitudinal direction of the substrate, which has the advantage that island-like clad plates of various shapes can be manufactured. The present invention makes it possible to highly clean the substrate surface, improve the quality of the adherend surface of the clad plate, and improve the adhesion strength, so that an island-shaped clad plate for electronic components can be obtained with high efficiency. Preferred Embodiments of the Invention The island-like clad plate for electronic components according to the present invention is formed by applying an adhesive material discontinuously in the longitudinal direction to at least one main surface of a substrate, as shown in FIG. 1a. As shown in the figure, in addition to the clad plate in which the square-shaped adhesive material 2 is adhered to the widthwise center of the substrate 1 at predetermined intervals in the longitudinal direction, as shown in figure b, the rectangular-shaped material 2 covering the entire width of the substrate 1 is Adhesive material 2
It is also possible to use cladding plates attached at regular intervals in the longitudinal direction of the substrate 1.Furthermore, as shown in FIG. 1c, the pattern shown in FIG. It is also possible to obtain an island-like clad plate for electronic components in which the adhesive material 2 is applied at three locations in the width direction of the substrate 1, and the adhesive material is discontinuously crimped onto portions corresponding to three strips in the longitudinal direction. The shape, dimensions, longitudinal spacing, etc. of the adhered material can be arbitrarily selected depending on the application, etc., and any desired discontinuous pattern can be adopted depending on the application, etc.
A deposition pattern in which deposited materials of the same shape are arranged at equal intervals is preferable from the viewpoint of manufacturability, but the shape of the pattern may be arbitrary, the same shape does not have to be repeated, and the pattern spacing is not constant. It's okay. It is also possible to apply the material to a relatively wide substrate in the patterns shown in Figures b and c, and then use a slitter to produce an island-like clad plate for electronic components of a desired width. In this invention, the method of irradiating the laser beam is to use a mirror to run a spot-shaped beam two-dimensionally on the surface of the material to be adhered, or to spread the beam in the width direction of the plate using a lens or mirror. Either the entire surface to be coated is irradiated uniformly, or at least one laser beam is irradiated onto the surface to be coated in various irradiation forms such as all over the surface, zigzag, meandering, or striped. irradiate. In addition, surfaces other than the surface to be adhered are treated as non-irradiated surfaces that are not irradiated with the laser beam. In addition, when a laser beam is irradiated onto the surface of the substrate to be adhered, for example, in a zigzag pattern, the surface condition of the irradiated surface of the substrate is changed by cleaning the irradiated surface and melting, solidifying and hardening the extreme surface layer, as described above. The non-irradiated portion of the surface to be deposited is not irradiated with the above-mentioned laser beam, that is, it is completely different from the non-irradiated surface other than the surface to be deposited, and there is no thermal effect due to zigzag laser beam irradiation. The surface is cleaned. For this reason, when the adherend material is cold pressure welded to the irradiated part of the zigzag laser beam, which is not the entire surface irradiation, as mentioned above, the adherend material and the substrate material will be firmly bonded in the irradiated part, and the non-irradiated part will also be bonded. Since the surface is cleaned, the adhesion between the adherend material and the substrate material is improved and sufficient adhesive strength can be obtained. In this invention, the type and combination of the substrate and the adherend material may be any combination that can be used for cladding, and the laser beam irradiation may be used as long as it can remove deposits, oils, and moisture from the surface, preferably with a thickness of 2 μm. Any method may be used as long as it is possible to melt and solidify the extreme surface layer described below.For example, the beam is focused in a spot shape and irradiated in a direction perpendicular to the substrate surface, and the substrate and the laser beam are aligned in the longitudinal direction of the substrate. By moving the laser beam in the same direction or in the opposite direction, or by moving the laser beam in the longitudinal direction of the substrate while vibrating it in the width direction of the substrate, the laser beam is intermittently oscillated and stopped, and the island-shaped irradiation surface of the desired pattern is Alternatively, methods such as blocking light from areas other than the surface to be deposited, or directing the laser beam to the outside of the substrate at areas other than the surface to be deposited can be adopted. In addition, the laser beam is oscillated from a laser oscillator, focused by a collimator and a lens,
It is also possible to use an optical fiber to guide the light to the desired position and irradiate it. In this invention, the laser beam irradiation conditions are such that the beam power density is 100kW/mm 2 ~
The range is preferably 1500kW/mm 2 , more preferably 300kW/mm 2 to 900kW/mm 2 . If the power density of the laser beam is less than 100kW/mm 2 , there is no surface cleaning effect for pressure welding, and if it exceeds 1500kW/mm 2 , the surface becomes more uneven and holes are formed in the substrate as the power density increases. It generates and is undesirable. Further, it is effective if the laser wavelength is 5 μm or less, but if it exceeds 2 μm, the absorption effect on the substrate is poor, so it is desirable to use a wavelength of 2 μm or less. The metal or alloy substrate in this invention includes Fe-Ni sealing material (40-55% Ni-Fe), Kovar alloy plate (25-50% Ni-10-20% Co-
Fe), Cu alloy plate (Be1.1% or less, Ti1.0% or less, Cr1.6
% or less, Fe6.0% or less, Ni15.0% or less, Zn43% or less, B0.5% or less, Si6.0% or less, Pb0.08% or less,
P0.5 or less, Te0.6% or less, Mg0.6% or less, Zr0.7%
Below, Mn 7% or less, Co2% or less, Ag 1.5% or less,
It contains at least one of Cd of 1.3% or less, Al of 12% or less, and Sn of 12% or less; however, if two or more types of additive elements are contained, the total amount is preferably 45% or less, with the balance being Cu. In this invention, the metal or alloy substrate is
A single plate may be used, or a laminate of the Cu alloy and 42% Ni-Fe alloy, or the Cu alloy and Kovar alloy, for example, may be used to improve conductivity, corrosion resistance, and strength. Note that the laminated substrate may be pressure-bonded after surface cleaning using a laser beam, or may be pressure-bonded after surface cleaning by conventional wire brushing. Further, as the material to be adhered, Au plate, Al plate, Al alloy plate, Cu plate, Cu alloy plate, Ag plate, Ag brazing plate, brass brazing plate, and solder plate are preferable. Further, the thickness of the island-shaped clad plate for electronic components according to the present invention is preferably 0.05 to 1.0 mm.
The plate thickness may be appropriately selected depending on the intended use. Disclosure of the Invention Based on Drawings FIGS. 2 and 3 are perspective explanatory views of a substrate showing a method of manufacturing an island-shaped clad plate for electronic components according to the present invention, respectively. Here, 42%Ni−
An example will be described in which a rectangular Al plate is cold-welded in the widthwise center of an Fe alloy plate in the form of islands at regular intervals in a portion corresponding to one strip. As shown in FIGS. 2 and 3a, the 42% Ni--Fe alloy plate 10 coil is uncoiled and transferred to a cold welding roll 11. An irradiation box 12 for irradiating a laser beam onto the upper surface of the alloy plate 10 passing through is arranged behind the pressure roll 11.
The irradiation box 12 surrounds the entire alloy plate 10, has Ar gas vented therein, and is configured to be able to irradiate the laser beam in an Ar gas atmosphere. The laser beam is oscillated by a laser oscillator 13 of, for example, a YAG laser, passes through a collimator 14 and a galvanic mirror 15, and is condensed and focused by an fθ lens 16. The position of the fθ lens 16 is adjusted so that a required width of the alloy plate 10 at the central position in the width direction can be irradiated. The laser beam is connected to a galvanic mirror 15.
By opening and closing the shutter 18 disposed between the fθ lenses 16, the substrate can be irradiated intermittently, and irradiated portions can be formed discontinuously in the longitudinal direction of the substrate. In the case of FIG. 3a, the irradiated surface and the alloy plate 10 are connected by intermittent oscillation of the laser beam.
can be provided discontinuously in the longitudinal direction. Note that the laser beam generator used in the present invention can increase the laser scanning speed by using a polyhedral mirror or a segment mirror instead of the galvanic mirror 15, and by using a cylindrical lens, By irradiating the sheet width direction all at once, it is possible to improve the processing speed. The rewound alloy plate 10 is irradiated with a laser beam in a zigzag or striped manner on the surface to be adhered at regular intervals in the center position in the width direction, so that the extreme surface layer is melted and solidified, and deposits on the surface are removed. It becomes a new surface from which oil, fat, and moisture have been removed. In addition, on surfaces other than those to be deposited, the shutter 18 is closed, the galvanic mirror 15 is given an offset to guide the laser beam to the outside of the alloy plate 10, or the oscillation of the laser beam is stopped and irradiation is not performed. On the other hand, after being rewound, the Al plate 17 is fed to the pressure roll 11 from above the alloy plate 10 and is pressed onto the surface irradiated with the laser beam. At this time, on the surface to be adhered by rolling, the molten solidified layer on the irradiated surface causes minute cracks on the surface due to the influence of internal sliding deformation, and the new internal surface is exposed.
Since the Al plate 17 is pressure-welded, the cleanliness is superior compared to conventional mechanically polished surfaces, and the alloy plate 10 and
The Al plate 17 is more firmly attached. However, since areas other than the surface to be adhered are not irradiated with the laser beam, the adherend material is not in close contact with the substrate, and after pressure bonding, for example, the second
As shown in the figure, by brushing with a brush roll 19, it can be easily removed and an island-shaped clad plate with the Al plate 17 adhered only to the intended surface can be obtained with high efficiency. Further, as shown in FIG. 3a, when the Al plate 17 is pressed by the pressure roll 11 and wound around the coil 20, the adhesive surface 22 of the adhesive tape 21 adheres to the Al.
Roll it up so that it is pasted on the board. Thereafter, when unwinding the coil 20, as shown in FIG.
As shown in FIG. 2, by peeling off the adhesive tape 21, the adherend material can be easily peeled off because areas other than the intended surface to be adhered to are not irradiated with the laser beam. Al
An island-shaped clad plate having the plate 17 attached thereon can be obtained with high efficiency. Regarding the island-like pattern, Fig. 1 describes an example in which the adhered material is cold-welded on the alloy plate in a rectangular shape at regular intervals, but it can be applied in multiple patterns in the width direction of the substrate or unequal in the longitudinal direction. Even if they are provided at intervals, they can be manufactured in the same way, and excellent adhesion strength and product properties can be obtained. Moreover, a double-sided clad plate having pressure contact not only with one main surface but also with the other main surface can be manufactured in the same manner. Therefore, the oscillation method of the laser beam, the irradiation output, the distance between the focal point of the FE lens and the irradiation surface, the moving speed of the irradiated side, etc., depend on the material and dimensions of the substrate material, as well as the material dimensions of the adhered material. It is necessary to select it appropriately. Examples Example 1 The metal substrate is a 42% Ni-Fe alloy plate with a thickness of 0.38 mm and a width of 27 mm. The adhesion material is an Al plate with a thickness of 0.02 mm and a width of 10 mm and a purity of 99.7%. did. The atmospheric gas in the irradiation box was Ar gas, and the substrate movement speed was 10 m/min. The laser irradiation device has 100W output and 10kHzQ.
Using a switch YAG laser and using the method shown in Figure 2 above, under the conditions of a lens focal length of 100 mm, a wavelength of 1.00 μm, and a laser power density of 500 kW/mm 2 , a laser beam of 10.5 mm in the width direction of the substrate and in the longitudinal direction of the substrate was used. A laser beam is intermittently irradiated onto a 7 mm rectangular spot-like portion to form discontinuous irradiated surfaces at intervals of 40 mm in the longitudinal direction of the substrate, and the irradiated surfaces and A non-irradiated surface was formed, and the Al plate was cold-pressed at a rolling rate of 30% using a pressure roll to a portion corresponding to one strip in the longitudinal direction including the same irradiated surface. After that, unnecessary Al plate was removed by brushing using a 0.15mmφ nylon brush, and
After one cold rolling, the plate thickness is 0.25mm and the plate width is 27mm.
An island-like clad plate of the following dimensions was obtained. Note that the total rolling reduction was 34.2%. At this time, the shape of the adherend material part was approximately square with dimensions of 10.3 mm x 10.7 mm, and the interval between the parts was 60 mm in the longitudinal direction. The dimensions, external appearance, and mechanical properties of the obtained island-shaped clad plate for electronic components according to the present invention were examined, and the results are shown in Table 1. Example 2 A 42% Ni-Fe alloy plate with a thickness of 0.45 mm and a width of 35 mm was used as the metal substrate, and an Al plate with a purity of 99.7% and a thickness of 0.02 mm and a width of 30 mm was used as the adherend material. The atmospheric gas inside the irradiation box was Ar gas, and the substrate movement speed was 5 m/min. The laser irradiation device has 100W output and 10kHzQ.
Using a Switch YAG laser and using the method shown in Figure 3 above, the distance between the lens focal points is 100 mm, the wavelength is 1.06 μm, and the laser power density is 500 kW/ mm2. The oscillator is operated intermittently to irradiate a rectangular spot-like portion with dimensions of mm to form a discontinuous irradiation surface at intervals of 20 mm in the longitudinal direction of the substrate, in the pattern shown in Figure 1a. An irradiated surface and a non-irradiated surface were formed, and the Al plate was cold-pressed at a rolling rate of 44% using a pressure roll to a portion corresponding to one strip in the longitudinal direction including the irradiated surface. Thereafter, as shown in FIG. 3A, after the Al plate 17 is pressed by the pressure roll 11, when it is wound around the coil 20, the adhesive surface 22 of the adhesive tape 21 adheres to it.
The coil 20 is wound so as to be pasted onto the Al plate, and when the coil 20 is unwound, the adhesive tape 21 is peeled off and the unnecessary Al plate is removed, as shown in FIG. 3b.
Furthermore, continuous stress relief annealing is applied to achieve a plate thickness of 0.25.
An island-shaped clad plate according to the present invention having dimensions of 35 mm and a plate width of 35 mm was obtained. Note that the total rolling reduction was 47%. At this time, the shape of the adherend material part was approximately square with dimensions of 7.1 mm x 7.0 mm, and the interval between the parts was 36 mm in the longitudinal direction. The dimensions, external appearance, and mechanical properties of the obtained island-shaped clad plate according to the present invention were examined, and the results are shown in Table 1. As is clear from Table 1, by the manufacturing method of the present invention, it is possible to easily obtain island-shaped cladding plates for electronic components, which were difficult to manufacture in the past. It can be seen that an island-like clad plate for parts can be obtained.
【表】【table】
【表】
さらに、本発明におけるレーザービーム照射後
の圧接前基板の表層から内部にかけての硬さの状
況及び比較例のワイヤーバフ研摩後の基板表層か
ら内部にかけての硬さの状況を測定し、第4図に
その結果を示す。
第4図から明らかなように、ワイヤーバフ研摩
後の表層は約10μmの厚さにわたり、硬化してお
り、硬化層は内部より変形能力が劣るため、圧接
時の変形により割れを生じ、その割れに現われる
新生面に被着材がよく密着する。このことは、圧
接後の密着性試験として加熱処理を施すと、この
割れが拡散の起点となることから理解される。
ワイヤーバフ研摩で生じる上記の態様は、圧接
前の表面処理として有効であるが、その反面、付
着物、油脂、水分を減少させ、圧接に必要な清浄
面を得るまでかかる処理を行なうと、研摩面は著
しく粗面となり、鱗片状金属粉の発生付着及び圧
接面への気体の巻き込む障害を残す恐れがあり、
また、かかる研摩を、基板上のアイランド状の被
着予定部分に、限定して施すことは困難である。
これに対して、この発明によるレーザービーム
照射では、断続的にビーム照射できるため、実施
例の如く、アイランド状の所要部分にのみ施すこ
とが可能であり、照射条件の選定により、粗面が
生じることなく、付着物、油脂、水分が除去さ
れ、所要厚みの溶融凝固硬化層を設けて、被着材
料の選択的な接着が可能である。
また、この溶融凝固層は圧接時にマイクロクラ
ツクの発生により、比較例の場合より、新生面が
均一且つ密に分布しているため、被着材がよく密
着することは加熱処理を施すと、拡散が均一に進
行することからも確認できた。[Table] Furthermore, we measured the hardness from the surface layer to the inside of the substrate before pressure bonding after laser beam irradiation in the present invention, and the hardness condition from the surface layer to the inside of the substrate after wire buffing in the comparative example. Figure 4 shows the results. As is clear from Figure 4, the surface layer after wire buffing has a thickness of about 10 μm and is hardened, and since the hardened layer has a lower deformability than the inside, it cracks due to deformation during pressure welding. The adherend adheres well to the newly formed surface. This can be understood from the fact that when heat treatment is performed as an adhesion test after pressure bonding, this crack becomes a starting point for diffusion. The above-mentioned aspect caused by wire buffing is effective as a surface treatment before pressure welding, but on the other hand, if such treatment is performed until deposits, oil, and moisture are reduced and a clean surface necessary for pressure welding is obtained, polishing The surface becomes extremely rough, and there is a risk of scaly metal powder forming and adhering to the surface and causing problems such as gas entrainment to the pressure welding surface.
Further, it is difficult to apply such polishing to a limited area on the island-shaped portion of the substrate where the material is to be deposited. On the other hand, in the laser beam irradiation according to the present invention, since the beam can be irradiated intermittently, it is possible to apply it only to the required island-shaped parts as in the embodiment, and depending on the selection of the irradiation conditions, a rough surface may occur. It is possible to remove deposits, oils, fats, and moisture without any problems, and to provide a melted, solidified, and hardened layer of a required thickness, allowing selective adhesion of adherend materials. In addition, due to the generation of micro-cracks during pressure welding, this molten solidified layer has a new surface that is more uniformly and densely distributed than in the comparative example. This was also confirmed by the fact that the process progressed uniformly.
第1図はこの発明による電子部品用アイランド
状クラツド板における被着材料の被着パターンを
示す基板の上面図である。第2図と第3図はこの
発明による電子部品用アイランド状クラツド板の
製造方法を示す装置の斜視説明図である。第4図
はこの発明の電子部品用アイランド状クラツド板
の基板深さとビツカース硬さとの関係を示すグラ
フである。
10……合金板、11……圧接ロール、12…
…照射ボツクス、13……レーザー発振器、14
……コリメータ、15……ガルバニツクミラー、
16……fθレンズ、17……Al板、18……シ
ヤツター、19……ブラシロール、20……コイ
ル、21……粘着テープ、22……粘着面。
FIG. 1 is a top view of a substrate showing the deposition pattern of the deposition material in the island-shaped clad plate for electronic components according to the present invention. FIGS. 2 and 3 are perspective explanatory views of an apparatus showing a method of manufacturing an island-shaped clad plate for electronic components according to the present invention. FIG. 4 is a graph showing the relationship between substrate depth and Vickers hardness of the island-shaped clad plate for electronic components of the present invention. 10... Alloy plate, 11... Pressure roll, 12...
...Irradiation box, 13...Laser oscillator, 14
... Collimator, 15 ... Galvanic mirror,
16...fθ lens, 17...Al plate, 18...shutter, 19...brush roll, 20...coil, 21...adhesive tape, 22...adhesive surface.
Claims (1)
不連続的な被着予定部にのみ、少なくとも1条の
レーザービームを照射した後、前記照射面を含む
基板長手方向に連続した所要の条部全面に被着材
料を圧下率25%〜70%にて冷間圧接後、被着予定
部以外の被着材料を除去してアイランド状クラツ
ド板を得ることを特徴とする電子部品用クラツド
板の製造方法。1. After irradiating at least one laser beam only on the discontinuous areas to be adhered on at least one main surface of a metal or alloy substrate, apply the laser beam to the entire surface of the desired area continuous in the longitudinal direction of the substrate, including the irradiated surface. A method for producing a clad plate for electronic components, which comprises cold welding the adherend material at a rolling reduction rate of 25% to 70%, and then removing the adherend material other than the area to be adhered to obtain an island-shaped clad plate. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62034182A JPS63203290A (en) | 1987-02-17 | 1987-02-17 | Manufacture of clad plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62034182A JPS63203290A (en) | 1987-02-17 | 1987-02-17 | Manufacture of clad plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63203290A JPS63203290A (en) | 1988-08-23 |
| JPH0328987B2 true JPH0328987B2 (en) | 1991-04-22 |
Family
ID=12407057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62034182A Granted JPS63203290A (en) | 1987-02-17 | 1987-02-17 | Manufacture of clad plate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63203290A (en) |
-
1987
- 1987-02-17 JP JP62034182A patent/JPS63203290A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63203290A (en) | 1988-08-23 |
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